公开(公告)号：US06610987B2

公开(公告)日：2003-08-26

申请号：US10081179

申请日：2002-02-25

申请人： Yoshihiro Kimura ,  Ko Hisamoto ,  Takaharu Sugiura ,  Yusuke Narita

发明人： Yoshihiro Kimura ,  Ko Hisamoto ,  Takaharu Sugiura ,  Yusuke Narita

IPC分类号： H01J3708

CPC分类号： H01J37/3053 ,  H01J2237/0041

摘要： In order to suppress quick potential change on the surface of a process target when the shutter plate is opened and closed, when an ion beam IB from the ion source 10 is irradiated on a substrate 38 and the ion beam IB is neutralized by using neutralizing electrons e− generated by a microwave neutralizer 14, the shutter plate 62 shields the substrate 38 before and after the milling processing of the substrate 38, and the voltage of a power supply 34 is lowered when the shutter plate 62 is opened and closed so as to limit the amount of ion beam IB irradiation, thereby suppressing charge-up on the surface of the substrate 38.

公开(公告)号：US20130216121A1

公开(公告)日：2013-08-22

申请号：US13882147

申请日：2011-10-14

申请人： Fumihiro Sasajima ,  Yoshihiro Kimura

发明人： Fumihiro Sasajima ,  Yoshihiro Kimura

IPC分类号： G06K9/00

CPC分类号： G06K9/00523 ,  G03F7/70625 ,  H01J37/28 ,  H01J2237/24578 ,  H01J2237/24592 ,  H01J2237/2817 ,  H01L22/12 ,  H01L2924/0002 ,  H01L2924/00

摘要： In measuring pattern with large process fluctuation, correct measurement cannot be carried out if noises, such as pattern that is not the subject to be measured, and dirt, are present in periphery of pattern to be measured in previously registered measurement region. Among the image data of sample, predetermined region aligned by pattern matching is set as region not to be measured that is excluded from subjects of pattern measurement. For example, in measuring pattern with large process fluctuation, only region including pattern with small process fluctuation is used in pattern matching, while in measuring the pattern, predetermined region, which was used in pattern matching and aligned, is set as region not to be measured. Stable pattern measurement can be easily carried out with respect to pattern with large process fluctuation, without being affected by region where measurement region and region not to be measured overlap with each other.

摘要翻译： 在具有大的工艺波动的测量图形中，如果在先前记录的测量区域中的要测量的图案的周围存在噪声，例如不被测量的图案和污物，则不能进行正确的测量。 在样本的图像数据中，通过图案匹配对准的预定区域被设置为从图案测量对象排除的不被测量的区域。 例如，在具有大的工艺波动的测量图案中，在图案匹配中仅使用包括具有小的工艺波动的图案的区域，而在测量图案时，在图案匹配和对准中使用的预定区域被设置为不是 测量。 相对于具有大的工艺波动的图案，可以容易地进行稳定的图案测量，而不受测量区域和不被测量的区域彼此重叠的区域的影响。

公开(公告)号：US20120305764A1

公开(公告)日：2012-12-06

申请号：US13570931

申请日：2012-08-09

申请人： Yoshihiro Kimura ,  Osamu Komuro ,  Fumihiro Sasajima

发明人： Yoshihiro Kimura ,  Osamu Komuro ,  Fumihiro Sasajima

IPC分类号： G01N23/225

CPC分类号： G01B15/08 ,  H01J37/28 ,  H01J2237/2814 ,  H01J2237/2817

摘要： A method and apparatus suitable for determining the concavity and convexity of line and space patterns formed on a sample. A profile is formed based on a charged-particle beam scan, the profile having a peak. When one foot portion of the peak converges more gradually than the other foot portion, a portion of the sample corresponding to the one foot portion is determined to be a convex portion. Alternatively, when one foot portion of the peak converges more steeply than the other foot portion, a portion of the sample corresponding to the one foot portion is determined to be a concave portion.

摘要翻译： 适用于确定在样品上形成的线和空间图案的凹凸的方法和装置。 基于带电粒子束扫描形成轮廓，轮廓具有峰值。 当峰的一个脚部比另一个脚部更加逐渐收敛时，与一个脚部相对应的部分样本被确定为凸部。 或者，当峰的一个脚部比另一个脚部收敛得更陡峭时，与一个脚部对应的样本的一部分被确定为凹部。

公开(公告)号：US07880344B2

公开(公告)日：2011-02-01

申请号：US12598885

申请日：2008-05-27

申请人： Yoshihiro Kimura ,  Toshiyuki Aso ,  Masashi Ishii

发明人： Yoshihiro Kimura ,  Toshiyuki Aso ,  Masashi Ishii

IPC分类号： H02K41/00

CPC分类号： H02K41/03 ,  H02K2201/18

摘要： An X-Y table actuator is constituted by stacking a stationary plate, an intermediate plate, and a movable plate. Between the stationary plate and the intermediate plate, arranged is an X-direction drive means for driving the intermediate plate in an X-direction with respect to the stationary plate. Between the intermediate plate and the movable plate, on the other hand, there is provided a Y-direction drive means for moving the movable plate forward and backward in a Y-direction with respect to the intermediate plate. By stacking the stationary plate and the movable plate, which are formed into a substantially channel-shape, and the intermediate plate, which is formed into a substantially flat-shape on each other, a housing chamber for the X-direction drive means is formed between the stationary plate and the intermediate plate, and a housing chamber for the Y-direction drive means is formed between the intermediate plate and the movable plate.

摘要翻译： X-Y工作台致动器由固定板，中间板和可动板的堆叠构成。 在固定板和中间板之间设置有用于相对于固定板沿X方向驱动中间板的X方向驱动装置。 另一方面，在中间板和可动板之间设置有用于相对于中间板在Y方向上前后移动可动板的Y方向驱动装置。 通过堆叠形成为大致通道形状的固定板和可动板以及彼此形成为大致平坦的形状的中间板，形成用于X方向驱动装置的容纳室 在中间板和可动板之间形成用于Y方向驱动装置的容纳室。

公开(公告)号：US20090287818A1

公开(公告)日：2009-11-19

申请号：US12507265

申请日：2009-07-22

申请人： Ikuko TACHIBANA ,  Takashi Tanifuji ,  Toshiaki Hayashi ,  Yoshihiro Kimura ,  Tomohiro Hikita ,  Yasutaka Tanikawa

发明人： Ikuko TACHIBANA ,  Takashi Tanifuji ,  Toshiaki Hayashi ,  Yoshihiro Kimura ,  Tomohiro Hikita ,  Yasutaka Tanikawa

IPC分类号： G06F15/16 ,  G06F15/173 ,  G06F11/30

CPC分类号： G06F11/3051 ,  G06F11/3006 ,  G06F11/3079 ,  H04L43/0817

摘要： A monitoring apparatus for monitoring communication configurations of a plurality of client devices connected to a server, the monitoring apparatus includes: a processor for controlling the communications between the client devices and the server in accordance with a process including: receiving from each of the client devices communication condition information and storing latest communication condition information of each of the client devices; determining at a time interval whether any of client devices became incapable of communication with the server by checking the latest communication condition information of each of client devices; and upon detection of at least one of the client devices for which obsolete communication condition information is stored, issuing a notice indicating that the at least one of the client devices are incapable of communication with the server.

摘要翻译： 一种用于监视连接到服务器的多个客户端设备的通信配置的监视设备，所述监控设备包括：处理器，用于根据包括以下过程来控制所述客户端设备与所述服务器之间的通信的处理：从每个所述客户端设备 通信条件信息并存储每个客户端设备的最新通信条件信息; 通过检查每个客户端设备的最新通信条件信息，在一段时间间隔确定任何客户端设备是否变得不能与服务器通信; 并且在检测到存储过时的通信条件信息的至少一个客户端设备时，发出指示所述至少一个客户端设备不能与服务器通信的通知。

公开(公告)号：US06675903B2

公开(公告)日：2004-01-13

申请号：US09971027

申请日：2001-10-05

申请人： Takashi Ohzeki ,  Yoshihiro Kimura ,  Yasuji Hashimoto ,  Yoshinobu Itani ,  Takashi Shinozaki

发明人： Takashi Ohzeki ,  Yoshihiro Kimura ,  Yasuji Hashimoto ,  Yoshinobu Itani ,  Takashi Shinozaki

IPC分类号： B65F300

CPC分类号： E01H12/00

摘要： A beach cleaner for recovering waste while moving in a towed state by a traction vehicle. A grating-like portion scoops up waste present in front of the beach cleaner as the beach cleaner is moved and a reticulate portion that is formed behind the grating-like portion to hold waste. As the beach cleaner is moved, waste present in front of the beach cleaner is scooped up onto the grating-like portion and is held with the reticulate portion formed behind the grating-like portion. Sand that is scooped up together with the waste is allowed to drop through the gaps in the grating-like portion.

公开(公告)号：US06640906B2

公开(公告)日：2003-11-04

申请号：US09969652

申请日：2001-10-04

申请人： Takashi Ohzeki ,  Yoshihiro Kimura ,  Yasuji Hashimoto ,  Yoshinobu Itani ,  Shinji Furuta ,  Takashi Shinozaki

发明人： Takashi Ohzeki ,  Yoshihiro Kimura ,  Yasuji Hashimoto ,  Yoshinobu Itani ,  Shinji Furuta ,  Takashi Shinozaki

IPC分类号： A01B4300

CPC分类号： E01H12/00

摘要： A beach cleaner for recovering waste while traveling in a towed state by a traction vehicle. A grating-like portion scoops up waste present in front of the beach cleaner as the beach cleaner is moved. A rotor is disposed on an upper side of the grating-like portion and is adapted to rotate so that a lower portion thereof moves rearwardly. The rotor is mounted on a rotary shaft extending in the transverse direction of the beach cleaner. Waste is delivered rearwardly between the rotor and the grating-like portion. With travel of the beach cleaner, waste present in front of the beach cleaner is scooped up onto the grating-like portion and sand which is scooped up together with the waste is allowed to drop through gaps in the grating-like portion.

公开(公告)号：US06612374B2

公开(公告)日：2003-09-02

申请号：US09970922

申请日：2001-10-05

申请人： Takashi Ohzeki ,  Yoshihiro Kimura ,  Yasuji Hashimoto ,  Yoshinobu Itani ,  Shinji Furuta ,  Takashi Shinozaki

发明人： Takashi Ohzeki ,  Yoshihiro Kimura ,  Yasuji Hashimoto ,  Yoshinobu Itani ,  Shinji Furuta ,  Takashi Shinozaki

IPC分类号： A01D1500

CPC分类号： E01H12/00

摘要： A beach cleaner for recovering waste while being towed by a traction vehicle. The beach cleaner includes a grating-like portion for scooping up waste present in front of the beach cleaner as the beach cleaner is moved. The grating-like portion is inclined so that the front side thereof assumes a lower position. A rotor is disposed on an upper side of the grating-like portion and for rotation so that a lower portion thereof moves rearwardly. The rotor is centered on a rotary shaft extending in the transverse direction of the vehicle. The rotor delivers the waste rearwardly between the rotor and the grating-like portion. A reticulate portion is formed behind the grating-like portion. The reticulate portion is inclined so that the rear side thereof is located at a lower position to hold waste. With movement of the beach cleaner, waste present in front of the beach cleaner is scooped up onto the grating-like portion and sand which is scooped up together with the waste is allowed to drop through gaps in the grating-like portion.

公开(公告)号：US06568482B2

公开(公告)日：2003-05-27

申请号：US09970823

申请日：2001-10-05

申请人： Takashi Ohzeki ,  Yoshihiro Kimura ,  Yasuji Hashimoto ,  Yoshinobu Itani ,  Takashi Shinozaki

发明人： Takashi Ohzeki ,  Yoshihiro Kimura ,  Yasuji Hashimoto ,  Yoshinobu Itani ,  Takashi Shinozaki

IPC分类号： A01D1500

CPC分类号： E01H12/00

摘要： A beach cleaner for traveling on sandy soil while being towed by a traction vehicle for recovering waste such as empty cans scattered on the sandy soil. The beach cleaner is provided with a travel body. The travel body includes a plurality of longitudinal members arranged in a hurdle shape spacedly and extending in a travel direction and also having in a front portion thereof a portion to be pulled by the traction vehicle. A flat plate-like scraper for scraping up waste together with sand during travel of the beach cleaner is provided in the front portion of the travel body. A net for separating waste from a mixture of sand and waste scraped up by the scraper and for storing the thus-separated waste thereon is stretched on an upper surface of the travel body.

公开(公告)号：US06343470B1

公开(公告)日：2002-02-05

申请号：US09655425

申请日：2000-09-05

申请人： Takehiko Nanri ,  Yoshihiro Kimura ,  Nobuyuki Yakigaya ,  Yoshihiro Yoshida

发明人： Takehiko Nanri ,  Yoshihiro Kimura ,  Nobuyuki Yakigaya ,  Yoshihiro Yoshida

IPC分类号： F16D3102

CPC分类号： F16D31/02 ,  F16D31/08 ,  F16H47/02 ,  F16H61/465 ,  F16H2059/366

摘要： An overtop position is to be established in a hydrostatic type continuously variable transmission, and an increase of the maximum speed and the maintenance of power performance are to be made compatible with each other. In a hydrostatic type continuously variable transmission, the angle of inclination of a movable swash plate is controlled in such a manner that a target Ne is calculated from both RC (riding condition) and throttle valve opening, then the target Ne thus calculated is compared with an actual Ne to determine a rotational direction and DUTY of a control motor. The operation of the control motor is controlled in accordance with the thus-determined data and angle information on the angle of the movable swash plate provided from an angle sensor. In constant speed vehicular traveling, the change gear ratio is set at TOP ratio and a shift is made to OVERTOP when predetermined overtop control conditions ((1) the current change gear ratio should be at TOP position, (2) the degree opening of a throttle valve should exceed a threshold value determined according to a vehicular speed, and (3) the engine speed should exceed a preset value) are satisfied, thereby increasing the maximum vehicle speed.

摘要翻译： 要在静液压型无级变速器中建立顶板位置，并且使最大速度的提高和动力性能的维持彼此兼容。 在液压式无级变速器中，可动斜盘的倾斜角度以从RC（骑乘状态）和节气门开度两者计算出的目标Ne的方式进行控制，然后将如此计算的目标Ne与 确定控制电机的旋转方向和DUTY的实际Ne。 根据由角度传感器提供的可移动斜盘角度的这样确定的数据和角度信息来控制控制电动机的操作。 在恒速车辆行驶中，变速比设定为TOP比，并且当预定的顶部控制条件（（1）当前变速比应在TOP位置时，转换为OVERTOP，（2）开度为 节流阀应超过根据车速决定的阈值，（3）发动机转速应超过预设值），从而提高车速。