Mask chuck and mask manufacturing apparatus including same

    公开(公告)号:US11619885B2

    公开(公告)日:2023-04-04

    申请号:US17677188

    申请日:2022-02-22

    Abstract: A mask chuck may include a base plate including a central region and an edge region surrounding the central region, a head part including a first surface connected to the edge region of the base plate and configured to move on the edge region to be close to the central region or away from the central region, and a pad part disposed on a second surface of the head part opposite to the first surface of the head part. The edge region may include a first edge region extending in a first direction, a second edge region extending in the first direction and spaced apart from the first edge region in a second direction crossing the first direction, a third edge region extending in the second direction, and a fourth edge region extending in the second direction and spaced apart from the third edge region in the first direction.

    METHOD AND APPARATUS FOR MANUFACTURING MASK ASSEMBLY AND METHOD OF MANUFACTURING DISPLAY DEVICE

    公开(公告)号:US20210343760A1

    公开(公告)日:2021-11-04

    申请号:US17097388

    申请日:2020-11-13

    Abstract: An apparatus and a method for manufacturing a mask assembly and a method of manufacturing a display device are provided. The apparatus may include: a tensioning part configured to be spaced apart from a mask frame comprising at least one opening, the tensioning part configured to tension a mask sheet in at least one of a first direction and a second direction, the mask sheet comprising a cell area corresponding to the at least one opening, and a dummy portion arranged outside the cell area; a pressing part configured to correspond to the dummy portion and press the dummy portion in a third direction intersecting a plane in which the first direction and the second direction extend; and a header configured to irradiate a laser beam toward the mask sheet to fix the mask sheet to the mask frame.

    Method of manufacturing a mask frame assembly

    公开(公告)号:US09882129B2

    公开(公告)日:2018-01-30

    申请号:US15180921

    申请日:2016-06-13

    Inventor: Junho Jo Euigyu Kim

    CPC classification number: H01L51/0011 C23C14/042 C23C16/042

    Abstract: A mask frame assembly manufactured via an extension-welding process on a stage, the mask frame assembly includes: a mask frame disposed on a stage, the mask frame including a first frame and a second frame having a first length, and a third frame and a fourth frame having a second length, the second length less than the first length. The mask frame assembly also includes a mask having respective ends welded and combined onto the first frame and the second frame. The first frame and the second frame include a slot disposed toward the stage, and at least portions of the first frame and the second frame corresponding to the slot are not in contact with the stage. The third frame and the fourth frame and the stage are in contact with the stage.

    Mask assembly, mask manufactured using the same, and method of manufacturing display panel

    公开(公告)号:US12168823B2

    公开(公告)日:2024-12-17

    申请号:US17217489

    申请日:2021-03-30

    Abstract: A mask assembly includes a mask frame through which a plurality of openings is defined and a plurality of cell masks disposed to respectively correspond to the cell openings. Each of the cell masks includes a mask main body substantially parallel to a plane defined by a first direction and a second direction crossing the first direction, where a plurality of holes is defined through the mask main body, a bonding portion disposed along an edge of the mask main body, and a tensile portion extending from the bonding portion and disposed spaced apart from the mask main body. The tensile portion includes first tensile portions spaced apart from each other in the first direction and disposed at opposite sides of the mask main body and second tensile portions spaced apart from each other in the second direction and disposed at opposite sides of the mask main body.

    METHOD AND APPARATUS FOR MANUFACTURING DISPLAY DEVICE

    公开(公告)号:US20240102145A1

    公开(公告)日:2024-03-28

    申请号:US18347104

    申请日:2023-07-05

    CPC classification number: C23C14/042 H10K59/1201 H10K71/166

    Abstract: An apparatus for manufacturing a display device includes a mask assembly, and a deposition source that supplies a deposition material toward the mask assembly. The mask assembly includes a mask frame including a first opening, a sheet portion fixed on the mask, overlapping a portion of the first opening in a plan view, and including a plurality of second openings, a plurality of first masks corresponding to the plurality of second openings and fixed on the sheet portion, each including a plurality of third openings, and a second mask arranged on another portion of the first opening defined by an edge of the sheet portion and inner surfaces of the first opening, fixed on the mask frame, and including a plurality of fourth openings.

    MASK ASSEMBLY AND METHOD OF MANUFACTURING THE SAME

    公开(公告)号:US20250115987A1

    公开(公告)日:2025-04-10

    申请号:US18760814

    申请日:2024-07-01

    Abstract: A mask assembly includes: a mask frame having an opening region; and a first mask sheet covering the mask frame. The first mask sheet includes: a first layer including a plurality of first ribs extending in a first direction and a plurality of second ribs extending in a second direction crossing the first direction and having a plurality of first openings defined by the first ribs and the second ribs; a second layer on a first surface of the first layer and extending around the first openings; and a third layer on a second surface of the first layer and having a plurality of pattern holes overlapping the first openings.

    APPARATUS FOR MANUFACTURING DISPLAY APPARATUS, METHOD OF MANUFACTURING DISPLAY APPARATUS, AND MASK ASSEMBLY

    公开(公告)号:US20250027191A1

    公开(公告)日:2025-01-23

    申请号:US18440424

    申请日:2024-02-13

    Abstract: An apparatus for manufacturing a display apparatus includes a mask assembly, wherein the mask assembly includes a first mask layer including a silicon material, a first portion, and a second portion on the first portion, wherein a first portion opening is disposed in the first portion and a plurality of second portion openings are disposed in the second portion above the first portion opening, and a second mask layer disposed on the first mask layer. The second mask layer includes an inorganic material, wherein the inorganic material has a plurality of second mask openings above the plurality of second portion openings, and wherein, in a cross-sectional view, a width of each of the plurality of second portion openings increases with distance from the second mask layer.

    Mask chuck and mask manufacturing apparatus including same

    公开(公告)号:US11287749B2

    公开(公告)日:2022-03-29

    申请号:US17198469

    申请日:2021-03-11

    Abstract: A mask chuck may include a base plate including a central region and an edge region surrounding the central region, a head part including a first surface connected to the edge region of the base plate and configured to move on the edge region to be close to the central region or away from the central region, and a pad part disposed on a second surface of the head part opposite to the first surface of the head part. The edge region may include a first edge region extending in a first direction, a second edge region extending in the first direction and spaced apart from the first edge region in a second direction crossing the first direction, a third edge region extending in the second direction, and a fourth edge region extending in the second direction and spaced apart from the third edge region in the first direction.

    Mask frame assembly for thin layer deposition

    公开(公告)号:US10897010B2

    公开(公告)日:2021-01-19

    申请号:US15854661

    申请日:2017-12-26

    Inventor: Junho Jo Euigyu Kim

    Abstract: A mask frame assembly manufactured via an extension-welding process on a stage, the mask frame assembly includes: a mask frame disposed on a stage, the mask frame including a first frame and a second frame having a first length, and a third frame and a fourth frame having a second length, the second length less than the first length. The mask frame assembly also includes a mask having respective ends welded and combined onto the first frame and the second frame. The first frame and the second frame include a slot disposed toward the stage, and at least portions of the first frame and the second frame corresponding to the slot are not in contact with the stage. The third frame and the fourth frame and the stage are in contact with the stage.

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