公开(公告)号：US08411343B2

公开(公告)日：2013-04-02

申请号：US12443023

申请日：2007-09-26

Applicant: Jun Akedo ,  Jaehyuk Park

Inventor： Jun Akedo ,  Jaehyuk Park

IPC: G02B26/08

CPC classification number: G02B26/10 ,  G02B26/105

Abstract: An optical scanning device of the invention includes: a substrate; torsion bar portion which is connected to the substrate; a mirror portion which is supported by the torsion bar portion; a drive source which causes the substrate to oscillate; and a light source which projects light onto the mirror portion, where the mirror portion resonates and vibrates in accordance with a vibration imparted to the substrate by the drive source, and the direction of reflection light from the light projected onto the mirror portion from the light source changes in accordance with the vibration of the mirror portion, and a spring constant in a longitudinal direction of the torsion bar portion supporting the mirror portion is distributed along the longitudinal direction of the torsion bar portion.

Abstract translation: 本发明的光学扫描装置包括：基板; 与基板连接的扭杆部; 由所述扭杆部支撑的镜部; 使基板振荡的驱动源; 以及光源，其将光投射到镜部分上，其中反射镜部分根据由驱动源施加到基板的振动而谐振和振动，以及来自光的投射到镜部分上的光的反射光 光源根据镜部的振动而变化，并且支撑镜部的扭杆部的长度方向的弹簧常数沿着扭杆部的长度方向分布。

公开(公告)号：US08398227B2

公开(公告)日：2013-03-19

申请号：US12745295

申请日：2008-12-05

Applicant: Jun Akedo ,  Akito Endo

Inventor： Jun Akedo ,  Akito Endo

IPC: B41J2/01

CPC classification number: H05K3/125 ,  H05K3/1208 ,  H05K2203/013 ,  H05K2203/107 ,  H05K2203/1105 ,  H05K2203/111

Abstract: Disclosed herein is a fine and thick wiring drawn at high speed in such a manner that a region on the substrate, on which region the liquid droplet is scheduled to impact, is heated beforehand, and that immediately after the impact of the liquid droplet on the substrate, the liquid droplet is promptly solidified so as thereby to suppress the spread of the liquid droplet due to the wettability of the liquid droplet to the substrate, and also to suppress the clogging of the nozzle due to the heating of the substrate. Thereby, even in the case where a liquid droplet having a larger volume than before is used, high-speed drawing of a thick and fine wiring having a line width approximately equal to the liquid droplet size is realized independently of the substrate material.

Abstract translation: 这里公开了以高速拉出的精细且粗的布线，使得预先加热液滴预定在其上排列冲击的区域的基板上的区域，并且在液滴在 基板，液滴迅速固化，从而抑制由于液滴对基板的润湿性而引起的液滴的扩散，并且还抑制了由于基板的加热引起的喷嘴的堵塞。 因此，即使在使用具有比以前更大的体积的液滴的情况下，也可以独立于基板材料实现具有大致等于液滴尺寸的线宽的精细布线的高速拉伸。

公开(公告)号：US08305669B2

公开(公告)日：2012-11-06

申请号：US12444922

申请日：2007-09-26

Applicant: Jun Akedo ,  Harumichi Sato ,  Jaehyuk Park

Inventor： Jun Akedo ,  Harumichi Sato ,  Jaehyuk Park

IPC: G02B26/08

CPC classification number: G02B26/105 ,  G02B26/0833

Abstract: An optical scanning device of the invention includes: a substrate main body; two cantilever beam portions which protrude from both-side portions of one side of the substrate main body; a mirror portion whose both-sides are supported by torsion bar portions between the cantilever beam portions; a drive source which causes the substrate main body to oscillate; and a light source which projects light onto the mirror portion, where the mirror portion resonates and vibrates in accordance with a vibration imparted to a substrate by the drive source, and a direction of reflection light from the light projected onto the mirror portion from the light source changes in accordance with the vibration of the mirror portion, and where a fixed end portion of the substrate main body which is located on the opposite side thereof from the mirror portion side is fixed to a supporting component, and the drive source is provided on a portion of the substrate main body.

Abstract translation: 本发明的光学扫描装置包括：基板主体; 从基板主体的一侧的两侧突出的两个悬臂梁部， 两侧由悬臂梁部之间的扭杆部支承的镜面部; 使基板主体振动的驱动源; 以及光源，其将光投射到镜部分上，其中反射镜部分根据由驱动源施加到基板的振动而谐振和振动，以及来自光的投射到镜部分的光的反射光的方向 光源根据镜部的振动而变化，并且位于与反射镜部侧相反的一侧的基板主体的固定端部固定在支撑部件上，驱动源设置在 基板主体的一部分。

公开(公告)号：US07908993B2

公开(公告)日：2011-03-22

申请号：US11466665

申请日：2006-08-23

Applicant: Motohiro Yasui ,  Jun Akedo

Inventor： Motohiro Yasui ,  Jun Akedo

IPC: B05C15/00

CPC classification number: B05D1/02 ,  C23C24/04 ,  H01L41/314

Abstract: A film forming apparatus including a film forming chamber which forms a film, a jetting mechanism which jets aerosol containing material particles onto a substrate in the film forming chamber, a measuring chamber communicating with the film forming chamber, a measuring mechanism which measures a thickness of the film in the measuring chamber, a pressure adjusting mechanism which controls an internal pressure of the film forming chamber and the measuring chamber, a conveyor which transports the substrate between the film forming chamber and the measuring chamber, and a blocking section which blocks a communication between the film forming chamber and the measuring chamber. Accordingly, inside of the measuring chamber is maintained clean without being polluted with the aerosol, and the measurement precision can be maintained. In the film forming process, the film thickness can be easily and precisely measured, and fed back to the film forming condition.

Abstract translation: 一种成膜装置，包括：成膜室，其形成膜;喷射机构，其将含有材料颗粒的气溶胶喷射到成膜室中的基板上;测量室，与成膜室连通;测量机构， 测量室中的膜，控制成膜室和测量室的内部压力的压力调节机构，在成膜室和测量室之间输送基板的输送器和阻挡通信的阻挡部分 在成膜室和测量室之间。 因此，测量室的内部保持清洁而不被气溶胶污染，并且可以保持测量精度。 在成膜过程中，可以容易且精确地测量膜厚，并将其反馈至成膜条件。

公开(公告)号：US20100014140A1

公开(公告)日：2010-01-21

申请号：US12444922

申请日：2007-09-26

Applicant: Jun Akedo ,  Harumichi Sato ,  Jaehyuk Park

Inventor： Jun Akedo ,  Harumichi Sato ,  Jaehyuk Park

IPC: G02B26/10

CPC classification number: G02B26/105 ,  G02B26/0833

Abstract: An optical scanning device of the invention includes: a substrate main body; two cantilever beam portions which protrude from both-side portions of one side of the substrate main body; a mirror portion whose both-sides are supported by torsion bar portions between the cantilever beam portions; a drive source which causes the substrate main body to oscillate; and a light source which projects light onto the mirror portion, where the mirror portion resonates and vibrates in accordance with a vibration imparted to a substrate by the drive source, and a direction of reflection light from the light projected onto the mirror portion from the light source changes in accordance with the vibration of the mirror portion, and where a fixed end portion of the substrate main body which is located on the opposite side thereof from the mirror portion side is fixed to a supporting component, and the drive source is provided on a portion of the substrate main body.

Abstract translation: 本发明的光学扫描装置包括：基板主体; 从基板主体的一侧的两侧突出的两个悬臂梁部， 两侧由悬臂梁部之间的扭杆部支承的镜面部; 使基板主体振动的驱动源; 以及光源，其将光投射到镜部分上，其中反射镜部分根据由驱动源施加到基板的振动而谐振和振动，以及来自光的投影到镜部分的光的反射光的方向 光源根据镜部的振动而变化，并且位于与反射镜部侧相反的一侧的基板主体的固定端部固定在支撑部件上，驱动源设置在 基板主体的一部分。

公开(公告)号：US07506441B2

公开(公告)日：2009-03-24

申请号：US11090201

申请日：2005-03-28

Applicant: Motohiro Yasui ,  Jun Akedo

Inventor： Motohiro Yasui ,  Jun Akedo

IPC: B21D53/76

CPC classification number: C23C24/04 ,  H01L41/081 ,  H01L41/0973 ,  H01L41/1876 ,  H01L41/314 ,  Y10T29/42 ,  Y10T29/49401

Abstract: The present invention provides a simple method using aerosol deposition, for manufacturing a piezoelectric film that will simultaneously satisfy various characteristics required of a piezoelectric film. In the method, the piezoelectric film is formed on a substrate by ejecting an aerosol containing particles of a piezoelectric material onto the substrate so that the particles adhere thereto, and a second piezoelectric layer is formed on the first piezoelectric layer by conducting the ejection such that energy used for crushing the particles when the particles collide with the substrate is less than in the formation of the first piezoelectric film.

Abstract translation: 本发明提供一种使用气溶胶沉积的简单方法，用于制造能够同时满足压电膜所需的各种特性的压电膜。 在该方法中，通过将含有压电材料颗粒的气溶胶喷射到基板上以使颗粒附着在基板上而形成压电膜，并且通过进行喷射在第一压电层上形成第二压电层，使得 当颗粒与基板碰撞时用于粉碎颗粒的能量小于第一压电膜的形成。

公开(公告)号：US20080220962A1

公开(公告)日：2008-09-11

申请号：US11882852

申请日：2007-08-06

Applicant: Jun Akedo ,  Maxim Lebedev

Inventor： Jun Akedo ,  Maxim Lebedev

IPC: C04B35/56

CPC classification number: C04B35/6261 ,  B22F3/006 ,  B22F2998/10 ,  B82Y30/00 ,  C04B35/491 ,  C04B2235/5454 ,  C04B2235/549 ,  C04B2235/96 ,  C23C24/04 ,  H01L41/1876 ,  H01L41/314 ,  Y10T428/25 ,  Y10T428/256 ,  Y10T428/26 ,  Y10T428/2982 ,  B22F1/0018 ,  B22F1/0096 ,  B22F3/17

Abstract: A method for forming an ultrafine particle brittle material at low temperature which includes the steps of applying a mechanical impact force or a pressure to a ultrafine particle brittle material so as to have a percentage in the ultrafine particles having a primary particle diameter less than 50 nm in all the particles of 10 to 90%, subjecting the resulting brittle material to a heat treatment at a temperature not higher than the sintering temperature thereof so as to have the above percentage of 50% or less, and then applying a mechanical impact force not less than the crushing strength to the resultant material, to crush the material, thereby joining the ultrafine particles in the brittle material with one another, to form a formed article of the ultrafine particle brittle material; and an ultrafine particle brittle material for use in the method.

Abstract translation: 一种在低温下形成超细颗粒脆性材料的方法，包括以下步骤：对超微粒脆性材料施加机械冲击力或压力，使得在一次粒径小于50nm的超微粒子中具有百分比 在所有的10〜90％的粒子中，使得到的脆性材料在不高于其烧结温度的温度下进行热处理，以使其具有上述百分比为50％以下，然后施加机械冲击力 小于对所得材料的破碎强度，粉碎材料，从而将脆性材料中的超细颗粒彼此接合，以形成超微粒脆性材料的成形品; 和用于该方法的超微粒脆性材料。

公开(公告)号：US20060102074A1

公开(公告)日：2006-05-18

申请号：US11311738

申请日：2005-12-19

Applicant: Hironori Hatono ,  Masakatsu Kiyohara ,  Katsuhiko Mori ,  Tatsuro Yokoyama ,  Atsushi Yoshida ,  Tomokazu Ito ,  Jun Akedo

Inventor： Hironori Hatono ,  Masakatsu Kiyohara ,  Katsuhiko Mori ,  Tatsuro Yokoyama ,  Atsushi Yoshida ,  Tomokazu Ito ,  Jun Akedo

IPC: B05C11/00 ,  B05C5/00 ,  B05B7/00

CPC classification number: C23C30/00 ,  C23C24/04 ,  Y10T428/249967 ,  Y10T428/25 ,  Y10T428/26 ,  Y10T428/265

Abstract: An apparatus for manufacturing a composite structure body is provided which forms structure body having the constitution in which the crystals of more than one type of brittle material are dispersed and having novel properties without involving a heating/sintering process. The apparatus includes an aerosol generator configured to generate an aerosol. The aerosol is generated through dispersing fine particles of more than one type of brittle material, or dispersing composite fine particles, in a gas. The apparatus also includes a nozzle configured to spray the aerosol, a classifier configured to classify the brittle material fine particles in the aerosol, and a disintegrating machine for disintegrating agglomerations of the brittle material fine particles in the aerosol. The composite structure body is manufactured in reduced pressure conditions by bombarding a substrate with the aerosol at a high velocity, whereby at least one of crystals and microstructures of said brittle materials are dispersed.

公开(公告)号：US20060087029A1

公开(公告)日：2006-04-27

申请号：US11250409

申请日：2005-10-17

Applicant: Yoshihiko Imanaka ,  Jun Akedo

Inventor： Yoshihiko Imanaka ,  Jun Akedo

IPC: H01L23/34

CPC classification number: H01L23/49822 ,  H01L23/3114 ,  H01L23/5223 ,  H01L23/5227 ,  H01L28/55 ,  H01L28/65 ,  H01L2224/05001 ,  H01L2224/05008 ,  H01L2224/05024 ,  H01L2224/05026 ,  H01L2224/05124 ,  H01L2224/05139 ,  H01L2224/05144 ,  H01L2224/05147 ,  H01L2224/05164 ,  H01L2224/05169 ,  H01L2224/05568 ,  H01L2224/05569 ,  H01L2224/05573 ,  H01L2224/05644 ,  H01L2224/05647 ,  H01L2224/16 ,  H01L2224/16235 ,  H01L2924/0102 ,  H01L2924/01046 ,  H01L2924/01057 ,  H01L2924/01077 ,  H01L2924/01078 ,  H01L2924/01079 ,  H01L2924/1433 ,  H01L2924/15192 ,  H01L2924/19041 ,  H01L2924/3011 ,  H01L2924/00014

Abstract: A semiconductor device includes a semiconductor chip having a surface provided with connecting electrodes, a stacked structure made up of alternately stacked dielectric and wiring layers and provided on the surface of the semiconductor chip, a passive element provided in the stacked structure and electrically connected to the wiring layers; and external electrodes for external electrical connection provided on the stacked structure and electrically connected to the connecting electrodes via the wiring layers. The passive element has at least one layer selected from a group consisting of a capacitor dielectric layer, a resistor layer and a conductor layer that are formed by spraying an aerosol particulate material.

Abstract translation: 半导体器件包括具有连接电极的表面的半导体芯片，由交替堆叠的电介质层和布线层构成并且设置在半导体芯片的表面上的堆叠结构，设置在层叠结构中并电连接到 接线层; 以及外部电连接的外部电极，设置在层叠结构上并通过布线层与连接电极电连接。 无源元件具有选自由通过喷雾气溶胶颗粒材料形成的电容器介电层，电阻层和导体层组成的组中的至少一个层。

公开(公告)号：US4855256A

公开(公告)日：1989-08-08

申请号：US155513

申请日：1988-02-12

Applicant: Hiroshi Kobayashi ,  Haruhiko Machida ,  Makoko Harigaya ,  Yasushi Ide ,  Jun Akedo

Inventor： Hiroshi Kobayashi ,  Haruhiko Machida ,  Makoko Harigaya ,  Yasushi Ide ,  Jun Akedo

IPC: H01S5/00 ,  H01S5/028 ,  H01S5/10

CPC classification number: H01S5/028 ,  H01S5/1082 ,  H01S2301/18 ,  H01S5/0286 ,  Y10S148/071 ,  Y10S148/094 ,  Y10S148/106 ,  Y10S148/169

Abstract: A masking layer is formed on the light-emitting mirror surface of a semiconductor laser body. The masking layer is capable of blocking light emitted from the semiconductor laser body and of being thermally melted and evaporated by exposure to the emitted light. When the masking layer is formed on the light-emitting mirror surface of the semiconductor laser body, a small light-emitting hole is defined in the masking layer by the heat of the emitted light which is effective to prevent the material of the masking layer from being evaporated on a portion of the light-emitting surface.

Abstract translation: 在半导体激光体的发光镜面上形成掩模层。 掩模层能够阻挡从半导体激光器体发射的光并且通过暴露于发射光而被热熔化和蒸发。 当掩模层形成在半导体激光器体的发光镜表面上时，通过发射光的热量在掩模层中限定小的发光孔，这有效地防止了掩模层的材料 在发光表面的一部分上蒸发。