公开(公告)号：US20150042208A1

公开(公告)日：2015-02-12

申请号：US14446602

申请日：2014-07-30

Applicant: YOKOGAWA ELECTRIC CORPORATION

Inventor： Takashi YOSHIDA ,  Takeshi MISHIMA ,  Shigeto IWAI ,  Yuusaku YOSHIDA

IPC: H01L41/083 ,  H01L41/331

CPC classification number: H01L41/083 ,  H01L41/331 ,  H03H3/0072 ,  H03H9/1057 ,  Y10T29/42

Abstract: A resonant transducer includes a silicon single crystal substrate, a silicon single crystal resonator disposed over the silicon single crystal substrate, a shell made of silicon, surrounding the resonator with a gap, and forming a chamber together with the silicon single crystal substrate, an exciting module configured to excite the resonator, a vibration detecting module configured to detect vibration of the resonator, a first layer disposed over the chamber, the first layer having a through-hole over the resonator, a second layer disposed over the first layer, the second layer covering a gap being positioned above the through-hole and being communicated with the through-hole, and a third layer covering the first layer and the second layer, and the third layer sealing the gap.

Abstract translation: 谐振换能器包括硅单晶衬底，设置在硅单晶衬底上的硅单晶谐振器，由硅构成的外壳，围绕谐振器间隙，并与硅单晶衬底一起形成腔室，令人兴奋的 模块，其被配置为激励所述谐振器;振动检测模块，被配置为检测所述谐振器的振动;第一层，设置在所述腔室上，所述第一层在所述谐振器上方具有通孔;第二层，设置在所述第一层上， 所述间隙覆盖位于所述通孔的上方且与所述通孔连通的间隙，以及覆盖所述第一层和所述第二层的第三层，所述第三层密封所述间隙。

公开(公告)号：US20200166538A1

公开(公告)日：2020-05-28

申请号：US16693485

申请日：2019-11-25

Applicant: Yokogawa Electric Corporation

Inventor： Shigeto IWAI ,  Makoto NORO

IPC: G01P15/097

Abstract: A resonant sensor device includes a base and a detection substrate. The detection substrate includes a movable portion configured to move in a first direction, a supporter includes one or more supporting portions which extend in a direction along an intersecting plane intersecting the first direction, an intermediate fixing portion which is connected to the movable portion via the supporter, a connection portion which connects a mounting portion fixed to the base to the intermediate fixing portion in a second direction that is one direction along the intersecting plane, and a resonator at least partially embedded in the one or more supporting portions. The maximum dimension of the connection portion in a third direction orthogonal to the second direction in the intersecting plane is smaller than a maximum dimension of the supporter in the third direction.

公开(公告)号：US20150028434A1

公开(公告)日：2015-01-29

申请号：US14336613

申请日：2014-07-21

Applicant: YOKOGAWA ELECTRIC CORPORATION

Inventor： Takashi YOSHIDA ,  Shuuji OKUDA ,  Shigeto IWAI

IPC: B81B3/00 ,  B81C1/00 ,  B81B7/02

CPC classification number: B81B3/0021 ,  B81B3/0002 ,  B81B7/02 ,  B81B2201/0271 ,  B81B2201/0285 ,  B81C1/00198 ,  B81C1/00293 ,  B81C2203/0145 ,  G01L1/14 ,  G01N29/12 ,  G01N2291/014 ,  G01N2291/02827 ,  H01L41/094 ,  H03H3/0072 ,  H03H9/2463

Abstract: A resonant transducer includes a silicon single crystal substrate, a silicon single crystal resonator disposed over the silicon single crystal substrate, a shell made of silicon, surrounding the resonator with a gap, and forming a chamber together with the silicon single crystal substrate, an exciting module configured to excite the resonator, a vibration detecting module configured to detect vibration of the resonator, a first layer disposed over the chamber, the first layer having a through-hole, a second layer disposed over the first layer, a third layer covering the first layer and the second layer, and a projection extending from the second layer toward the resonator, the projection being spatially separated from the resonator, the projection being separated from the first layer by a first gap, the second layer being separated from the first layer by a second gap, the first gap is communicated with the second gap.

Abstract translation: 谐振换能器包括硅单晶衬底，设置在硅单晶衬底上的硅单晶谐振器，由硅构成的外壳，围绕谐振器间隙，并与硅单晶衬底一起形成腔室，令人兴奋的 模块，其被配置为激励所述谐振器;振动检测模块，被配置为检测所述谐振器的振动，设置在所述腔室上的第一层，所述第一层具有通孔，设置在所述第一层上的第二层， 第一层和第二层，以及从第二层朝向谐振器延伸的突起，突起与谐振器在空间上分离，突起与第一层隔开第一间隙，第二层与第一层分离 通过第二间隙，第一间隙与第二间隙连通。

公开(公告)号：US20140197712A1

公开(公告)日：2014-07-17

申请号：US14153325

申请日：2014-01-13

Applicant: YOKOGAWA ELECTRIC CORPORATION

Inventor： Takashi YOSHIDA ,  Shigeto IWAI ,  Yoshitaka SASAKI

IPC: H02N11/00

CPC classification number: H02N11/00 ,  H03H3/0072 ,  H03H9/2463 ,  Y10T29/49007

Abstract: A resonant transducer includes a resonator, a resonator electrodes connected to an end part of the resonator, at least one fixed electrode arranged in the vicinity of the resonator, and a buried part formed between the fixed electrode and the resonator electrode. The resonator, the resonator electrodes and the fixed electrode are formed by the same active layer on a substrate.

Abstract translation: 谐振换能器包括谐振器，连接到谐振器的端部的谐振器电极，布置在谐振器附近的至少一个固定电极，以及形成在固定电极和谐振器电极之间的掩埋部分。 谐振器，谐振器电极和固定电极由衬底上相同的有源层形成。