摘要:
The present invention is an online methodology for end point detection for use in a chemical mechanical planarization process which is both robust and inexpensive while overcoming some of the drawbacks of the existing end point detection approaches currently known in the art. The present invention provides a system and method for identifying a significant event in a chemical mechanical planarization process including the steps of decomposing coefficient of friction data acquired from a chemical mechanical planarization process using wavelet-based multiresolution analysis, and applying a sequential probability ratio test for variance on the decomposed data to identify a significant event in the chemical mechanical planarization process.
摘要:
The present invention presents a novel application of a wavelet-based multiscale method in a nanomachining process chemical mechanical planarization (CMP) of wafer fabrication. The invention involves identification of delamination defects of low-k dielectric layers by analyzing the nonstationary acoustic emission (AE) signal collected during copper damascene (Cu-low k) CMP processes. An offline strategy and a moving window-based strategy for online implementation of the wavelet monitoring approach are developed.
摘要:
The present invention presents a novel application of a wavelet-based multiscale method in a nanomachining process chemical mechanical planarization (CMP) of wafer fabrication. The invention involves identification of delamination defects of low-k dielectric layers by analyzing the nonstationary acoustic emission (AE) signal collected during copper damascene (Cu-low k) CMP processes. An offline strategy and a moving window-based strategy for online implementation of the wavelet monitoring approach are developed.
摘要:
The present invention is an online methodology for end point detection for use in a chemical mechanical planarization process which is both robust and inexpensive while overcoming some of the drawbacks of the existing end point detection approaches currently known in the art. The present invention provides a system and method for identifying a significant event in a chemical mechanical planarization process including the steps of decomposing coefficient of friction data acquired from a chemical mechanical planarization process using wavelet-based multiresolution analysis, and applying a sequential probability ratio test for variance on the decomposed data to identify a significant event in the chemical mechanical planarization process.
摘要:
The present invention presents a novel application of a wavelet-based multiscale method in a nanomachining process chemical mechanical planarization (CMP) of wafer fabrication. The invention involves identification of delamination defects of low-k dielectric layers by analyzing the nonstationary acoustic emission (AE) signal collected during copper damascene (Cu-low k) CMP processes. An offline strategy and a moving window-based strategy for online implementation of the wavelet monitoring approach are developed.
摘要:
Provided herein are phenylboronate containing co-polymers (PCC), compositions containing PCC and polyvinyl alcohol (PVA), such compositions further including proteins, methods of making these compositions by water in oil polymerization, and methods of using the protein containing compositions for releasing proteins. Such phenylboronate containing co-polymers are of Formula I: where m, n, p, x, R1-R5, L, X1 and X2 are defined in the application.
摘要:
The subject invention concerns materials and methods for detecting nucleic acid sequences. One aspect of the invention concerns a silicon-based “biochip” comprising nucleic acid immobilized thereon. In one embodiment, the silicon comprises microcavities. The nucleic acid to be assayed for the presence of one or more target nucleic acid sequences is immobilized on the silicon. A nucleic acid, such as an oligonucleotide probe, having a sequence substantially complementary to the target nucleic acid sequence can be used to detect the immobilized nucleic acid on the silicon. If the nucleic acid used for detection hybridizes with a target nucleic acid sequence, the hybridized sequences can be detected directly or indirectly. In an exemplified embodiment, the oligonucleotide probe can be labeled with a detectable label, for example, a fluorescent molecule. The subject invention also concerns methods for detecting a target nucleic acid using a silicon-based biochip of the invention.
摘要:
This invention discloses composition and manufacturing processes of a toxicity free botanical drug formulation for curative treatment of chronic diseases. It is manufactured from plants Crinum asiaticum and Crocus sativus. This drug was administered to human volunteers by oral and intranasal routes in effective amount for an effective time period. Effective amount and effective time of administration varies from one human volunteer to another depending upon age, body weight, length of disease, severity of disease, type of the disease. In vitro experiments show that this botanical drug causes proliferation and differentiation of stem cells.
摘要:
An exemplary method includes a user computing device 1) determining current states, such as current integration states and/or current operational states, of software applications included in a suite of software applications relative to the user computing device, 2) identifying, based on the current states, access options for the software applications included in the suite of software applications, and 3) providing, by the user computing device for display, a graphical user interface that includes the access options configured to be selected by a user of the user computing device to access the software applications included in the suite of software applications. Corresponding methods and systems are also disclosed.
摘要:
The invention provides, in one aspect, a method of searching an RDF triples data store of the type in which the triples are maintained in accord with a first storage schema. The method includes inputting a first query specifying RDF triples that are to be identified in the data store. That first query assumes either (i) that the triples are stored in a schema-less manner (i.e., with no storage schema) or (ii) that the triples are maintained in accord with a second storage schema that differs from the first. The method further includes generating, from the first query, a second query that specifies those same RDF triples, yet, that reflects the first storage schema. That second query can be applied to the RDF triples data store in order to identify and/or retrieve the desired data.