-
公开(公告)号：US20230138430A1
公开(公告)日：2023-05-04
申请号：US17848389
申请日：2022-06-24
Applicant: SEMES CO., LTD.
Inventor： Ji Hoon YOO , Kwang Sup KIM , Jong Min LEE , Yeon Chul SONG , Jun Ho OH , Young Ho PARK , Myeong Jun LIM
IPC: G06V10/774 , G06V10/764 , G06T7/00 , G06V10/776
Abstract: A method for generating an adaptive training image dataset capable of improving prediction accuracy is provided. The method comprises preparing a first image dataset, wherein the first image dataset includes a plurality of first images and a first class corresponding to each of the plurality of first images, performing a learning algorithm on the first image dataset to generate a first learning model, preparing a second image dataset, wherein the second image dataset includes a plurality of second images and a second class corresponding to each of the plurality of second images, inputting the second image to the first learning model to obtain a prediction class corresponding to the second image, determining which class of image the second image is similar to in case of the second class corresponding to the second image being different from the prediction class, updating the second image dataset by updating a class corresponding to the second image according to the determination result, and performing a learning algorithm on the first image dataset and the updated second image dataset to generate a second learning model.
-
公开(公告)号：US20230206424A1
公开(公告)日：2023-06-29
申请号：US18075412
申请日：2022-12-06
Applicant: SEMES CO., LTD.
Inventor： Myeong Jun LIM , Kwang Sup KIM , Yeon Chul SONG , Ji Hoon YOO , Jong Min LEE , Jun Ho OH , Young Ho PARK
CPC classification number: G06T7/001 , G06T7/11 , G06T7/187 , B41J2/0451 , B41J2/04586 , G06T2207/20081 , G06T2207/20221 , G06T2207/20021 , G06T2207/30168 , G06T2207/30144
Abstract: Provided are a nozzle inspection unit configured to generate a large amount of defect data to improve detection accuracy of a defective nozzle, and a substrate treatment apparatus including the same. The nozzle inspection unit includes: a data collection module configured to collect a plurality of image data related to nozzles; a data classification module configured to classify the plurality of image data according to predefined classes; a data merging module configured to merge good image data related to a normal nozzle and defect image data related to a defective nozzle from among the plurality of image data; a data training module configured to train a plurality of merged image data obtained through the data merging module; and a defect data generation module configured to generate a plurality of final image data from the plurality of merged image data based on the training result.
-
公开(公告)号：US20230203669A1
公开(公告)日：2023-06-29
申请号：US18145138
申请日：2022-12-22
Applicant: SEMES CO., LTD.
Inventor： Shin Hwa KANG , Seung Un OH , Young Ho PARK , Sang Hyeon RYU , Kwang Sup KIM
CPC classification number: C23F1/08 , H01L21/681
Abstract: Disclosed is a method for treating a substrate, on which a plurality of reference marks and a pattern are formed. The method includes a process preparing operation, a location information acquiring operation of acquiring information on an actual location of the pattern, and a process executing operation of supplying a treatment liquid to the substrate, and heating the substrate by irradiating laser light to the pattern on the substrate, to which the treatment liquid is applied, the location information acquiring operation includes acquiring information on actual locations of, among the plurality of reference marks, at least three reference marks, and acquiring information of the actual location of the pattern through the information of the actual locations of the reference marks.
-
公开(公告)号：US20210183660A1
公开(公告)日：2021-06-17
申请号：US17115313
申请日：2020-12-08
Applicant: SEMES CO., LTD.
Inventor： Jung Suk GOH , Jae Seong LEE , Do Youn LIM , Kuk Saeng KIM , Young Dae CHUNG , Tae Shin KIM , Jee Young LEE , Won Geun KIM , Ji Hoon JEONG , Kwang Sup KIM , Pil Kyun HEO , Yoon Ki SA , Ye Rim YEON , Hyun YOON , Do Yeon KIM , Yong Jun SEO , Byeong Geun KIM , Young Je UM
IPC: H01L21/311 , H01L21/66 , H01L21/67
Abstract: Method and apparatus for etching a thin layer including silicon nitride formed on a substrate are disclosed. Etchant including phosphoric acid and water is supplied on the substrate so that a liquid layer is formed on the substrate. The thin layer is etched by reaction between the thin layer and the etchant. Thickness of the liquid layer is measured to detect variation in the thickness of the liquid layer while etching the thin layer. Variation in the concentration of the phosphoric acid and the water is calculated based on the variation in the thickness of the liquid layer. Water is supplied on the substrate based on the variation in the concentration of the phosphoric acid and the water so that the concentration of the phosphoric acid and the water becomes a predetermined value.
-
Patent Agency Ranking
公开(公告)号：US20230207349A1
公开(公告)日：2023-06-29
申请号：US18068675
申请日：2022-12-20
Applicant: SEMES CO., LTD.
Inventor： Kwang Sup KIM , Seung Un OH , Shin Hwa KANG , Sang Hyeon RYU , Young Ho PARK
CPC classification number: H01L21/67115 , B23K26/0823 , B23K26/0869 , B23K2103/56
Abstract: Disclosed is a substrate treating apparatus. The substrate treating apparatus includes a body including an irradiation end, from which laser light is irradiated, a shaft coupled to the body, and a driver that supplies power to the shaft, the heating unit is swung about an axis of the shaft, and the controller moves the irradiation end of the heating unit to a target location on a substrate by adjusting a rotation angle of the heating unit and a rotation angle of the support unit.
-
公开(公告)号：US20230116619A1
公开(公告)日：2023-04-13
申请号：US17743432
申请日：2022-05-12
Applicant: SEMES CO., LTD.
Inventor： Jun Ho OH , Kwang Sup KIM , Jong Min LEE , Yeon Chul SONG , Young Ho PARK , Ji Hoon YOO , Myeong Jun LIM
Abstract: A static electricity visualization system capable of visually confirming the level of the measured static electricity is provided. The static electricity visualization system comprises a first measuring unit for measuring a static electricity level detected at a first position of a measurement target and comprising a first mark, a photographing unit for generating a photographed image by photographing the measurement target, a processor for recognizing a first mark in the photographed image and calculating coordinates of the first mark on the photographed image, and an output unit for outputting a static electricity visualization image that visualizes the static electricity level measured by the first measuring unit in a first mode, wherein the static electricity visualization image comprises a color corresponding to a level of static electricity measured by the first measuring unit on the coordinates of the first mark of the photographed image.
-
公开(公告)号：US20230206415A1
公开(公告)日：2023-06-29
申请号：US18076401
申请日：2022-12-07
Applicant: SEMES CO., LTD.
Inventor： Ji Hoon YOO , Kwang Sup KIM , Jong Min LEE , Yeon Chul SONG , Jun Ho OH , Young Ho PARK , Myeong Jun LIM
IPC: G06T7/00 , H04N1/034 , G06V10/44 , G06V10/762 , G06V10/764
CPC classification number: G06T7/0002 , H04N1/034 , G06V10/44 , G06V10/762 , G06V10/764
Abstract: Provided are a substrate inspecting unit capable of reducing image data labeling work time through training image data set verification and semi-automatic image labeling, and at the same time, improving prediction performance by improving classification accuracy for data sets, and a substrate treating apparatus including the same. The substrate inspecting unit comprises a feature extracting module for extracting a feature from training data included in each class in response to a plurality of training data related to image data of a substrate being classified according to a predefined class, a validity evaluating module for evaluating validity of the feature, a class verifying module for verifying the predefined class, and a data reconstructing module for reconstructing the plurality of training data based on a feature determined as valid and a verified class, wherein reconstructed training data is utilized when inspecting the substrate.
-
公开(公告)号：US20230204648A1
公开(公告)日：2023-06-29
申请号：US17837027
申请日：2022-06-10
Applicant: SEMES CO., LTD.
Inventor： Jun Ho OH , Kwang Sup KIM , Jae Hong KIM , Kyung Hun JANG , Young Ho PARK , Jong Min LEE , Yeon Chul SONG , Sang Min HA , Ji Hoon YOO , Myeong Jun LIM
IPC: G01R29/24
CPC classification number: G01R29/24
Abstract: A static electricity visualization apparatus capable of visually identifying a measured level of static electricity is provided. The static electricity visualization apparatus comprises a photographing unit for generating a first photographed image obtained by photographing a measurement target at a first distance from the measurement target in a first mode, and generating a second photographed image obtained by photographing the measurement target at a second distance from the measurement target in a second mode, a static electricity sensor for measuring a static electricity level of the measurement target at the second distance from the measurement target, a processor for matching the second photographed image with the first photographed image, and an output unit for outputting a static electricity visualization image that visualizes a static electricity level measured by the static electricity sensor on the first photographed image, wherein the static electricity visualization image comprises a color corresponding to the static electricity level of the measurement target measured by the static electricity sensor at a position where the second photographed image matches on the first photographed image.
-
公开(公告)号：US20220072848A1
公开(公告)日：2022-03-10
申请号：US17467266
申请日：2021-09-05
Applicant: SEMES CO., LTD.
Inventor： Kwang Sup KIM , Dong Ok AHN , Jong Min LEE , Jun Ho OH , Ji Hoon YOO , Young Ho PARK
Abstract: Disclosed are an apparatus and a method for quickly and accurately inspecting a droplet on a substrate. An apparatus for inspecting a droplet on a substrate according to an exemplary embodiment of the present disclosure includes: an ultrasonic sensor configured to apply an ultrasonic wave to a droplet on the substrate and detect an ultrasonic wave reflected from the substrate; and a processor configured to acquire a height of the droplet at each position on the substrate on the basis of a signal of the ultrasonic wave reflected from the droplet on the substrate, calculate a volume of the droplet on the basis of the heights of the droplet at the positions, and store or output data in relation to the volume of the droplet. The embodiment of the present disclosure may calculate the volume of the droplet using the ultrasonic wave, thereby quickly and accurately inspecting the droplet on the substrate.
-
-
-
-
-
-
-
-
Search Results
9
records
(took 0.013 seconds)
