公开(公告)号：US06488730B2

公开(公告)日：2002-12-03

申请号：US09850209

申请日：2001-05-07

申请人： Kil Sung Lee ,  Jae Seok Lee ,  Seok Jin Kim ,  Young Ki Lee ,  Tu Won Chang

发明人： Kil Sung Lee ,  Jae Seok Lee ,  Seok Jin Kim ,  Young Ki Lee ,  Tu Won Chang

IPC分类号： B24D300

CPC分类号： H01L21/31053

摘要： The present invention relates to a polishing composition comprising 30 to 99 wt % of deionized water, 0.1 to 50 wt % of powder of metallic oxide and 0.01 to 20 wt % of cyclic amine. This polishing composition can be used in a chemical mechanical polishing of thin films in integrated circuit manufacturing and has an effect of minimizing the occurrence of microscratches on the thin film after polishing. Thereby it can be applied to the manufacturing process of highly integrated circuits such as Shallow Trench Isolation.

摘要翻译： 本发明涉及一种抛光组合物，其包含30-99重量％的去离子水，0.1-50重量％的金属氧化物粉末和0.01-20重量％的环胺。 该抛光组合物可用于集成电路制造中的薄膜的化学机械抛光，并且具有最小化抛光后薄膜上的微细纹差的发生的效果。 因此，它可以应用于诸如浅沟槽隔离的高度集成电路的制造过程。

公开(公告)号：US06364919B1

公开(公告)日：2002-04-02

申请号：US09535865

申请日：2000-03-27

申请人： Kil Sung Lee ,  Jae Seok Lee ,  Seok Jin Kim ,  Tu Won Chang

发明人： Kil Sung Lee ,  Jae Seok Lee ,  Seok Jin Kim ,  Tu Won Chang

IPC分类号： C09K314

CPC分类号： C09G1/02 ,  C01B13/145 ,  C01B33/1417 ,  C01P2004/51 ,  C01P2004/61 ,  C01P2004/62 ,  C01P2006/12 ,  C01P2006/22 ,  C09K3/1463

摘要： Disclosed is a process for preparing metal oxide slurries suitable for the chemical mechanical polishing (CMP) of semiconductor devices. A suspension of metal oxide in water is dispersed at a predetermined pressure through an orifice of a dispersion chamber while two intensifier pumps are used to maintain the pressure applied to the dispersion chamber constantly, resulting in restraining or minimizing the generation of macro particles as large as or larger than 1 &mgr;m. The metal oxide slurries are uniform in particle size with narrow particle size distribution and show excellent polishing performance with a significant reduction in the occurrence frequency of microscratches, so that they are suitable for CMP of ultra-integrated semiconductor devices.

摘要翻译： 公开了一种制备适用于半导体器件的化学机械抛光（CMP）的金属氧化物浆料的方法。 金属氧化物在水中的悬浮液以预定的压力通过分散室的孔分散，同时使用两个增压泵来恒定地施加到分散室上的压力，从而抑制或最小化大颗粒的产生， 或大于1um。 金属氧化物浆料的粒度均匀，粒度分布窄，显示出优异的抛光性能，显着降低了微观尺度的发生频率，因此适用于超集成半导体器件的CMP。

公开(公告)号：US06551367B2

公开(公告)日：2003-04-22

申请号：US09867522

申请日：2001-05-31

申请人： Kil Sung Lee ,  Jae Seok Lee ,  Seok Jin Kim ,  Tu Won Chang

发明人： Kil Sung Lee ,  Jae Seok Lee ,  Seok Jin Kim ,  Tu Won Chang

IPC分类号： C09K314

CPC分类号： C09K3/1463 ,  C09G1/02

摘要： There is disclosed a process for preparing a metal oxide CMP slurry suitable for semiconductor devices, wherein a mixture comprising 1 to 50 weight % of a metal oxide and 50 to 99 weight % of water is mixed in a pre-mixing tank, transferred to a dispersion chamber with the aid of a transfer pump, allowed to have a flow rate of not less than 100 m/sec by pressurization with a high pressure pump, and subjected to counter collision for dispersion through two orifices in the dispersion chamber. The slurry has particles which are narrow in particle size distribution, showing an ultrafine size ranging from 30 to 500 nm. Also, the slurry is not polluted at all during its preparation and shows no tailing phenomena, so that it is preventive of &mgr;-scratching. Therefore, it can be used in the planarization for shallow trench isolation, interlayer dielectrics and inter metal dielectrics through a CMP process.

摘要翻译： 公开了一种制备适用于半导体器件的金属氧化物CMP浆料的方法，其中将包含1至50重量％的金属氧化物和50至99重量％的水的混合物混合在预混合罐中，转移至 借助于输送泵的分散室，通过用高压泵加压使其具有不小于100m /秒的流速，并通过分散室中的两个孔进行反向碰撞以进行分散。 该浆料具有粒径分布窄的粒子，显示出30〜500nm的超细尺寸。 此外，浆料在其制备过程中根本不会被污染，并且不显示拖尾现象，因此可以防止刮擦。 因此，可以通过CMP工艺在浅沟槽隔离，层间电介质和金属间电介质的平面化中使用。

公开(公告)号：US06447694B1

公开(公告)日：2002-09-10

申请号：US09598768

申请日：2000-06-22

申请人： Kil Sung Lee ,  Seok Jin Kim ,  Jae Seok Lee ,  Tu Won Chang

发明人： Kil Sung Lee ,  Seok Jin Kim ,  Jae Seok Lee ,  Tu Won Chang

IPC分类号： C09K1300

CPC分类号： C09G1/02 ,  C09K3/1436 ,  C09K3/1463 ,  H01L21/3212

摘要： Disclosed is a polishing composition which comprises an Al2O3/SiO2 composite-based metal oxide powder, deionized water and an additive, said metal oxide powder comprising an Al2O3/SiO2 composite as an essential component. The polishing composition is superior in removal rate and free of causing microscratches after polishing and thus, suitable for use in the global planarization of device wafer surfaces.

摘要翻译： 公开了一种抛光组合物，其包含Al 2 O 3 / SiO 2复合基金属氧化物粉末，去离子水和添加剂，所述金属氧化物粉末包含Al 2 O 3 / SiO 2复合材料作为必要组分。 抛光组合物在去除速度上优异，并且在抛光后不会引起微细化，因此适用于器件晶片表面的全局平面化。

公开(公告)号：USD696614S1

公开(公告)日：2013-12-31

申请号：US29421640

申请日：2012-08-27

申请人： Moon Hee Lee ,  Jung Gyu Pack ,  Seok Jin Kim ,  Hyung Kwon Choi ,  Young Rae Hong ,  Yune Soo Kim

设计人： Moon Hee Lee ,  Jung Gyu Pack ,  Seok Jin Kim ,  Hyung Kwon Choi ,  Young Rae Hong ,  Yune Soo Kim

公开(公告)号：US20120070328A1

公开(公告)日：2012-03-22

申请号：US12947065

申请日：2010-11-16

申请人： Hang Cheol Cho ,  Jin Young Hwang ,  Seok Jin Kim

发明人： Hang Cheol Cho ,  Jin Young Hwang ,  Seok Jin Kim

IPC分类号： F04C2/00

CPC分类号： F04C2/356 ,  F01C21/0845 ,  F04C2210/14

摘要： A vane pump may include an oval fixed portion of which an outer circumference may be oval, a rotation ring that may be rotatably disposed outside of the oval fixed portion with a gap and in which blade slots may be formed in a predetermined depth along a circular interior circumference of the rotation ring at a predetermined interval from each other, blades of which one end thereof may be slidably inserted into the blade slots respectively and of which the other end slidably contacts an outer surface of the oval fixed portion, an elastic member coupled to the rotation ring and elastically pushing the blades towards the oval fixed portion, and a drive portion connected to the rotation ring and rotating the rotation ring such that oil may be sucked through an expanding space that may be formed between at least two of the blades and oil may be pumped through a shrinking space that may be formed between at least two of the blades.

摘要翻译： 叶片泵可以包括其外周可以是椭圆形的椭圆形固定部分，旋转环可以可旋转地设置在椭圆形固定部分的外侧，具有间隙，并且叶片槽可以沿着圆形形成在预定深度 旋转环的内周彼此间隔预定的间隔，其一端可分别可滑动地插入到刀片槽中，其另一端可滑动地接触椭圆形固定部分的外表面的弹性构件 旋转环并将叶片弹性地推向椭​​圆形固定部分;以及驱动部分，连接到旋转环并旋转旋转环，使得油可以通过可形成在至少两个叶片之间的扩张空间吸入 并且油可以被泵送通过可形成在至少两个叶片之间的收缩空间。

公开(公告)号：US08398388B2

公开(公告)日：2013-03-19

申请号：US12947065

申请日：2010-11-16

申请人： Hang Cheol Cho ,  Jin Young Hwang ,  Seok Jin Kim

发明人： Hang Cheol Cho ,  Jin Young Hwang ,  Seok Jin Kim

IPC分类号： F01C1/00 ,  F03C2/00 ,  F03C4/00 ,  F04C2/00 ,  F04C18/00

CPC分类号： F04C2/356 ,  F01C21/0845 ,  F04C2210/14

摘要： A vane pump may include an oval fixed portion of which an outer circumference may be oval, a rotation ring that may be rotatably disposed outside of the oval fixed portion with a gap and in which blade slots may be formed in a predetermined depth along a circular interior circumference of the rotation ring at a predetermined interval from each other, blades of which one end thereof may be slidably inserted into the blade slots respectively and of which the other end slidably contacts an outer surface of the oval fixed portion, an elastic member coupled to the rotation ring and elastically pushing the blades towards the oval fixed portion, and a drive portion connected to the rotation ring and rotating the rotation ring such that oil may be sucked through an expanding space that may be formed between at least two of the blades and oil may be pumped through a shrinking space that may be formed between at least two of the blades.

摘要翻译： 叶片泵可以包括其外周可以是椭圆形的椭圆形固定部分，旋转环可以可旋转地设置在椭圆形固定部分的外侧，具有间隙，并且叶片槽可以沿着圆形形成在预定深度 旋转环的内周彼此间隔预定的间隔，其一端可分别可滑动地插入到刀片槽中，其另一端可滑动地接触椭圆形固定部分的外表面的弹性构件 旋转环并将叶片弹性地推向椭​​圆形固定部分;以及驱动部分，连接到旋转环并旋转旋转环，使得油可以通过可形成在至少两个叶片之间的扩张空间吸入 并且油可以被泵送通过可形成在至少两个叶片之间的收缩空间。

公开(公告)号：US08470920B2

公开(公告)日：2013-06-25

申请号：US13514667

申请日：2010-02-12

申请人： Sang Min Kwon ,  Seok Jin Kim ,  Tae Keun Lee ,  Woon Ki Chung

发明人： Sang Min Kwon ,  Seok Jin Kim ,  Tae Keun Lee ,  Woon Ki Chung

IPC分类号： C08K3/26

CPC分类号： C08J5/18 ,  C08J2323/10 ,  C08L23/10 ,  C08L67/02 ,  C08L2666/18

摘要： The present invention relates to a polyolefin composition for an interior sheet/film. The polyolefin composition of the present invention for an interior sheet comprises 70 to 99 wt % of polyolefin and 1 to 30 wt % of modified polyethylene terephthalate having a melting point of 130 to 180° C. The polyolefin composition of the present invention is environmentally friendly and has good physical properties such as workability, printing characteristics, and adhesiveness. In addition, sheets having various thicknesses can be produced by extrusion without having to stretch the sheets, and thus the sheets can be used separately or in combination in various application fields.

摘要翻译： 本发明涉及用于内部片/薄膜的聚烯烃组合物。 用于内部片材的本发明的聚烯烃组合物包含70至99重量％的聚烯烃和1至30重量％的熔点为130至180℃的改性聚对苯二甲酸乙二醇酯。本发明的聚烯烃组合物是环境友好的 并且具有良好的物理性能，例如可加工性，印刷特性和粘合性。 此外，可以通过挤出而不必拉伸片材来生产具有各种厚度的片材，因此片材可以在各种应用领域中单独使用或组合使用。

公开(公告)号：US20120235318A1

公开(公告)日：2012-09-20

申请号：US13513888

申请日：2010-12-02

申请人： Sang Min Kwon ,  Seok Jin Kim ,  Tae Keun Lee ,  Woon Ki Chung ,  Sung Bo Yoo

发明人： Sang Min Kwon ,  Seok Jin Kim ,  Tae Keun Lee ,  Woon Ki Chung ,  Sung Bo Yoo

IPC分类号： B29C47/88

CPC分类号： B29C48/914 ,  B29C48/07 ,  B29C48/08 ,  B29C48/12 ,  B29C48/92 ,  B29C2948/92704 ,  B29C2948/92923 ,  B29K2023/0625 ,  B29K2023/0633 ,  B29K2023/12 ,  B29L2007/008

摘要： Provided herein is a method of manufacturing a polyolefin sheet using a circulating belt and a first roller, comprising the steps of: heating polyolefin resin to melt polyolefin; and forming the molten polyolefin into a polyolefin sheet using an extruding die, wherein the circulating belt includes a plurality of second rollers (cooling rollers) which come into contact with an inner side of the circulating belt and are arranged in a circle around the circulating belt running in a circle and which cool the rotating circulating belt; a temperature of the circulating belt is maintained at 0˜30 to cool the polyolefin sheet such that the polyolefin sheet has desired thickness, a temperature of the first roller is set to a specific temperature between 40 and 120, and the temperature of the first roller is maintained in a temperature range of the specific temperature ±5; and a linear speed of the molten polyolefin sheet is substantially equal to a rotation speed of the circulating belt or the first roller to obtain a polyolefin sheet having a thickness of 0.05˜0.45 mm and a width of 1100˜1700 mm The method is advantageous in that a wide-width polyolefin sheet having excellent flatness and a small thickness deviation can be manufactured.

摘要翻译： 本发明提供使用循环带和第一辊制造聚烯烃片材的方法，包括以下步骤：加热聚烯烃树脂以熔化聚烯烃; 以及使用挤出模具将熔融聚烯烃形成聚烯烃片材，其中循环带包括与循环带的内侧接触并围绕循环带布置的多个第二辊（冷却辊） 以循环方式运行，并冷却旋转循环带; 循环带的温度保持在0〜30以冷却聚烯烃片材，使得聚烯烃片材具有期望的厚度，将第一辊子的温度设定在40至120的特定温度，并且第一辊子的温度 保持在特定温度±5℃的温度范围内; 熔融聚烯烃片材的线速度基本上等于循环带或第一辊的转速，得到厚度为0.05〜0.45mm，宽度为1100〜1700mm的聚烯烃片材。该方法有利于 可以制造具有优异的平坦度和小的厚度偏差的宽幅聚烯烃片材。

公开(公告)号：US20100264598A1

公开(公告)日：2010-10-21

申请号：US12742084

申请日：2008-10-29

申请人： Seok Jin Kim ,  Young Ho Ban ,  Kwang Uk Kang

发明人： Seok Jin Kim ,  Young Ho Ban ,  Kwang Uk Kang

IPC分类号： B63H23/32 ,  F16J15/34 ,  F16J15/38

CPC分类号： B63H23/321

摘要： Disclosed is an apparatus (1) for preventing generation of bilge water in a ship. The apparatus includes a cover (7) configured to receive fluid therein, a rotating unit (3) coupled to a shaft (91) so as to be rotated along with the shaft penetrated through the rotating unit, the rotating unit including a first coupler (31). The apparatus further includes a first sealing unit (4) located inside the cover and interposed between one side of the first coupler and one side of the cover, and a sealing piece (6) interposed in a contact interface between the rotating unit and the shaft. The apparatus completely prevents seawater from being introduced into an engine room, therby preventing generation of bilge water and achieving an extended lifespan thereof without damage.

摘要翻译： 公开了一种用于防止在船上产生舱底水的装置（1）。 该装置包括构造成在其中容纳流体的盖子（7），与轴（91）联接的旋转单元（3），以便与穿过旋转单元的轴一起旋转，旋转单元包括第一耦合器 31）。 该装置还包括一个第一密封单元（4），该第一密封单元（4）位于盖子的内部，并且位于第一耦合器的一侧和盖的一侧之间，以及密封件（6），该密封件插入在旋转单元和轴之间的接触界面 。 该装置完全防止海水被引入发动机室，从而防止舱底水的产生并实现其寿命延长而不损坏。