公开(公告)号：US20030184426A1

公开(公告)日：2003-10-02

申请号：US10309213

申请日：2002-12-04

Applicant: Samsung Electronics Co., Ltd.

Inventor： In-sang Song

IPC: H01F005/00

CPC classification number: H01F17/0006 ,  H01F27/362 ,  H01F27/365 ,  H01L23/5227 ,  H01L23/645 ,  H01L2924/0002 ,  H01L2924/00

Abstract: An inductor element having a high quality factor, wherein the inductor element includes an inductor helically formed on a semiconductor substrate and a magnetic material film on a surface of the inductor for inducing magnetic flux generated by the inductor. The magnetic material film preferably includes a first magnetic material film disposed on a lower surface of the inductor, between the substrate and the inductor, and a second magnetic material film disposed on an upper surface of the inductor. The magnetic material film may be patterned according to a direction along which the magnetic flux flows, for example, radially. Since the magnetic flux proceeding toward the upper part and lower part of the inductor is induced by the magnetic material film, the effect of the magnetic flux generated in the inductor on external circuits may be reduced and the efficiency of the inductor may be enhanced.

Abstract translation: 一种具有高品质因数的电感器元件，其中电感器元件包括螺旋地形成在半导体衬底上的电感器和用于感应由电感器产生的磁通量的电感器表面上的磁性材料膜。 磁性材料膜优选地包括设置在电感器的下表面，衬底和电感器之间的第一磁性材料膜和设置在电感器的上表面上的第二磁性材料膜。 磁性材料膜可以根据例如径向流过磁方向的方向图案化。 由于通过磁性材料膜感应到电感上部和下部的磁通量，所以可以减小在电感器上产生的磁通量对外部电路的影响，从而提高电感器的效率。

公开(公告)号：US20040155306A1

公开(公告)日：2004-08-12

申请号：US10773312

申请日：2004-02-09

Applicant: SAMSUNG ELECTRONICS CO., LTD.

Inventor： Eun-sung Lee ,  Chung-woo Kim ,  In-sang Song ,  Jong-seok Kim ,  Moon-chul Lee

IPC: H01L027/14

CPC classification number: B81B3/0078 ,  B81B2201/014 ,  B81B2203/0118 ,  B81B2203/0307 ,  B81B2203/04 ,  B81C2201/0107 ,  B81C2201/014 ,  H01H59/0009

Abstract: A method for fabricating a MEMS device having a fixing part fixed to a substrate, a connecting part, a driving part, a driving electrode, and contact parts, includes patterning the driving electrode on the substrate; forming an insulation layer on the substrate; patterning the insulation layer and etching a fixing region and a contact region of the insulation layer; forming a metal layer over the substrate; planarizing the metal layer until the insulation layer is exposed; forming a sacrificial layer on the substrate; patterning the sacrificial layer to form an opening exposing a portion of the insulation layer and the metal layer in the fixing region; forming a MEMS structure layer on the sacrificial layer to partially fill the opening, thereby forming sidewalls therein; and selectively removing a portion of the sacrificial layer by etching so that a portion of the sacrificial layer remains in the fixing region.

Abstract translation: 一种用于制造具有固定到基板上的固定部件，连接部件，驱动部件，驱动电极和接触部件的MEMS器件的方法，包括在所述基板上图形化所述驱动电极; 在所述基板上形成绝缘层; 图案化绝缘层并蚀刻绝缘层的固定区域和接触区域; 在衬底上形成金属层; 使金属层平坦化直到绝缘层露出; 在所述基板上形成牺牲层; 图案化牺牲层以形成露出固定区域中绝缘层和金属层的一部分的开口; 在所述牺牲层上形成MEMS结构层以部分地填充所述开口，从而在其中形成侧壁; 并且通过蚀刻选择性地去除牺牲层的一部分，使得牺牲层的一部分保留在固定区域中。

公开(公告)号：US20030183887A1

公开(公告)日：2003-10-02

申请号：US10384495

申请日：2003-03-10

Applicant: Samsung Electronics Co., Ltd.

Inventor： Eun-sung Lee ,  Chung-woo Kim ,  In-sang Song ,  Jong-seok Kim ,  Moon-chul Lee

IPC: H01L021/00 ,  H01L027/14 ,  H01L029/82

CPC classification number: B81B3/0078 ,  B81B2201/014 ,  B81B2203/0118 ,  B81B2203/0307 ,  B81B2203/04 ,  B81C2201/0107 ,  B81C2201/014 ,  H01H59/0009

Abstract: A method for fabricating a MEMS device having a fixing part fixed to a substrate, a connecting part, a driving part, a driving electrode, and contact parts, includes patterning the driving electrode on the substrate; forming an insulation layer on the substrate; patterning the insulation layer and etching a fixing region and a contact region of the insulation layer; forming a metal layer over the substrate; planarizing the metal layer until the insulation layer is exposed; forming a sacrificial layer on the substrate; patterning the sacrificial layer to form an opening exposing a portion of the insulation layer and the metal layer in the fixing region; forming a MEMS structure layer on the sacrificial layer to partially fill the opening, thereby forming sidewalls therein; and selectively removing a portion of the sacrificial layer by etching so that a portion of the sacrificial layer remains in the fixing region.

Abstract translation: 一种用于制造具有固定到基板上的固定部件，连接部件，驱动部件，驱动电极和接触部件的MEMS器件的方法，包括在所述基板上图形化所述驱动电极; 在所述基板上形成绝缘层; 图案化绝缘层并蚀刻绝缘层的固定区域和接触区域; 在衬底上形成金属层; 平坦化金属层直到绝缘层露出; 在所述基板上形成牺牲层; 图案化牺牲层以形成露出固定区域中绝缘层和金属层的一部分的开口; 在所述牺牲层上形成MEMS结构层以部分地填充所述开口，从而在其中形成侧壁; 并且通过蚀刻选择性地去除牺牲层的一部分，使得牺牲层的一部分保留在固定区域中。

公开(公告)号：US20040257171A1

公开(公告)日：2004-12-23

申请号：US10825608

申请日：2004-04-16

Applicant: Samsung Electronics Co., Ltd.

Inventor： Yun-Kwon Park ,  In-sang Song ,  Byeoung-ju Ha ,  Il-jong Song ,  Duck-hwan Kim

IPC: H03H009/70

CPC classification number: H03H9/173 ,  H03H3/02 ,  H03H9/02133 ,  H03H9/0571 ,  H03H9/587 ,  H03H9/706 ,  Y10T29/42

Abstract: An air-gap type film bulk acoustic resonator (FBAR) is created by securing two substrate parts, one providing a resonance structure and the other providing a separation structure, i.e., a cavity. When the two substrate parts are secured, the resonance structure is over the cavity, forming an air gap isolating the resonant structure from the support substrate. The FBAR may be used to form a duplexer, which includes a plurality of resonance structures, a corresponding plurality of cavities, and an isolation part formed between the cavities. The separate creation of the resonance structures and the cavities both simplifies processing and allows additional elements to be readily integrated in the cavities.

Abstract translation: 通过固定两个基板部分，一个提供谐振结构，另一个提供分离结构，即空腔，形成气隙型膜体声波谐振器（FBAR）。 当固定两个基板部分时，谐振结构在空腔之上，形成将谐振结构与支撑基板隔离的气隙。 FBAR可以用于形成双工器，其包括多个谐振结构，相应的多个空腔和形成在腔之间的隔离部分。 谐振结构和空腔的独立创建既简化了处理，并允许额外的元件容易地集成在空腔中。

公开(公告)号：US20040227787A1

公开(公告)日：2004-11-18

申请号：US10686770

申请日：2003-10-17

Applicant: Samsung Electronics Co.,Ltd.

Inventor： In-sang Song

IPC: B41J002/135

CPC classification number: B41J2/14008

Abstract: A printer head using a radio frequency micro-electromechanical system (RF MEMS) sprayer includes an inner pressure chamber having a liquid inlet and a liquid outlet; a cavity resonator surrounding the inner pressure chamber, wherein the cavity resonator inputs a predetermined cavity resonance frequency signal to increase an inner pressure of the inner pressure chamber; a signal transmitting unit for generating the predetermined cavity resonance frequency signal and for inputting the generated cavity resonance frequency signal into the inner pressure chamber through the cavity resonator in response to an external input control signal; and a liquid chamber for supplying a liquid, wherein the liquid inlet and the liquid outlet each extend through the inner pressure chamber and the cavity resonator so that when an inner pressure of the inner pressure chamber is increased by the cavity resonator, a liquid from within the inner pressure chamber is ejected.

Abstract translation: 使用射频微机电系统（RF MEMS）喷雾器的打印机头包括具有液体入口和液体出口的内部压力室; 围绕所述内部压力室的空腔谐振器，其中所述空腔谐振器输入预定的谐振频率信号以增加所述内部压力室的内部压力; 信号发送单元，用于产生预定的腔共振频率信号，并且响应于外部输入控制信号通过空腔谐振器将所产生的空腔谐振频率信号输入到内部压力室; 以及用于供应液体的液体室，其中所述液体入口和所述液体出口各自延伸穿过所述内部压力室和所述空腔谐振器，使得当所述内部压力室的内部压力通过所述空腔谐振器增加时， 内压室被排出。

公开(公告)号：US20040173872A1

公开(公告)日：2004-09-09

申请号：US10706106

申请日：2003-11-13

Applicant: Samsung Electronics Co., Ltd.

Inventor： Young-jun Park ,  In-sang Song ,  In-taek Han

IPC: H01L029/00

CPC classification number: B81B3/0008 ,  B81B2201/018 ,  H01H59/0009

Abstract: Provided is a microelectro mechanical system (MEMS). The provided MEMS switch includes a substrate; a signal line formed on the substrate; a beam deformed by an electrostatic force to electrically switch with the signal line; and a spring type contact unit formed on the signal line to electrically contact the beam and elastically deformed by an external force. Thus, stability of the contact between the contact unit and the beam is improved. In particular, even when the beam or the contact unit under the beam is unbalanced, the contact unit can elastically contact the beam to obtain a stable electrical switching operation.

Abstract translation: 提供了一种微电子机械系统（MEMS）。 所提供的MEMS开关包括基板; 形成在基板上的信号线; 通过静电力变形的电子束与信号线电开关的光束; 以及弹簧式接触单元，形成在信号线上，以电接触梁并通过外力弹性变形。 因此，提高了接触单元和梁之间的接触的稳定性。 特别地，即使当梁或梁下的接触单元不平衡时，接触单元可以弹性地接触梁以获得稳定的电开关操作。

公开(公告)号：US20030214309A1

公开(公告)日：2003-11-20

申请号：US10408779

申请日：2003-04-08

Applicant: Samsung Electronics Co., Ltd.

Inventor： Dong-ha Shim ,  In-sang Song ,  Young-il Kim ,  Sun-hee Park ,  Young-tack Hong ,  Dong-ki Min

IPC: G01R027/04 ,  G01R027/26

CPC classification number: G01R21/00 ,  G01R1/06772

Abstract: An RF power sensor for measuring power for an RF signal using capacitance includes a substrate preferably formed of a semiconductor, such as silicon or of a dielectric substance, a fixture part fixed to the substrate and forming a signal line and ground lines that transmit RF signals, and a bridge connected to the ground lines and floating over the signal line, wherein the bridge is driven by an external driving force, and the external driving force induces capacitance between the bridge and the signal line. Accordingly, power for an RF signal can be measured through the capacitance between the signal line and the bridge. The RF power sensor facilitates matchings, reduces insertion loss, and can be used in a wide bandwidth because it is based on transmission lines having characteristic impedance. Further, high power can be measured depending upon bridge designs.

Abstract translation: 用于测量使用电容的RF信号的功率的RF功率传感器包括优选地由诸如硅或电介质的半导体形成的衬底，固定到衬底并形成信号线的固定部分和发射RF信号的接地线 以及连接到地线并跨越信号线的桥，其中桥由外部驱动力驱动，并且外部驱动力引起桥与信号线之间的电容。 因此，可以通过信号线和桥之间的电容来测量RF信号的功率。 RF功率传感器有助于匹配，减少插入损耗，并且可以在宽带宽中使用，因为它基于具有特征阻抗的传输线。 此外，可以根据桥梁设计来测量高功率。