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    Particle-optical apparatus including a low-temperature specimen holder
    2.
    发明授权
    Particle-optical apparatus including a low-temperature specimen holder 失效
    粒子光学装置包括低温试样架

    公开(公告)号：US5986270A

    公开(公告)日：1999-11-16

    申请号：US990870

    申请日：1997-12-15

    Applicant: Bernardus J. M. Bormans ,  Alan F. De Jong ,  Karel D. Van Der Mast ,  Raymond Wagner ,  Peter E. S. J. Asselbergs

    Inventor： Bernardus J. M. Bormans ,  Alan F. De Jong ,  Karel D. Van Der Mast ,  Raymond Wagner ,  Peter E. S. J. Asselbergs

    IPC: G01Q30/10 ,  G01Q30/16 ,  G01Q30/20 ,  H01J37/20

    CPC classification number: H01J37/20 ,  H01J2237/2001

    Abstract: In an electron microscope it is sometimes important that specimens can be studied at a very low temperature (for example, that of liquid helium). In the case of known specimen holders the specimen is cooled by supplying the cooling medium via a bore in the specimen holder; this causes thermal drift of the removed specimen holder each time when a specimen is exchanged, and also an acoustic coupling (i.e. transfer of vibrations) exists with the dewar vessel connected to the specimen holder. In accordance with the invention, the specimen is arranged on the end 20 of the specimen holder 7 by means of a separate transport unit 13, 36 so that it is not necessary to remove the specimen holder 7 in order to exchange a specimen, with the result that the specimen holder is not heated. Moreover, the coupling to the cold source 22, 28 can take place via a flexible cooling conduit 30 which extends directly to the end 20 to be cooled and may be permanently connected thereto, thus avoiding the transfer of vibrations.

    Abstract translation: 在电子显微镜中，有时重要的是可以在非常低的温度下（例如液态氦）进行研究。 在已知的试样支架的情况下，通过在试样支架中的孔供给冷却介质来冷却试样; 这样每次当样品被更换时，都会导致移除的标本夹持器的热漂移，并且与连接到样本架的杜瓦瓶也存在声耦合（即振动的传递）。 根据本发明，试样通过单独的运输单元13,36布置在试样保持器7的端部20上，使得不需要移除样品架7以便更换试样， 导致样品架不加热。 此外，与冷源22,28的联接可以通过柔性冷却导管30进行，柔性冷却导管30直接延伸到待冷却的端部20并且可以永久地连接到其上，从而避免了振动的传递。

    Electron image projector
    3.
    发明授权
    Electron image projector 失效
    电子图像投影机

    公开(公告)号：US4902930A

    公开(公告)日：1990-02-20

    申请号：US261207

    申请日：1988-10-21

    Applicant: Karel D. Van Der Mast

    Inventor： Karel D. Van Der Mast

    IPC: H01L21/30 ,  H01J37/305 ,  H01J37/317

    CPC classification number: B82Y10/00 ,  B82Y40/00 ,  H01J37/3175 ,  H01J2237/028 ,  H01J2237/04735 ,  H01J2237/31779

    Abstract: An electron image projector for transferring mask patterns onto a semiconductor wafer comprises a patterned photo-emissive cathode mask (1) and a target (3) such as a semiconductor wafer (11) coated with an electron sensitive resist (10). Accelerated by a uniform electric field E and focussed by a uniform magnetic field H a patterned electron beam is projected from the cathode onto the target with unity magnification. The electric field E is at least mainly established between the cathode and the target A foil is provided for protecting the photocathode against poisoning by gas liberated from the target upon electron beam bombardement. To avoid adversely influencing the imaging electron beams the foil may be constituted as a metal foil with a thickness of about 0,1 .mu.m for 25 kV electrons.

    Environmental SEM with a multiple fields for improved secondary electron detection
    4.
    发明授权
    Environmental SEM with a multiple fields for improved secondary electron detection 有权
    具有改善二次电子检测的多极场的环境SEM

    公开(公告)号：US06184525B2

    公开(公告)日：2001-02-06

    申请号：US09205441

    申请日：1998-12-04

    Applicant: Karel D. Van Der Mast

    Inventor： Karel D. Van Der Mast

    IPC: H01J3726

    CPC classification number: H01J37/244 ,  H01J2237/2448 ,  H01J2237/2608

    Abstract: Amplification of the current of secondary electrons emanating from the specimen 14 is realized in an ESEM by avalanche-like ionization of the molecules 41 of the gas atmosphere. However, in order to achieve an adequate number of successive ionizations, a comparatively high value of the electric field at the detector electrode 46 is required and, because of the risk of electric breakdowns, the distance between the specimen and the detector electrode may not be smaller than a comparatively large minimum distance. The number of successive ionizations, and hence the current amplification, is thus limited. The invention proposes to configure the electric field of the detector 46, 50, co-operating with the magnetic field 52 of the immersion lens 8 already present in the ionization space, as an electric multipole field. In the case of electric multipoles, at a given field strength on the optical axis the electric field strength outside the optical axis may be substantially higher. Thus, while influencing the primary electron beam slightly only, a strong detector field can be provided so that the secondary electrons to be accelerated receive adequate energy to realize numerous multipole ionizations, and hence a high current amplification in the gas atmosphere around the specimen.

    Abstract translation: 通过气体气氛的分子41的雪崩状电离，在ESEM中实现从样品14发出的二次电子的电流的放大。 然而，为了实现足够数量的连续电离，需要在检测器电极46处具有相当高的电场值，并且由于电击穿的风险，样本和检测器电极之间的距离可能不是 小于比较大的最小距离。 因此，连续电离的数量以及因此的电流放大被限制。 本发明提出了将已经存在于电离空间中的浸没透镜8的磁场52配合的检测器46,50的电场作为电多极场。 在电气多极的情况下，在光轴上的给定场强下，光轴外的电场强度可能显着更高。 因此，在稍微仅影响一次电子束的同时，可以提供强的检测器场，使得待加速的二次电子能够接收足够的能量以实现许多多极电离，从而在样品周围的气体气氛中进行高电流放大。

    Particle-optical apparatus comprising a detector for secondary electrons
    5.
    发明授权
    Particle-optical apparatus comprising a detector for secondary electrons 失效
    粒子光学装置包括用于二次电子的检测器

    公开(公告)号：US5578822A

    公开(公告)日：1996-11-26

    申请号：US419493

    申请日：1995-04-10

    Applicant: Karel D. Van Der Mast ,  Pieter Kruit ,  Kars Z. Troost ,  Alexander Henstra

    Inventor： Karel D. Van Der Mast ,  Pieter Kruit ,  Kars Z. Troost ,  Alexander Henstra

    IPC: H01J37/141 ,  H01J37/244 ,  H01J37/28 ,  H01J37/14

    CPC classification number: H01J37/28 ,  H01J2237/04922 ,  H01J2237/2448

    Abstract: The focusing device 8 for the primary beam in a scanning electron microscope (SEM) consists in known manner of a combination of a magnetic gap lens 34 and a monopole lens 38. The secondary electrons released from the specimen are detected in accordance with the invention by a detector whose deflection unit 52, or the actual detector 64, 66, is arranged in a field-free space between the gap lens and the monopole lens. This space is rendered field-free by a screening plate 44 arranged underneath the gap lens. In order to achieve a high detector efficiency and a large field of vision, the pole tip of the focusing device 8 is provided with an attraction electrode 42 whose potential is higher than that of the specimen.

    Abstract translation: 用于扫描电子显微镜（SEM）中的一次束的聚焦装置8由已知的磁隙透镜34和单极透镜38的组合的方式组成。从样品释放的二次电子根据本发明由 其偏转单元52或实际检测器64,66布置在间隙透镜和单极透镜之间的无场隙空间中的检测器。 通过布置在间隙透镜下方的遮蔽板44使该空间无场地。 为了实现高检测效率和大视野，聚焦装置8的极尖设置有电位高于试样的吸引电极42。

    Charged particle beam apparatus
    6.
    发明授权
    Charged particle beam apparatus 失效
    带电粒子束装置

    公开(公告)号：US4977324A

    公开(公告)日：1990-12-11

    申请号：US344196

    申请日：1989-04-27

    Applicant: Pieter Kruit ,  Karel D. Van Der Mast

    Inventor： Pieter Kruit ,  Karel D. Van Der Mast

    IPC: H01J37/04 ,  H01J37/141

    CPC classification number: H01J37/1416 ,  H01J37/04

    Abstract: A Variable Axis Lens system comprises at least two lenses which are arranged to be radially offset with respect to an optical axis of the apparatus. Because the lenses do not contain iron, the occurrence of disturbing eddy currents can be prevented. The lenses for axis displacement are preferably constructed as single ring conductors, a number of which can be readily arranged in one plane in a partly overlapping fashion. Such a system can also be arranged behind the object. For the lenses for axis displacement use is preferably made of a ceramic superconducting material having a comparatively high temperature coefficient and a comparatively high specific heat in the superconducting phase, so that they can be simply cooled from the outside.

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