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    Sputtering apparatus and an ion source
    1.
    发明授权
    Sputtering apparatus and an ion source 失效
    溅射装置和离子源

    公开(公告)号：US5288386A

    公开(公告)日：1994-02-22

    申请号：US913927

    申请日：1992-07-17

    申请人： Kenichi Yanagi ,  Mitsuo Kato ,  Kazuya Tsurusaki ,  Toshio Taguchi ,  Kenji Atarashiya ,  Tadashi Rokkaku ,  Ichiro Yamashita

    发明人： Kenichi Yanagi ,  Mitsuo Kato ,  Kazuya Tsurusaki ,  Toshio Taguchi ,  Kenji Atarashiya ,  Tadashi Rokkaku ,  Ichiro Yamashita

    IPC分类号： H01J27/08 ,  H01J27/18 ,  H01J37/08 ,  H01J37/317 ,  C23C14/35

    CPC分类号： H01J27/08 ,  H01J27/18 ,  H01J37/08 ,  H01J37/3178 ,  H01J2237/0822

    摘要： A sputtering apparatus including two electrodes, a sputtering target disposed on one of the electrodes, and a gas supply for supplying a discharge gas in a vacuum to produce an electric discharge between the two electrodes and whereby particles sputtered from the target due to impact thereon of ions produced by the discharge, are deposited on a substrate. The target disposed on one electrode is formed into an elongated band and the other electrode is disposed so as to enclose the target. The other electrode is also provided with a magnet for producing a magnetic field thereon, and further includes a narrow elongated slot which defines a narrow sputter particle outlet. The narrow sputter particle outlet permits a pressure to exist near the electrical discharge which is higher than the pressure near the substrate. According to a preferred embodiment, the sputtering apparatus has an ion source combined integrally therewith.

    摘要翻译： 一种溅射装置，包括两个电极，设置在一个电极上的溅射靶，以及用于在真空中供应放电气体以在两个电极之间产生放电的气体源，由此由于其上的冲击而从靶溅射的颗粒 通过放电产生的离子沉积在基底上。 设置在一个电极上的靶被形成为细长带，并且另一个电极被设置成包围靶。 另一个电极还设置有用于在其上产生磁场的磁体，并且还包括限定窄的溅射颗粒出口的窄的细长槽。 窄的溅射粒子出口允许在高于衬底附近的压力的放电附近存在压力。 根据优选实施例，溅射装置具有与其一体地组合的离子源。

    DC or HF ion source
    2.
    发明授权
    DC or HF ion source 失效
    DC或HF离子源

    公开(公告)号：US5369337A

    公开(公告)日：1994-11-29

    申请号：US104899

    申请日：1993-08-12

    申请人： Kenichi Yanagi ,  Mitsuo Kato ,  Kazuya Tsurusaki ,  Toshio Taguchi ,  Kenji Atarashiya ,  Tadashi Rokkaku ,  Ichiro Yamashita

    发明人： Kenichi Yanagi ,  Mitsuo Kato ,  Kazuya Tsurusaki ,  Toshio Taguchi ,  Kenji Atarashiya ,  Tadashi Rokkaku ,  Ichiro Yamashita

    IPC分类号： H01J27/08 ,  H01J27/18 ,  H01J37/08 ,  H01J37/317 ,  H01J27/02

    CPC分类号： H01J27/08 ,  H01J27/18 ,  H01J37/08 ,  H01J37/3178 ,  H01J2237/0822

    摘要： A DC or high frequency ion source comprising a hollow cathode and a substantially hollow anode for applying a DC or alternating voltage; a gas inlet disposed at a first side of the cathode for supplying a discharge gas into the cathode; a cathode heater disposed between the anode and the cathode; a magnet disposed adjacent the anode to thereby improve the uniformity of a plasma; an ion extraction outlet disposed at a second side of the cathode opposite to the gas inlet and having an elongated rectangular shape; and an ion extraction electrode and an acceleration electrode for controlling the energy of extracted ions. Both the anode and cathode comprise substantially hollow boxes. The cathode includes an elongated rectangular cross section and is disposed inside the substantially hollow anode. The ion extraction electrode and the acceleration electrode have an elongated rectangular shape and an opening coextensive with the ion extraction outlet. The ion extraction electrode and the acceleration electrode are disposed adjacent, and aligned with, the ion extraction outlet. The ion source can be formed with an arcuate shape to accommodate round objects. The ion source can also be formed integrally with a sputtering device.

    摘要翻译： 一种DC或高频离子源，包括中空阴极和用于施加DC或交流电压的基本中空的阳极; 设置在阴极的第一侧的气体入口，用于向阴极供应放电气体; 设置在阳极和阴极之间的阴极加热器; 设置在阳极附近的磁体，从而提高等离子体的均匀性; 离子提取出口，设置在与气体入口相对的阴极的第二侧，并且具有细长的矩形形状; 以及用于控制提取的离子的能量的离子提取电极和加速电极。 阳极和阴极都包括基本上空心的盒子。 阴极包括细长的矩形横截面并且设置在基本上空心的阳极内。 离子提取电极和加速电极具有细长的矩形形状和与离子提取出口共同延伸的开口。 离子提取电极和加速电极被设置成与离子提取出口相邻并对齐。 离子源可以形成为弓形以容纳圆形物体。 离子源也可以与溅射装置一体地形成。

    METHOD FOR MANUFACTURING INSPECTION PROBE
    4.
    发明申请
    METHOD FOR MANUFACTURING INSPECTION PROBE 审中-公开
    制造检验探针的方法

    公开(公告)号：US20130313234A1

    公开(公告)日：2013-11-28

    申请号：US13979431

    申请日：2012-01-12

    申请人： Tadashi Rokkaku ,  Hisayoshi Kasahara

    发明人： Tadashi Rokkaku ,  Hisayoshi Kasahara

    IPC分类号： G01R1/067 ,  B23K26/32

    CPC分类号： B23K26/323 ,  B23K26/24 ,  B23K26/26 ,  B23K33/006 ,  B23K2101/32 ,  B23K2101/34 ,  B23K2101/38 ,  B23K2103/08 ,  B23K2103/12 ,  B23K2103/18 ,  G01R1/06755 ,  G01R1/06761 ,  G01R1/07357 ,  G01R3/00

    摘要： This is to provide a method for manufacturing an inspection probe in which qualities of a bonded portion of the inspection probe constituted by bonding wire rods including different metals are improved. The method for manufacturing an inspection probe is configured by bonding a first wire rod 110 and a second wire rod 120, at least one of which has an inspection contact portion at a tip thereof, performing laser welding by irradiating laser beam to outer circumferential surfaces of the first wire rod and the second wire rod with different energy quantities, and then, polishing the outer circumferential surfaces.

    摘要翻译： 这是提供一种用于制造检查探针的方法，其中检查探针的接合部分的质量由接合包括不同金属的线材构成。 检查用探针的制造方法通过将第一线材110和第二线材120接合而构成，第一线材110和第二线材120中的至少一方在前端具有检查接触部，通过将激光照射到外周面的激光焊接 第一线材和第二线材具有不同的能量，然后抛光外圆周表面。

    Chip disposer
    5.
    发明授权
    Chip disposer 失效
    芯片处理器

    公开(公告)号：US4664572A

    公开(公告)日：1987-05-12

    申请号：US845248

    申请日：1986-03-28

    申请人： Tadashi Rokkaku ,  Kazeushi Sugitani

    发明人： Tadashi Rokkaku ,  Kazeushi Sugitani

    IPC分类号： B23Q11/00 ,  B23B47/34

    CPC分类号： B23Q11/0064 ,  Y02P70/171 ,  Y10S29/095 ,  Y10T408/50 ,  Y10T408/554 ,  Y10T409/304088

    摘要： An improved chip disposer which removes chips or iron chips produced from a machine tool by using magnetic force is disclosed. The chip disposer includes an extension shaft which is detachably mounted to a main shaft of the machine tool, an outer tube which is rotatably fitted to the extension shaft, a mechanism for preventing rotation of the outer tube in respect to a head of the main shaft when the extension shaft is mounted to the main shaft, a mechanism for positioning the extension shaft with regard to the outer shaft in a predetermined rotational angle, a plurality of permanent magnets disposed in a ring in an end of the outer tubes so that the same poles of the adjacent magnets are opposed to each other through attracting rods, respectively, and a plurality of permanent magnets disposed in a ring around the extension shaft so that the S- and N-poles thereof are alternately opposed to inner peripheries of the plurality of attracting rods, whereby a relative position of the permanent magnets in the end of the outer tube and the permanent magnets around the extension shaft is changed in response to normal rotation and reverse rotation of the main shaft to turn on and off attractive force.

    摘要翻译： 公开了一种通过使用磁力除去由机床产生的芯片或铁芯的改进的芯片处理器。 芯片处理机包括可拆卸地安装在机床的主轴上的延伸轴，可旋转地装配到延伸轴的外管，用于防止外管相对于主轴的头部旋转的机构 当延长轴安装到主轴上时，用于将延伸轴相对于外轴以预定旋转角度定位的机构，多个永久磁铁设置在外管的端部中的环中，使得其相同 相邻磁铁的极分别通过吸引杆彼此相对，并且多个永久磁铁分别围绕延伸轴设置在环中，使得其S极和N极交替地与多个磁体的内周面相对 吸引棒，由此永磁体在外管的端部和围绕延长轴的永磁体的相对位置响应于正常而改变 主轴的旋转和反向旋转来打开和关闭吸引力。

    Helical guide apparatus usable for a gear shaper
    7.
    发明授权
    Helical guide apparatus usable for a gear shaper 失效
    可用于齿轮整形器的螺旋导向装置

    公开(公告)号：US4695209A

    公开(公告)日：1987-09-22

    申请号：US888973

    申请日：1986-07-21

    申请人： Takayo Noguchi ,  Yoichi Togawa ,  Tsuneo Nishimoto ,  Yoshiharu Tonohara ,  Tadashi Rokkaku ,  Seigo Nakai ,  Michio Araki ,  Kahei Kitano

    发明人： Takayo Noguchi ,  Yoichi Togawa ,  Tsuneo Nishimoto ,  Yoshiharu Tonohara ,  Tadashi Rokkaku ,  Seigo Nakai ,  Michio Araki ,  Kahei Kitano

    IPC分类号： B23F23/00 ,  B23F5/16 ,  B23F23/12 ,  B23F9/04

    CPC分类号： B23F5/16 ,  B23F23/1287 ,  Y10T409/106519 ,  Y10T409/109063 ,  Y10T409/109381 ,  Y10T74/1804

    摘要： The helical guide apparatus includes a main spindle, a male pattern, a first female pattern and a second female pattern which are operatively associated with one another. As the main spindle adapted to reciprocably move in the axial direction and rotate in the circumferential direction is reciprocably driven in the axial direction by first reciprocable driving means, it carries out reciprocable rotational movement in accordance with a lead which is determined by a combination of the first helical projection on the male pattern and the first helical recess on the first female pattern. Then, the first female pattern is caused to carry out reciprocable movement in the axial direction of the main spindle in synchronization with reciprocable movement of the main spindle with the aid of second reciprocable driving means whereby it carries out reciprocable rotational movement in accordance with a lead which is determined by a combination of the second helical projection on the first female pattern and the second helical recess on the second female pattern. Reciprocable rotational movement of the first female pattern is combined with reciprocable rotational movement caused by reciprocable movement of the main spindle. Any required helical angle can be steplessly determined prior to gear cutting operation.

    摘要翻译： 螺旋引导装置包括彼此可操作地相关联的主轴，凸形图案，第一凹形图案和第二凹形图案。 由于主轴适于在轴向方向上往复移动并沿圆周方向旋转，所以通过第一往复运动驱动装置在轴向方向上可往复地驱动，它根据导线执行往复运动，该导程由 阳图案上的第一螺旋突起和第一阴图案上的第一螺旋凹槽。 然后，借助于第二往复运动驱动装置，第一阴模与主轴的轴向方向同步地与主轴的轴向方向一起进行往复移动，由此根据导向件进行往复运动 其由第一阴图案上的第二螺旋突起和第二阴图案上的第二螺旋凹槽的组合决定。 第一阴型图案的可往复旋转运动与由主轴的往复运动引起的往复运动的旋转运动组合。 在齿轮切割操作之前，可以无级地确定任何所需的螺旋角。