公开(公告)号：US5022977A

公开(公告)日：1991-06-11

申请号：US198500

申请日：1988-05-25

申请人： Morito Matsuoka ,  Ken-ichi Ono

发明人： Morito Matsuoka ,  Ken-ichi Ono

IPC分类号： H01J27/18 ,  H01J37/32

CPC分类号： H01J37/32623 ,  H01J27/18 ,  H01J37/32192 ,  H01J37/32357 ,  H01J37/3266 ,  H01J37/32678 ,  H01J2237/081

摘要： An ion generation apparatus utilizes microwaves and employs the electron cyclotron resonance phenomenon to generate plasma. The plasma is confined in a plasma generation chamber by a mirror field, whereby high density plasma is obtained. A target disposed within the plasma generation chamber is sputtered by the ions in the high density plasma, so that a large number of ions is produced. This ion generation apparatus can be employed in a thin film forming apparatus which forms a thin film on the surface of a substrate by directing the ions and neutral particles to the substrate. An ion extracting grid may be included. Permanent magnets may be disposed at the upper and lower ends of the target disposed in the plasma generation chamber so as to permit the leakage of magnetic flux to the inner surface of the target. This permits the film to be formed at a high rate even when the voltage applied to the target is relatively low.

摘要翻译： PCT No.PCT / JP87 / 00695 Sec。 371日期：1988年5月25日 102（e）日期1988年5月25日PCT提交1987年9月24日PCT公布。 出版物WO88 / 02546 日期：1988年4月7日。离子产生装置利用微波并采用电子回旋共振现象产生等离子体。 等离子体通过镜面场限制在等离子体产生室中，从而获得高密度等离子体。 设置在等离子体发生室内的靶被高密度等离子体中的离子溅射，从而产生大量的离子。 该离子产生装置可以用于通过将离子和中性粒子引导到基底而在基底表面上形成薄膜的薄膜形成装置中。 可以包括离子提取网格。 永磁体可以设置在设置在等离子体产生室中的靶的上端和下端，以允许磁通量泄漏到靶的内表面。 这使得即使当施加到目标的电压相对较低时也能以高速率形成膜。

公开(公告)号：US4941915A

公开(公告)日：1990-07-17

申请号：US307342

申请日：1989-02-07

申请人： Morito Matsuoka ,  Ken'ichi Ono

发明人： Morito Matsuoka ,  Ken'ichi Ono

IPC分类号： C23C14/32 ,  C23C14/35 ,  H01J37/08

CPC分类号： C23C14/352 ,  C23C14/32 ,  H01J37/08

摘要： A thin film forming apparatus comprising a plasma generating chamber into which is introduced a gas to generate plasma; a first target and a second target which are made of a material to be sputtered and are disposed in the vicinity of both end portions of interior of the plasma generating chamber, respectively, at least one of the first and second targets having the form of a cylinder; at least one power supply for applying a negative potential to the first and second targets; an electromagnet adapted to establish the magnetic field within the plasma generating chamber and inducing the magnetic flux leaving one of the first and second targets and entering the other; and a specimen chamber which incorporates therein a substrate holder and is communicated to one end of the plasma generating chamber on the side of the cylindrical target. High density plasma generated in the plasma generating chamber sputters the targets so that sputtered substances which constituted the targets are deposited over the surface of a substrate, thereby forming a thin film.

公开(公告)号：US20070291273A1

公开(公告)日：2007-12-20

申请号：US11806486

申请日：2007-05-31

申请人： Noriyuki Yokouchi ,  Junji Yoshida ,  Takahisa Harayama ,  Takehiro Fukushima ,  Akihiko Kasukawa ,  Shuichi Tamura ,  Keizou Inagaki ,  Morito Matsuoka

发明人： Noriyuki Yokouchi ,  Junji Yoshida ,  Takahisa Harayama ,  Takehiro Fukushima ,  Akihiko Kasukawa ,  Shuichi Tamura ,  Keizou Inagaki ,  Morito Matsuoka

IPC分类号： G01C19/66

CPC分类号： G01C19/66

摘要： A laser gyro of the present invention includes laser light excitation means (a semiconductor laser device 100) that excites first and second laser lights propagating in the opposite directions to each other in a circular ring-shaped path (an optical path 40), coupling means (optical waveguides 41 and 42) for superimposing the first and the second laser lights, and a photodetector for observing an interference signal generated by the superimposed first and second laser lights.

摘要翻译： 本发明的激光陀螺仪包括：激光激发装置（半导体激光装置100），其激励在圆形环状路径（光路40）中以相反的方向传播的第一和第二激光，耦合装置 （光波导41和42），用于重叠第一和第二激光;以及光电检测器，用于观察由叠加的第一和第二激光产生的干涉信号。

公开(公告)号：US07113701B2

公开(公告)日：2006-09-26

申请号：US10756062

申请日：2004-01-13

申请人： Akira Okada ,  Kazutoshi Kato ,  Kazuto Noguchi ,  Yoshihisa Sakai ,  Takashi Sakamoto ,  Morito Matsuoka ,  Sen-ichi Suzuki

发明人： Akira Okada ,  Kazutoshi Kato ,  Kazuto Noguchi ,  Yoshihisa Sakai ,  Takashi Sakamoto ,  Morito Matsuoka ,  Sen-ichi Suzuki

IPC分类号： H04B10/08 ,  H04B10/00 ,  H04J14/00 ,  H04J14/08

CPC分类号： H04Q11/0005 ,  H04Q11/0062 ,  H04Q11/0066 ,  H04Q2011/0011 ,  H04Q2011/0016 ,  H04Q2011/0032 ,  H04Q2011/0041 ,  H04Q2011/0069 ,  H04Q2011/0073 ,  H04Q2011/0083

摘要： An optical communication equipment comprises shared optical sources 88a–88d to be shared by communication nodes 100a–100d, the wavelengths of optical signals 76a–76d are converted into desired wavelengths λa–λd according to the addressed information of the corresponding optical label signals 77a–77d by using the shared optical sources 88a–88d, and routed to the addressed communication nodes without being converted into electrical signals by using the wavelength routing function of the cyclic-wavelength arrayed-waveguide grating (AWG) 120. The load of each communication node can be reduced by incorporating the multi-wavelength optical sources, which can be shared among individual communication nodes, into the router 80. Further, each communication node is provided with an optical gate or the like for returning the optical signal to the communication node from which the optical signal has been transmitted through the router 80 in order to adjust the transmission time lag between the optical signal and the corresponding optical label signal by the controllers 110a–110d.

摘要翻译： 光通信设备包括由通信节点100a -100d共享的共享光源88a -88d，光信号76a -76d的波长根据所寻址的信息被转换成期望的波长λa-lambdad 通过使用共享光源88a -88d对应的光标签信号77a -77d，并且通过使用循环波长阵列波导光栅的波长路由功能被路由到寻址通信节点而不转换成电信号 AWG）120。 可以通过将可以在各个通信节点之间共享的多波长光源并入到路由器80中来减少每个通信节点的负载。 此外，每个通信节点设置有用于将光信号返回到通过路由器80从其发送光信号的通信节点的光栅等，以便调整光信号和对应的光信号之间的传输时滞 控制器110a-110d的光标签信号。

公开(公告)号：US4874497A

公开(公告)日：1989-10-17

申请号：US210511

申请日：1988-06-08

申请人： Morito Matsuoka ,  Ken'ichi Ono

发明人： Morito Matsuoka ,  Ken'ichi Ono

IPC分类号： H01L21/31 ,  C23C14/34 ,  C23C14/35 ,  H01J37/32 ,  H01L21/203 ,  H01L21/285 ,  H05H1/46

CPC分类号： H01J37/32623 ,  C23C14/352 ,  C23C14/357 ,  H01J37/32357 ,  H01J37/3266 ,  H01J37/32678

摘要： Plasma is generated by electron cyclotron resonance utilizing microwave energy and is confined within a plasma generation chamber by a mirror magnetic field, whereby high density plasma is obtained. Targets are disposed within the plasma generation chamber in the direction perpendicular to the magnetic flux and sputtered by the ions in the high density plasma, whereby a large amount of ions are sputtered and neutral particles produced. The ions and neutral particles are extracted in the direction perpendicular to the magnetic flux and deposited over the surface of a substrate so that it is possible to form a thin film at a high deposition rate without the bombardment of high-energy particles upon the substrate. Furthermore, the ions and neutral particles can be extracted through a slit-like opening formed through the cylindrical wall of the plasma generation chamber, so that a thin film is continuously formed on the surface of a tape-like substrate.

摘要翻译： PCT No.PCT / JP87 / 00759 Sec。 371日期：1988年6月8日 102（e）日期1988年6月8日PCT提交1987年10月8日PCT公布。 出版物WO88 / 02791 日期：1988年04月21日。通过使用微波能量的电子回旋共振产生波片，并通过镜面磁场限制在等离子体发生室内，由此获得高密度等离子体。 目标在垂直于磁通的方向设置在等离子体发生室内，并由高密度等离子体中的离子溅射，由此大量的离子被溅射并产生中性粒子。 离子和中性粒子在与磁通垂直的方向上被提取并沉积在基片的表面上，使得可以以高沉积速率形成薄膜而不会在基底上轰击高能粒子。 此外，离子和中性粒子可以通过通过等离子体产生室的圆筒壁形成的狭缝状开口被提取，从而在带状基底的表面上连续地形成薄膜。

公开(公告)号：US07298974B2

公开(公告)日：2007-11-20

申请号：US10542316

申请日：2004-02-13

申请人： Hiromasa Tanobe ,  Akira Okada ,  Kazuto Noguchi ,  Morito Matsuoka ,  Takashi Sakamoto ,  Osamu Moriwaki

发明人： Hiromasa Tanobe ,  Akira Okada ,  Kazuto Noguchi ,  Morito Matsuoka ,  Takashi Sakamoto ,  Osamu Moriwaki

IPC分类号： H04J14/00 ,  H04B10/20

CPC分类号： H04Q11/0062 ,  H04J14/0227 ,  H04J14/0228 ,  H04J14/0241 ,  H04J14/0282 ,  H04J14/0283 ,  H04J14/0284 ,  H04L41/12 ,  H04Q2011/0011 ,  H04Q2011/0032 ,  H04Q2011/0073 ,  H04Q2011/009

摘要： A fiber optic communication system includes a device of switching and setting wavelength of optical signals used in communication by network-node equipments, which sets the mapping of the wavelength of the optical signal used in communication by the network node equipments, and the input/output ports of an array waveguide grating (AWG), so as to construct a predetermined logical network topology by a plurality of network node equipments which are connected via optical fibers to the array waveguide grating that outputs optical signals inputted to optical input ports, to predetermined optical output ports in accordance with the wavelength thereof. As well as enabling a simple construction, it is easy to realize flexible network design, construction, and operation, and different network groups can also be easily connected to each other. Moreover, a fiber optic communication system having robust security and which can be stably operated even at the time of failure is realized at low cost.

摘要翻译： 光纤通信系统包括：网络节点设备对通信中使用的光信号的波长进行切换和设置的装置，其设置由网络节点设备在通信中使用的光信号的波长的映射，以及输入/输出 阵列波导光栅（AWG）的端口，以便通过光纤连接到输出到光输入端口的光信号的阵列波导光栅的多个网络节点设备构成预定的逻辑网络拓扑到预定的光 输出端口。 实现简单的构建，实现灵活的网络设计，构建和操作是容易的，不同的网络组也可以很容易地相互连接。 此外，即使在故障时也可以以低成本实现具有鲁棒安全性且能够稳定运行的光纤通信系统。

公开(公告)号：US07120358B2

公开(公告)日：2006-10-10

申请号：US10756561

申请日：2004-01-13

申请人： Akira Okada ,  Kazutoshi Kato ,  Kazuto Noguchi ,  Yoshihisa Sakai ,  Takashi Sakamoto ,  Morito Matsuoka ,  Sen-ichi Suzuki

发明人： Akira Okada ,  Kazutoshi Kato ,  Kazuto Noguchi ,  Yoshihisa Sakai ,  Takashi Sakamoto ,  Morito Matsuoka ,  Sen-ichi Suzuki

IPC分类号： H04B10/08 ,  H04J14/00 ,  H04J14/02

CPC分类号： H04Q11/0005 ,  H04Q11/0062 ,  H04Q11/0066 ,  H04Q2011/0011 ,  H04Q2011/0016 ,  H04Q2011/0032 ,  H04Q2011/0041 ,  H04Q2011/0069 ,  H04Q2011/0073 ,  H04Q2011/0083

摘要： An optical communication equipment comprises shared optical sources 88a–88d to be shared by communication nodes 100a–100d, the wavelengths of optical signals 76a–76d are converted into desired wavelengths λa–λd according to the addressed information of the corresponding optical label signals 77a–77d by using the shared optical sources 88a–88d, and routed to the addressed communication nodes without being converted into electrical signals by using the wavelength routing function of the cyclic-wavelength arrayed-waveguide grating (AWG) 120. The load of each communication node can be reduced by incorporating the multi-wavelength optical sources, which can be shared among individual communication nodes, into the router 80. Further, each communication node is provided with an optical gate or the like for returning the optical signal to the communication node from which the optical signal has been transmitted through the router 80 in order to adjust the transmission time lag between the optical signal and the corresponding optical label signal by the controllers 110a–110d.

摘要翻译： 光通信设备包括要由通信节点100a至100d共享的共享光源88a-88d，光信号76a-76d的波长根据所寻址的信息被转换成期望的波长λa-lambdad 通过使用共享光源88a-88d对应的光标签信号77a至77d，并且通过使用循环波长阵列波导光栅的波长路由功能路由到寻址通信节点而不转换成电信号 AWG）120。 可以通过将可以在各个通信节点之间共享的多波长光源并入到路由器80中来减少每个通信节点的负载。 此外，每个通信节点设置有用于将光信号返回到通过路由器80从其发送光信号的通信节点的光栅等，以便调整光信号和对应的光信号之间的传输时滞 控制器110a-110d的光标签信号。

公开(公告)号：US20060051094A1

公开(公告)日：2006-03-09

申请号：US10522831

申请日：2004-02-19

申请人： Osamu Moriwaki ,  Akira Okada ,  Kazuto Noguchi ,  Hiromasa Tanobe ,  Morito Matsuoka ,  Takashi Sakamoto

发明人： Osamu Moriwaki ,  Akira Okada ,  Kazuto Noguchi ,  Hiromasa Tanobe ,  Morito Matsuoka ,  Takashi Sakamoto

IPC分类号： H04J14/02

CPC分类号： H04Q11/0005 ,  H04J14/0209 ,  H04J14/021 ,  H04J14/0212 ,  H04J14/0213 ,  H04J14/0217 ,  H04Q2011/0075

摘要： An optical communication network system and a wavelength-routing device and a communication node therefor are provided which can easily increase the optical paths between communication nodes, which are capable of expanding transmission capacity, and which excel in flexibility and expandability. An optical signal within a wavelength band (λBm±Δλm) which has been transmitted from a predetermined communication node (200-1 through 200-4) is subjected to wavelength-band demultiplexing of the wavelength bands by wavelength-band demultiplexers (220-1 through 220-4) of a wavelength-routing device (210), and is then subjected to wavelength-routing by arrayed-waveguide gratings (241 through 244) according to the wavelength bands, and furthermore is multiplexed with optical signals of other wavelength bands by wavelength-band multiplexers (230-1 through 230-4), and after having been outputted, is transmitted to a communication node. In this manner, by varying the wavelength band (λBm±Δλm) of the wavelength of the optical signal which is transmitted from the communication node, it becomes possible to establish a single optical path between the communication nodes for each wavelength band.

摘要翻译： 提供了一种光通信网络系统和波长路由设备及其通信节点，其可以容易地增加能够扩展传输容量的通信节点之间的光路，并且其灵活性和可扩展性优异。 已经从预定的通信节点（200-1到200-4）发送的波长带（λB> m / D）中的光信号经受波长 波长路由设备（210）的波长带解复用器（220-1至220-4）对带宽进行带宽解复用，然后根据阵列波导光栅（241至244）进行波长路由，根据 并且还通过波长带复用器（230-1至230-4）与其它波长带的光信号进行多路复用，并且在输出之后被发送到通信节点。 以这种方式，通过改变从通信节点发送的光信号的波长的波长带（λB），可以建立 在每个波长带的通信节点之间的单个光路。

公开(公告)号：US06782210B1

公开(公告)日：2004-08-24

申请号：US09644324

申请日：2000-08-23

申请人： Akira Okada ,  Kazutoshi Kato ,  Kazuto Noguchi ,  Yoshihisa Sakai ,  Takashi Sakamoto ,  Morito Matsuoka ,  Sen-ichi Suzuki

发明人： Akira Okada ,  Kazutoshi Kato ,  Kazuto Noguchi ,  Yoshihisa Sakai ,  Takashi Sakamoto ,  Morito Matsuoka ,  Sen-ichi Suzuki

IPC分类号： H04B1000

CPC分类号： H04Q11/0005 ,  H04Q11/0062 ,  H04Q11/0066 ,  H04Q2011/0011 ,  H04Q2011/0016 ,  H04Q2011/0032 ,  H04Q2011/0041 ,  H04Q2011/0069 ,  H04Q2011/0073 ,  H04Q2011/0083

摘要： An optical communication equipment comprises shared optical sources 88a-88d to be shared by communication nodes 100a-100d, the wavelengths of optical signals 76a-76d are converted into desired wavelengths &lgr;a-&lgr;d according to the addressed information of the corresponding optical label signals 77a-77d by using the shared optical sources 88a-88d and routed to the addressed communication nodes without being converted into electrical signals by using the wavelength routing function of the cyclic-wavelength arrayed-waveguide grating (AWG) 120. The load of each communication node can be reduced by incorporating the multi-wavelength optical sources, which can be shared among individual communication nodes, into the router 80. Further, each communication node is provided with an optical gate or the like for returning the optical signal to the communication node from which the optical signal has been transmitted through the router 80 in order to adjust the transmission time lag between the optical signal and the corresponding optical label signal by the controllers 110a-110d.

摘要翻译： 光通信设备包括由通信节点100a-100d共享的共享光源88a-88d，光信号76a-76d的波长根据对应的光标签信号77a-76d的寻址信息被转换成所需波长λa-lambdad 77d，通过使用共享光源88a-88d并通过使用循环波长阵列波导光栅（AWG）120的波长路由功能而被路由到寻址的通信节点而不被转换成电信号。每个通信节点的负载可以 可以通过将可以在各个通信节点之间共享的多波长光源并入到路由器80中来减少。另外，每个通信节点都设置有光栅等，用于将光信号返回到通信节点，通信节点从 光信号已通过路由器80传输，以便调整传输时间间隔 控制器110a-110d的光信号和对应的光标签信号。

公开(公告)号：US07564563B2

公开(公告)日：2009-07-21

申请号：US11806486

申请日：2007-05-31

申请人： Noriyuki Yokouchi ,  Junji Yoshida ,  Takahisa Harayama ,  Takehiro Fukushima ,  Akihiko Kasukawa ,  Shuichi Tamura ,  Keizou Inagaki ,  Morito Matsuoka

发明人： Noriyuki Yokouchi ,  Junji Yoshida ,  Takahisa Harayama ,  Takehiro Fukushima ,  Akihiko Kasukawa ,  Shuichi Tamura ,  Keizou Inagaki ,  Morito Matsuoka

IPC分类号： G01C19/72

CPC分类号： G01C19/66

摘要： A laser gyro of the present invention includes laser light excitation means (a semiconductor laser device 100) that excites first and second laser lights propagating in the opposite directions to each other in a circular ring-shaped path (an optical path 40), coupling means (optical waveguides 41 and 42) for superimposing the first and the second laser lights, and a photodetector for observing an interference signal generated by the superimposed first and second laser lights.

摘要翻译： 本发明的激光陀螺仪包括：激光激发装置（半导体激光装置100），其激励在圆形环状路径（光路40）中以相反的方向传播的第一和第二激光，耦合装置 （光波导41和42），用于重叠第一和第二激光;以及光电检测器，用于观察由叠加的第一和第二激光产生的干涉信号。