公开(公告)号：US10996075B2

公开(公告)日：2021-05-04

申请号：US16221409

申请日：2018-12-14

Applicant: INVENSENSE, INC.

Inventor： Sriraman Dakshinamurthy ,  Doruk Senkal ,  Ali Shirvani ,  Ronak Chetan Desai ,  Carlo Pinna

IPC: G01C25/00 ,  B81B3/00 ,  B81B7/02 ,  G01C19/56

Abstract: Microelectromechanical systems (MEMS) gyroscopes and related measurement and calibration techniques are described. Various embodiments facilitate phase estimation of an ideal phase for a demodulator mixer associated with an exemplary MEMS gyroscope using quadrature tuning, which can improve offset performance over life time for exemplary MEMS gyroscopes. Exemplary embodiments can comprise adjusting a quadrature component of an exemplary MEMS gyroscope sense signal, measuring a change in offset of the exemplary MEMS gyroscope at an output of a demodulator mixer associated with the exemplary MEMS gyroscope, estimating a phase error between the quadrature component and a demodulation phase angle of the demodulator mixer based on the change in the offset, and periodically adjusting the demodulation phase angle of the demodulator mixer based on the phase error.

公开(公告)号：US11913788B2

公开(公告)日：2024-02-27

申请号：US17680637

申请日：2022-02-25

Applicant: INVENSENSE, INC.

Inventor： Vadim Tsinker ,  Frederico Mazzarella ,  Ali Shirvani

IPC: G01C19/5776 ,  H03M1/12 ,  G01P15/08 ,  H03M1/38 ,  G01C19/5712 ,  G01P15/125

CPC classification number: G01C19/5776 ,  G01P15/08 ,  H03M1/1245 ,  H03M1/38 ,  G01C19/5712 ,  G01P15/125

Abstract: A round robin sensor device for processing sensor data is provided herein. The sensor device includes a multiplexer stage configured to sequentially select sensor outputs from one or more sensors continuously. Continuously and sequentially selecting sensor outputs results in a stream of selected sensor outputs. The sensor device also includes a charge-to-voltage converter operatively coupled to the multiplexer stage and configured to convert a charge from a first sensor of the one or more sensors to a voltage. Further, the sensor device includes a resettable integrator operatively coupled to the charge-to-voltage converter and configured to demodulate and integrate the voltage, resulting in an integrated voltage. Also included in the sensor device is an analog-to-digital converter operatively coupled to the resettable integrator and configured to digitize the integrated voltage to a digital code.

公开(公告)号：US20230273025A1

公开(公告)日：2023-08-31

申请号：US17680637

申请日：2022-02-25

Applicant: INVENSENSE, INC.

Inventor： Vadim Tsinker ,  Frederico Mazzarella ,  Ali Shirvani

IPC: G01C19/5776 ,  H03M1/12 ,  H03M1/38 ,  G01P15/08

CPC classification number: G01C19/5776 ,  H03M1/1245 ,  H03M1/38 ,  G01P15/08 ,  G01P15/125

Abstract: A round robin sensor device for processing sensor data is provided herein. The sensor device includes a multiplexer stage configured to sequentially select sensor outputs from one or more sensors continuously. Continuously and sequentially selecting sensor outputs results in a stream of selected sensor outputs. The sensor device also includes a charge-to-voltage converter operatively coupled to the multiplexer stage and configured to convert a charge from a first sensor of the one or more sensors to a voltage. Further, the sensor device includes a resettable integrator operatively coupled to the charge-to-voltage converter and configured to demodulate and integrate the voltage, resulting in an integrated voltage. Also included in the sensor device is an analog-to-digital converter operatively coupled to the resettable integrator and configured to digitize the integrated voltage to a digital code.

公开(公告)号：US10649001B2

公开(公告)日：2020-05-12

申请号：US16198626

申请日：2018-11-21

Applicant: InvenSense, Inc.

Inventor： Matthew Julian Thompson ,  Ali Shirvani

IPC: G01P15/125 ,  G01D5/241 ,  G01P15/13 ,  G01D3/02 ,  G01P15/08 ,  G01D5/24

Abstract: A MEMS system includes a proof mass, an anchor, an amplifier, first and second sense elements and their corresponding feedback elements. The proof mass moves responsive to a stimulus. The anchor coupled to the proof mass via a spring. The amplifier receives a proof mass signal from the proof mass and amplifies the signal to generate an output signal. The first sense element is connected between the proof mass and a first input signal and the second sense element is connected between the proof mass and a second input signal. The second input signal has a polarity opposite to the first input signal. The first feedback element is connected between the proof mass and the output signal and its charges change responsive to proof mass displacement. The second feedback element is connected between the proof mass and the output signal and its charges change in response to proof mass displacement.

公开(公告)号：US20190186950A1

公开(公告)日：2019-06-20

申请号：US16221409

申请日：2018-12-14

Applicant: INVENSENSE, INC.

Inventor： Sriraman Dakshinamurthy ,  Doruk Senkal ,  Ali Shirvani ,  Ronak Chetan Desai ,  Carlo Pinna

IPC: G01C25/00 ,  B81B7/02 ,  B81B3/00

CPC classification number: G01C25/005 ,  B81B3/0018 ,  B81B7/02 ,  B81B2201/0242

Abstract: Microelectromechanical systems (MEMS) gyroscopes and related measurement and calibration techniques are described. Various embodiments facilitate phase estimation of an ideal phase for a demodulator mixer associated with an exemplary MEMS gyroscope using quadrature tuning, which can improve offset performance over life time for exemplary MEMS gyroscopes. Exemplary embodiments can comprise adjusting a quadrature component of an exemplary MEMS gyroscope sense signal, measuring a change in offset of the exemplary MEMS gyroscope at an output of a demodulator mixer associated with the exemplary MEMS gyroscope, estimating a phase error between the quadrature component and a demodulation phase angle of the demodulator mixer based on the change in the offset, and periodically adjusting the demodulation phase angle of the demodulator mixer based on the phase error.

公开(公告)号：US20190170786A1

公开(公告)日：2019-06-06

申请号：US16198626

申请日：2018-11-21

Applicant: InvenSense, Inc.

Inventor： Matthew Julian THOMPSON ,  Ali Shirvani

IPC: G01P15/125 ,  G01P15/13 ,  G01D5/241

Abstract: A MEMS system includes a proof mass, an anchor, an amplifier, first and second sense elements and their corresponding feedback elements. The proof mass moves responsive to a stimulus. The anchor coupled to the proof mass via a spring. The amplifier receives a proof mass signal from the proof mass and amplifies the signal to generate an output signal. The first sense element is connected between the proof mass and a first input signal and the second sense element is connected between the proof mass and a second input signal. The second input signal has a polarity opposite to the first input signal. The first feedback element is connected between the proof mass and the output signal and its charges change responsive to proof mass displacement. The second feedback element is connected between the proof mass and the output signal and its charges change in response to proof mass displacement.