公开(公告)号：US4604294A

公开(公告)日：1986-08-05

申请号：US660230

申请日：1984-10-12

申请人： Masahiro Tanaka ,  Kazufumi Azuma ,  Kazuo Nate ,  Mitsuo Nakatani

发明人： Masahiro Tanaka ,  Kazufumi Azuma ,  Kazuo Nate ,  Mitsuo Nakatani

IPC分类号： G03C1/76 ,  B05D3/06 ,  B05D7/24

CPC分类号： B05D1/60 ,  B05D3/06

摘要： An organic thin film consisting essentially of an organic compound is formed on a substrate surface by vacuum vapor deposition by exposing the organic compound as a vapor source to a laser beam having an energy level corresponding to that of the chemical bond of the organic compound, thereby sputtering the organic compound onto a substrate surface in vacuum and forming the organic thin film thereon. When a light or radiation-sensitive organic compound is used as the vapor source, a light or radiation-sensitive resist film is formed. The thin film thus formed retains the original chemical structure of the vapor source, and has a good flatness. Resolvability of resist film is improved owing to the absence of pin holes and particulate matters. A resist film having a higher sensitivity and a better contrast is formed by heating the substrate during the vapor deposition.

摘要翻译： 通过将有机化合物作为蒸汽源暴露于具有与有机化合物的化学键的能级对应的能级的激光束，通过真空汽相沉积在基板表面上形成基本上由有机化合物构成的有机薄膜，由此 在真空中将有机化合物溅射到基板表面上并在其上形成有机薄膜。 当使用光或辐射敏感的有机化合物作为蒸气源时，形成光或辐射敏感的抗蚀剂膜。 由此形成的薄膜保持蒸气源的原始化学结构，并且具有良好的平坦度。 由于没有针孔和颗粒物质，抗蚀剂膜的可分离性得到改善。 通过在气相沉积期间加热基底来形成具有更高灵敏度和更好对比度的抗蚀剂膜。

公开(公告)号：US4495218A

公开(公告)日：1985-01-22

申请号：US534686

申请日：1983-09-22

申请人： Kazufumi Azuma ,  Mitsuo Nakatani ,  Kazuo Nate ,  Masaaki Okunaka ,  Hitoshi Yokono

发明人： Kazufumi Azuma ,  Mitsuo Nakatani ,  Kazuo Nate ,  Masaaki Okunaka ,  Hitoshi Yokono

IPC分类号： C23C16/48 ,  C23C16/24 ,  C23C16/34 ,  C23C16/40 ,  H01L21/205 ,  H01L21/268 ,  H01L21/31 ,  H01L21/314 ,  H01L21/316 ,  H01L21/318 ,  H01L31/04 ,  C23C17/00

CPC分类号： H01L21/02164 ,  C23C16/24 ,  C23C16/345 ,  C23C16/402 ,  H01L21/0217 ,  H01L21/02211 ,  H01L21/02277 ,  H01L21/02381 ,  H01L21/02422 ,  H01L21/02425 ,  H01L21/02532 ,  H01L21/0262 ,  H01L21/268 ,  H01L21/2686 ,  H01L21/31612 ,  H01L21/3185 ,  Y10S148/093

摘要： A thin film of a-Si, SiO.sub.2 or Si.sub.3 N.sub.4 can be formed on a substrate using a starting material gas containing at least a polysilane of the formula Si.sub.n H.sub.2n+2 (n=2, 3 or 4) by a chemical vapor deposition method with irradiation with light with high film forming rate at lower temperatures.

摘要翻译： 可以通过化学气相沉积法使用至少含有式SinH2n + 2（n = 2,3或4）的聚硅烷的原料气体在基板上形成a-Si，SiO 2或Si 3 N 4的薄膜 具有在较低温度下具有高成膜速率的光。

公开(公告)号：US4530746A

公开(公告)日：1985-07-23

申请号：US496591

申请日：1983-05-20

申请人： Kazufumi Azuma ,  Kazuo Nate ,  Mitsuo Nakatani ,  Hitoshi Yokono ,  Takeshi Endo

发明人： Kazufumi Azuma ,  Kazuo Nate ,  Mitsuo Nakatani ,  Hitoshi Yokono ,  Takeshi Endo

IPC分类号： C08F24/00 ,  C08F2/50 ,  C08F290/00 ,  C08F299/00 ,  C08F299/02 ,  C08G65/00 ,  C08G67/00 ,  C09D4/00 ,  C09D5/00 ,  G03F7/027

CPC分类号： C08F299/024 ,  G03F7/027

摘要： A photosensitive resin composition comprising (a) 10 to 90 parts by weight of at least one polymerizable monomer of the formula: ##STR1## (R is defined in the specification), (b) 90 to 10 parts by weight of at least one compound selected from the group consisting of epoxy-acrylate resins, 1,2-polybutadiene resins, polyester resins and organopolysiloxanes, all having one or more acryloyloxy or methacryloyloxy groups in their molecular end or ends, and (c) 0.05 to 5 parts by weight of a photosensitizer based on 100 parts by weight of the sum of the components (a) and (b) shows slight shrinkage and the resulting coating film is good in adhesive properties and mechanical strength.

摘要翻译： 一种感光性树脂组合物，其包含（a）10至90重量份的至少一种下式的可聚合单体：（R在说明书中定义），（b）90至10重量份的至少一种化合物 选自在其分子末端或末端具有一个或多个丙烯酰氧基或甲基丙烯酰氧基的环氧丙烯酸酯树脂，1,2-聚丁二烯树脂，聚酯树脂和有机聚硅氧烷，以及（c）0.05至5重量份的 基于100重量份的组分（a）和（b）的总和的光敏剂显示出轻微的收缩，并且所得的涂膜具有良好的粘合性能和机械强度。

公开(公告)号：US5272360A

公开(公告)日：1993-12-21

申请号：US662635

申请日：1991-02-28

申请人： Satoru Todoroki ,  Masahiro Tanaka ,  Kunihiko Watanabe ,  Mitsuo Nakatani

发明人： Satoru Todoroki ,  Masahiro Tanaka ,  Kunihiko Watanabe ,  Mitsuo Nakatani

IPC分类号： C23C16/511 ,  G02F1/1368 ,  H01L21/318 ,  H01L21/77 ,  H01L21/84 ,  H01L29/49 ,  H01L27/01 ,  H01L27/13 ,  H01L29/78

CPC分类号： C23C16/511 ,  H01L21/3185 ,  H01L27/1214 ,  H01L29/4908 ,  G02F1/1368

摘要： A microwave plasma enhanced CVD method and apparatus wherein a microwave is applied, after expanded, over a greater area than the area in which a desired thin film is to be formed. With this arrangement, uniform microwave application is assured to produce uniform plasma over a wide area. This enables realization of a large size liquid crystal display.

摘要翻译： 一种微波等离子体增强CVD方法和装置，其中在扩展之后，在比要形成所需薄膜的区域更大的面积上施加微波。 通过这种布置，可以确保均匀的微波应用在广泛的区域上产生均匀的等离子体。 这使得能够实现大尺寸液晶显示器。

公开(公告)号：US07530184B2

公开(公告)日：2009-05-12

申请号：US11470942

申请日：2006-09-07

申请人： Hiroyoshi Ishihama ,  Mitsuo Nakatani ,  Yasunari Watanabe

发明人： Hiroyoshi Ishihama ,  Mitsuo Nakatani ,  Yasunari Watanabe

IPC分类号： E01H5/06

CPC分类号： E02F3/815

摘要： A working machine having a blade is disclosed, the blade comprising a body blade and an extension blade, the body blade having a body-side mounting portion having a body-side mounting hole and the extension blade having an extension-side mounting portion having an extension-side mounting hole, the body-side mounting hole and the extension-side mounting hole being formed vertically through the body-side mounting portion and the extension-side mounting portion, respectively. Further provided are mounting members adapted to be inserted into the mounting holes to connect the body blade and the extension blade with each other, and positioning members and a cutout portion for aligning the positions of the body-side mounting hole and the extension-side mounting hole vertically with each other and inhibiting the body-side mounting portion and the extension-side mounting portion from pivoting around the mounting members.

摘要翻译： 公开了一种具有叶片的工作机，所述叶片包括主体叶片和延伸叶片，所述主体叶片具有主体侧安装部分，所述主体侧安装部分具有主体侧安装孔，所述延伸叶片具有延伸侧安装部分， 延伸侧安装孔，主体侧安装孔和延伸侧安装孔分别垂直地形成在主体侧安装部和延伸侧安装部上。 还提供了适于插入到安装孔中以将主体叶片和延伸叶片彼此连接的安装构件，以及用于使主体侧安装孔和延伸侧安装件的位置对准的定位构件和切口部 并且禁止体侧安装部和延伸侧安装部围绕安装构件枢转。

公开(公告)号：US06903786B2

公开(公告)日：2005-06-07

申请号：US10865779

申请日：2004-06-14

申请人： Tomoaki Takahashi ,  Sakari Kaneku ,  Hideaki Yamamoto ,  Mitsuo Nakatani ,  Hiroshi Sasaki

发明人： Tomoaki Takahashi ,  Sakari Kaneku ,  Hideaki Yamamoto ,  Mitsuo Nakatani ,  Hiroshi Sasaki

IPC分类号： G02F1/136 ,  C23C28/02 ,  C25F3/02 ,  G02F1/1343 ,  G02F1/1362 ,  G02F1/1368 ,  G09F9/30 ,  H01L21/3063 ,  H01L21/336 ,  H01L29/786

CPC分类号： G02F1/13458 ,  G02F1/134363 ,  G02F1/136286 ,  G02F2001/13629

摘要： A method of manufacturing an LCD device which includes a gate line having an effective display area which includes an aluminum alloy layer and an aluminum oxide layer. The gate line also includes a gate terminal portion which is made up of the same aluminum alloy layer with a molybdenum alloy layer formed thereon. To form this structure, an insulating substrate of the LCD device, with the laminated structure of the aluminum alloy layer and the molybdenum layer, is immersed in an electrolytic solution. During the immersion, the molybdenum layer is etched off the aluminum alloy in the effective displaying area, while the etching is prevented in the gate terminal area by a protective layer. Following this, the aluminum oxide layer is formed over the aluminum alloy in the effected display area while the device is still immersed in the electrolytic solution.

摘要翻译： 一种制造LCD装置的方法，其包括具有包括铝合金层和氧化铝层的有效显示区域的栅极线。 栅极线还包括由形成有钼合金层的相同的铝合金层构成的栅极端子部。 为了形成该结构，将具有铝合金层和钼层的层叠结构的LCD装置的绝缘基板浸渍在电解液中。 在浸渍期间，在有效显示区域中，钼层被蚀刻掉铝合金，同时通过保护层在栅极端子区域中防止蚀刻。 接下来，在受影响的显示区域中在铝合金上形成氧化铝层，同时该装置仍然浸没在电解液中。

公开(公告)号：US5493129A

公开(公告)日：1996-02-20

申请号：US372289

申请日：1989-06-27

申请人： Eiji Matsuzaki ,  Akihiro Kenmotsu ,  Yoshifumi Yoritomi ,  Toshiyuki Koshita ,  Takao Takano ,  Mitsuo Nakatani

发明人： Eiji Matsuzaki ,  Akihiro Kenmotsu ,  Yoshifumi Yoritomi ,  Toshiyuki Koshita ,  Takao Takano ,  Mitsuo Nakatani

IPC分类号： H01L29/417 ,  H01L29/786 ,  H01L29/04

CPC分类号： H01L29/78696 ,  H01L29/41733 ,  H01L29/78669 ,  H01L29/78687

摘要： A thin film transistor structure for use in driving liquid crystal display elements has a semiconductor active layer, a control electrode layer underlying the active layer with an insulating layer interposed therebetween and first and second main electrode layers formed on or above the active layer in a spaced relation with each other to define a channel in the active layer in cooperation with the control electrode layer between the main electrode layers. The active layer has a first peripheral edge portion generally perpendicular to the direction of the channel and a second peripheral edge portion generally not perpendicular to the direction of the channel. The first and/or second main electrode layer extends over the first and/or second peripheral edge portion of the active layer such that at least a part of the first peripheral edge portion and/or at least part of the second peripheral edge portion of the active layer has its side face directly covered with the main electrode layer.

公开(公告)号：US5399202A

公开(公告)日：1995-03-21

申请号：US986683

申请日：1992-12-08

申请人： Hiroshi Kikuchi ,  Yasushi Sano ,  Satoru Todoroki ,  Hitoshi Oka ,  Toshiyuki Koshita ,  Masato Kikuchi ,  Mitsuo Nakatani ,  Michio Tsukii

发明人： Hiroshi Kikuchi ,  Yasushi Sano ,  Satoru Todoroki ,  Hitoshi Oka ,  Toshiyuki Koshita ,  Masato Kikuchi ,  Mitsuo Nakatani ,  Michio Tsukii

IPC分类号： C23F1/00 ,  C09D9/00 ,  C11D7/32 ,  G02F1/1362 ,  G03F7/42 ,  H01L21/027 ,  H01L21/30 ,  H01L21/302 ,  H01L21/3065 ,  H05K3/06 ,  B08B3/08 ,  B08B3/10

CPC分类号： C11D7/3281 ,  C11D7/3218 ,  G03F7/425 ,  G02F1/1362

摘要： A resist is peeled without leaving a residue after peeling, by bringing a resist-peeling liquid comprising a primary aliphatic amine of 2-6 carbon atoms into contact with the surface of an etched novolak positive photoresist, and removing the resist-peeling liquid containing the thus peeled resist from the surface of the etched resist. The used resist-peeling liquid can easily be recovered and regenerated.

摘要翻译： 通过使包含2-6个碳原子的脂肪族脂族胺的抗蚀剂剥离液与蚀刻的酚醛清漆型正性光致抗蚀剂的表面接触，除去剥离后的残留物，除去含有 从而从蚀刻抗蚀剂的表面剥离抗蚀剂。 所使用的抗蚀剂剥离液可以容易地回收和再生。

公开(公告)号：US4830891A

公开(公告)日：1989-05-16

申请号：US126430

申请日：1987-11-30

申请人： Eisuke Nishitani ,  Susumu Tsuzuku ,  Mitsuo Nakatani ,  Masaaki Maehara ,  Mitsuaki Horiuchi ,  Koichiro Mizukami

发明人： Eisuke Nishitani ,  Susumu Tsuzuku ,  Mitsuo Nakatani ,  Masaaki Maehara ,  Mitsuaki Horiuchi ,  Koichiro Mizukami

IPC分类号： H01L21/285 ,  C23C14/24 ,  C23C16/04 ,  C23C16/06 ,  C23C16/08

CPC分类号： C23C16/04

摘要： A metal thin film is deposited on predetermined portions of an underlayer of a substrate by a chemical deposition method with good selectivity, good reproducibility and high deposition rate by preventing hydrogen atoms from the adhesion to portions of the substrate not to be deposited with a metal using a special means for heating only the substrate or a special gas flow controlling means.

摘要翻译： 金属薄膜通过化学沉积法以良好的选择性，良好的再现性和高的沉积速率沉积在衬底的底层的预定部分上，通过防止氢原子与衬底的部分粘附而不被金属沉积 用于仅加热基板或特殊气体流量控制装置的特殊装置。

公开(公告)号：US4486232A

公开(公告)日：1984-12-04

申请号：US523857

申请日：1983-08-17

申请人： Mitsuo Nakatani ,  Haruhiko Matsuyama ,  Masaaki Okunaka ,  Hitoshi Yokono ,  Tokio Isogai ,  Tadashi Saitoh ,  Sumiyuki Midorikawa

发明人： Mitsuo Nakatani ,  Haruhiko Matsuyama ,  Masaaki Okunaka ,  Hitoshi Yokono ,  Tokio Isogai ,  Tadashi Saitoh ,  Sumiyuki Midorikawa

IPC分类号： H01L31/04 ,  H01L21/28 ,  H01L21/283 ,  H01L21/288 ,  H01L29/43 ,  H01L31/0224 ,  H01B1/02

CPC分类号： H01L31/022408 ,  H01L31/022425 ,  Y02E10/50

摘要： An electrode material for semi-conductor device such as solar cells comprises Ag powders, at least one metal of zirconium, hafnium, vanadium, niobium, and tantalum, an organic binder, and an organic solvent, and, if necessary, glass, Pd powders and Pt powders.The electrodes are prepared from the electrode material by printing, drying and firing at a low temperature and have a low contact resistance without any junction breakage or increase in leak current.

摘要翻译： 用于半导体器件如太阳能电池的电极材料包括Ag粉末，至少一种锆，铪，钒，铌和钽金属，有机粘合剂和有机溶剂，并且如果需要，玻璃，Pd粉末 和Pt粉末。 电极由电极材料通过在低温下进行印刷，干燥和烧制而制备，并且具有低接触电阻而没有任何断裂或漏电流增加。