摘要:
Problem: To generate long plasma easily at low cost and to perform a plurality of film deposition methods using a single plasma generating device.Means for Solving the Problem A plasma generating device is provided with, in the vacuum inside thereof, a cylindrical electrode comprising an opening in a part thereof and generating plasma therein when gas is introduced thereinto and a direct-current negative voltage is applied thereto.
摘要:
The present invention provides a carbon film that is remarkably excellent in current voltage (IV) characteristics. This is achieved by way of a carbon film structure, two or more carbon film assembly units 12 are formed on a substrate 10. The carbon film assembly units 12 comprise: a stem-like carbon film 14 which is made into a film in the shape of a long and thin needle; and a branch-like carbon film cluster 16 which is made into a film so as to surround the stem-like carbon film 14 from the halfway to the lower part of this stem-like carbon film 14. The stem-like carbon film 14 has the shape of a long and thin needle having a configuration which has a spiral streak-like step part 18 towards the distal end at the circumference face of a near tip and in which the radius becomes small as going to the distal end.
摘要:
A carbon film of the present invention has an elongated needle shape whose radius decreases toward a tip. The shape is, preferably, a shape in which a field concentration coefficient β in the Fowler-Nordheim equation is expressed by h/r where r denotes the radius in an arbitrary position and h denotes height from the arbitrary position to the tip.
摘要:
A carbon film of the present invention has an elongated needle shape whose radius decreases toward a tip. The shape is, preferably, a shape in which a field concentration coefficient β in the Fowler-Nordheim equation is expressed by h/r where r denotes the radius in an arbitrary position and h denotes height from the arbitrary position to the tip.
摘要:
A carbon film of the present invention has an elongated needle shape whose radius decreases toward a tip. The shape is, preferably, a shape in which a field concentration coefficient β in the Fowler-Nordheim equation is expressed by h/r where r denotes the radius in an arbitrary position and h denotes height from the arbitrary position to the tip.
摘要:
A carbon film of the present invention has an elongated needle shape whose radius decreases toward a tip. The shape is, preferably, a shape in which a field concentration coefficient β in the Fowler-Nordheim equation is expressed by h/r where r denotes the radius in an arbitrary position and h denotes height from the arbitrary position to the tip.
摘要:
The present invention provides a carbon film that is remarkably excellent in current voltage (IV) characteristics. This is achieved by way of a carbon film structure, two or more carbon film assembly units 12 are formed on a substrate 10. The carbon film assembly units 12 comprise: a stem-like carbon film 14 which is made into a film in the shape of a long and thin needle; and a branch-like carbon film cluster 16 which is made into a film so as to surround the stem-like carbon film 14 from the halfway to the lower part of this stem-like carbon film 14. The stem-like carbon film 14 has the shape of a long and thin needle having a configuration which has a spiral streak-like step part 18 towards the distal end at the circumference face of a near tip and in which the radius becomes small as going to the distal end.
摘要:
This field electron emission device comprises a linear conductor wire having concave/convex on its surface and an electron emitter having electron conductivity formed on the concave/convex surface of the conductor wire. Preferably, the concave/convex is formed by a channeling performed to the surface of the conductor wire. Preferably, the electron emitter is composed of microscopic linear materials composed of selected one or combination of carbon nano-tube, carbon nano-wall, carbon fiber, graphite fiber, amorphous carbon fiber and diamond fiber.
摘要:
A heavy oil emulsified fuel combustion furnace is provided which prevents lowering of combustion efficiency due to water content in the fuel as well as prevents elevation of sulfuric acid dew point due to water content in the flue gas of the combustion furnace. In the apparatus a heavy oil emulsified fuel (102) is heated by a heater (110) using a heat pipe etc. and then is separated by a water vaporizer (120) into heavy oil (122) and vapor (121) consisting of steam and a light oil combustible gas. The heavy oil (122) is supplied to a burner port of the combustion furnace, such as a boiler etc. The vapor (121) is condensed by a condenser (140) to produce liquid (141) comprising a mixture of water and light oil. The liquid (141) is separated by an oily water separator (150) into oil (151) and water (152). The oil (151) is used as a fuel for an igniting torch of the combustion furnace 10 and the water (152) is used partially as cooling water (41) for an SO.sub.X removal apparatus (40) and partially as an atomizing steam 9 or a soot blowing steam 8 in the boiler, etc.
摘要:
The present invention provides a cesium-lithium-borate crystal, which can be used as a high-performance wavelength converting crystal, having a chemical composition expressed as CsLiB6O10, and substituted cesium-lithium-borate crystals expressed by the following formula: Cs1−xLi1−yMx+yB6O10 or Cs2(1−z)Li2LzB12O20 (where, M is an alkali metal element, and L is an alkali earth metal element); a method for manufacturing same by heating and melting; and an optical apparatus using such crystals.