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219 条记录 (耗时 0.033 秒)

    Asymmetric fabry-perot modulator with a micromechanical phase compensating cavity
    91.
    发明授权
    Asymmetric fabry-perot modulator with a micromechanical phase compensating cavity 失效
    具有微机械相位补偿腔的不对称fabry-perot调制器

    公开(公告)号：US06819466B2

    公开(公告)日：2004-11-16

    申请号：US10036125

    申请日：2001-12-26

    申请人： Parviz Tayebati

    发明人： Parviz Tayebati

    IPC分类号： G02F103

    CPC分类号： B82Y20/00 ,  G02F1/01708

    摘要： An asymmetric Fabry-Perot modulator is disclosed having an adjustable resonant cavity length. A preferred embodiment of the invention includes an asymmetric Fabry-Perot modulator having a first reflector adjustably mounted to another portion of the modulator containing a second reflector. The length of the resonant cavity is adjusted by microelectomechanically changing the distance from the first reflector to the second reflector. In turn, this change of the resonant cavity length may tune the modulator to an optimal wavelength corresponding to the electro-absorptance material in the modulator.

    摘要翻译： 公开了具有可调谐谐振腔长度的非对称法布里 - 珀罗调制器。 本发明的优选实施例包括不对称法布里 - 珀罗调制器，其具有可调节地安装到包含第二反射器的调制器的另一部分的第一反射器。 通过微电子机械地改变从第一反射器到第二反射器的距离来调节谐振腔的长度。 反过来，谐振腔长度的这种变化可以将调制器调谐到对应于调制器中的电吸收材料的最佳波长。

    Single mode operation of microelectromechanically tunable, half-symmetric, vertical cavity surface emitting lasers
    92.
    发明授权
    Single mode operation of microelectromechanically tunable, half-symmetric, vertical cavity surface emitting lasers 失效
    微机电可调谐，半对称，垂直腔表面发射激光器的单模操作

    公开(公告)号：US06744805B2

    公开(公告)日：2004-06-01

    申请号：US10255401

    申请日：2002-09-26

    申请人： Peidong Wang ,  Parviz Tayebati ,  Daryoosh Vakhshoori

    发明人： Peidong Wang ,  Parviz Tayebati ,  Daryoosh Vakhshoori

    IPC分类号： H01S308

    CPC分类号： H01S5/18366 ,  H01S5/18308 ,  H01S5/18311 ,  H01S5/18388 ,  H01S2301/163 ,  H01S2301/166

    摘要： A method is provided for fabricating microelectromechanically tunable vertical-cavity surface-emitting lasers with precise lateral and vertical dimensional control. Microelectromechanical tunable vertical cavity surface emitting laser structures are also provided which include a suspended membrane structure made of a dielectric/metal membrane or metal film that supports a cavity-tuning reflective dielectric film stack while being anchored at the perimeter by metal support post(s). Tuning is achieved by translational movement of the cavity-tuning reflective dielectric film stack in a controlled electrostatic field. The current invention deals with the intracavity electrical contacts for current injection for this type of MEM-tunable VCSEL's. The current invention also includes various mechanisms to control the current injection profile so as to ensure single mode operation throughout the tuning range of the MEM-tunable VCSEL's.

    摘要翻译： 提供了一种用于制造具有精确横向和垂直尺寸控制的微机电可调垂直腔表面发射激光器的方法。 还提供了微电子机械可调谐垂直腔表面发射激光器结构，其包括由电介质/金属膜或金属膜制成的悬浮膜结构，该膜结构在通过金属支撑柱在周边锚定的同时支撑腔调谐反射介电膜堆叠， 。 调谐是通过腔调谐反射介电膜堆叠在受控静电场中的平移运动来实现的。 本发明涉及用于这种MEM可调谐VCSEL的电流注入的腔内电触头。 本发明还包括控制电流注入分布的各种机制，以确保在MEM可调VCSEL的整个调谐范围内的单模操作。

    Double etalon optical wavelength reference device
    94.
    发明授权
    Double etalon optical wavelength reference device 有权
    双标准光波长参考装置

    公开(公告)号：US06498800B1

    公开(公告)日：2002-12-24

    申请号：US09636807

    申请日：2000-08-10

    申请人： Reich Watterson ,  Parviz Tayebati ,  Don McDaniel ,  Kevin McCallion

    发明人： Reich Watterson ,  Parviz Tayebati ,  Don McDaniel ,  Kevin McCallion

    IPC分类号： H01S310

    CPC分类号： G01J9/0246 ,  G01J2009/0257 ,  H01S5/0078 ,  H01S5/0687 ,  H01S5/18366 ,  H01S5/18388

    摘要： A compact wavelength monitoring and control assembly for a narrow band (i.e., laser) source is provided, comprising two narrow bandpass, wavelength selective transmission filter elements of Fabry-Perot structure through which two separate collimated beams from a laser source are directed onto two photodetectors. The spacing of the multiple transmission maxima for one etalon is chosen to match that of the desired set of frequencies to be used for locking purposes. The spacing of the transmission maxima for the second etalon is used, in combination with a dielectric filter, to generate a wavelength fiducial to denote an absolute frequency. The spacing of the second etalon is chosen to be much wider than the frequency grid etalon. A control circuit processes the simultaneously acquired signals from the two detectors as the laser wavelength is varied. The device functions as an optical wavelength discriminator in which the detectors convert optical energy to current (or voltage) for a feedback loop for controlling the laser source. Any one of a large number of discrete, predetermined wavelengths may be chosen for locking using the same device. The system is compact and may be packaged within the same temperature controlled laser assembly for maximum performance and minimum circuit board space requirements.

    摘要翻译： 提供了一种用于窄带（即激光）源的紧凑型波长监视和控制组件，其包括法布里 - 珀罗结构的两个窄带通波长选择性透射滤波器元件，来自激光源的两个分离的准直光束通过该组件被引导到两个光电检测器 。 选择一个标准具的多个传输最大值的间距以匹配要用于锁定目的的期望频率组的间隔。 与介质滤波器组合使用第二标准具的透射最大值的间隔以产生表示绝对频率的波长基准。 第二个标准具的间距被选择为比频率网格标准具宽得多。 当激光波长变化时，控制电路处理来自两个检测器的同时采集的信号。 该器件用作光学波长鉴别器，其中检测器将光能转换成用于控制激光源的反馈回路的电流（或电压）。 可以选择大量离散的预定波长中的任何一个用于使用相同的装置进行锁定。 该系统紧凑，可以封装在相同的温度控制激光器组件中，以实现最大的性能和最小的电路板空间要求。

    Electrically tunable fabry-perot structure utilizing a deformable multi-layer mirror and method of making the same
    95.
    发明授权
    Electrically tunable fabry-perot structure utilizing a deformable multi-layer mirror and method of making the same 失效
    利用可变形多层反射镜进行电可调节的fabry-perot结构及其制作方法

    公开(公告)号：US06324192B1

    公开(公告)日：2001-11-27

    申请号：US09059877

    申请日：1998-04-14

    申请人： Parviz Tayebati

    发明人： Parviz Tayebati

    IPC分类号： H01S310

    CPC分类号： G02B26/0841 ,  G02B26/001 ,  G02B26/002 ,  H01S5/0614 ,  H01S5/18363 ,  H01S5/18366 ,  H01S5/18372

    摘要： An electrically tunable Fabry-Perot structure using a deformable multi-layer mirror construction wherein Ga1−aAlaAs, where a 0.96, and a material selected from the group consisting of either Ga1−zAlzAs, where 0.7>Z>0, or Ga1−yAlyAs/Ga1−zAlzAs/Ga1−yAlyAs, where 0.7>Z>0 and y>0.5. The Ga1−xAlxAs is wet oxidized by exposing its edge to water in a nitrogen or helium atmosphere at a temperature of between about 360° C. and 450° C. so as to transform it to AlOx. The resulting AlOx layers abut the sacrificial layer and act as etch stops during the formation of a cantilever Fabry-Perot structure by etching of the sacrificial layer.

    摘要翻译： 使用可变形多层反射镜结构的电可调法布里 - 珀罗结构，其中使用Ga1-aAlaAs（其中a <0.1）作为可以使用柠檬酸附魔选择性去除的牺牲层。 多层反射镜由N和M周期的四分之一波长层组成，其中N和M是整数，或整数加上1/2。 此外，反射镜由Ga1-xAlxAs的交替层制成，其中X> 0.96，以及选自Ga1-zAlzAs，其中0.7> Z> 0或Ga1-yAlyAs / Ga1-zAlzAs / Ga1的材料 -yAlyAs，其中0.7> Z> 0且y> 0.5。 将Ga1-xAlxAs在氮或氦气氛中在约360℃至450℃的温度下将其边缘暴露于水中进行湿式氧化，从而将其转化为AlOx。 所产生的AlO x层邻接牺牲层，并且通过蚀刻牺牲层在形成悬臂法布里 - 珀罗结构期间作为蚀刻停止。