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    Automatically adjustable electron microscope
    4.
    发明授权
    Automatically adjustable electron microscope 失效
    自动调节电子显微镜

    公开(公告)号：US4618766A

    公开(公告)日：1986-10-21

    申请号：US773721

    申请日：1985-09-09

    Applicant: Karel D. van der Mast ,  Ulrich Gross

    Inventor： Karel D. van der Mast ,  Ulrich Gross

    IPC: H01J37/22 ,  H01J37/153 ,  H01J37/21 ,  H01J37/26 ,  G01N23/04 ,  G01N23/225

    CPC classification number: H01J37/153 ,  H01J37/21

    Abstract: In order to find criteria for the adjustment of an optimum focus, lens correction, specimen shift and the like, measurements are performed by means of a beam wobbler and the corresponding generation of a variable F(s)=.THETA..vertline.(Xi-Yi+s).vertline.* in order to determine that s-value for which F(s) is a minimum. Using this image shift value is then used to make a correction preferably automatically.

    Abstract translation: 为了找到用于调整最佳焦点，透镜校正，样本移位等的标准，通过波束摆动器执行测量，并且相应地产生变量F（s）= THETA |（Xi-Yi + s）| *，以便确定F（s）最小的s值。 然后使用该图像偏移值来优选地自动进行校正。

    Collection of secondary electrons through the objective lens of a scanning electron microscope
    5.
    发明授权
    Collection of secondary electrons through the objective lens of a scanning electron microscope 有权
    通过扫描电子显微镜的物镜收集二次电子

    公开(公告)号：US06946654B2

    公开(公告)日：2005-09-20

    申请号：US09840558

    申请日：2001-04-23

    Applicant: Robert L. Gerlach ,  Karel D. van der Mast ,  Michael R. Scheinfein

    Inventor： Robert L. Gerlach ,  Karel D. van der Mast ,  Michael R. Scheinfein

    IPC: H01J37/252 ,  G01Q10/04 ,  G01Q30/02 ,  G01Q30/04 ,  H01J37/141 ,  H01J37/244 ,  H01J37/28 ,  G01N23/00 ,  G21K7/00

    CPC classification number: H01J37/141 ,  H01J37/244 ,  H01J37/28 ,  H01J2237/24485

    Abstract: A high resolution scanning electron microscope collects secondary Auger electrons through its objective lens to sensitively determine the chemical make-up with extremely fine positional resolution. The system uses a magnetic high resolution objective lens, such as a snorkel lens or a dual pole magnetic lens which provides an outstanding primary electron beam performance. The Auger electrons are deflected from the path of the primary beam by a transfer spherical capacitor. The primary beam is shielded, by a tube or plates, as it traverses the spherical capacitor to prevent aberration of the primary beam and the external wall of the shield maintains a potential gradient related to that of the spherical capacitor to reduce aberration of the primary electron beam. The coaxial configuration of the primary electron beam and the collected secondary electron beam allows the Auger image to coincide with the SEM view.

    Abstract translation: 高分辨率扫描电子显微镜通过其物镜收集次级俄歇电子，以非常精细的位置分辨率灵敏地确定化学成分。 该系统使用磁性高分辨率物镜，例如浮潜透镜或提供优异的一次电子束性能的双极磁性透镜。 俄歇电子通过转移球形电容器从主光束的路径偏转。 主梁被穿过球形电容器时被管或屏蔽屏蔽，以防止主光束的像差，并且屏蔽的外壁保持与球形电容器相关的电位梯度，以减少初级电子的像差 光束。 一次电子束和收集的二次电子束的同轴配置允许俄歇图与SEM视图一致。

    Environmental SEM with a multiple fields for improved secondary electron detection
    6.
    发明授权
    Environmental SEM with a multiple fields for improved secondary electron detection 有权
    具有改善二次电子检测的多极场的环境SEM

    公开(公告)号：US06184525B2

    公开(公告)日：2001-02-06

    申请号：US09205441

    申请日：1998-12-04

    Applicant: Karel D. Van Der Mast

    Inventor： Karel D. Van Der Mast

    IPC: H01J3726

    CPC classification number: H01J37/244 ,  H01J2237/2448 ,  H01J2237/2608

    Abstract: Amplification of the current of secondary electrons emanating from the specimen 14 is realized in an ESEM by avalanche-like ionization of the molecules 41 of the gas atmosphere. However, in order to achieve an adequate number of successive ionizations, a comparatively high value of the electric field at the detector electrode 46 is required and, because of the risk of electric breakdowns, the distance between the specimen and the detector electrode may not be smaller than a comparatively large minimum distance. The number of successive ionizations, and hence the current amplification, is thus limited. The invention proposes to configure the electric field of the detector 46, 50, co-operating with the magnetic field 52 of the immersion lens 8 already present in the ionization space, as an electric multipole field. In the case of electric multipoles, at a given field strength on the optical axis the electric field strength outside the optical axis may be substantially higher. Thus, while influencing the primary electron beam slightly only, a strong detector field can be provided so that the secondary electrons to be accelerated receive adequate energy to realize numerous multipole ionizations, and hence a high current amplification in the gas atmosphere around the specimen.

    Abstract translation: 通过气体气氛的分子41的雪崩状电离，在ESEM中实现从样品14发出的二次电子的电流的放大。 然而，为了实现足够数量的连续电离，需要在检测器电极46处具有相当高的电场值，并且由于电击穿的风险，样本和检测器电极之间的距离可能不是 小于比较大的最小距离。 因此，连续电离的数量以及因此的电流放大被限制。 本发明提出了将已经存在于电离空间中的浸没透镜8的磁场52配合的检测器46,50的电场作为电多极场。 在电气多极的情况下，在光轴上的给定场强下，光轴外的电场强度可能显着更高。 因此，在稍微仅影响一次电子束的同时，可以提供强的检测器场，使得待加速的二次电子能够接收足够的能量以实现许多多极电离，从而在样品周围的气体气氛中进行高电流放大。

    Particle-optical apparatus comprising a detector for secondary electrons
    7.
    发明授权
    Particle-optical apparatus comprising a detector for secondary electrons 失效
    粒子光学装置包括用于二次电子的检测器

    公开(公告)号：US5578822A

    公开(公告)日：1996-11-26

    申请号：US419493

    申请日：1995-04-10

    Applicant: Karel D. Van Der Mast ,  Pieter Kruit ,  Kars Z. Troost ,  Alexander Henstra

    Inventor： Karel D. Van Der Mast ,  Pieter Kruit ,  Kars Z. Troost ,  Alexander Henstra

    IPC: H01J37/141 ,  H01J37/244 ,  H01J37/28 ,  H01J37/14

    CPC classification number: H01J37/28 ,  H01J2237/04922 ,  H01J2237/2448

    Abstract: The focusing device 8 for the primary beam in a scanning electron microscope (SEM) consists in known manner of a combination of a magnetic gap lens 34 and a monopole lens 38. The secondary electrons released from the specimen are detected in accordance with the invention by a detector whose deflection unit 52, or the actual detector 64, 66, is arranged in a field-free space between the gap lens and the monopole lens. This space is rendered field-free by a screening plate 44 arranged underneath the gap lens. In order to achieve a high detector efficiency and a large field of vision, the pole tip of the focusing device 8 is provided with an attraction electrode 42 whose potential is higher than that of the specimen.

    Abstract translation: 用于扫描电子显微镜（SEM）中的一次束的聚焦装置8由已知的磁隙透镜34和单极透镜38的组合的方式组成。从样品释放的二次电子根据本发明由 其偏转单元52或实际检测器64,66布置在间隙透镜和单极透镜之间的无场隙空间中的检测器。 通过布置在间隙透镜下方的遮蔽板44使该空间无场地。 为了实现高检测效率和大视野，聚焦装置8的极尖设置有电位高于试样的吸引电极42。

    Charged particle beam device
    8.
    发明授权
    Charged particle beam device 失效

    公开(公告)号：US5221844A

    公开(公告)日：1993-06-22

    申请号：US837517

    申请日：1992-02-18

    Applicant: Karel D. van der Mast ,  Alan F. De Jong

    Inventor： Karel D. van der Mast ,  Alan F. De Jong

    IPC: G21K5/04 ,  G01Q30/02 ,  H01J37/153 ,  H01J37/26

    CPC classification number: H01J37/153 ,  H01J37/26 ,  H01J2237/1514

    Abstract: In an electron microscope correction of spherical and chromatic aberration can be achieved in a number of freely adjustable directions by using a multipole correction element whereby a magnetic or electrostatic octupole field, rotatable about the optical axis, or a combined rotatable magnetic and electrostatic quadrupole field is generated. A corrected overall image can be obtained by combination of images successively corrected in different directions. In the case of holographic images, correction in the direction perpendicular to the line direction in the hologram enhances the accuracy of phase determination. A correction element of this kind, having comparatively small dimensions of from 1 to 2 cm, can be simply mounted, notably in a transmission electron microscope, in a space provided for the stigmator.

    Charged particle beam apparatus
    9.
    发明授权
    Charged particle beam apparatus 失效
    带电粒子束装置

    公开(公告)号：US4977324A

    公开(公告)日：1990-12-11

    申请号：US344196

    申请日：1989-04-27

    Applicant: Pieter Kruit ,  Karel D. Van Der Mast

    Inventor： Pieter Kruit ,  Karel D. Van Der Mast

    IPC: H01J37/04 ,  H01J37/141

    CPC classification number: H01J37/1416 ,  H01J37/04

    Abstract: A Variable Axis Lens system comprises at least two lenses which are arranged to be radially offset with respect to an optical axis of the apparatus. Because the lenses do not contain iron, the occurrence of disturbing eddy currents can be prevented. The lenses for axis displacement are preferably constructed as single ring conductors, a number of which can be readily arranged in one plane in a partly overlapping fashion. Such a system can also be arranged behind the object. For the lenses for axis displacement use is preferably made of a ceramic superconducting material having a comparatively high temperature coefficient and a comparatively high specific heat in the superconducting phase, so that they can be simply cooled from the outside.

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