公开(公告)号：US09958349B2

公开(公告)日：2018-05-01

申请号：US15085592

申请日：2016-03-30

Applicant: InvenSense, Inc.

Inventor： Johannes Schumm ,  Andreas Reinhard ,  Thomas Kraehenbuehl ,  Stefan Thiele ,  Rene Hummel ,  Chung-Hsien Lin ,  Wang Shen Su ,  Tsung Lin Tang ,  Chia Min Lin

IPC: G01L9/00 ,  B81C1/00 ,  H01L29/84

CPC classification number: G01L9/0042 ,  B81B3/0089 ,  B81B2201/0264 ,  B81B2203/0315 ,  B81C1/00285 ,  G01L9/0045 ,  G01L9/0073 ,  H01L29/84

Abstract: A pressure sensor comprises a deformable membrane deflecting in response to pressure applied, a first stationary electrode, and a second electrode coupled to the deformable membrane, for determining a change in a capacitance between the first and the second electrode in response to the pressure applied. At least one of the first and the second electrode comprises a getter material for collecting gas molecules.

公开(公告)号：US10254185B2

公开(公告)日：2019-04-09

申请号：US15921504

申请日：2018-03-14

Applicant: InvenSense, Inc.

Inventor： Johannes Schumm ,  Andreas Reinhard ,  Thomas Kraehenbuehl ,  Stefan Thiele ,  Rene Hummel ,  Chung-Hsien Lin ,  Wang Shen Su ,  Tsung Lin Tang ,  Chia Min Lin

IPC: H01L29/84 ,  G01L9/00 ,  B81C1/00 ,  B81B3/00

Abstract: A sensor includes a deformable membrane that deflects in response to a stimuli. The sensor further includes a capacitive element coupled to the deformable membrane. The capacitive element is disposed within an enclosed cavity of the sensor. The capacitive element changes capacitance in response to the deformable membrane deflecting. The capacitive element comprises a getter material for collecting gas molecules within the enclosed cavity.

公开(公告)号：US10816422B2

公开(公告)日：2020-10-27

申请号：US15442468

申请日：2017-02-24

Applicant: InvenSense, Inc.

Inventor： Chung-Hsien Lin ,  Rene Hummel ,  Ulrich Bartsch ,  Marion Hermersdorf ,  Tsung Lin Tang ,  Wang Shen Su ,  Chia Min Lin

IPC: G01L9/00 ,  G01L19/00 ,  G01L19/14 ,  B81B7/00 ,  B23P19/04 ,  G01L9/12

Abstract: A pressure sensor comprises a first substrate and a cap attached to the first substrate. The cap includes a processing circuit, a cavity and a deformable membrane separating the cavity and a port open to an outside of the pressure sensor. Sensing means are provided for converting a response of the deformable membrane to pressure at the port into a signal capable of being processed by the processing circuit. The cap is attached to the first substrate such that the deformable membrane faces the first substrate and such that a gap is provided between the deformable membrane and the first substrate which gap contributes to the port. The first substrate comprises a support portion the cap is attached to, a contact portion for electrically connecting the pressure sensor to an external device, and one or more suspension elements for suspending the support portion from the contact portion.

公开(公告)号：US20180202882A1

公开(公告)日：2018-07-19

申请号：US15921504

申请日：2018-03-14

Applicant: InvenSense, Inc.

Inventor： Johannes Schumm ,  Andreas Reinhard ,  Thomas Kraehenbuehl ,  Stefan Thiele ,  Rene Hummel ,  Chung-Hsien Lin ,  Wang Shen Su ,  Tsung Lin Tang ,  Chia Min Lin

IPC: G01L9/00 ,  H01L29/84 ,  B81C1/00

CPC classification number: G01L9/0042 ,  B81B3/0089 ,  B81B2201/0264 ,  B81B2203/0315 ,  B81C1/00285 ,  G01L9/0045 ,  G01L9/0073 ,  H01L29/84

Abstract: A sensor includes a deformable membrane that deflects in response to a stimuli. The sensor further includes a capacitive element coupled to the deformable membrane. The capacitive element is disposed within an enclosed cavity of the sensor. The capacitive element changes capacitance in response to the deformable membrane deflecting. The capacitive element comprises a getter material for collecting gas molecules within the enclosed cavity.

公开(公告)号：US09581512B2

公开(公告)日：2017-02-28

申请号：US14522014

申请日：2014-10-23

Applicant: InvenSense, Inc.

Inventor： Chung-Hsien Lin ,  Rene Hummel ,  Ulrich Bartsch ,  Marion Hermersdorf ,  Tsung Lin Tang ,  Wang Shen Su ,  Chia Min Lin

IPC: G01L9/00 ,  G01L19/00 ,  B23P19/04 ,  G01L9/12 ,  G01L19/14 ,  B81B7/00

CPC classification number: G01L9/0073 ,  B23P19/04 ,  B81B7/0051 ,  B81B7/0054 ,  B81B2201/0264 ,  B81B2207/012 ,  B81B2207/095 ,  B81C2203/0792 ,  G01L9/12 ,  G01L19/0084 ,  G01L19/145 ,  G01L19/146 ,  Y10T29/49165 ,  Y10T29/49904

Abstract: A pressure sensor comprises a first substrate and a cap attached to the first substrate. The cap includes a processing circuit, a cavity and a deformable membrane separating the cavity and a port open to an outside of the pressure sensor. Sensing means are provided for converting a response of the deformable membrane to pressure at the port into a signal capable of being processed by the processing circuit. The cap is attached to the first substrate such that the deformable membrane faces the first substrate and such that a gap is provided between the deformable membrane and the first substrate which gap contributes to the port. The first substrate comprises a support portion the cap is attached to, a contact portion for electrically connecting the pressure sensor to an external device, and one or more suspension elements for suspending the support portion from the contact portion.

Abstract translation: 压力传感器包括第一基板和附接到第一基板的盖。 盖包括处理电路，空腔和分离空腔的可变形膜和通向压力传感器外部的端口。 提供感测装置，用于将可变形膜的响应转换成端口处的压力，使其成为能够被处理电路处理的信号。 盖子附接到第一基板，使得可变形膜面向第一基板，并且使得在可变形膜和第一基板之间提供间隙，该间隙有助于端口。 第一基板包括盖附接的支撑部分，用于将压力传感器电连接到外部装置的接触部分以及用于将支撑部分从接触部分悬挂的一个或多个悬挂元件。