公开(公告)号：US11940620B2

公开(公告)日：2024-03-26

申请号：US17508224

申请日：2021-10-22

Applicant: Samsung Electronics Co., Ltd.

Inventor： Changsoon Lim ,  Youngdo Kim ,  Daewon Kang ,  Chansoo Kang ,  Hoonseop Kim ,  Sangki Nam ,  Youngduk Suh ,  Donghyub Lee ,  Jonghun Pi

IPC: G02B27/00 ,  B08B7/00 ,  B08B7/04 ,  G01N33/00 ,  G03F7/00 ,  G06T7/00

CPC classification number: G02B27/0006 ,  B08B7/0035 ,  B08B7/04 ,  G01N33/0027 ,  G03F7/70033 ,  G03F7/7085 ,  G03F7/70925 ,  G06T7/001

Abstract: A method of cleaning a collector of an extreme ultraviolet light source system includes introducing the collector separated from the extreme ultraviolet light source system into a chamber; capturing an optical image of a reflective surface of the collector; measuring a contamination level of the reflective surface by comparing the optical image with a prestored standard image; performing a first cleaning operation if the contamination level exceeds a preset first reference value, the first cleaning operation including cleaning the reflective surface by spraying dry ice particles onto the reflective surface; and performing a second cleaning operation if the contamination level is less than or equal to the preset first reference value. The second cleaning operation includes cleaning the reflective surface by radiating atmospheric plasma onto the reflective surface and measuring a microcontamination level and a damage level of the reflective surface.

公开(公告)号：US11705306B2

公开(公告)日：2023-07-18

申请号：US17470337

申请日：2021-09-09

Applicant: Samsung Electronics Co., Ltd.

Inventor： Hyunbae Kim ,  Hyunjae Lee ,  Youngdo Kim ,  Hyejin Kim ,  Sangki Nam ,  Chanhee Park ,  Minho Jung

IPC: H01J37/32

CPC classification number: H01J37/32174 ,  H01J37/32146 ,  H01J2237/002

Abstract: A variable frequency and non-sinusoidal power generator includes a pulse module circuit, a slope module circuit, and first and second cooling systems. The pulse module circuit and the slope module circuit includes control switches, and generates at least one of a output currents and a output voltages by selectively turning on/off the control switches based on control signals. The first and second cooling systems are disposed at first and second sides of the control switches. A bias power having a variable frequency and a non-sinusoidal waveform is generated based on the control signals, at least one of the output currents and the output voltages.

公开(公告)号：US20230109672A1

公开(公告)日：2023-04-13

申请号：US17850257

申请日：2022-06-27

Applicant: SAMSUNG ELECTRONICS CO., LTD.

Inventor： Changsoon Lim ,  Youngdo Kim ,  Daewon Kang ,  Chansoo Kang ,  Kyunghyun Kim ,  Sangki Nam ,  Kyunjin Lee ,  Sungho Jang ,  Jonghun Pi

IPC: H01J37/32

Abstract: An apparatus includes first and second VI sensors, an optical sensor, and an arcing detector. The first VI sensor is disposed in a power filter or on a power supply line connected to a heater disposed in a lower electrode of a process chamber in which a plasma process is performed. The first VI sensor senses a harmonic generated from a first power supply supplying power to the lower electrode and outputs a first signal. The optical sensor senses an intensity of light generated from the process chamber and outputs a second signal. The second VI sensor is disposed on a power supply line connected to an upper electrode and senses a harmonic generated from a second power supply supplying power to the upper electrode and outputs a third signal. The arcing detector determines whether arcing occurs based on one or more of the first, second, and third signals.

公开(公告)号：US12087550B2

公开(公告)日：2024-09-10

申请号：US17874475

申请日：2022-07-27

Applicant: SAMSUNG ELECTRONICS CO., LTD.

Inventor： Vladimir Vsevolodovich Protopopov ,  Vasily Grigorievich Pashkovskiy ,  Chansoo Kang ,  Youngdo Kim ,  Hoonseop Kim ,  Sangki Nam ,  Sejin Oh ,  Changsoon Lim

IPC: H01J37/32

CPC classification number: H01J37/32201 ,  H01J37/32935

Abstract: A device for measuring a density of plasma is provided. The device includes a first sensor configured to measure a microwave spectrum of an input port reflection parameter of plasma, the first sensor having a probe including a conductive material and a flat plate shape, and a second sensor configured to measure an optical signal generated from the plasma, the second sensor being configured to detect the optical signal through the probe of the first sensor.

公开(公告)号：US11996275B2

公开(公告)日：2024-05-28

申请号：US17942368

申请日：2022-09-12

Applicant: SAMSUNG ELECTRONICS CO., LTD.

Inventor： Sungyong Lim ,  Chansoo Kang ,  Youngdo Kim ,  Namkyun Kim ,  Sungyeol Kim ,  Sangki Nam ,  Seungbo Shim ,  Kyungmin Lee

IPC: H01J37/32 ,  G01J1/44

CPC classification number: H01J37/32935 ,  G01J1/44 ,  H01J37/32174 ,  G01J2001/446

Abstract: A diagnostic device for diagnosing distribution of a radical in a plasma processing chamber, the diagnostic device, may include a spectrometer receiving an optical signal through at least one optical channel connected to the plasma processing chamber, and performing spectral analysis on the optical signal in response to a synchronization signal corresponding to each of states of a multi-level pulse applied to the plasma processing chamber and a synchronizer generating the synchronization signal corresponding to each of the states of the multi-level pulse.

公开(公告)号：US20230117953A1

公开(公告)日：2023-04-20

申请号：US17877439

申请日：2022-07-29

Applicant: SAMSUNG ELECTRONICS CO., LTD.

Inventor： Sejin OH ,  Youngdo Kim ,  Sanghun Kim ,  Sungyeol Kim ,  Sangki Nam ,  Taemin Earmme ,  Changyun Lee ,  Seongmoon Ha

IPC: H01J37/32

Abstract: A plasma generator may include a dielectric tube, an inner helical coil surrounding the dielectric tube and configured to generate plasma by forming a stationary wave of at least one of a magnetic field and an electromagnetic wave in the dielectric tube, a variable capacitor configuring a closed loop with the inner helical coil, an outer helical coil surrounding the inner helical coil and magnetically coupled to the inner helical coil, and a radio frequency (RF) power supply configured to provide RF power at a variable frequency to the inner helical coil.

公开(公告)号：US12254842B2

公开(公告)日：2025-03-18

申请号：US18341235

申请日：2023-06-26

Applicant: Samsung Electronics Co., Ltd.

Inventor： Yongkoo Her ,  Youngdo Kim ,  Hyunchang Shin ,  Woonbo Yeo ,  Minwoo Lee ,  Songhee Jung

IPC: G09G3/3275 ,  G09G3/3266

Abstract: An electronic device and a method for driving a plurality of display areas of a display at different driving frequencies are provided. The electronic device can determine a first driving frequency of a first application, and the position of a first portion on which a first execution screen of the first application is to be displayed, determine a second driving frequency of a second application, and the position of a second portion on which a second execution screen of the second application is to be displayed, determine a third driving frequency of a third application, and the position of a third portion on which a third execution screen of the third application is to be displayed, and drive a first area of the display panel based on a first partial scan rate, and drive a second area of the display panel based on a second partial scan rate.

公开(公告)号：US12198638B2

公开(公告)日：2025-01-14

申请号：US18341235

申请日：2023-06-26

Applicant: Samsung Electronics Co., Ltd.

Inventor： Yongkoo Her ,  Youngdo Kim ,  Hyunchang Shin ,  Woonbo Yeo ,  Minwoo Lee ,  Songhee Jung

IPC: G09G3/3275 ,  G09G3/3266

Abstract: An electronic device and a method for driving a plurality of display areas of a display at different driving frequencies are provided. The electronic device can determine a first driving frequency of a first application, and the position of a first portion on which a first execution screen of the first application is to be displayed, determine a second driving frequency of a second application, and the position of a second portion on which a second execution screen of the second application is to be displayed, determine a third driving frequency of a third application, and the position of a third portion on which a third execution screen of the third application is to be displayed, and drive a first area of the display panel based on a first partial scan rate, and drive a second area of the display panel based on a second partial scan rate.

公开(公告)号：US12112721B2

公开(公告)日：2024-10-08

申请号：US17370069

申请日：2021-07-08

Applicant: SAMSUNG ELECTRONICS CO., LTD.

Inventor： Yongkoo Her ,  Youngdo Kim ,  Jungbae Bae ,  Hyunchang Shin ,  Joongyu Lee ,  Songhee Jung ,  Jaeseung Choi

IPC: G09G5/10 ,  G09G3/3233

CPC classification number: G09G5/10 ,  G09G3/3233 ,  G09G2320/064 ,  G09G2354/00

Abstract: Various embodiments disclose a method and an apparatus including a display, a memory including information on a number of duty cycles per one refresh period for emitting light by pixels of the display corresponding to each of a plurality of refresh rates of the display, and a processor, wherein the processor is configured to control the electronic device to perform an operation according to a first number of duty cycles based on the display operating at a first refresh rate, and perform an operation according to a second number of duty cycles based on the display operating at a second refresh rate, wherein the first number is less than the second number based on the first refresh rate being higher than the second refresh rate.

公开(公告)号：US11810505B2

公开(公告)日：2023-11-07

申请号：US17882492

申请日：2022-08-05

Applicant: SAMSUNG ELECTRONICS CO., LTD.

Inventor： Minwoo Lee ,  Seoyoung Lee ,  Juseok Lee ,  Youngdo Kim ,  Sungha Park ,  Woonbo Yeo

IPC: G09G3/3225 ,  G09G3/20

CPC classification number: G09G3/3225 ,  G09G3/20 ,  G09G2310/0267 ,  G09G2310/08 ,  G09G2320/0247 ,  G09G2320/0276 ,  G09G2320/0606 ,  G09G2320/0626 ,  G09G2320/0673 ,  G09G2330/021 ,  G09G2330/028 ,  G09G2340/0435 ,  G09G2360/16

Abstract: An electronic device may include a display panel, a display driver IC (integrated circuit) and a processor, wherein the display driver IC may set an output time (horizontal time) of one of lines constituting the display panel to a first time period, set a number of vertical blank lines for the display panel to a first number, drive the display panel at a first refresh rate corresponding to the first time period and the first number of the vertical blank lines, receive a control signal for changing from the first refresh rate to a second refresh rate from the processor, and set the output time to a second time period or set the number of the vertical blank lines to a second number and drive the display panel based on the control signal, and wherein the display panel may be driven at a second refresh rate while the second time period and the second number of vertical blank lines are being set.