公开(公告)号：US20230063938A1

公开(公告)日：2023-03-02

申请号：US17734080

申请日：2022-05-01

Applicant: SEMES CO., LTD.

Inventor： Sang Min HA ,  Sang Hyun SON ,  Young Joo SEO ,  Hyeong Jun CHO ,  Jae Hong KIM

IPC: B41J2/045 ,  B41J2/07 ,  B41J2/125

Abstract: Provided is a jetting driver that can be used for various types of heads with minimal changes. The jetting driver includes: an image board receiving raw image data and generating image data by transforming the raw image data into a form suitable for a type of heads used; and an interface board physically separated from the image board, receiving the image data, and transmitting the image data to the heads through a plurality of channels.

公开(公告)号：US20230211622A1

公开(公告)日：2023-07-06

申请号：US18147910

申请日：2022-12-29

Applicant: SEMES CO., LTD.

Inventor： Sang Min HA ,  Hyeong Jun CHO ,  Jae Hong KIM ,  Sang Hyun SON ,  Young-Joo SEO

IPC: B41M5/00 ,  B41J2/015 ,  C09D11/30

CPC classification number: B41M5/0047 ,  B41J2/015 ,  C09D11/30

Abstract: Disclosed is a substrate processing device which includes a substrate transfer part on which a transfer object is received and a jetting system part includes an ink jet body that jets and prints ink on the transfer object over an upper surface of the substrate transfer part, an ink module transfer part that transfers the ink jet body, an encoder disposed around the ink module transfer part to output a movement signal per unit movement distance of the ink module transfer part, an ink ejection controller that interworks with the ink jet body to control an ink jetting timing of the ink jet body, and a signal splitter that interworks with the encoder to count the movement signal, reset a width of the counted movement signal, and transmit the movement signal, the width of which is reset, to the ink ejection controller.

公开(公告)号：US20240153831A1

公开(公告)日：2024-05-09

申请号：US18382042

申请日：2023-10-19

Applicant: SEMES CO., LTD.

Inventor： Yong Jun SEO ,  Su Jin CHAE ,  Sang Hyun SON ,  Sang Min HA ,  Young Sik BANG ,  Jeong Mo HWANG ,  Dong Ok AHN

IPC: H01L21/66 ,  G01F1/684 ,  G01F1/688 ,  G01F1/696

CPC classification number: H01L22/34 ,  G01F1/6845 ,  G01F1/6888 ,  G01F1/6965

Abstract: An apparatus and method for measuring air currents on the surface of a substrate, which can accurately measure the magnitude and direction of air currents on the surface of a wafer with wafer-type air current measurement sensors, are provided. The apparatus includes: a first air current measurement module measuring a magnitude of air currents on a surface of a first substrate, which is processed in accordance with a semiconductor manufacturing process; a second air current measurement module measuring a movement direction of the air currents; and a power module supplying power to the first and second air current measurement modules, wherein the first air current measurement module, the second air current measurement module, and the power module are mounted on a second substrate, which has the same shape as the first substrate.

公开(公告)号：US20230205235A1

公开(公告)日：2023-06-29

申请号：US18147798

申请日：2022-12-29

Applicant: SEMES CO., LTD.

Inventor： Jae Hong KIM ,  Hyeong Jun CHO ,  Sang Hyun SON ,  Sang Min HA

IPC: G05D7/06 ,  G01F1/667 ,  B08B3/02 ,  B08B13/00

CPC classification number: G05D7/0623 ,  G01F1/667 ,  G05D7/0635 ,  B08B3/02 ,  B08B13/00 ,  H01L21/02057

Abstract: The present invention provides a method for treating a substrate. The method for treating a substrate comprises: a monitoring step of calculating a flow rate of a liquid, comparing the calculated measurement flow rate of the liquid with a set flow rate of the liquid in a normal state, and determining whether an error occurs in the measurement flow rate; and when an error is determined to occur in the measurement flow rate in the monitoring step, a feedback step of performing feedback control of a discharge flow rate of the liquid discharged to the substrate, wherein the feedback step determines a type of the error, and differently performs the feedback control according to the determined type of the error.

公开(公告)号：US20230201860A1

公开(公告)日：2023-06-29

申请号：US18147353

申请日：2022-12-28

Applicant: SEMES CO., LTD.

Inventor： Sang Min HA ,  Hyeong Jun CHO ,  Jae Hong KIM ,  Sang Hyun SON ,  Young-Joo SEO

IPC: B05C5/02

CPC classification number: B05C5/0225 ,  B05C5/0291

Abstract: The present invention provides a substrate processing device. An aspect of the present disclosure is to a substrate processing device and a control method for substrate processing device which can improve a resolution of a printer by determining a discharge time of an ink discharge controller with a higher resolution than a pulse wave generated by an encoder.

公开(公告)号：US20230204648A1

公开(公告)日：2023-06-29

申请号：US17837027

申请日：2022-06-10

Applicant: SEMES CO., LTD.

Inventor： Jun Ho OH ,  Kwang Sup KIM ,  Jae Hong KIM ,  Kyung Hun JANG ,  Young Ho PARK ,  Jong Min LEE ,  Yeon Chul SONG ,  Sang Min HA ,  Ji Hoon YOO ,  Myeong Jun LIM

IPC: G01R29/24

CPC classification number: G01R29/24

Abstract: A static electricity visualization apparatus capable of visually identifying a measured level of static electricity is provided. The static electricity visualization apparatus comprises a photographing unit for generating a first photographed image obtained by photographing a measurement target at a first distance from the measurement target in a first mode, and generating a second photographed image obtained by photographing the measurement target at a second distance from the measurement target in a second mode, a static electricity sensor for measuring a static electricity level of the measurement target at the second distance from the measurement target, a processor for matching the second photographed image with the first photographed image, and an output unit for outputting a static electricity visualization image that visualizes a static electricity level measured by the static electricity sensor on the first photographed image, wherein the static electricity visualization image comprises a color corresponding to the static electricity level of the measurement target measured by the static electricity sensor at a position where the second photographed image matches on the first photographed image.

公开(公告)号：US20230204354A1

公开(公告)日：2023-06-29

申请号：US18067406

申请日：2022-12-16

Applicant: SEMES CO., LTD.

Inventor： Su Jin CHAE ,  Sang Min HA ,  Dong Ok AHN ,  Ho Hyeong LEE ,  Yong-Jun SEO ,  Sang Hyun SON ,  Hyeong Jun CHO

IPC: G01C9/04 ,  G01C9/06

CPC classification number: G01C9/04 ,  G01C9/06

Abstract: The inventive concept provides a portable level measuring apparatus. The portable level measuring apparatus includes a sensor module having a sensor unit configured to measure an inclination of a measuring object and a wireless communication unit configured to transmit a measured information which is measured at the sensor unit; and a portable terminal connected to the sensor module through a wireless communication, and which displays the measured information, and wherein the sensor module combines with the portable terminal through a connector and which pairs immediately if separated with the portable terminal.

公开(公告)号：US20210134628A1

公开(公告)日：2021-05-06

申请号：US17083189

申请日：2020-10-28

Applicant: SEMES CO., LTD.

Inventor： Yong Jun SEO ,  Sang Hyun SON ,  Sang Min HA ,  Dong Ok AHN

IPC: H01L21/67 ,  H01L23/00 ,  H01L21/324 ,  G01C19/00 ,  H01L23/498 ,  G01P15/02

Abstract: Disclosed is an apparatus for precisely monitoring warpage deformation of a substrate. The apparatus includes a sensing unit and a processor. The sensing unit is removably mounted on the substrate and detects information on the warpage deformation of the substrate during a treatment process performed on the substrate. The processor generates warpage state information on the basis of the warpage information detected by the sensing unit.