公开(公告)号：US20150219715A1

公开(公告)日：2015-08-06

申请号：US14612343

申请日：2015-02-03

Applicant: Infineon Technologies AG

Inventor： Reinhard Schachtner ,  Gerhard Poeppel

IPC: G01R31/28

CPC classification number: G01R31/2834 ,  G01N21/9501 ,  G01R31/2601 ,  G01R31/2894 ,  G01R31/31707 ,  G01R31/3185 ,  G06T2207/30148 ,  H01L22/20 ,  H01L22/34

Abstract: In various embodiments, a method for the computer-aided determination of deviation patterns during at least one of the production or testing of a multiplicity of dies is provided. The dies are uniquely identified. The method may include determining, for each die of the multiplicity of dies and for at least one measurement process of a plurality of measurement processes which are applied to at least one portion of the dies, a measurement value which was determined in the measurement process for the respective die; and carrying out a blind source separation using the measurement values, thereby determining the deviation patterns for the dies.

Abstract translation: 在各种实施例中，提供了一种在多个管芯的生产或测试中的至少一个中计算机辅助确定偏差图案的方法。 模具被唯一标识。 该方法可以包括针对多个管芯的每个管芯以及施加到管芯的至少一部分的多个测量过程的至少一个测量过程来确定在测量过程中确定的测量值 相应的模具; 并使用测量值进行盲源分离，从而确定模具的偏离图案。

公开(公告)号：US10209212B2

公开(公告)日：2019-02-19

申请号：US15043701

申请日：2016-02-15

Applicant: Infineon Technologies AG

Inventor： Guenther Ruhl ,  Thomas Hirsch ,  Gerhard Poeppel ,  Herbert Roedig

IPC: G01R17/00 ,  G01N27/22 ,  G01N15/10

Abstract: According to various embodiments, a sensor arrangement for particle analysis may include: a base electrode configured to generate an electrical field for particle attraction; a support layer disposed over the base electrode; a sensor array disposed over the support layer and including or formed from a plurality of sensor elements, wherein each sensor element of the plurality of sensor elements is configured to generate or modify an electrical signal in response to a particle at least one of adsorbed to and approaching the sensor element; and an electrical contact structure may include or be formed from a plurality of contact lines, wherein each contact line of the plurality of contact lines is electrically connected to a respective sensor element of the plurality of sensor elements, such that each sensor element of the plurality of sensor elements is addressable via the contact structure.

公开(公告)号：US10573533B2

公开(公告)日：2020-02-25

申请号：US16116210

申请日：2018-08-29

Applicant: Infineon Technologies AG

Inventor： Edward Fuergut ,  Irmgard Escher-Poeppel ,  Stephanie Fassl ,  Paul Ganitzer ,  Gerhard Poeppel ,  Werner Schustereder ,  Harald Wiedenhofer

IPC: H01L21/324 ,  H01L23/31 ,  H01L21/268 ,  H01L21/04 ,  H01L21/225 ,  H01L21/285

Abstract: Various embodiments provide a method of reducing a sheet resistance in an electronic device encapsulated at least partially in an encapsulation material, wherein the method comprises: providing an electronic device comprising a multilayer structure and being at least partially encapsulated by an encapsulation material; and locally introducing energy into the multilayer structure for reducing a sheet resistance.

公开(公告)号：US20190013210A1

公开(公告)日：2019-01-10

申请号：US16116210

申请日：2018-08-29

Applicant: Infineon Technologies AG

Inventor： Edward Fuergut ,  Irmgard Escher-Poeppel ,  Stephanie Fassl ,  Paul Ganitzer ,  Gerhard Poeppel ,  Werner Schustereder ,  Harald Wiedenhofer

IPC: H01L21/324 ,  H01L21/285 ,  H01L21/225 ,  H01L21/04 ,  H01L21/321 ,  H01L21/268 ,  H01L23/31

CPC classification number: H01L21/324 ,  H01L21/0455 ,  H01L21/0485 ,  H01L21/2254 ,  H01L21/2258 ,  H01L21/268 ,  H01L21/28512 ,  H01L21/28575 ,  H01L23/3157

Abstract: Various embodiments provide a method of reducing a sheet resistance in an electronic device encapsulated at least partially in an encapsulation material, wherein the method comprises: providing an electronic device comprising a multilayer structure and being at least partially encapsulated by an encapsulation material; and locally introducing energy into the multilayer structure for reducing a sheet resistance.

公开(公告)号：US09201007B2

公开(公告)日：2015-12-01

申请号：US13851879

申请日：2013-03-27

Applicant: Infineon Technologies AG

Inventor： Dieter Kohlert ,  Gerhard Poeppel ,  Franz Schreier

IPC: G01J3/00 ,  G01N21/61 ,  G01N21/3504 ,  G01N21/35

CPC classification number: G01N21/61 ,  G01N21/3504 ,  G01N2021/3513 ,  G01N2021/3595 ,  G01N2201/0636

Abstract: A device can be used for establishing gas concentrations in an examination volume. A radiation source is configured to generate an electromagnetic beam. A beam guiding apparatus is arranged downstream of the radiation source. The beam guiding apparatus is configured to set a plurality of variations of beam guidance of the beam entering the beam guiding apparatus in an observation plane in the examination volume. A spectrometer is arranged downstream of the beam guiding apparatus. The spectrometer is configured to carry out a spectral analysis of the beam leaving the beam guiding apparatus. An evaluation unit is configured to establish in the observation plane a 2D concentration distribution for one or more gases in the examination volume on the basis of the spectral analysis for different variations of beam guidance.

Abstract translation: 一种装置可用于建立检查体积中的气体浓度。 辐射源被配置为产生电磁波束。 光束引导装置布置在辐射源的下游。 光束引导装置被配置为在检查体积中的观察平面中设置进入光束引导装置的光束的多个波束引导变化。 光谱仪布置在光束引导装置的下游。 光谱仪被配置为对离开光束引导装置的光束进行光谱分析。 评估单元被配置为基于对波束引导的不同变化的频谱分析，在观察平面中建立检查体积中的一种或多种气体的2D浓度分布。

公开(公告)号：US11531056B2

公开(公告)日：2022-12-20

申请号：US16849931

申请日：2020-04-15

Applicant: Infineon Technologies AG

Inventor： Irmgard Escher-Poeppel ,  Thorsten Meyer ,  Gerhard Poeppel

IPC: G01R31/26 ,  G01R31/28 ,  G01R31/316 ,  H01L23/60

Abstract: The disclosure describes to techniques for detecting field failures or performance degradation of circuits, including integrated circuits (IC), by including additional contacts, i.e. terminals, along with the functional contacts that used for connecting the circuit to a system in which the circuit is a part. These additional contacts may be used to measure dynamic changing electrical characteristics over time e.g. voltage, current, temperature and impedance. These electrical characteristics may be representative of a certain failure mode and may be an indicator for circuit state-of-health (SOH), while the circuit is performing in the field.

公开(公告)号：US20210325445A1

公开(公告)日：2021-10-21

申请号：US16849931

申请日：2020-04-15

Applicant: Infineon Technologies AG

Inventor： Irmgard Escher-Poeppel ,  Thorsten Meyer ,  Gerhard Poeppel

IPC: G01R31/26 ,  G01R31/28 ,  G01R31/316 ,  H01L23/60

Abstract: The disclosure describes to techniques for detecting field failures or performance degradation of circuits, including integrated circuits (IC), by including additional contacts, i.e. terminals, along with the functional contacts that used for connecting the circuit to a system in which the circuit is a part. These additional contacts may be used to measure dynamic changing electrical characteristics over time e.g. voltage, current, temperature and impedance. These electrical characteristics may be representative of a certain failure mode and may be an indicator for circuit state-of-health (SOH), while the circuit is performing in the field.

公开(公告)号：US09970983B2

公开(公告)日：2018-05-15

申请号：US14612343

申请日：2015-02-03

Applicant: Infineon Technologies AG

Inventor： Reinhard Schachtner ,  Gerhard Poeppel

IPC: G01R31/28 ,  G01R31/26 ,  G01R31/3185 ,  H01L21/66 ,  G01N21/95 ,  G01R31/317

CPC classification number: G01R31/2834 ,  G01N21/9501 ,  G01R31/2601 ,  G01R31/2894 ,  G01R31/31707 ,  G01R31/3185 ,  G06T2207/30148 ,  H01L22/20 ,  H01L22/34

Abstract: In various embodiments, a method for the computer-aided determination of deviation patterns during at least one of the production or testing of a multiplicity of dies is provided. The dies are uniquely identified. The method may include determining, for each die of the multiplicity of dies and for at least one measurement process of a plurality of measurement processes which are applied to at least one portion of the dies, a measurement value which was determined in the measurement process for the respective die; and carrying out a blind source separation using the measurement values, thereby determining the deviation patterns for the dies.

公开(公告)号：US20130258315A1

公开(公告)日：2013-10-03

申请号：US13851879

申请日：2013-03-27

Applicant: INFINEON TECHNOLOGIES AG

Inventor： Dieter Kohlert ,  Gerhard Poeppel ,  Franz Schreier

IPC: G01N21/61

CPC classification number: G01N21/61 ,  G01N21/3504 ,  G01N2021/3513 ,  G01N2021/3595 ,  G01N2201/0636

Abstract: A device can be used for establishing gas concentrations in an examination volume. A radiation source is configured to generate an electromagnetic beam. A beam guiding apparatus is arranged downstream of the radiation source. The beam guiding apparatus is configured to set a plurality of variations of beam guidance of the beam entering the beam guiding apparatus in an observation plane in the examination volume. A spectrometer is arranged downstream of the beam guiding apparatus. The spectrometer is configured to carry out a spectral analysis of the beam leaving the beam guiding apparatus. An evaluation unit is configured to establish in the observation plane a 2D concentration distribution for one or more gases in the examination volume on the basis of the spectral analysis for different variations of beam guidance.

Abstract translation: 一种装置可用于建立检查体积中的气体浓度。 辐射源被配置为产生电磁波束。 光束引导装置布置在辐射源的下游。 光束引导装置被配置为在检查体积中的观察平面中设置进入光束引导装置的光束的多个波束引导变化。 光谱仪布置在光束引导装置的下游。 光谱仪被配置为对离开光束引导装置的光束进行光谱分析。 评估单元被配置为基于对波束引导的不同变化的频谱分析，在观察平面中建立检查体积中的一种或多种气体的2D浓度分布。