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    DEVICE AND METHOD FOR ANALYZING DEFECTS BY USING HEAT DISTRIBUTION MEASUREMENT
    3.
    发明申请
    DEVICE AND METHOD FOR ANALYZING DEFECTS BY USING HEAT DISTRIBUTION MEASUREMENT 有权
    使用热分布测量分析缺陷的装置和方法

    公开(公告)号：US20150316496A1

    公开(公告)日：2015-11-05

    申请号：US14647772

    申请日：2013-11-26

    Applicant: KOREA BASIC SCIENCE INSTITUTE

    Inventor： Ki Soo Chang ,  Seon Young Ryu ,  Woo June Choi ,  Geon Hee Kim

    IPC: G01N25/72

    CPC classification number: G01N25/72 ,  H01L22/12

    Abstract: The present invention provides a method for analyzing defects by using heat distribution measurement, comprising: a sample loading unit for loading a sample to check whether or not there is a defect through heat distribution characteristics; a light source for radiating visible light onto the sample; a power supply unit for generating a driving signal in order to periodically heat the sample; a detection unit for detecting reflected light from the surface of the sample; and a signal generator for synchronizing the detection unit with the driving signal of the power supply unit.

    Abstract translation: 本发明提供一种通过使用热分布测量来分析缺陷的方法，包括：样品加载单元，用于加载样品以通过热分布特性检查是否存在缺陷; 用于将可见光辐射到样品上的光源; 用于产生驱动信号以便周期性地加热样品的电源单元; 用于检测来自所述样品表面的反射光的检测单元; 以及用于使检测单元与电源单元的驱动信号同步的信号发生器。

    Solid immersion lens holder for high resolution optical microscope
    4.
    发明授权
    Solid immersion lens holder for high resolution optical microscope 有权

    公开(公告)号：US10281707B2

    公开(公告)日：2019-05-07

    申请号：US15387622

    申请日：2016-12-21

    Applicant: KOREA BASIC SCIENCE INSTITUTE

    Inventor： Ji Yong Bae ,  Kye Sung Lee ,  Geon Hee Kim ,  Ki Soo Chang

    IPC: G02B7/00 ,  G02B21/02 ,  G02B21/32 ,  G02B21/33

    Abstract: Provided is a solid immersion lens (SIL) holder for optical axis precision correction of a high resolution optical microscope, equipped with a SIL and an objective lens barrel equipped with a plurality of objective lenses, the SIL holder comprising: a circular flange providing in the middle of the objective lens barrel to be coupled to the SIL holder; a coupling flange formed at one end portion thereof and coupled to the circular flange; a conical tube formed at the other end portion thereof, the SIL being mounted onto a lower end portion of the conical tube, wherein the SIL holder comprises an optical axis adjusting part which adjusts such that the central axis of the SIL approaches the central axis of an objective lens, and the SIL holder comprises an extension/contraction adjusting part which allows the SIL to be very close to a measurement surface of a specimen.

    Image sensor comprising a digital-alloy microlens array integrated with sensor array, and manufacturing method thereof
    5.
    发明授权
    Image sensor comprising a digital-alloy microlens array integrated with sensor array, and manufacturing method thereof 有权
    图像传感器包括与传感器阵列集成的数字合金微透镜阵列及其制造方法

    公开(公告)号：US09093576B2

    公开(公告)日：2015-07-28

    申请号：US14056915

    申请日：2013-10-17

    Applicant: KOREA BASIC SCIENCE INSTITUTE

    Inventor： Ki Soo Chang ,  Geon Hee Kim ,  Sun Cheol Yang ,  Hyo Sik Kim

    IPC: H01L21/00 ,  H01L31/0232 ,  B29D11/00 ,  H01L27/146 ,  H01L31/18

    CPC classification number: H01L31/0232 ,  B29D11/00365 ,  B29D11/00807 ,  H01L27/14627 ,  H01L27/14685 ,  H01L31/02327 ,  H01L31/18

    Abstract: The present invention relates to an image sensor comprising a microlens array, and to a manufacturing method thereof. The method of the present invention includes gradually increasing the aluminum composition ratio of a compound semiconductor as the latter gradually gets farther from a substrate, to enable a microlens-forming layer to grow, and making the oxidation rate of the region adjacent to the substrate slower and the oxidation rate of the region farther from the substrate faster, making the interface between the oxidized region and the unoxidized region into a lens shape after the completion of oxidation. The thus-made lens is integrated into an image sensor. The present invention reduces costs for manufacturing image sensors in which a microlens is integrated, increases the signal-to-noise ratio and resolution of the image sensor, and achieves improved sensitivity.

    Abstract translation: 本发明涉及一种包括微透镜阵列的图像传感器及其制造方法。 本发明的方法包括逐渐增加化合物半导体的铝组成比，随着后者从衬底逐渐变得越远，以使微透镜形成层生长，并且使与邻近衬底的区域的氧化速率变慢 并且距离衬底更远的区域的氧化速率更快，使氧化区域和未氧化区域之间的界面在氧化完成后成为透镜形状。 这样制成的镜头被集成到图像传感器中。 本发明降低了其中集成微透镜的图像传感器的制造成本，增加了图像传感器的信噪比和分辨率，并且实现了改进的灵敏度。

    IMAGING SYSTEM USING OPTICAL FIBER ARRAY INTEGRATED WITH LENSES
    7.
    发明申请
    IMAGING SYSTEM USING OPTICAL FIBER ARRAY INTEGRATED WITH LENSES 审中-公开
    使用与镜片集成的光纤阵列的成像系统

    公开(公告)号：US20130146754A1

    公开(公告)日：2013-06-13

    申请号：US13708388

    申请日：2012-12-07

    Applicant: Korea Basic Science Institute

    Inventor： Ki Soo Chang ,  Seon Young Ryu ,  Sun Cheol Yang ,  Geon Hee Kim ,  Hae Young Choi

    IPC: G01J1/42 ,  G01J1/04

    CPC classification number: G01J1/42 ,  A61B5/0062 ,  A61B5/0071 ,  A61B5/0084 ,  G01J1/0488 ,  G01J3/0218 ,  G01J3/4406 ,  G01N21/645 ,  G01N2021/6484 ,  G02B6/2552 ,  G02B6/262

    Abstract: Provided is an imaging system using an optical fiber array probe integrated with lenses for emitting light transmitted from a light source to a sample, and guiding light generated from the sample. The imaging system includes an optical fiber array probe integrated with lenses including an optical fiber lens with a lens surface of a predetermined radius of curvature in which one ends of two optical fibers are integrally connected with each other by heating a predetermined region including the one ends of the two optical fibers using a heating means. Therefore, a compact imaging system may be realized while effectively improving optical coupling efficiency through a simple manufacturing process.

    Abstract translation: 提供了一种使用与透镜集成的光纤阵列探针的成像系统，用于发射从光源向样本透射的光，并且引导从样品产生的光。 成像系统包括与透镜组合的光纤阵列探针，该透镜包括具有预定曲率半径的透镜表面的光纤透镜，其中两个光纤的一端通过加热包括一端的预定区域而彼此一体地连接 的两根光纤。 因此，可以通过简单的制造过程有效地提高光耦合效率，实现紧凑的成像系统。

    Apparatus and method for acquiring fluorescence image
    8.
    发明授权
    Apparatus and method for acquiring fluorescence image 有权

    公开(公告)号：US10386299B2

    公开(公告)日：2019-08-20

    申请号：US15660166

    申请日：2017-07-26

    Applicant: KOREA BASIC SCIENCE INSTITUTE

    Inventor： Dong Uk Kim ,  Ki Soo Chang ,  Geon Hee Kim ,  Joo Ran Lee

    IPC: G01N21/64 ,  G06T5/00 ,  G06T5/20

    Abstract: Provided is a fluorescence image acquisition apparatus for acquiring fluorescence images and phase images using optical signals that are modulated at the same frequency and that have different time delays. The fluorescence image acquisition apparatus may include a light source configured to generate, at different time delays, a plurality of optical signals that are modulated at the same frequency, an illuminator configured to control paths of the plurality of modulated optical signals so that the plurality of modulated optical signals are illuminated onto a sample including a plurality of fluorescent materials, a photodetector configured to detect a plurality of fluorescence signals that are emitted from the plurality of fluorescent materials, respectively, and a controller configured to acquire a plurality of fluorescence images and a plurality of phase images from the plurality of detected fluorescence signals.

    Apparatus for fixing solid immersion lens
    10.
    发明授权
    Apparatus for fixing solid immersion lens 有权
    固定浸没透镜的装置

    公开(公告)号：US09575282B2

    公开(公告)日：2017-02-21

    申请号：US14389443

    申请日：2013-09-13

    Applicant: KOREA BASIC SCIENCE INSTITUTE

    Inventor： Geon Hee Kim ,  Ha Yeong Sung ,  Woo Kang Kim ,  Kye Sung Lee ,  Ki Soo Chang ,  Ki Ju Yee

    IPC: G02B7/02 ,  G02B27/56 ,  G02B7/04 ,  G01Q60/22

    CPC classification number: G02B7/023 ,  G01Q60/22 ,  G02B7/025 ,  G02B7/04 ,  G02B27/56

    Abstract: Provided is an apparatus for fixing a solid immersion lens (SIL) in an optical system. The apparatus includes a first adapter; a second adapter screw-coupled to the inner surface of the first adapter and screw-coupled to the outer surface of a third adapter to pressurize a first O-ring; the third adapter screw-coupled to the inner surfaces of the second adapter and a fourth adapter; the fourth adapter screw-coupled to the outer surface of the third adapter to pressurize a second O-ring; the first and second O-rings elastically fixing an outer surface of a barrel of an infrared ray (IR) objective lens; and an SIL holder mounting the SIL onto the first adapter.

    Abstract translation: 提供了一种用于将固体浸没透镜（SIL）固定在光学系统中的装置。 该装置包括第一适配器; 第二适配器，其螺纹联接到所述第一适配器的内表面，并且螺纹连接到第三适配器的外表面以对第一O形环加压; 所述第三适配器螺纹连接到所述第二适配器的内表面和第四适配器; 所述第四适配器螺纹连接到所述第三适配器的外表面以加压第二O形环; 所述第一和第二O形环弹性地固定红外线（IR）物镜的镜筒的外表面; 以及将SIL安装到第一适配器上的SIL保持架。

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