摘要:
A balancer of a reciprocating machine having crank mechanisms includes an adjusting weight having one end supported by a reciprocating portion of a crank mechanism for the balancer. An adjusting weight support rotatably supports the other end of the adjusting weight with respect to a stationary portion of a body frame. The adjusting weight support is equipped with a weight support position altering mechanism for permitting alteration of the support position of the adjusting weight.
摘要:
A diffusion-agent composition including a borate ester (A); a polyhydric alcohol (B) represented by general formula (1); and an alkoxysilane compound (C). In general formula (1), k represents an integer from 0 to 3, m represents an integer of 1 or more, and R2 and R3 each independently represent a hydrogen atom, a hydroxyl group, a C1-5 alkyl group, or a C1-5 hydroxyalkyl group. When there are a plurality of R2s and R3s, the plurality of R2s and R3s may be the same as or different from one another. When k is 2 or more, the plurality of R2s and R3s always include at least one or more hydroxyl groups or C1-5 hydroxyalkyl groups having 1 to 5 carbon atoms. R4 and R5 each independently represent a hydrogen atom or a C1-3 alkyl group.
摘要:
Provided is a diffusing agent composition used for the printing of a dopant component on a semiconductor substrate, the diffusing agent composition including a silicon compound (A), a dopant component (B), and a non-dopant metal component (C). Among these components, the content of Na contained as the non-dopant metal component (C) is less than 60 ppb relative to the total amount of the composition.
摘要:
A film-forming composition for use in a coating diffusion method, capable of diffusing a dopant at a higher concentration, and further capable of concomitantly forming a silica-based coating film is provided. A film-forming composition for constituting a diffusion film provided for diffusing a dopant element into a silicon wafer, the film-forming composition including: (A) a polymeric silicon compound; (B) an oxide of the dopant element, or a salt including the dopant element; and (C) porogene.
摘要:
A film-forming composition for use in a coating diffusion method, capable of diffusing a dopant at a higher concentration, and further capable of concomitantly forming a silica-based coating film is provided. A film-forming composition for constituting a diffusion film provided for diffusing a dopant element into a silicon wafer, the film-forming composition including: (A) a polymeric silicon compound; (B) an oxide of the dopant element, or a salt including the dopant element; and (C) porogene.
摘要:
A diffusing agent composition contains a condensation product (A) and an impurity diffusion component (B). The condensation product (A) is a reaction product yielded by hydrolyzing an alkoxysilane. The impurity diffusion component (B) is a monoester or diester of phosphoric acid, or a mixture thereof.
摘要:
A diffusing agent composition of an aspect of the invention contains: a condensation product (A) made from a starting material that is an alkoxysilane represented by the following general formula (1):[Chemical Formula 1] R1mSi(OR2)4-m (1) where R1 and R2 are an organic group, a plurality of R1s and R2s included in condensation product are identical or different, and m is 0, 1 or 2,the condensation product including an alkoxysilane where m=0 also including at least one alkoxysilane where m is 1 or 2; an impurity diffusion component (C); and an organic solvent (D).
摘要翻译:本发明的一个方面的扩散剂组合物含有:作为由以下通式(1)表示的烷氧基硅烷的原料制成的缩合产物(A):[化学式1] R 1mSi(OR 2)4-m( 1)其中R1和R2是有机基团,缩合产物中包含的多个R1和R2相同或不同,m为0,1或2,其中m = 0的烷氧基硅烷的缩合产物还包括至少一个 m为1或2的烷氧基硅烷; 杂质扩散成分(C); 和有机溶剂(D)。
摘要:
A mask material composition that is used for diffusion barrier of an impurity diffusing component into a semiconductor substrate includes a siloxane resin (A1) containing a constituent unit represented by the following formula (a1): wherein R1 is a single bond or C1-C5 alkylene group; and R2 is a C6-C20 aryl group.
摘要:
An SiO2-based film-forming composition giving a protective film which, after impurity diffusion, can be easily stripped off and which has a higher protective effect. The film-forming composition is one for forming a protective film which in the diffusion of an impurity into a silicon wafer, serves to partly prevent the impurity diffusion. This film-forming composition comprises a high-molecular silicon compound and a compound having a protective element which undergoes covalent bonding to the element to be diffused in the impurity diffusion and thereby comes to have eight valence electrons. The protective element is preferably gallium or aluminum when phosphorus is used as the element to be diffused, and is preferably tantalum, niobium, arsenic, or antimony when boron is used as the diffusion element.
摘要:
An embodiment of the present invention relates to a diffusing agent composition used in printing an impurity-diffusing component onto a semiconductor substrate, wherein the diffusing agent composition contains: a hydrolysis product of alkoxysilane (A); a component (B) containing at least one selected from the group consisting of a hydrolysis product of alkoxy titanium, a hydrolysis product of alkoxy zirconium, titania fine particle, and zirconia fine particle; an impurity-diffusing component (C); and an organic solvent (D).