公开(公告)号：US07470908B2

公开(公告)日：2008-12-30

申请号：US11751702

申请日：2007-05-22

申请人： Takamasa Ishii ,  Chiori Mochizuki ,  Minoru Watanabe

发明人： Takamasa Ishii ,  Chiori Mochizuki ,  Minoru Watanabe

IPC分类号： G01T1/24

CPC分类号： H01L27/14643 ,  G01T1/2018 ,  G01T1/24 ,  H01L27/14603 ,  H01L27/14632 ,  H01L27/14663 ,  H01L27/14692 ,  H01L31/105

摘要： A radiation imaging apparatus has a pixel region arranged on a substrate. Arranged in a matrix pattern in the pixel region are pixels, each pixel including a conversion element which converts radiation to electrical charges, and a switching element which is connected to the conversion element therein. The radiation imaging apparatus has, in a region outside the pixel region of the substrate, an intersection at which a signal line connected to the switching element and a bias line connected to the conversion element intersects. At the intersection, a semiconductor layer is arranged between the signal line and the bias line, and a carrier blocking portion is arranged between the semiconductor layer and the signal line.

摘要翻译： 放射线成像装置具有布置在基板上的像素区域。 在像素区域中以矩阵图案排列的是像素，每个像素包括将辐射转换成电荷的转换元件，以及连接到转换元件的开关元件。 放射线摄像装置在基板的像素区域外的区域中具有与开关元件连接的信号线和与转换元件连接的偏置线交叉的交点。 在交叉点处，在信号线和偏置线之间设置半导体层，并且在半导体层和信号线之间配置载流子阻挡部。

公开(公告)号：US20070176216A1

公开(公告)日：2007-08-02

申请号：US11625412

申请日：2007-01-22

申请人： Minoru Watanabe ,  Chiori Mochizuki ,  Takamasa Ishii

发明人： Minoru Watanabe ,  Chiori Mochizuki ,  Takamasa Ishii

IPC分类号： H01L31/113

CPC分类号： H01L27/14603 ,  H01L27/1462 ,  H01L27/14632 ,  H01L27/14665 ,  H01L27/14685 ,  H01L27/14687 ,  H01L27/14692

摘要： An imaging apparatus is provided in which a plurality of pixels, each having a conversion element and a thin-film transistor, are arranged in a two-dimensional fashion on an insulating substrate; the photoelectric conversion element is arranged over the thin-film transistor, with an insulating film, which serves as an interlayer insulating film, inserted between the conversion element and the thin-film transistor; and by way of a contact hole portion provided in the insulating film, the source electrode or the drain electrode of the thin-film transistor and the photoelectric conversion element are connected with each other. The imaging apparatus has a pixel in which the contact hole portion is removed through a laser-beam irradiation so that the connection portion between the conversion element and a conductive layer, which serves as the source electrode or the drain electrode of the thin-film transistor, is discontinued.

摘要翻译： 提供了一种成像装置，其中具有转换元件和薄膜晶体管的多个像素以二维方式布置在绝缘基板上; 光电转换元件布置在薄膜晶体管的上方，并且插入在转换元件和薄膜晶体管之间的绝缘膜，其用作层间绝缘膜; 并且通过设置在绝缘膜中的接触孔部分，薄膜晶体管的源电极或漏电极和光电转换元件彼此连接。 成像装置具有像素，其中通过激光束照射去除接触孔部分，使得转换元件和用作薄膜晶体管的源电极或漏电极的导电层之间的连接部分 ，停产。

公开(公告)号：US6049074A

公开(公告)日：2000-04-11

申请号：US379630

申请日：1999-08-24

申请人： Tadao Endo ,  Akira Funakoshi ,  Akira Tago ,  Shinichi Takeda ,  Eiichi Takami ,  Masakazu Morishita ,  Shinichi Hayashi ,  Chiori Mochizuki ,  Toshikazu Tamura ,  Minoru Watanabe

发明人： Tadao Endo ,  Akira Funakoshi ,  Akira Tago ,  Shinichi Takeda ,  Eiichi Takami ,  Masakazu Morishita ,  Shinichi Hayashi ,  Chiori Mochizuki ,  Toshikazu Tamura ,  Minoru Watanabe

IPC分类号： G01T1/20 ,  H01J35/10 ,  H01L27/00 ,  H01L27/14 ,  H01L27/144 ,  H01L27/146 ,  H01L31/02 ,  H01L31/0232 ,  H01L31/115 ,  H04N5/32

CPC分类号： H01L27/14663 ,  H01L27/1446 ,  H01L27/14618 ,  H01L27/14623 ,  H01L27/14634 ,  H01L27/14636 ,  H01L27/14676 ,  H01L31/02 ,  H01L31/02322 ,  H01L31/024 ,  H01L31/085 ,  H01L31/115 ,  H01L2924/0002 ,  H04N5/32

摘要： In a photoelectric conversion device including peripheral ICs, the peripheral ICs are in thermal contact with a substrate having photoelectric conversion elements and a chassis, which covers the peripheral ICs and has high thermal conductivity, via a thermal conductive member, so as to eliminate adverse influences of heat produced by the peripheral ICs such as a low S/N ratio.

摘要翻译： 在包括外围IC的光电转换装置中，外围IC通过导热部件与具有光电转换元件的基板和底板热接触，该基板覆盖外围IC并具有高导热性，以消除不利影响 的外部IC产生的热量，例如低S / N比。

公开(公告)号：US08785873B2

公开(公告)日：2014-07-22

申请号：US13049975

申请日：2011-03-17

申请人： Chiori Mochizuki ,  Minoru Watanabe ,  Takamasa Ishii ,  Jun Kawanabe ,  Kentaro Fujiyoshi

发明人： Chiori Mochizuki ,  Minoru Watanabe ,  Takamasa Ishii ,  Jun Kawanabe ,  Kentaro Fujiyoshi

IPC分类号： G01T1/20

CPC分类号： H01L27/14663 ,  H01L27/14665 ,  H01L31/18

摘要： A detection apparatus comprising a substrate; a switching element arranged over the substrate and including a plurality of electrodes; a conductive line arranged over the substrate and electrically connected to a first electrode of the plurality of electrodes of the switching element; and a conversion element including a semiconductor layer arranged over the switching element and the conductive line and arranged between two electrodes, one electrode of the two electrodes being electrically connected to a second electrode of the plurality of electrodes of the switching element, is provided. The one electrode of the conversion element is arranged over the switching element and the conductive line through a space formed between the one electrode and the first electrode of the switching element or between the one electrode and the conductive line.

摘要翻译： 一种检测装置，包括：基板; 布置在所述基板上并包括多个电极的开关元件; 布置在所述基板上并与所述开关元件的所述多个电极中的第一电极电连接的导电线; 以及转换元件，其包括布置在所述开关元件和所述导电线上并且布置在两个电极之间的半导体层，所述两个电极的一个电极电连接到所述开关元件的所述多个电极中的第二电极。 转换元件的一个电极通过形成在开关元件的一个电极和第一电极之间的空间或者在一个电极和导电线之间的空间设置在开关元件和导线之上。

公开(公告)号：US08440977B2

公开(公告)日：2013-05-14

申请号：US12676352

申请日：2008-11-04

申请人： Takamasa Ishii ,  Chiori Mochizuki ,  Minoru Watanabe

发明人： Takamasa Ishii ,  Chiori Mochizuki ,  Minoru Watanabe

IPC分类号： H01L27/146

CPC分类号： H01L27/14663

摘要： The object of the invention is to realize a light radiation-detecting apparatus including a step of preparing a matrix array including a substrate, an insulating layer arranged on the substrate, a plurality of pixels arranged on the insulating layer, wherein the pixel includes a conversion element converting an incident radiation into an electric signal, and connection electrode arranged at a periphery of the plurality of pixels, fixing a flexible supporting member for covering the plurality of pixels to the matrix array at a side opposite to the substrate, and releasing the substrate from the matrix array.

摘要翻译： 本发明的目的是实现一种光辐射检测装置，包括准备包括衬底，布置在衬底上的绝缘层，布置在绝缘层上的多个像素的矩阵阵列的步骤，其中像素包括转换 元件将入射辐射转换为电信号，以及连接电极，布置在多个像素的周围，将与多个像素覆盖的柔性支撑部件固定在与基板相对的一侧的矩阵阵列，并且释放基板 从矩阵数组。

公开(公告)号：US20120032088A1

公开(公告)日：2012-02-09

申请号：US13195535

申请日：2011-08-01

申请人： Takamasa Ishii ,  Chiori Mochizuki ,  Minoru Watanabe ,  Jun Kawanabe ,  Kentaro Fujiyoshi ,  Hiroshi Wayama

发明人： Takamasa Ishii ,  Chiori Mochizuki ,  Minoru Watanabe ,  Jun Kawanabe ,  Kentaro Fujiyoshi ,  Hiroshi Wayama

IPC分类号： G01T1/24 ,  G01J1/42 ,  G01T1/16

CPC分类号： G01T1/242 ,  G01T1/24 ,  H01L27/14636 ,  H01L27/14663 ,  H01L31/113 ,  H04N5/32

摘要： A stacked-type detection apparatus including a plurality of pixels arranged at small intervals is configured to have low capacitance associated with signal lines and/or driving lines. With this novel configuration, small time constant and high-speed driving capability can be achieved in the signal lines and/or driving lines. The plurality of pixels in the detection apparatus are arranged in a row direction and a column direction on an insulating substrate. Each pixel includes a conversion element and a switch element, the conversion element is disposed above the switch element. A driving line disposed below the conversion elements is connected to switch elements arranged in the row direction, and a signal line is connected to switch elements arranged in the column direction. The signal line includes a conductive layer embedded in an insulating member, the insulating member is disposed in a layer lower than an uppermost surface portion of the driving line.

摘要翻译： 包括以小间隔排列的多个像素的层叠型检测装置被配置为具有与信号线和/或驱动线相关联的低电容。 利用这种新颖的结构，可以在信号线路和/或驱动线路中实现小的时间常数和高速驱动能力。 检测装置中的多个像素在绝缘基板上排列成行方向和列方向。 每个像素包括转换元件和开关元件，转换元件设置在开关元件上方。 设置在转换元件下方的驱动线连接到沿行方向布置的开关元件，并且信号线连接到沿列方向布置的开关元件。 信号线包括嵌入在绝缘构件中的导电层，绝缘构件设置在比驱动线的最上表面部分低的层中。

公开(公告)号：US07723136B2

公开(公告)日：2010-05-25

申请号：US12273602

申请日：2008-11-19

申请人： Minoru Watanabe ,  Chiori Mochizuki ,  Takamasa Ishii

发明人： Minoru Watanabe ,  Chiori Mochizuki ,  Takamasa Ishii

IPC分类号： H01L21/00

CPC分类号： H01L27/14603 ,  H01L27/1462 ,  H01L27/14632 ,  H01L27/14665 ,  H01L27/14685 ,  H01L27/14687 ,  H01L27/14692

摘要： An imaging apparatus is provided in which a plurality of pixels, each having a conversion element and a thin-film transistor, are arranged in a two-dimensional fashion on an insulating substrate; the photoelectric conversion element is arranged over the thin-film transistor, with an insulating film, which serves as an interlayer insulating film, inserted between the conversion element and the thin-film transistor; and by way of a contact hole portion provided in the insulating film, the source electrode or the drain electrode of the thin-film transistor and the photoelectric conversion element are connected with each other. The imaging apparatus has a pixel in which the contact hole portion is removed through a laser-beam irradiation so that the connection portion between the conversion element and a conductive layer, which serves as the source electrode or the drain electrode of the thin-film transistor, is discontinued.

摘要翻译： 提供了一种成像装置，其中具有转换元件和薄膜晶体管的多个像素以二维方式布置在绝缘基板上; 光电转换元件布置在薄膜晶体管的上方，并且插入在转换元件和薄膜晶体管之间的绝缘膜，其用作层间绝缘膜; 并且通过设置在绝缘膜中的接触孔部分，薄膜晶体管的源电极或漏电极和光电转换元件彼此连接。 成像装置具有像素，其中通过激光束照射去除接触孔部分，使得转换元件和用作薄膜晶体管的源电极或漏电极的导电层之间的连接部分 ，停产。

公开(公告)号：US20100001194A1

公开(公告)日：2010-01-07

申请号：US12493776

申请日：2009-06-29

申请人： Takamasa Ishii ,  Chiori Mochizuki ,  Minoru Watanabe

发明人： Takamasa Ishii ,  Chiori Mochizuki ,  Minoru Watanabe

IPC分类号： G01T1/24

CPC分类号： G01T1/2018

摘要： A radiation detection apparatus comprises a plurality of pixels each including a conversion element which converts incident radiation into a charge, a switching element which transfers the charge, and an interlayer insulation film disposed between the conversion element and the switching element, a gate line to drive the switching element, and a signal line located to intersect with the gate line and configured to read out the charge transferred from the switching element, wherein Ca≧ε0×ε×S/d and 7d≦P/2 is satisfied, where P is a pixel pitch, Ca is a sum total of coupling capacitances between the signal line and the gate line, S is an overlapping area of the signal line and the conversion element, d is a thickness of the interlayer insulation film, ε is a relative dielectric constant of the interlayer insulation film, and ε0 is a vacuum dielectric constant.

摘要翻译： 辐射检测装置包括多个像素，每个像素包括将入射辐射转换为电荷的转换元件，传送电荷的开关元件和设置在转换元件和开关元件之间的层间绝缘膜，驱动栅极线 所述开关元件和位于与所述栅极线相交并且被配置为读出从所述开关元件传送的电荷的信号线，其中满足Ca> = epsilonxSexS / d和7d <= P / 2，其中P是像素 间距，Ca是信号线和栅极线之间的耦合电容的总和，S是信号线和转换元件的重叠面积，d是层间绝缘膜的厚度，ε是相对介电常数 层间绝缘膜，ε0为真空介电常数。

公开(公告)号：US07642517B2

公开(公告)日：2010-01-05

申请号：US12210839

申请日：2008-09-15

申请人： Takamasa Ishii ,  Chiori Mochizuki ,  Minoru Watanabe

发明人： Takamasa Ishii ,  Chiori Mochizuki ,  Minoru Watanabe

IPC分类号： G01T1/24 ,  H01L25/065

CPC分类号： H01L27/14643 ,  G01T1/2018 ,  G01T1/24 ,  H01L27/14603 ,  H01L27/14632 ,  H01L27/14663 ,  H01L27/14692 ,  H01L31/105

摘要： A radiation imaging apparatus has a pixel region arranged on a substrate. Arranged in a matrix pattern in the pixel region are pixels, each pixel including a conversion element which converts radiation to electrical charges, and a switching element which is connected to the conversion element therein. The radiation imaging apparatus has, in a region outside the pixel region of the substrate, an intersection at which a signal line connected to the switching element and a bias line connected to the conversion element intersects. At the intersection, a semiconductor layer is arranged between the signal line and the bias line, and a carrier blocking portion is arranged between the semiconductor layer and the signal line.

摘要翻译： 放射线成像装置具有布置在基板上的像素区域。 在像素区域中以矩阵图案排列的是像素，每个像素包括将辐射转换成电荷的转换元件，以及连接到转换元件的开关元件。 放射线摄像装置在基板的像素区域外的区域中具有与开关元件连接的信号线和与转换元件连接的偏置线交叉的交点。 在交叉点处，在信号线和偏置线之间设置半导体层，并且在半导体层和信号线之间配置载流子阻挡部。

公开(公告)号：US07468531B2

公开(公告)日：2008-12-23

申请号：US11625412

申请日：2007-01-22

申请人： Minoru Watanabe ,  Chiori Mochizuki ,  Takamasa Ishii

发明人： Minoru Watanabe ,  Chiori Mochizuki ,  Takamasa Ishii

IPC分类号： H01L31/062 ,  H01L31/113

CPC分类号： H01L27/14603 ,  H01L27/1462 ,  H01L27/14632 ,  H01L27/14665 ,  H01L27/14685 ,  H01L27/14687 ,  H01L27/14692

摘要： An imaging apparatus is provided in which a plurality of pixels, each having a conversion element and a thin-film transistor, are arranged in a two-dimensional fashion on an insulating substrate; the photoelectric conversion element is arranged over the thin-film transistor, with an insulating film, which serves as an interlayer insulating film, inserted between the conversion element and the thin-film transistor; and by way of a contact hole portion provided in the insulating film, the source electrode or the drain electrode of the thin-film transistor and the photoelectric conversion element are connected with each other. The imaging apparatus has a pixel in which the contact hole portion is removed through a laser-beam irradiation so that the connection portion between the conversion element and a conductive layer, which serves as the source electrode or the drain electrode of the thin-film transistor, is discontinued.

摘要翻译： 提供了一种成像装置，其中具有转换元件和薄膜晶体管的多个像素以二维方式布置在绝缘基板上; 光电转换元件布置在薄膜晶体管的上方，并且插入在转换元件和薄膜晶体管之间的绝缘膜，其用作层间绝缘膜; 并且通过设置在绝缘膜中的接触孔部分，薄膜晶体管的源电极或漏电极和光电转换元件彼此连接。 成像装置具有像素，其中通过激光束照射去除接触孔部分，使得转换元件和用作薄膜晶体管的源电极或漏电极的导电层之间的连接部分 ，停产。