公开(公告)号：US4954717A

公开(公告)日：1990-09-04

申请号：US283982

申请日：1988-12-13

申请人： Kiichi Sakamoto ,  Hiroshi Yasuda ,  Akio Yamada ,  Jinko Kudou

发明人： Kiichi Sakamoto ,  Hiroshi Yasuda ,  Akio Yamada ,  Jinko Kudou

IPC分类号： G03F1/00 ,  G03F7/20 ,  H01J1/34 ,  H01J37/317 ,  H01L21/027

CPC分类号： B82Y10/00 ,  B82Y40/00 ,  H01J1/34 ,  H01J37/3175 ,  H01J2201/3425 ,  H01J2237/31779

摘要： A photoelectron mask for photo cathode image projection includes a transparent substrate, and a pattern formed on a main surface of the transparent substrate. The pattern includes a non-transparent material. The mask also includes a photoelectron emission film formed so as to cover the main surface of the transparent substrate on which the pattern is formed. The photoelectron emission film includes a material selected from the group consisting of pure platinum, a platinum-rich material containing platinum as the major component, and a platinum compound.

公开(公告)号：US4891524A

公开(公告)日：1990-01-02

申请号：US243274

申请日：1988-09-12

申请人： Hiroshi Yasuda ,  Masahiko Suzuki, deceased

发明人： Hiroshi Yasuda ,  Masahiko Suzuki, deceased

IPC分类号： G03F7/20 ,  H01J37/304 ,  H01J37/317 ,  H01L21/027

CPC分类号： B82Y10/00 ,  B82Y40/00 ,  H01J37/304 ,  H01J37/3174 ,  H01J2237/0209 ,  H01J2237/30461 ,  H01J2237/31766

摘要： A method for compensating for an eddy current effect due to leakage flux of a magnetic lens in a charged particle beam exposure system, and a system for exposing the beam on a substrate while a stage carrying the substrate is moving. By employing this method and system, a step and repeat system can be operated while the stage is moving, while improving the throughput of the system. A deviation in the path of the charged particle beam caused by the eddy current is proportional to the velocity of the stage. To compensate for this, a proportional constant relating the deviation to the velocity of the stage is measured in advance, and a correction term which is a product of the speed of the stage and the proportional constant, is fed back to a deflector of the charged particle beam. The proportional constant is obtained from a shift of an image of a test pattern viewed on a CRT in a SEM mode, from a first position at which the stage is stationary to a second position while the stage is moving at a constant speed.

公开(公告)号：US4868821A

公开(公告)日：1989-09-19

申请号：US144462

申请日：1988-01-19

申请人： Masashi Ito ,  Toshiki Matsuno ,  Hiroyuki Nakamura ,  Hiroshi Yasuda

发明人： Masashi Ito ,  Toshiki Matsuno ,  Hiroyuki Nakamura ,  Hiroshi Yasuda

IPC分类号： G11B7/08

CPC分类号： G11B7/08

摘要： The movable range of an objective of an optical pickup device used in optical disc reproducing apparatus is increased and the size of the device is reduced by moving the objective solely or in combination with a collimating lens system in that range. The objective and collimating lens systems are integrated into a lens holder and located in the path of a diverging beam of a semiconductor laser.

摘要翻译： 在光盘再现装置中使用的光学拾取装置的物镜的可移动范围增加，并且仅通过在该范围内与准直透镜系统组合移动目标来减小装置的尺寸。 物镜和准直透镜系统被集成到透镜架中并且位于半导体激光器的发散光束的路径中。

公开(公告)号：US4782585A

公开(公告)日：1988-11-08

申请号：US425256

申请日：1982-09-28

申请人： Kenji Kobayashi ,  Tetsunari Kawase ,  Sadao Furuya ,  Hiroshi Yasuda

发明人： Kenji Kobayashi ,  Tetsunari Kawase ,  Sadao Furuya ,  Hiroshi Yasuda

IPC分类号： H01M4/73 ,  H01M4/82 ,  H01M4/72

CPC分类号： H01M4/73 ,  H01M4/82 ,  Y10T29/10 ,  Y10T29/49115

摘要： A grid has a grid structure (11) made of acid proof synthetic resin. A grid rib structure constitutes the grid structure and part of the grid rib structure inclusive of at least a connector lug (12) and a portion contiguous thereto is immersed in molten lead or lead alloy to form a lead or lead alloy film (16) coated on the grid structure. The portion to be coated with the lead or lead alloy film includes part of a frame rib (13) and an active material support rib (14, 15) which constitute the grid rib structure, and the active material support rib constituting the grid mesh is partly cut off (18) to enhance the coating of the lead or lead alloy film, the reduction in weight of the grid and ease of working for the coating of the lead or lead alloy film on the grid structure.

摘要翻译： 栅格具有由耐酸合成树脂制成的栅格结构（11）。 网格肋结构构成网格结构，并且网格肋结构的一部分包括至少一个连接器凸耳（12），并且与其相邻的部分浸入熔融的铅或铅合金中以形成涂覆的铅或铅合金膜（16） 在网格结构上。 用铅或铅合金膜涂覆的部分包括构成网格肋结构的框架肋（13）和活性材料支撑肋（14,15）的一部分，构成网格的活性材料支撑肋是 部分切断（18）以增强铅或铅合金膜的涂层，减小栅格重量，并且易于在栅格结构上涂覆铅或铅合金膜。

公开(公告)号：US4739801A

公开(公告)日：1988-04-26

申请号：US849029

申请日：1986-04-07

申请人： Akira Kimura ,  Nobuo Kitao ,  Hiroshi Yasuda ,  Yoshimasa Shimomura ,  Kiyoshi Isozaki ,  Hiroshi Nishimura

发明人： Akira Kimura ,  Nobuo Kitao ,  Hiroshi Yasuda ,  Yoshimasa Shimomura ,  Kiyoshi Isozaki ,  Hiroshi Nishimura

IPC分类号： F16G13/10 ,  F16G13/16 ,  F16L11/18 ,  G02B6/44 ,  H02G11/00 ,  F16L27/04

CPC分类号： H02G3/0475 ,  F16G13/10 ,  F16G13/16 ,  F16L3/015 ,  F16L57/02 ,  G02B6/4461 ,  H02G11/00 ,  H02G11/006 ,  Y10S285/921 ,  Y10T403/32032

摘要： A universally articulable supporting sheath comprises an interconnected series of links, each having a convex spherical surface at one end, and a concave spherical surface at its opposite end. The concave and convex surfaces mate with one another to form the sheath. Special links having branch openings may be provided. Various forms of waterproofing seals are provided, including O-rings, axially compressed rings, flexible belts, and ridges on the spherical surfaces. The links can be fitted together by thermal expansion. However, an axilly split link is also described, which comprises two parts which snap together. The split parts may be molded as a unit with an integral thin wall hinge. The bending characteristics and bending radius of a sheath can be modified by insertion of spacers between the links at selected locations, or by the insertion of pins into radial holes provided in the links. Spacers with tongues may be used to prevent rotation of the links about the sheath axis, while allowing unidirectional articulation. Projections on one of a pair of mating spherical surfaces can be engaged with holes, slots or recesses of rectangular or other shapes to produce various limits on articulation and rotation. A single link may be provided iwth several alternatively usable holes, recesses and the like. The outer surface of a link can be provided iwth an axial extension engageable with a surface of an adjoining link to prevent back bending, or to prevent bending altogether.

摘要翻译： 普遍关节的支撑护套包括互连的连接系列，每个连杆在一端具有凸形球形表面，在其相对端具有凹形球形表面。 凹凸表面彼此配合形成护套。 可以提供具有分支开口的特殊连接。 提供各种形式的防水密封件，包括O形圈，轴向压缩环，柔性带和球形表面上的脊。 连杆可以通过热膨胀装配在一起。 然而，还描述了一种轴向分离连杆，其包括两部分组合在一起。 分开的部件可以被模制成具有整体薄壁铰链的单元。 护套的弯曲特性和弯曲半径可以通过在选定位置处的连杆之间插入间隔件，或者通过将销插入设置在连杆中的径向孔中来改变。 可以使用具有舌头的间隔器来防止链节围绕护套轴线的旋转，同时允许单向铰接。 一对配对球面之一上的突起可以与矩形或其它形状的孔，槽或凹槽接合，以产生铰接和旋转的各种限制。 单个链接可以提供几个可选择的可用孔，凹槽等。 连杆的外表面可以设置在与邻接连杆的表面接合的轴向延伸部，以防止后弯曲，或者完全防止弯曲。

公开(公告)号：US4687949A

公开(公告)日：1987-08-18

申请号：US795256

申请日：1985-11-05

申请人： Hiroshi Yasuda

发明人： Hiroshi Yasuda

IPC分类号： H01L21/768 ,  G11C11/401 ,  H01L23/522 ,  H01L23/64 ,  H01L27/00 ,  H03K17/56 ,  H03K5/13 ,  H03K5/159 ,  H03K17/28

CPC分类号： H01L23/64 ,  H01L23/5222 ,  H01L2924/0002

摘要： A signal transmission circuit includes an input pad for receiving an input signal, a resistor connected at one end to the input pad, and a signal transmission line connected at the input end to the other end of the resistor, and at the output end to an internal circuit. The signal transmission circuit further includes an auxiliary line connected at the input end to the input pad, floating electrically at the output end, and extending substantially in parallel with the transmission line.

摘要翻译： 信号传输电路包括用于接收输入信号的输入焊盘，一端连接到输入焊盘的电阻器和在输入端连接到电阻器的另一端的信号传输线，在输出端连接到 内部电路 信号传输电路还包括在输入端连接到输入焊盘的辅助线，其在输出端处电气浮动，并且基本上与传输线平行地延伸。

公开(公告)号：US4646283A

公开(公告)日：1987-02-24

申请号：US700818

申请日：1985-01-29

申请人： Masashi Ito ,  Hiroshi Yasuda ,  Hiroyuki Nakamura ,  Toshiki Matsuno

发明人： Masashi Ito ,  Hiroshi Yasuda ,  Hiroyuki Nakamura ,  Toshiki Matsuno

IPC分类号： G11B7/09 ,  G11B7/22 ,  G11B7/08

CPC分类号： G11B7/22 ,  G11B7/0932 ,  G11B7/0933

摘要： Disclosed is an objective lens driving apparatus having a holder 9 holding an objective lens 1 and connected to a base 17 through at least four linear members 13, such that the holder 9 can be moved both in the focussing direction and in the tracking direction orthogonal to the focussing direction through the flexing of the linear members 13. Undesirable local resonance can be suppressed due to the use of the linear members 13 in support of the holder 9.

摘要翻译： PCT No.PCT / JP84 / 00275 Sec。 371日期1985年1月29日第 102（e）日期1985年1月29日PCT提交1984年5月29日PCT公布。 公开号WO84 / 04841 日期为1984年12月6日。公开的是一种物镜驱动装置，其具有保持物体1并通过至少四个直线构件13连接到基座17的保持器9，使得保持器9可以在聚焦方向 并且通过线性构件13的弯曲在与聚焦方向正交的跟踪方向上。由于使用支撑保持器9的直线构件13，可以抑制不期望的局部共振。

公开(公告)号：US4583077A

公开(公告)日：1986-04-15

申请号：US536467

申请日：1983-09-27

申请人： Hiroshi Yasuda ,  Haruo Tsuchikawa

发明人： Hiroshi Yasuda ,  Haruo Tsuchikawa

IPC分类号： H01J37/305 ,  G03F7/20 ,  H01L21/027 ,  H01L21/30 ,  H03M1/00 ,  H03K13/05

CPC分类号： H01L21/30 ,  H03M1/74

摘要： In a D/A converter in a deflection system of an electron beam exposure device, the most significant bits (m bits) of input digital data consisting of n bits are input into a decoder circuit, and 2.sup.m D/A converters which correspond to the m bits are provided. The data consisting of the least significant bits (n-m bits) is input into the 2.sup.m D/A converters via 2.sup.m gates, respectively. The decoder circuit is constructed so as to control the 2.sup.m gates so that when the content of the data of the m bits is S, the first to S-th data of the 2.sup.m D/A converters is all rendered to be "1", the data of the (S+1)-th D/A converter remains the same as the data of the n-m bits, and the data of the (S+2)-th and subsequent D/A converters is all rendered to be "0", the sum of the outputs of the 2.sup.m D/A converters being applied to a coil which deflects the electron beam.

摘要翻译： 在电子束曝光装置的偏转系统中的D / A转换器中，由n位组成的输入数字数据的最高有效位（m位）被输入到解码器电路中，对应于2m的D / A转换器 提供m位。 由最低有效位（n-m位）组成的数据分别通过2m个门输入到2m D / A转换器。 解码器电路被构造成控制2m个门，使得当m位的数据的内容为S时，2m D / A转换器的第一至第S数据全部变为“1” 第（S + 1）个D / A转换器的数据与nm位的数据保持相同，并且第（S + 2）和随后的D / A转换器的数据全部变为“ 0“，2m D / A转换器的输出之和被施加到偏转电子束的线圈上。

公开(公告)号：US4145597A

公开(公告)日：1979-03-20

申请号：US752989

申请日：1976-12-21

申请人： Hiroshi Yasuda

发明人： Hiroshi Yasuda

IPC分类号： H01L21/027 ,  H01J37/30 ,  H01J37/304 ,  H01J37/305 ,  B23K15/00

CPC分类号： H01J37/3007 ,  H01J37/3045

摘要： An electron beam lithographic system which exposes a desired area of an electron beam resist so as to form a desired pattern to be used for manufacturing large scale integrated circuits. This electron beam lithographic system provides a first and a second slit plate, respectively providing a rectangular slit so as to form an electron beam having a rectangular cross section, and a deflection means which deflects the electron beam passing the first slit so as to vary the cross section of the electron beam which passes the second slit. Therefore, electron beams having various cross sections can be obtained, so that the electron beam resist is exposed by the beam having various cross sections and the desired pattern can be formed within a short time on a wafer.

摘要翻译： 一种电子束光刻系统，其暴露电子束抗蚀剂的期望区域，以形成用于制造大规模集成电路的期望图案。 该电子束光刻系统提供分别提供矩形狭缝以形成具有矩形横截面的电子束的第一和第二狭缝板以及偏转通过第一狭缝的电子束的偏转装置，以便改变 通过第二狭缝的电子束的横截面。 因此，可以获得具有各种横截面的电子束，使得电子束抗蚀剂被具有各种截面的光束曝光，并且可以在短时间内在晶片上形成期望的图案。

公开(公告)号：US4105740A

公开(公告)日：1978-08-08

申请号：US536644

申请日：1974-12-26

申请人： Hiroshi Yasuda ,  Katsuya Tani ,  Jiro Nagatamo

发明人： Hiroshi Yasuda ,  Katsuya Tani ,  Jiro Nagatamo

IPC分类号： D01F6/62 ,  D02J1/22

CPC分类号： D01F6/62 ,  D02J1/22

摘要： Stretching polyester tows at a speed greater than 150 m/min., wherein more than 85 mol percent of the recurring units are units of ethylene terephthalate, is carried out at a stretch ratio satisfying the formula-1.58log(.DELTA.n .times. 10.sup.3) + 4.18 .ltoreq. DR .ltoreq. -2.32log(.DELTA.n .times. 10.sup.3) + 5.93Wherein .DELTA. n represents the birefringence of the unstretched filaments and is a value of from 0.020 to 0.100, and DR is the stretch ratio in times.

摘要翻译： 以大于150m / min的速度拉伸聚酯丝束，其中大于85mol％的重复单元是对苯二甲酸乙二醇酯的单元，以满足式-1.58LOG（DELTA N×103）+ 4.18