LINE NARROWING MODULE, MANUFACTURING METHOD OF LINE NARROWING MODULE, AND ELECTRONIC DEVICE MANUFACTURING METHOD

    公开(公告)号:US20250070526A1

    公开(公告)日:2025-02-27

    申请号:US18938048

    申请日:2024-11-05

    Abstract: A line narrowing module includes a mirror including a bottom surface and a reflection surface of light; a grating configured to wavelength-disperse the light reflected by the reflection surface; a base plate to which the bottom surface of the mirror is fixed with an adhesive; a rotation stage configured to rotate the base plate, arranged thereon, about a rotation axis perpendicular to a plane in which the light is wavelength-dispersed to rotate the mirror about the rotation axis; and a drive unit configured to rotate the rotation stage about the rotation axis. A centroid of the mirror, a centroid of the adhesive, a centroid of the base plate, and a centroid of the rotation stage are located on the rotation axis.

    GASEOUS LASER SYSTEMS WITH EDGE-DEFINING ELEMENT AND RELATED TECHNIQUES

    公开(公告)号:US20240170910A1

    公开(公告)日:2024-05-23

    申请号:US18396290

    申请日:2023-12-26

    Applicant: Xemed LLC

    CPC classification number: H01S3/0941 H01S3/031 H01S3/0943 H01S3/104 H01S3/227

    Abstract: Gaseous laser systems and related techniques are disclosed. Techniques disclosed herein may be utilized, in accordance with some embodiments, in providing a gaseous laser system with a configuration that provides (A) pump illumination with distinct edge surfaces for an extended depth and (B) an output beam illumination from a resonator cavity with distinct edges in its reflectivity profile, thereby providing (C) pump beam and resonator beam illumination on a volume so that the distinct edge surfaces of its pump and resonator beam illumination are shared-edge surfaces with (D) further edge surfaces of the amplifier volume at the surfaces illuminated directly by the pump or resonator beams, as defined by optical windows and (optionally) by one or more flowing gas curtains depleted of the alkali vapor flowing along those optical windows. Techniques disclosed herein may be implemented, for example, in a diode-pumped alkali laser (DPAL) system, in accordance with some embodiments.

    Conductively-cooled slab laser
    4.
    发明授权

    公开(公告)号:US11336070B2

    公开(公告)日:2022-05-17

    申请号:US16838564

    申请日:2020-04-02

    Applicant: Coherent, Inc.

    Abstract: A carbon dioxide gas-discharge slab-laser is assembled in a laser-housing. The laser-housing is formed from a hollow extrusion. An interior surface of the extrusion provides a ground electrode of the laser. Another live electrode is located within the extrusion, electrically insulated from and parallel to the ground electrode, forming a discharge-gap of the slab-laser. The electrodes are spaced apart by parallel ceramic strips. Neither the extrusion, nor the live electrode, include fluid coolant channels. The laser-housing is cooled by fluid-cooled plates attached to the outside thereof.

    Method and system for generating tunable ultrafast optical pulses

    公开(公告)号:US11289870B2

    公开(公告)日:2022-03-29

    申请号:US16784552

    申请日:2020-02-07

    Abstract: A system and a method for generating tunable ultrafast optical pulses, the method comprising spectral broadening of a laser input beam by propagating the laser input beam in a nonlinear medium of a third-order nonlinear susceptibility χ(3), yielding an output laser spectrum; and one of: i) selecting at least one portion of the output laser spectrum, yielding an output pulse different than the input pulse and centered at a different frequency; ii) temporal compensation and spatial spreading of spectral components of the output laser spectrum; selecting two pulses at two different frequencies; and nonlinearly mixing the two pulses together in a first second-order nonlinear susceptibility χ(2) nonlinear crystal into a third pulse centered at a frequency which is a difference between the frequencies of the first two pulses; and iii) dividing output laser spectrum into a pump beam and a probe beam, directing a pump pulse to a third second-order nonlinear crystal for THz radiation generation; and directing a probe pulse to a third second-order nonlinear crystal for THz radiation reconstruction.

    Light source apparatus
    6.
    发明授权

    公开(公告)号:US11128097B2

    公开(公告)日:2021-09-21

    申请号:US16814418

    申请日:2020-03-10

    Abstract: A light source apparatus includes an airtight container having a hemispherical or semielliptical first curved portion configured to receive laser light, a hemispherical or semielliptical second curved portion opposite to the first curved portion, and a cylindrical portion connecting the first curved portion and the second curved portion; assist gas sealed in the airtight container; and a light source configured to irradiate laser light to the first curved portion from outside of the airtight container.

    Laser chamber with metal damper member

    公开(公告)号:US10965085B2

    公开(公告)日:2021-03-30

    申请号:US15864017

    申请日:2018-01-08

    Abstract: A laser chamber may include a first discharge electrode, a second discharge electrode, a fan making a laser gas flow through a discharge space between the first and second discharge electrodes, a first insulating member disposed on upstream side and downstream side of the first discharge electrode in the laser gas flow, a first metal damper member disposed on upstream side of the second discharge electrode and a second insulating member disposed on downstream side of the second discharge electrode in the laser gas flow, and a second metal damper member disposed on downstream side of the second insulating member in the laser gas flow. In a boundary portion between the second metal damper member and the second insulating member, a first discharge space side surface of the second metal damper member may be located further toward the opposite side to the discharge space than a second discharge space side surface of the second insulating member. A first corner formed by the first surface and a first side surface of the second metal damper member, the first side surface being on the side of the second insulating member, may be in contact with a second side surface of the second insulating member, the second side surface being on the side of the second metal damper member.

    LASER DEVICE
    9.
    发明申请
    LASER DEVICE 审中-公开

    公开(公告)号:US20190173258A1

    公开(公告)日:2019-06-06

    申请号:US16266279

    申请日:2019-02-04

    Abstract: Provided is a laser device that includes a laser chamber in which a pair of discharge electrodes are disposed; a line narrowing optical system including a grating disposed in a position outside the laser chamber; a beam expander optical system that increases a diameter of a light beam, outputted from the laser chamber and traveling toward the grating, in a first direction parallel to a discharge direction between the discharge electrodes and in a second direction orthogonal to the discharge direction; and a holding platform that is formed as a component separate from the laser chamber and the grating, holds the beam expander optical system, and forms along with the beam expander optical system a beam expander unit.

    Laser apparatus and extreme ultraviolet light generation apparatus

    公开(公告)号:US10211589B2

    公开(公告)日:2019-02-19

    申请号:US15552730

    申请日:2016-04-20

    Abstract: Kinematic mounts have three points having zero degree of freedom, one degree of freedom, and two degrees of freedom, respectively. As viewed from a direction perpendicular to a plane containing the three points, an extension of an entrance optical axis of a laser beam to an amplifying apparatus or an extension of an exit optical axis from the amplifying apparatus is oriented to the point with the zero degree of freedom. A translational direction of the point with the one degree of freedom is oriented to the point with the zero degree of freedom. One of the extension of the entrance optical axis and the extension of the exist optical axis passes on a side closer to the point with the two degrees of freedom with respect to a side of the point with the one degree of freedom.

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