公开(公告)号：US20060145585A1

公开(公告)日：2006-07-06

申请号：US10545808

申请日：2004-02-17

申请人： Yoshinori Terui ,  Ryozo Nongaki ,  Seiichi Sakawa

发明人： Yoshinori Terui ,  Ryozo Nongaki ,  Seiichi Sakawa

IPC分类号： H01J1/20 ,  H01J19/14 ,  H01J9/02

CPC分类号： H01J1/16 ,  H01J1/146 ,  H01J1/20 ,  H01J9/04 ,  H01J9/042 ,  H01J37/065 ,  H01J2237/06316 ,  H01J2237/25 ,  H01J2237/28 ,  H01J2237/3175

摘要： To provide an electron source which is suitable for an electron beam lithography machine, an Auger electron spectroscope or the like and provides a small total emission current even in a high angular intensity operation. An electron gun provided with a cathode which comprises a single crystal needle of tungsten or molybdenum and a coating layer consisting of oxygen and at least one metal element selected from the group consisting of Group 2A, Group 3A and Group 4A, formed on its surface, characterized in that an apex of the cathode as a truncated cone shape, and the truncated cone shape portion has a cone angle of from 25° to 95° and a diameter of the top surface of from 5 μm to 200 μm.

摘要翻译： 提供适用于电子束光刻机，俄歇电子分光镜等的电子源，并且即使在高角度强度操作中也提供小的总发射电流。 一种具有阴极的电子枪，其包括钨或钼的单晶针和由氧和由其表面形成的组2A，组3A和组4A组成的组中的至少一种金属元素组成的涂层， 其特征在于，所述阴极的顶点为截头圆锥形状，所述截锥形部分的锥角为25°〜95°，顶面直径为5〜200μm。

公开(公告)号：US20090023355A1

公开(公告)日：2009-01-22

申请号：US11813963

申请日：2006-01-13

申请人： Seiichi Sakawa ,  Yoshinori Terui

发明人： Seiichi Sakawa ,  Yoshinori Terui

IPC分类号： H01J9/04

CPC分类号： H01J1/16 ,  B82Y10/00 ,  B82Y40/00 ,  H01J9/04 ,  H01J37/06 ,  H01J37/3174 ,  H01J2237/06316 ,  H01J2237/25 ,  H01J2237/28

摘要： An electron source excellent in the uniformity in current emission distribution is provided certainly and at a low costA process for producing an electron source having an electron emitting portion at one end of a rod which comprises a step of forming the electron emitting portion by machining, and a step of removing a damaged layer at the surface of the formed electron emitting portion by chemical polishing or electrolytic polishing.

摘要翻译： 一种电子发射分布均匀性优良的电子源，以低成本提供。一种用于制造电子源的方法，该电子源在一端具有电子发射部分，该电子源包括通过机械加工形成电子发射部分的步骤， 以及通过化学抛光或电解抛光去除形成的电子发射部分的表面处的损伤层的步骤。

公开(公告)号：US20080315089A1

公开(公告)日：2008-12-25

申请号：US12151500

申请日：2008-05-07

申请人： Hiroshi Yasuda ,  Takeshi Haraguchi ,  Yoshihisa Ooae ,  Takamasa Satoh ,  Yoshinori Terui ,  Seiichi Sakawa ,  Ryozo Nonogaki

发明人： Hiroshi Yasuda ,  Takeshi Haraguchi ,  Yoshihisa Ooae ,  Takamasa Satoh ,  Yoshinori Terui ,  Seiichi Sakawa ,  Ryozo Nonogaki

IPC分类号： H01J3/02

CPC分类号： H01J37/073 ,  H01J2237/06316 ,  H01J2237/06341 ,  H01J2237/3175

摘要： An electron gun includes an electron source configured to emit electrons. The electron source includes an electron emission region configured to emit the electrons and an electron emission restrictive region configured to restrict emission of the electrons. The electron emission restrictive region is located on a side surface of the electron source except an electron emission surface on a tip of the electron source and is covered with a different material from the electron source. The electron gun emits thermal field-emitted electrons by applying an electric field to the tip while maintaining a sufficiently low temperature to avoid sublimation of a material of the electron source. The material of the electron source may be lanthanum hexaboride (LaB6) or cerium hexaboride (CeB6). The electron emission restrictive region may be covered with carbon.

摘要翻译： 电子枪包括被配置为发射电子的电子源。 电子源包括配置为发射电子的电子发射区域和被配置为限制电子发射的电子发射限制区域。 电子发射限制区域位于电子源的除了电子源的尖端上的电子发射表面以外的电子源的侧表面上，并被与电子源不同的材料覆盖。 电子枪通过向尖端施加电场而发射热场发射的电子，同时保持足够低的温度以避免电子源的材料的升华。 电子源的材料可以是六硼化镧（LaB 6）或六硼化铈（CeB 6）。 电子发射限制区域可以被碳覆盖。

公开(公告)号：US20100026160A1

公开(公告)日：2010-02-04

申请号：US12443032

申请日：2007-09-26

申请人： Yoshinori Terui ,  Fumihiro Nakahara ,  Seiichi Sakawa

发明人： Yoshinori Terui ,  Fumihiro Nakahara ,  Seiichi Sakawa

IPC分类号： H01J1/46

CPC分类号： H01J37/065 ,  B82Y10/00 ,  B82Y40/00 ,  H01J37/28 ,  H01J37/3174 ,  H01J2237/06316 ,  H01J2237/065 ,  H01J2237/2817

摘要： An electron source showing little surplus current even at a time of high angular intensity operation is provided. An electron source comprising an electron emitting portion, a suppressor electrode and an extractor electrode, wherein the electron emitting portion is present at a leading edge of an end of a single crystal rod having a shape comprising a first truncated cone portion or a cone portion, and a second truncated cone portion continuing therefrom. It is preferably the electron source, wherein the single crystal rod has an oxide of a metal element selected from the group consisting of Ca, Sr, Ba, Sc, Y, La, Ti, Zr, Hf and lanthanoide elements as a diffusion source, and the single crystal rod is made of tungsten or molybden of orientation.

摘要翻译： 提供即使在高角度强度操作时也显示出少量剩余电流的电子源。 一种电子源，包括电子发射部分，抑制电极和提取器电极，其中电子发射部分存在于具有包括第一截锥体部分或锥形部分的形状的单晶棒的端部的前缘， 以及从其继续的第二截锥体部分。 优选为电子源，其中，单晶棒具有选自Ca，Sr，Ba，Sc，Y，La，Ti，Zr，Hf和镧系元素作为扩散源的金属元素的氧化物， 并且单晶棒由<100>方向的钨或钼制成。

公开(公告)号：US06630794B2

公开(公告)日：2003-10-07

申请号：US09987273

申请日：2001-11-14

申请人： Seiichi Sakawa ,  Yoshinori Terui

发明人： Seiichi Sakawa ,  Yoshinori Terui

IPC分类号： G09G310

CPC分类号： H01J9/42 ,  H01J37/073 ,  H01J2237/06316 ,  H01J2237/065

摘要： An S/N ratio of a probe current is measured while a filament current is changed, and the filament current in which the S/N ratio is maximal is determined.

摘要翻译： 在灯丝电流改变时测量探头电流的S / N比，并且确定S / N比最大的灯丝电流。

公开(公告)号：US07969080B2

公开(公告)日：2011-06-28

申请号：US12439413

申请日：2007-08-31

申请人： Yoshinori Terui ,  Seiichi Sakawa

发明人： Yoshinori Terui ,  Seiichi Sakawa

IPC分类号： H01J1/00

CPC分类号： H01J1/144 ,  B82Y10/00 ,  B82Y40/00 ,  H01J37/065 ,  H01J37/3174 ,  H01J2237/0216 ,  H01J2237/06316 ,  H01J2237/28

摘要： The present invention provides an electron source that can produce a stable electron beam even if an apparatus employing the electron source receives vibration from the outside. An electron source comprising an insulator, a pair of conductive terminals attached to the insulator, a filament tensed between the pair of conductive terminals, a rod-shaped cathode having a sharp end portion performing as an electron emitting portion and joined with the filament, wherein the cathode has another end portion different from the electron emitting portion, fixed to the insulator. It is preferred that said another end portion of the cathode other than the electron emitting portion, is fixed to the insulator via a metal pin brazed with the insulator.

摘要翻译： 本发明提供即使使用电子源的装置从外部接收到振动也能够产生稳定的电子束的电子源。 一种电子源，包括绝缘体，连接到绝缘体的一对导电端子，在所述一对导电端子之间张紧的细丝，具有作为电子发射部分并与灯丝连接的尖端部分的棒状阴极，其中 阴极具有不同于电子发射部分的另一端部，固定到绝缘体。 优选除电子发射部分之外的阴极的所述另一个端部经由与绝缘体钎焊的金属销固定到绝缘体上。

公开(公告)号：US07919750B2

公开(公告)日：2011-04-05

申请号：US12151500

申请日：2008-05-07

申请人： Hiroshi Yasuda ,  Takeshi Haraguchi ,  Yoshihisa Ooae ,  Takamasa Satoh ,  Yoshinori Terui ,  Seiichi Sakawa ,  Ryozo Nonogaki

发明人： Hiroshi Yasuda ,  Takeshi Haraguchi ,  Yoshihisa Ooae ,  Takamasa Satoh ,  Yoshinori Terui ,  Seiichi Sakawa ,  Ryozo Nonogaki

IPC分类号： H01J29/48 ,  H01J37/073

CPC分类号： H01J37/073 ,  H01J2237/06316 ,  H01J2237/06341 ,  H01J2237/3175

摘要： An electron gun includes an electron source configured to emit electrons. The electron source includes an electron emission region configured to emit the electrons and an electron emission restrictive region configured to restrict emission of the electrons. The electron emission restrictive region is located on a side surface of the electron source except an electron emission surface on a tip of the electron source and is covered with a different material from the electron source. The electron gun emits thermal field-emitted electrons by applying an electric field to the tip while maintaining a sufficiently low temperature to avoid sublimation of a material of the electron source. The material of the electron source may be lanthanum hexaboride (LaB6) or cerium hexaboride (CeB6). The electron emission restrictive region may be covered with carbon.

摘要翻译： 电子枪包括被配置为发射电子的电子源。 电子源包括配置为发射电子的电子发射区域和被配置为限制电子发射的电子发射限制区域。 电子发射限制区域位于电子源的除了电子源的尖端上的电子发射表面以外的电子源的侧表面上，并被与电子源不同的材料覆盖。 电子枪通过向尖端施加电场而发射热场发射的电子，同时保持足够低的温度以避免电子源的材料的升华。 电子源的材料可以是六硼化镧（LaB 6）或六硼化铈（CeB 6）。 电子发射限制区域可以被碳覆盖。

公开(公告)号：US07722425B2

公开(公告)日：2010-05-25

申请号：US11813963

申请日：2006-01-13

申请人： Seiichi Sakawa ,  Yoshinori Terui

发明人： Seiichi Sakawa ,  Yoshinori Terui

IPC分类号： H01J9/04 ,  H01J1/13

CPC分类号： H01J1/16 ,  B82Y10/00 ,  B82Y40/00 ,  H01J9/04 ,  H01J37/06 ,  H01J37/3174 ,  H01J2237/06316 ,  H01J2237/25 ,  H01J2237/28

摘要： An electron source excellent in the uniformity in current emission distribution is provided certainly and at a low cost.A process for producing an electron source having an electron emitting portion at one end of a rod, which comprises a step of forming the electron emitting portion by machining, and a step of removing a damaged layer at the surface of the formed electron emitting portion by chemical polishing or electrolytic polishing.

摘要翻译： 提供电流发射分布均匀性优异的电子源，成本低廉。 一种用于制造在棒的一端具有电子发射部分的电子源的方法，包括通过机械加工形成电子发射部分的步骤，以及通过以下方法除去形成的电子发射部分的表面处的损伤层的步骤： 化学抛光或电解抛光。

公开(公告)号：US20100019649A1

公开(公告)日：2010-01-28

申请号：US12439413

申请日：2007-08-31

申请人： Yoshinori Terui ,  Seiichi Sakawa

发明人： Yoshinori Terui ,  Seiichi Sakawa

IPC分类号： H01J29/46

CPC分类号： H01J1/144 ,  B82Y10/00 ,  B82Y40/00 ,  H01J37/065 ,  H01J37/3174 ,  H01J2237/0216 ,  H01J2237/06316 ,  H01J2237/28

摘要： The present invention provides an electron source that can produce a stable electron beam even if an apparatus employing the electron source receives vibration from the outside. An electron source comprising an insulator, a pair of conductive terminals attached to the insulator, a filament tensed between the pair of conductive terminals, a rod-shaped cathode having a sharp end portion performing as an electron emitting portion and joined with the filament, wherein the cathode has another end portion different from the electron emitting portion, fixed to the insulator. It is preferred that said another end portion of the cathode other than the electron emitting portion, is fixed to the insulator via a metal pin brazed with the insulator.

摘要翻译： 本发明提供即使使用电子源的装置从外部接收到振动也能够产生稳定的电子束的电子源。 一种电子源，包括绝缘体，连接到绝缘体的一对导电端子，在所述一对导电端子之间张紧的细丝，具有作为电子发射部分并与灯丝连接的尖端部分的棒状阴极，其中 阴极具有不同于电子发射部分的另一端部，固定到绝缘体。 优选除电子发射部分之外的阴极的所述另一个端部经由与绝缘体钎焊的金属销固定到绝缘体上。