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    Component sensor
    1.
    发明授权
    Component sensor 有权

    公开(公告)号：US11320372B2

    公开(公告)日：2022-05-03

    申请号：US16639148

    申请日：2018-10-25

    Applicant: Panasonic Intellectual Property Management Co., Ltd.

    Inventor： Takafumi Okudo ,  Shinichi Kishimoto ,  Masahiko Ohbayashi ,  Koji Sakai ,  Hiroki Yoshino

    IPC: G01N21/552 ,  G01J3/42 ,  G01J5/08 ,  G01J5/58 ,  G01N21/03 ,  G01N21/27 ,  G01N21/35

    Abstract: A component sensor detects a fluid component with improved accuracy. The component sensor includes tube (3) including tube side (4) that permits inflow of fluid (2), substrate (5) provided to tube (3), first protrusion (6) provided at one end of substrate (5), second protrusion (7) provided at another end of substrate (5), light emitter (9) that emits infrared light (8) toward first protrusion (6), and light receiver (10) that receives infrared light (8). Infrared light (8) entering substrate (5) through first protrusion (6) experiences total reflection inside substrate (5) and exits through second protrusion (7) to head for light receiver (10). Tube side (4) includes two through holes (13) that each extend between an interior and an exterior of tube (3). Substrate (5) is inserted into through holes (13) with a central part of substrate (5) being inside tube (3) and with the one end and the other end of substrate (5) that are respectively provided with first protrusion (6) and second protrusion (7) being outside tube (3).

    MEMS device
    2.
    发明授权
    MEMS device 有权
    MEMS器件

    公开(公告)号：US09550663B2

    公开(公告)日：2017-01-24

    申请号：US14764572

    申请日：2014-02-03

    Applicant: Panasonic Intellectual Property Management Co., Ltd.

    Inventor： Kazuo Goda ,  Takumi Taura ,  Shinichi Kishimoto ,  Hideki Ueda ,  Takeshi Mori

    IPC: H01L29/84 ,  B81B3/00 ,  G01P15/125 ,  G01P15/08

    CPC classification number: B81B3/0008 ,  B81B2201/0235 ,  G01P15/125 ,  G01P2015/0834 ,  H01L29/84

    Abstract: A MEMS device includes a movable section, a frame, a beam, and an electrode substrate. The frame surrounds a surrounding of the movable section. The beam extends from at least a part of the frame, and is connected to the movable section. The electrode substrate includes a fixed electrode, an extended electrode, and a substrate section. The fixed electrode is formed on the electrode substrate in at least a part of a region facing a swing section. The extended electrode is connected to the fixed electrode, and is formed on the electrode substrate in at least a part of a region facing the shaft.

    Abstract translation: MEMS器件包括可移动部分，框架，光束和电极基板。 框架围绕可动部分的周围。 梁从框架的至少一部分延伸，并连接到可移动部分。 电极基板包括固定电极，延伸电极和基板部分。 在面向摆动部的区域的至少一部分中，在电极基板上形成固定电极。 延伸电极连接到固定电极，并且在面向轴的区域的至少一部分中形成在电极基板上。

    Inertial sensor
    3.
    发明授权
    Inertial sensor 有权

    公开(公告)号：US12281899B2

    公开(公告)日：2025-04-22

    申请号：US18001990

    申请日：2021-06-24

    Applicant: Panasonic Intellectual Property Management Co., Ltd.

    Inventor： Shinichi Kishimoto

    IPC: G01C21/16 ,  G01C21/18 ,  G01C21/20

    Abstract: An inertial sensor includes: a plurality of inertial force detection elements each configured to output an output signal corresponding to a detected inertial force; and a processor configured to execute processing relating to the output signal from each of the plurality of inertial force detection elements. The plurality of inertial force detection elements includes: a plurality of main inertial force detection elements configured to detect inertial forces of a plurality of first predetermined axes orthogonal to each other; and a sub-inertial force detection element configured to detect an inertial force of a second predetermined axis which intersects the plurality of first predetermined axes such that the second predetermined axis is orthogonal to none of the plurality of first predetermined axes.

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