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公开(公告)号:US11619885B2
公开(公告)日:2023-04-04
申请号:US17677188
申请日:2022-02-22
Applicant: Samsung Display Co., Ltd.
Inventor: Junho Jo , Youngho Park , Seungyong Song , Youngchul Lee , Youngsuck Choi
IPC: G03F7/20
Abstract: A mask chuck may include a base plate including a central region and an edge region surrounding the central region, a head part including a first surface connected to the edge region of the base plate and configured to move on the edge region to be close to the central region or away from the central region, and a pad part disposed on a second surface of the head part opposite to the first surface of the head part. The edge region may include a first edge region extending in a first direction, a second edge region extending in the first direction and spaced apart from the first edge region in a second direction crossing the first direction, a third edge region extending in the second direction, and a fourth edge region extending in the second direction and spaced apart from the third edge region in the first direction.
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2.
公开(公告)号:US20210343760A1
公开(公告)日:2021-11-04
申请号:US17097388
申请日:2020-11-13
Applicant: Samsung Display Co., Ltd.
Inventor: Junho Jo , Seungwon Kim , Youngho Park , Youngchul Lee
Abstract: An apparatus and a method for manufacturing a mask assembly and a method of manufacturing a display device are provided. The apparatus may include: a tensioning part configured to be spaced apart from a mask frame comprising at least one opening, the tensioning part configured to tension a mask sheet in at least one of a first direction and a second direction, the mask sheet comprising a cell area corresponding to the at least one opening, and a dummy portion arranged outside the cell area; a pressing part configured to correspond to the dummy portion and press the dummy portion in a third direction intersecting a plane in which the first direction and the second direction extend; and a header configured to irradiate a laser beam toward the mask sheet to fix the mask sheet to the mask frame.
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公开(公告)号:US09882129B2
公开(公告)日:2018-01-30
申请号:US15180921
申请日:2016-06-13
Applicant: Samsung Display Co., Ltd.
Inventor: Junho Jo , Euigyu Kim
CPC classification number: H01L51/0011 , C23C14/042 , C23C16/042
Abstract: A mask frame assembly manufactured via an extension-welding process on a stage, the mask frame assembly includes: a mask frame disposed on a stage, the mask frame including a first frame and a second frame having a first length, and a third frame and a fourth frame having a second length, the second length less than the first length. The mask frame assembly also includes a mask having respective ends welded and combined onto the first frame and the second frame. The first frame and the second frame include a slot disposed toward the stage, and at least portions of the first frame and the second frame corresponding to the slot are not in contact with the stage. The third frame and the fourth frame and the stage are in contact with the stage.
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4.
公开(公告)号:US12168823B2
公开(公告)日:2024-12-17
申请号:US17217489
申请日:2021-03-30
Applicant: Samsung Display Co., Ltd.
Inventor: Youngmin Moon , Minho Moon , Sungsoon Im , Junho Jo , Seungyong Song
Abstract: A mask assembly includes a mask frame through which a plurality of openings is defined and a plurality of cell masks disposed to respectively correspond to the cell openings. Each of the cell masks includes a mask main body substantially parallel to a plane defined by a first direction and a second direction crossing the first direction, where a plurality of holes is defined through the mask main body, a bonding portion disposed along an edge of the mask main body, and a tensile portion extending from the bonding portion and disposed spaced apart from the mask main body. The tensile portion includes first tensile portions spaced apart from each other in the first direction and disposed at opposite sides of the mask main body and second tensile portions spaced apart from each other in the second direction and disposed at opposite sides of the mask main body.
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公开(公告)号:US20240102145A1
公开(公告)日:2024-03-28
申请号:US18347104
申请日:2023-07-05
Applicant: Samsung Display Co., Ltd.
Inventor: Heemin Park , Arong Kim , Youngmin Moon , Youngho Park , Areum Lee , Sungsoon Im , Junho Jo
CPC classification number: C23C14/042 , H10K59/1201 , H10K71/166
Abstract: An apparatus for manufacturing a display device includes a mask assembly, and a deposition source that supplies a deposition material toward the mask assembly. The mask assembly includes a mask frame including a first opening, a sheet portion fixed on the mask, overlapping a portion of the first opening in a plan view, and including a plurality of second openings, a plurality of first masks corresponding to the plurality of second openings and fixed on the sheet portion, each including a plurality of third openings, and a second mask arranged on another portion of the first opening defined by an edge of the sheet portion and inner surfaces of the first opening, fixed on the mask frame, and including a plurality of fourth openings.
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公开(公告)号:US20250115987A1
公开(公告)日:2025-04-10
申请号:US18760814
申请日:2024-07-01
Applicant: Samsung Display Co., Ltd.
Inventor: Jeongkuk Kim , Kyongtae Yu , Sungwon Cho , Junho Jo
Abstract: A mask assembly includes: a mask frame having an opening region; and a first mask sheet covering the mask frame. The first mask sheet includes: a first layer including a plurality of first ribs extending in a first direction and a plurality of second ribs extending in a second direction crossing the first direction and having a plurality of first openings defined by the first ribs and the second ribs; a second layer on a first surface of the first layer and extending around the first openings; and a third layer on a second surface of the first layer and having a plurality of pattern holes overlapping the first openings.
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公开(公告)号:US20250027191A1
公开(公告)日:2025-01-23
申请号:US18440424
申请日:2024-02-13
Applicant: Samsung Display Co., Ltd.
Inventor: Jeongkuk Kim , Youngjin Song , Jinwoo Lee , Sugwoo Jung , Sungwon Cho , Junho Jo
Abstract: An apparatus for manufacturing a display apparatus includes a mask assembly, wherein the mask assembly includes a first mask layer including a silicon material, a first portion, and a second portion on the first portion, wherein a first portion opening is disposed in the first portion and a plurality of second portion openings are disposed in the second portion above the first portion opening, and a second mask layer disposed on the first mask layer. The second mask layer includes an inorganic material, wherein the inorganic material has a plurality of second mask openings above the plurality of second portion openings, and wherein, in a cross-sectional view, a width of each of the plurality of second portion openings increases with distance from the second mask layer.
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8.
公开(公告)号:US11776972B2
公开(公告)日:2023-10-03
申请号:US17097388
申请日:2020-11-13
Applicant: Samsung Display Co., Ltd.
Inventor: Junho Jo , Seungwon Kim , Youngho Park , Youngchul Lee
CPC classification number: H01L27/1288 , C23C14/042 , C23C14/54 , H01L27/1285
Abstract: An apparatus and a method for manufacturing a mask assembly and a method of manufacturing a display device are provided. The apparatus may include: a tensioning part configured to be spaced apart from a mask frame comprising at least one opening, the tensioning part configured to tension a mask sheet in at least one of a first direction and a second direction, the mask sheet comprising a cell area corresponding to the at least one opening, and a dummy portion arranged outside the cell area; a pressing part configured to correspond to the dummy portion and press the dummy portion in a third direction intersecting a plane in which the first direction and the second direction extend; and a header configured to irradiate a laser beam toward the mask sheet to fix the mask sheet to the mask frame.
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公开(公告)号:US11287749B2
公开(公告)日:2022-03-29
申请号:US17198469
申请日:2021-03-11
Applicant: Samsung Display Co., Ltd.
Inventor: Junho Jo , Youngho Park , Seungyong Song , Youngchul Lee , Youngsuck Choi
IPC: G03F7/20
Abstract: A mask chuck may include a base plate including a central region and an edge region surrounding the central region, a head part including a first surface connected to the edge region of the base plate and configured to move on the edge region to be close to the central region or away from the central region, and a pad part disposed on a second surface of the head part opposite to the first surface of the head part. The edge region may include a first edge region extending in a first direction, a second edge region extending in the first direction and spaced apart from the first edge region in a second direction crossing the first direction, a third edge region extending in the second direction, and a fourth edge region extending in the second direction and spaced apart from the third edge region in the first direction.
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公开(公告)号:US10897010B2
公开(公告)日:2021-01-19
申请号:US15854661
申请日:2017-12-26
Applicant: Samsung Display Co., Ltd.
Inventor: Junho Jo , Euigyu Kim
Abstract: A mask frame assembly manufactured via an extension-welding process on a stage, the mask frame assembly includes: a mask frame disposed on a stage, the mask frame including a first frame and a second frame having a first length, and a third frame and a fourth frame having a second length, the second length less than the first length. The mask frame assembly also includes a mask having respective ends welded and combined onto the first frame and the second frame. The first frame and the second frame include a slot disposed toward the stage, and at least portions of the first frame and the second frame corresponding to the slot are not in contact with the stage. The third frame and the fourth frame and the stage are in contact with the stage.
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