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    Electron source
    1.
    发明授权
    Electron source 有权
    电子源

    公开(公告)号：US08040034B2

    公开(公告)日：2011-10-18

    申请号：US12667762

    申请日：2008-06-19

    申请人： Ryozo Nonogaki ,  Yoshinori Terui

    发明人： Ryozo Nonogaki ,  Yoshinori Terui

    IPC分类号： H01J1/16

    CPC分类号： H01J37/28 ,  H01J1/15 ,  H01J37/06 ,  H01J37/065 ,  H01J37/073 ,  H01J2237/061 ,  H01J2237/06316

    摘要： An electron source producing an electron beam which is highly reliable and stable even when it is externally oscillated. The electron source comprises a cathode (1) having an electron emitting section which is so connected to be interposed between top ends of two filaments (3) which are respectively connected to two conductive pins (4) provided on an insulator member (5), an end of the cathode (1) which differs from the electron emitting section being fixed to the insulator member (5), wherein the two filaments (3) are being twofold symmetry with a center on a center axis of the cathode (1), and preferably, the end of the cathode (1) which differs from the electron emitting section is fixed to the insulator member (5) via a metallic member (6) brazed to the insulator member, and more preferably, a curved portion is provided to the filaments.

    摘要翻译： 产生电子束的电子源即使在外部振荡时也是高度可靠和稳定的。 电子源包括具有电子发射部分的阴极（1），该电子发射部分被连接以分别连接到设置在绝缘体部件（5）上的两个导电针（4）的两根细丝（3）的顶端之间， 阴极（1）的与电子发射部分不同的端部固定到绝缘体部件（5），其中两根细丝（3）与阴极（1）的中心轴线上的中心是双重对称的， 并且优选地，与电子发射部分不同的阴极（1）的端部通过钎焊到绝缘体构件的金属构件（6）固定到绝缘体构件（5），更优选地，弯曲部分 长丝。

    ELECTRON SOURCE
    2.
    发明申请
    ELECTRON SOURCE 审中-公开
    电子源

    公开(公告)号：US20100026160A1

    公开(公告)日：2010-02-04

    申请号：US12443032

    申请日：2007-09-26

    申请人： Yoshinori Terui ,  Fumihiro Nakahara ,  Seiichi Sakawa

    发明人： Yoshinori Terui ,  Fumihiro Nakahara ,  Seiichi Sakawa

    IPC分类号： H01J1/46

    CPC分类号： H01J37/065 ,  B82Y10/00 ,  B82Y40/00 ,  H01J37/28 ,  H01J37/3174 ,  H01J2237/06316 ,  H01J2237/065 ,  H01J2237/2817

    摘要： An electron source showing little surplus current even at a time of high angular intensity operation is provided. An electron source comprising an electron emitting portion, a suppressor electrode and an extractor electrode, wherein the electron emitting portion is present at a leading edge of an end of a single crystal rod having a shape comprising a first truncated cone portion or a cone portion, and a second truncated cone portion continuing therefrom. It is preferably the electron source, wherein the single crystal rod has an oxide of a metal element selected from the group consisting of Ca, Sr, Ba, Sc, Y, La, Ti, Zr, Hf and lanthanoide elements as a diffusion source, and the single crystal rod is made of tungsten or molybden of orientation.

    摘要翻译： 提供即使在高角度强度操作时也显示出少量剩余电流的电子源。 一种电子源，包括电子发射部分，抑制电极和提取器电极，其中电子发射部分存在于具有包括第一截锥体部分或锥形部分的形状的单晶棒的端部的前缘， 以及从其继续的第二截锥体部分。 优选为电子源，其中，单晶棒具有选自Ca，Sr，Ba，Sc，Y，La，Ti，Zr，Hf和镧系元素作为扩散源的金属元素的氧化物， 并且单晶棒由<100>方向的钨或钼制成。

    Electron gun
    3.
    发明申请
    Electron gun 审中-公开
    电子枪

    公开(公告)号：US20060145585A1

    公开(公告)日：2006-07-06

    申请号：US10545808

    申请日：2004-02-17

    申请人： Yoshinori Terui ,  Ryozo Nongaki ,  Seiichi Sakawa

    发明人： Yoshinori Terui ,  Ryozo Nongaki ,  Seiichi Sakawa

    IPC分类号： H01J1/20 ,  H01J19/14 ,  H01J9/02

    CPC分类号： H01J1/16 ,  H01J1/146 ,  H01J1/20 ,  H01J9/04 ,  H01J9/042 ,  H01J37/065 ,  H01J2237/06316 ,  H01J2237/25 ,  H01J2237/28 ,  H01J2237/3175

    摘要： To provide an electron source which is suitable for an electron beam lithography machine, an Auger electron spectroscope or the like and provides a small total emission current even in a high angular intensity operation. An electron gun provided with a cathode which comprises a single crystal needle of tungsten or molybdenum and a coating layer consisting of oxygen and at least one metal element selected from the group consisting of Group 2A, Group 3A and Group 4A, formed on its surface, characterized in that an apex of the cathode as a truncated cone shape, and the truncated cone shape portion has a cone angle of from 25° to 95° and a diameter of the top surface of from 5 μm to 200 μm.

    摘要翻译： 提供适用于电子束光刻机，俄歇电子分光镜等的电子源，并且即使在高角度强度操作中也提供小的总发射电流。 一种具有阴极的电子枪，其包括钨或钼的单晶针和由氧和由其表面形成的组2A，组3A和组4A组成的组中的至少一种金属元素组成的涂层， 其特征在于，所述阴极的顶点为截头圆锥形状，所述截锥形部分的锥角为25°〜95°，顶面直径为5〜200μm。

    Thermal field emmission electron gun
    5.
    发明授权
    Thermal field emmission electron gun 失效
    热场发射电子枪

    公开(公告)号：US5536944A

    公开(公告)日：1996-07-16

    申请号：US424097

    申请日：1995-04-19

    申请人： Katsuyoshi Tsunoda ,  Yoshinori Terui

    发明人： Katsuyoshi Tsunoda ,  Yoshinori Terui

    IPC分类号： H01J1/304 ,  H01J3/02 ,  H01J37/073 ,  H01J1/30 ,  H01J1/48

    CPC分类号： H01J3/021 ,  H01J37/073 ,  H01J2201/317 ,  H01J2237/06316

    摘要： A thermal field emission electron gun has a thermal field emission cathode and a suppressor electrode wherein the thermal field emission cathode comprises a single crystal tungsten needle of an axis direction of and a coating layer composed of zirconium and oxygen, and the suppressor electrode is composed of either titanium or an alloy including titanium as the major component, of which hydrogen content is 60 ppm or less. Electron beams can be stably obtained with good reproducibility in a short time.

    摘要翻译： 热场发射电子枪具有热场发射阴极和抑制电极，其中热场发射阴极包括轴向<100>的单晶钨针和由锆和氧组成的涂层，抑制电极 由钛或包含钛作为主要成分的合金构成，其氢含量为60ppm以下。 可以在短时间内以良好的再现性稳定地获得电子束。

    ENCLOSURE AND METHOD FOR HANDLING ELECTRIC GUN OR ION GUN
    7.
    发明申请
    ENCLOSURE AND METHOD FOR HANDLING ELECTRIC GUN OR ION GUN 有权
    用于处理电枪或离子枪的外壳和方法

    公开(公告)号：US20140000104A1

    公开(公告)日：2014-01-02

    申请号：US14005469

    申请日：2012-02-21

    申请人： Toshiyuki Morishita ,  Yoshinori Terui ,  Shimpei Hirokawa

    发明人： Toshiyuki Morishita ,  Yoshinori Terui ,  Shimpei Hirokawa

    IPC分类号： H01R43/26

    CPC分类号： H01R43/26 ,  H01J3/02 ,  H01J37/06 ,  H01J37/065 ,  H01J37/067 ,  H01J37/07 ,  H01J37/08 ,  Y10T29/49117

    摘要： The present invention is a charged-particle gun (EG) in which a negative electrode (1) and a positive electrode (9) are integrated and assembled in advance, and which can be stored and transported in a state in which the negative electrode and the positive electrode are integrated, wherein the negative electrode and the positive electrode are connected by a conductor (11) during storage and transportation of the charged-particle gun. It is thereby possible to prevent an electrode tip of the charged-particle gun from being damaged by electrical discharge caused by static electricity during storage and transportation.

    摘要翻译： 本发明是一种带电粒子枪（EG），其中负极（1）和正极（9）预先集成并组装，并且可以在负极和 正极集成在一起，其中在带电粒子枪的储存和运输期间，负极和正极通过导体（11）连接。 由此，可以防止带电粒子枪的电极头在储存和运输期间由静电引起的放电损坏。

    Electron emitting source and manufacturing method of electron emitting source
    8.
    发明授权
    Electron emitting source and manufacturing method of electron emitting source 有权
    电子发射源和电子发射源的制造方法

    公开(公告)号：US08456076B2

    公开(公告)日：2013-06-04

    申请号：US12745316

    申请日：2008-07-11

    申请人： Toshiyuki Morishita ,  Yoshinori Terui

    发明人： Toshiyuki Morishita ,  Yoshinori Terui

    IPC分类号： H01J1/15 ,  H01J19/08 ,  H01K1/02

    CPC分类号： H01J37/06 ,  H01J37/065 ,  H01J2237/06308 ,  H01J2237/06375

    摘要： An electron emitting source capable of preventing increase in an inter-terminal resistance and a manufacturing method of the electron emitting source. The electron emitting source comprises an electron emitting chip made of rare-earth hexaboride, and a heater constituted by a carbonaceous member for holding and heating the electron emitting chip, wherein an electrically conductive substance is provided in a gap between the electron emitting chip and the heater.

    摘要翻译： 能够防止端子间电阻增加的电子发射源和电子发射源的制造方法。 电子发射源包括由稀土六硼化物制成的电子发射芯片和由用于保持和加热电子发射芯片的碳质元件构成的加热器，其中导电物质设置在电子发射芯片和 加热器。

    Electron source
    9.
    发明授权
    Electron source 有权
    电子源

    公开(公告)号：US08436524B2

    公开(公告)日：2013-05-07

    申请号：US12597961

    申请日：2008-05-13

    申请人： Yoshinori Terui ,  Ryozo Nonogaki

    发明人： Yoshinori Terui ,  Ryozo Nonogaki

    IPC分类号： H01J1/26 ,  H01J1/28

    CPC分类号： H01J37/063 ,  H01J1/20 ,  H01J1/26 ,  H01J37/073 ,  H01J37/075 ,  H01J2237/0216 ,  H01J2237/06316

    摘要： Provided is an electron source which provides a stable electron beam even when vibration is applied from external to a device which uses the electron source. The electron source is provided with a needlelike chip (1) having an electron emitting section at one end; a cup-like component (6) bonded to the other end of the needlelike chip (1); and a filament (3) for heating the cup-like component (6). The filament (3) is arranged in a gap inside the cup-like component (6), in a noncontact state to the cup-like component (6).

    摘要翻译： 提供了即使当从外部向使用电子源的装置施加振动时也提供稳定电子束的电子源。 电子源设置有在一端具有电子发射部分的针状芯片（1）; 结合到针状芯片（1）的另一端的杯状部件（6）; 以及用于加热杯状部件（6）的灯丝（3）。 灯丝（3）以与杯状部件（6）非接触状态配置在杯状部件（6）内的间隙内。