公开(公告)号：US20210217638A1

公开(公告)日：2021-07-15

申请号：US17219316

申请日：2021-03-31

Applicant: NHK SPRING CO., LTD.

Inventor： Toshihiko HANAMACHI ,  Arata TATSUMI ,  Kenji SEKIYA ,  Naoya AIKAWA ,  Masaya TAKANASHI

IPC: H01L21/67 ,  C23C16/46 ,  H01J37/32 ,  H05B3/28 ,  C23C16/458 ,  H01J37/34 ,  H01L21/687

Abstract: Disclosed is a stage including a first supporting plate, a second supporting plate under the first supporting plate, a shaft under the second supporting plate and overlapping with the first supporting plate and the second supporting plate, and at least one sheath heater passing through the second supporting plate. The at least one sheath heater is arranged so as to extend on a first surface and a second surface which are parallel to an upper surface of the second supporting plate and which are different in distance from the first supporting plate from each other.

公开(公告)号：US20220151031A1

公开(公告)日：2022-05-12

申请号：US17582848

申请日：2022-01-24

Applicant: NHK SPRING CO., LTD.

Inventor： Naoya KIDA ,  Arata TATSUMI ,  Kenji SEKIYA ,  Naoya AIKAWA ,  Masaya TAKANASHI

IPC: H05B3/56 ,  H05B3/06 ,  H05B3/18

Abstract: A heater includes a folded heater wire, a first insulator provided on the heater wire, a metal sheath provided so as to be in contact with the first insulator, a first insulating member arranged parallel to a first end part of the heater wire taken out from a first end part of the metal sheath, a second insulating member arranged parallel to the first insulating member and parallel to a second end part of the heater wire taken out from the first end part of the metal sheath, a second insulator in contact with the first and the second insulating members and the metal sheath, and a lid member covering the first insulating member, the lid member being in contact with the metal sheath, the first and the second insulating members via the second insulator, and arranged parallel to the first and the second insulating members and the metal sheath.

公开(公告)号：US20200043638A1

公开(公告)日：2020-02-06

申请号：US16598100

申请日：2019-10-10

Applicant: NHK SPRING CO., LTD.

Inventor： Toshihiko HANAMACHI ,  Kenji SEKIYA ,  Go TAKAHARA ,  Naoya AIKAWA ,  Yuta KISARA ,  Arata TATSUMI

IPC: H01C1/03

Abstract: A heather unit including a small diameter sheath heater with improved reliability is provided. The heater unit includes a first substrate having a first joint surface and a second substrate having a second joint surface being joined together, a groove arranged on at least one of the first joint surface or the second joint surface, and a sheath heater arranged inside the groove. The sheath heater includes a metal sheath, a heating wire having a band shape, the heating wire arranged with a space within the metal sheath so as to rotate with respect to an axis direction of the metal sheath, an insulating material arranged in the space, and connection terminals arranged at one end of the metal sheath, the connection terminals electrically connected with both ends of the heating wire respectively.

公开(公告)号：US20190228953A1

公开(公告)日：2019-07-25

申请号：US16367643

申请日：2019-03-28

Applicant: NHK SPRING CO., LTD.

Inventor： Toshihiro TACHIKAWA ,  Naoya AIKAWA ,  Go TAKAHARA ,  Kohei SUZUKI ,  Hiroshi MITSUDA

IPC: H01J37/32 ,  H01L21/67 ,  H01L21/683 ,  H01J37/34 ,  C23C16/46 ,  C23C16/458 ,  C23C14/50

Abstract: Provided is a stage for precisely controlling a substrate temperature and a manufacturing method thereof. Alternatively, a film-forming apparatus or a film-processing apparatus having the stage is provided. The stage includes a base material and a heater layer over the base material. The heater layer has a first insulating film, a heater wire over the first insulating film, and a second insulating film over the heater wire. The heater wire includes more than one kind of metal selected from tungsten, nickel. chromium cobalt, and molybdenum.

公开(公告)号：US20250010425A1

公开(公告)日：2025-01-09

申请号：US18897639

申请日：2024-09-26

Applicant: NHK SPRING CO., LTD.

Inventor： Masahiro FUJII ,  Daisuke FUJINO ,  Yoshihito ARAKI ,  Naoya AIKAWA ,  Nobuyuki FURUGORI ,  Tomonori KASONO

IPC: B24B37/04

Abstract: A polishing device according to an embodiment comprises: a supporting unit for supporting a polishing tool, a stage for holding an object to be polished; a first drive unit for causing the support unit and the stage to move relative to one another along a shape of a polishing surface of the object to be polished, and a second drive unit for causing the support unit to control synchronously with the first drive unit such that one predetermined end of a polishing member attached to the polishing tool faces in a movement direction of the polishing member.

公开(公告)号：US20220155156A1

公开(公告)日：2022-05-19

申请号：US17590780

申请日：2022-02-01

Applicant: NHK SPRING CO., LTD.

Inventor： Naoya KIDA ,  Arata TATSUMI ,  Kenji SEKIYA ,  Naoya AIKAWA ,  Masaya TAKANASHI

IPC: G01K7/06

Abstract: A temperature sensor includes a block body, a first thermocouple, and a second thermocouple. The first thermocouple includes a first strand, a second strand, a first insulator surrounding the first strand and the second strand, and a first metal sheath surrounding the first insulator. The second thermocouple includes a third strand, a fourth strand, a second insulator surrounding the third strand and the fourth strand, and a second metal sheath surrounding the second insulator. An end portion of each of the first thermocouple and the second thermocouple is buried in the block body.

公开(公告)号：US20210235550A1

公开(公告)日：2021-07-29

申请号：US17232519

申请日：2021-04-16

Applicant: NHK SPRING CO., LTD.

Inventor： Toshihiko HANAMACHI ,  Arata TATSUMI ,  Kenji SEKIYA ,  Naoya AIKAWA ,  Masaya TAKANASHI

IPC: H05B3/48 ,  H01L21/67 ,  H01J37/32 ,  C23C14/50 ,  C23C16/458 ,  C23C16/46

Abstract: A heater comprises a folded heater wire, a first insulator provided on the folded heater wire, a metal sheath in contact with a part of the first insulator, a first insulating member arranged in parallel to a part of a first end of the folded heater wire taken out from a first end of the metal sheath, a second insulating member arranged in parallel to a part of the first insulating member and parallel to a part of a second end of the folded heater wire taken out from the first end of the metal sheath, a third insulating member arranged in parallel to a part of the first insulating member and the second insulating member, and bundle the first insulating member and the second insulating member, and a cylindrical member arranged in parallel to a part of the metal sheath and the third insulating member.

公开(公告)号：US20180226285A1

公开(公告)日：2018-08-09

申请号：US15948473

申请日：2018-04-09

Applicant: NHK SPRING CO., LTD.

Inventor： Toshihiko HANAMACHI ,  Naoya AIKAWA

IPC: H01L21/683 ,  H05B3/18 ,  H01L21/67 ,  H05B3/28

CPC classification number: H01L21/6831 ,  H01L21/02 ,  H01L21/3065 ,  H01L21/67017 ,  H01L21/67098 ,  H01L21/67103 ,  H05B3/18 ,  H05B3/28 ,  H05B3/74

Abstract: A heater unit having high in-plane temperature uniformity is provided. A heater unit includes a first heater part, a second heater part controlled independently of the first heater part, a base arranged with a groove in a region between the first heater part and the second heater part, and a cover part arranged at an opening end of the groove and providing a closed space with the groove. In addition, an insulating layer covering the first heater part and the second heater part, and an electrostatic chuck attached to the base via the insulating layer may be further included. In addition, the closed space provided by the cover part and the groove may be a vacuum.