-
公开(公告)号：US10996075B2
公开(公告)日：2021-05-04
申请号：US16221409
申请日：2018-12-14
申请人： INVENSENSE, INC.
摘要： Microelectromechanical systems (MEMS) gyroscopes and related measurement and calibration techniques are described. Various embodiments facilitate phase estimation of an ideal phase for a demodulator mixer associated with an exemplary MEMS gyroscope using quadrature tuning, which can improve offset performance over life time for exemplary MEMS gyroscopes. Exemplary embodiments can comprise adjusting a quadrature component of an exemplary MEMS gyroscope sense signal, measuring a change in offset of the exemplary MEMS gyroscope at an output of a demodulator mixer associated with the exemplary MEMS gyroscope, estimating a phase error between the quadrature component and a demodulation phase angle of the demodulator mixer based on the change in the offset, and periodically adjusting the demodulation phase angle of the demodulator mixer based on the phase error.
-
公开(公告)号：US10649001B2
公开(公告)日：2020-05-12
申请号：US16198626
申请日：2018-11-21
申请人： InvenSense, Inc.
摘要： A MEMS system includes a proof mass, an anchor, an amplifier, first and second sense elements and their corresponding feedback elements. The proof mass moves responsive to a stimulus. The anchor coupled to the proof mass via a spring. The amplifier receives a proof mass signal from the proof mass and amplifies the signal to generate an output signal. The first sense element is connected between the proof mass and a first input signal and the second sense element is connected between the proof mass and a second input signal. The second input signal has a polarity opposite to the first input signal. The first feedback element is connected between the proof mass and the output signal and its charges change responsive to proof mass displacement. The second feedback element is connected between the proof mass and the output signal and its charges change in response to proof mass displacement.
-
公开(公告)号：US20190186950A1
公开(公告)日：2019-06-20
申请号：US16221409
申请日：2018-12-14
申请人： INVENSENSE, INC.
CPC分类号： G01C25/005 , B81B3/0018 , B81B7/02 , B81B2201/0242
摘要： Microelectromechanical systems (MEMS) gyroscopes and related measurement and calibration techniques are described. Various embodiments facilitate phase estimation of an ideal phase for a demodulator mixer associated with an exemplary MEMS gyroscope using quadrature tuning, which can improve offset performance over life time for exemplary MEMS gyroscopes. Exemplary embodiments can comprise adjusting a quadrature component of an exemplary MEMS gyroscope sense signal, measuring a change in offset of the exemplary MEMS gyroscope at an output of a demodulator mixer associated with the exemplary MEMS gyroscope, estimating a phase error between the quadrature component and a demodulation phase angle of the demodulator mixer based on the change in the offset, and periodically adjusting the demodulation phase angle of the demodulator mixer based on the phase error.
-
公开(公告)号：US20190170786A1
公开(公告)日：2019-06-06
申请号：US16198626
申请日：2018-11-21
申请人： InvenSense, Inc.
IPC分类号： G01P15/125 , G01P15/13 , G01D5/241
摘要： A MEMS system includes a proof mass, an anchor, an amplifier, first and second sense elements and their corresponding feedback elements. The proof mass moves responsive to a stimulus. The anchor coupled to the proof mass via a spring. The amplifier receives a proof mass signal from the proof mass and amplifies the signal to generate an output signal. The first sense element is connected between the proof mass and a first input signal and the second sense element is connected between the proof mass and a second input signal. The second input signal has a polarity opposite to the first input signal. The first feedback element is connected between the proof mass and the output signal and its charges change responsive to proof mass displacement. The second feedback element is connected between the proof mass and the output signal and its charges change in response to proof mass displacement.
-
-
-
搜索结果
4 条记录 (耗时 0.009 秒)