Abstract:
A coordinate measuring unit includes a measuring probe and a processing device configured to compute the shape coordinates of an object to be measured on the basis of an output of the measuring probe. The measuring probe has a first identification code. The processing device includes a first determination portion configured to determine whether the first identification code outputted from the measuring probe is matched with a matching code, and a downstream determination portion configured to identify a second identification code outputted from the measuring probe to thereby recognize the measuring probe when the first identification code is matched with the matching code in the first determination portion and the measuring probe further has the second identification code. The coordinate measuring unit with the aforementioned configuration can efficiently recognize a number of measuring probes.
Abstract:
A contact probe includes a stylus, a spring, a magnetic body, and a permanent magnet. The stylus is displaceable in an X direction and a tip of the stylus makes contact with a measured object. A first end of the spring is fixated and a second end provides spring force along the X direction. A position of the magnetic body is fixated with respect to the stylus. The permanent magnet is arranged separated from the magnetic body so as to generate a magnetic force along the X direction between the magnetic body and the permanent magnet.
Abstract:
A measuring probe includes a stylus, an axial motion mechanism, and a rotary motion mechanism. The axial motion mechanism includes a pair of first diaphragm structures that allows a moving member to be displaced, and the rotary motion mechanism includes a second diaphragm structure that allows a rotating member to be displaced. The second diaphragm structure is disposed between the pair of first diaphragm structures in an axial direction. The respective first diaphragm structures are disposed at a symmetric distance with respect to the second diaphragm structure. This can reduce the length in the axial direction and weight thereof and also reduce shape errors and improve measurement accuracy.
Abstract:
A line image sensor including a light receiving plane on which two or more straight rows of pixels are disposed, the straight rows of pixels capturing images of regular fringes generated from light reflected from an irradiated body in accordance with the amount of light received by each pixel; at least two rows of pixels acquiring images of linear fringes crossing at right angles in two directions among the fringe projected onto the light receiving plane.
Abstract:
A measuring apparatus and a measuring method capable of measuring a surface of an object includes a movable body having a mounting portion on which the object is mounted, and first and second surfaces not coplanar with each other, a first scale portion provided to press the first surface and to measure a first scale position along a first scale axis parallel to a normal direction of the first surface, a second scale portion provided to press the second surface and to measure a second scale position along a second scale axis parallel to a normal direction of the second surface, a first probe having a reference point of position measurement set on a probe axis parallel to the second direction and at an intersection of the first scale axis and the second scale axis, and a second probe measuring a position along the probe axis.
Abstract:
A measuring probe for measuring a screw groove of a relatively movable ball screw includes a light source, an objective lens formed to correspond to the screw groove of the ball screw, arranged to be opposed to the screw groove of the ball screw in a non-contact manner, and configured to emit light from the light source to the screw groove of the ball screw, and a line sensor configured to detect an interference pattern generated by reflected light from the screw groove of the ball screw and reflected light on a surface of the objective lens. This enables high-accuracy measurement of a specified area of a shape of a side surface of a relatively movable work in a non-contact manner.
Abstract:
An image sensor for fringe images of interference fringes and the like in which the optical system has a simpler configuration than that of the conventional line image sensor, and faster detection becomes possible includes a light receiving plane on which two or more straight rows of pixels are disposed, and captures images of regular fringes generated from light reflected from an irradiated body in accordance with the amount of light received by each pixel; among the rows of pixels, at least two rows of pixels are disposed at right angles to each other, and acquires images of linear fringes crossing almost at right angles in two directions among the fringe projected onto the light receiving plane.
Abstract:
An inductive position detector (IPD) for stylus position measurement in a scanning probe comprises a coil board configuration located along a central axis in the probe with a motion volume extending on opposite sides of the coil board configuration. The coil board configuration includes N top rotary sensing coils (RSCs) and a top axial sensing coil configuration (ASCC), and N bottom RSCs and a bottom ASCC. A pair of stylus-coupled conductive disruptors move along Z (axial) and X-Y (rotary) directions in the motion volume. A generating coil (GC) of the coil board configuration generates a changing magnetic flux (e.g., encompassing all or at least part of the disruptors), and coil signals indicate the disruptors and/or stylus positions. Areas of the conductive disruptors may be larger than an area of the generating coil in some implementations, and the conductive disruptors may each comprise a plurality of concentric conductive loops, spirals, etc.
Abstract:
A measuring probe includes a stylus having a contact part, an axial motion mechanism, and a rotary motion mechanism. The axial motion mechanism includes first diaphragm structures and a moving member that allows the contact part to move in an axial direction. The rotary motion mechanism includes a second diaphragm structure and a rotating member that allows the contact part to move along a plane perpendicular to the axial direction. The first diaphragm structures are disposed at a symmetric distance with respect to the second diaphragm structure, and the second diaphragm structure is disposed between the first diaphragm structures in the axial direction. The axial motion mechanism supports the rotary motion mechanism, or the rotary motion mechanism supports the axial motion mechanism.
Abstract:
A stylus support portion moveable in an X direction is arranged separate from a fixed portion. A plate spring has a first end fixated to an end portion of the stylus support portion in an X (+) direction, a second end fixated to the fixed portion, and a principal surface facing the X direction. A plate spring has a first end fixated to an end portion of the stylus support portion in an X (−) direction, a second end fixated to the fixed portion, and a principal surface facing the X direction. A first permanent magnet is provided on the end portion of the stylus support portion in the X (+) direction. A second permanent magnet is provided on the end portion of the stylus support portion in the X (−) direction. A third permanent magnet is provided to the fixed portion so that a magnetic force in the X direction acts on an area between the first permanent magnet and the third permanent magnet. A fourth permanent magnet is provided to the fixed portion so that the magnetic force in the X direction acts on an area between the second permanent magnet and the fourth permanent magnet.