Devices having horizontally-disposed nanofabric articles and methods of making the same
    91.
    发明授权
    Devices having horizontally-disposed nanofabric articles and methods of making the same 有权
    具有水平布置的纳米制品的装置及其制造方法

    公开(公告)号:US07304357B2

    公开(公告)日:2007-12-04

    申请号:US11193795

    申请日:2005-07-29

    IPC分类号: H01L29/84

    摘要: New devices having horizontally-disposed nanofabric articles and methods of making same are described. A discrete electro-mechanical device includes a structure having an electrically-conductive trace. A defined patch of nanotube fabric is disposed in spaced relation to the trace; and the defined patch of nanotube fabric is electromechanically deflectable between a first and second state. In the first state, the nanotube article is in spaced relation relative to the trace, and in the second state the nanotube article is in contact with the trace. A low resistance signal path is in electrical communication with the defined patch of nanofabric. Under certain embodiments, the structure includes a defined gap into which the electrically conductive trace is disposed. The defined gap has a defined width, and the defined patch of nanotube fabric spans the gap and has a longitudinal extent that is slightly longer than the defined width of the gap. Under certain embodiments, a clamp is disposed at each of two ends of the nanotube fabric segment and disposed over at least a portion of the nanotube fabric segment substantially at the edges defining the gap. Under certain embodiments, the clamp is made of electrically-conductive material. Under certain embodiments, the contact between the nanotube patch and the trace is a non-volatile state. Under certain embodiments, the contact between the nanotube patch and the trace is a volatile state. Under certain embodiments, the at least one electrically conductive trace has an interface material to alter the attractive force between the nanotube fabric segment and the electrically conductive trace.

    摘要翻译: 描述了具有水平布置的纳米制品的新器件及其制造方法。 分立的机电装置包括具有导电迹线的结构。 定义的纳米管织物贴片与痕迹间隔开设置; 并且所述限定的纳米管织物片在第一和第二状态之间是机电偏转的。 在第一状态下,纳米管制品相对于迹线具有间隔的关系,并且在第二状态下,纳米管制品与痕迹接触。 低电阻信号路径与所定义的纳米片段电连通。 在某些实施例中,该结构包括限定的导电迹线设置的间隙。 限定的间隙具有限定的宽度,并且限定的纳米管织物片段跨过间隙并且具有比限定的间隙宽度稍长的纵向范围。 在某些实施例中,夹具设置在纳米管织物片段的两端中的每一个处,并且在纳米管织物片段的至少一部分上大致位于限定间隙的边缘处。 在某些实施例中,夹具由导电材料制成。 在某些实施方案中,纳米管贴片和迹线之间的接触是非挥发性状态。 在某些实施方案中,纳米管贴片和迹线之间的接触是挥发性状态。 在某些实施例中,至少一个导电迹线具有界面材料,以改变纳米管织物片段和导电迹线之间的吸引力。

    Devices having horizontally-disposed nanofabric articles and methods of making the same
    92.
    发明授权
    Devices having horizontally-disposed nanofabric articles and methods of making the same 有权
    具有水平布置的纳米制品的装置及其制造方法

    公开(公告)号:US07259410B2

    公开(公告)日:2007-08-21

    申请号:US10776059

    申请日:2004-02-11

    IPC分类号: H01L27/10

    摘要: New devices having horizontally-disposed nanofabric articles and methods of making same are described. A discrete electromechanical device includes a structure having an electrically-conductive trace. A defined patch of nanotube fabric is disposed in spaced relation to the trace; and the defined patch of nanotube fabric is electromechanically deflectable between a first and second state. In the first state, the nanotube article is in spaced relation relative to the trace, and in the second state the nanotube article is in contact with the trace. A low resistance signal path is in electrical communication with the defined patch of nanofabric. Under certain embodiments, the structure includes a defined gap into which the electrically conductive trace is disposed. The defined gap has a defined width, and the defined patch of nanotube fabric spans the gap and has a longitudinal extent that is slightly longer than the defined width of the gap. Under certain embodiments, a clamp is disposed at each of two ends of the nanotube fabric segment and disposed over at least a portion of the nanotube fabric segment substantially at the edges defining the gap. Under certain embodiments, the clamp is made of electrically-conductive material. Under certain embodiments, the contact between the nanotube patch and the trace is a non-volatile state. Under certain embodiments, the contact between the nanotube patch and the trace is a volatile state. Under certain embodiments, the at least one electrically conductive trace has an interface material to alter the attractive force between the nanotube fabric segment and the electrically conductive trace.

    摘要翻译: 描述了具有水平布置的纳米制品的新器件及其制造方法。 分立的机电装置包括具有导电迹线的结构。 定义的纳米管织物贴片与痕迹间隔开设置; 并且所述限定的纳米管织物片在第一和第二状态之间是机电偏转的。 在第一状态下,纳米管制品相对于迹线具有间隔的关系,并且在第二状态下,纳米管制品与痕迹接触。 低电阻信号路径与所定义的纳米片段电连通。 在某些实施例中,该结构包括限定的导电迹线设置的间隙。 限定的间隙具有限定的宽度,并且限定的纳米管织物片段跨过间隙并且具有比限定的间隙宽度稍长的纵向范围。 在某些实施例中,夹具设置在纳米管织物片段的两端中的每一个处,并且在纳米管织物片段的至少一部分上大致位于限定间隙的边缘处。 在某些实施例中,夹具由导电材料制成。 在某些实施方案中,纳米管贴片和迹线之间的接触是非挥发性状态。 在某些实施方案中,纳米管贴片和迹线之间的接触是挥发性状态。 在某些实施例中,至少一个导电迹线具有界面材料,以改变纳米管织物片段和导电迹线之间的吸引力。

    Devices having vertically-disposed nanofabric articles and methods of making the same
    93.
    发明授权
    Devices having vertically-disposed nanofabric articles and methods of making the same 有权
    具有垂直布置的纳米制品的装置及其制造方法

    公开(公告)号:US07112464B2

    公开(公告)日:2006-09-26

    申请号:US11158217

    申请日:2005-06-21

    IPC分类号: H01L21/00

    摘要: Electro-mechanical switches and memory cells using vertically-disposed nanofabric articles and methods of making the same are described. An electro-mechanical device, includes a structure having a major horizontal surface and a channel formed therein. A conductive trace is in the channel; and a nanotube article vertically suspended in the channel, in spaced relation to a vertical wall of the channel. The article is electro-mechanically deflectable in a horizontal direction toward the conductive trace. Under certain embodiments, the vertically suspended extent of the nanotube article is defined by a thin film process. Under certain embodiments, the vertically suspended extent of the nanotube article is about 50 nanometers or less. Under certain embodiments, the nanotube article is clamped with a conducting material disposed in porous spaces between some nanotubes of the nanotube article. Under certain embodiments, the nanotube article is formed from a porous nanofabric. Under certain embodiments, the nanotube article is electromechanically deflectable into contact with the conductive trace and the contact is either a volatile state or non-volatile state depending on the device construction. Under certain embodiments, the vertically oriented device is arranged into various forms of three-trace devices. Under certain embodiments, the channel may be used for multiple independent devices, or for devices that share a common electrode.

    摘要翻译: 描述了使用垂直布置的纳米制品的机电开关和存储单元及其制造方法。 机电装置包括具有主要水平表面和形成在其中的通道的结构。 通道中有导电迹线; 以及垂直悬挂在所述通道中的与所述通道的垂直壁成间隔开的纳米管制品。 该物品在水平方向上可电导向导电迹线偏转。 在某些实施方案中,纳米管制品的垂直悬浮程度由薄膜工艺限定。 在某些实施方案中,纳米管制品的垂直悬浮程度为约50纳米或更小。 在某些实施例中,纳米管制品被夹持在布置在纳米管制品的一些纳米管之间的多孔空间中的导电材料上。 在某些实施方案中,纳米管制品由多孔纳米纤维形成。 在某些实施例中,取决于器件结构,纳米管制品在机电上可偏转成与导电迹线接触,并且触点是易失性状态或非易失性状态。 在某些实施例中,垂直取向的装置被布置成各种形式的三轨迹装置。 在某些实施例中,信道可以用于多个独立设备,或者可以用于共享公共电极的设备。

    Reconfigurable devices containing carbon nanomaterials and methods for using same
    94.
    发明授权
    Reconfigurable devices containing carbon nanomaterials and methods for using same 有权
    含有碳纳米材料的可重构装置及其使用方法

    公开(公告)号:US08816706B1

    公开(公告)日:2014-08-26

    申请号:US13220592

    申请日:2011-08-29

    IPC分类号: G01R27/26 G01N27/00

    摘要: Methods for using carbon nanomaterials to alter the operational output of a device are described herein. The methods can include providing a device that contains a carbon nanomaterial in a first state, and applying an input stimulus to the carbon nanomaterial so as to change the first state into a second state. In the first state, the carbon nanomaterial can be used to produce a normal operational output of the device, whereas the device can produce an altered operational output when the carbon nanomaterial is in the second state. When producing an altered operational output, the device can continue operating, but the altered operational output can be non-indicative of the true operational state of the device. Devices containing a carbon nanomaterial that can be reconfigured from a normal operational output to an altered operational output are also described herein.

    摘要翻译: 本文描述了使用碳纳米材料来改变设备的操作输出的方法。 所述方法可以包括提供包含处于第一状态的碳纳米材料的装置,以及向碳纳米材料施加输入刺激以将第一状态改变为第二状态。 在第一状态下,碳纳米材料可用于产生器件的正常工作输出,而当碳纳米材料处于第二状态时,器件可以产生改变的工作输出。 当产生改变的操作输出时,设备可以继续操作,但改变的操作输出可以不指示设备的真实操作状态。 本文还描述了包含可从正常操作输出重新配置为改变的操作输出的碳纳米材料的装置。

    Carbon nanotube resonators comprising a non-woven fabric of unaligned nanotubes
    96.
    发明授权
    Carbon nanotube resonators comprising a non-woven fabric of unaligned nanotubes 有权
    碳纳米管谐振器包括非对准纳米管的无纺织物

    公开(公告)号:US07965156B2

    公开(公告)日:2011-06-21

    申请号:US12065854

    申请日:2006-09-05

    IPC分类号: H03H9/24 H03H9/00 H03H9/46

    摘要: Under one aspect, a resonator 400 includes a nanotube element 410 including a non-woven fabric of unaligned nanotubes and having a thickness, and a support structure 404 defining a gap 406 over which the nanotube element 410 is suspended, the thickness of the nanotube element 410 and the length of the gap 406 being selected to provide a pre-specified resonance frequency for the resonator 400 The resonator 400 also includes a conductive element 412 in electrical contact with the nanotube element 410, a drive electrode 408 in spaced relation to the nanotube element 410, and power logic in electrical contact with die at least one drive electrode 408 The power logic provides a series of electrical pulses at a frequency selected to be about the same as the pre-specified resonance frequency of the resonator 400 to the drive electrode 408 during operation of the resonator 400, such that the nanotube element 410 responds to the series of electrical pulses applied to the drive electrode 408 by making a series of mechanical motions at the resonance frequency of the resonator 400.

    摘要翻译: 在一个方面,谐振器400包括纳米管元件410,纳米管元件410包括非对准纳米管的非织造织物并具有厚度,以及支撑结构404,其限定了纳米管元件410悬挂在其上的间隙406,纳米管元件的厚度 410,并且间隙406的长度被选择为谐振器400提供预定的谐振频率。谐振器400还包括与纳米管元件410电接触的导电元件412,与纳米管相隔离的驱动电极408 元件410以及与裸片至少一个驱动电极408电接触的功率逻辑功率逻辑提供一系列电脉冲,频率选择为与谐振器400的预先指定的谐振频率相对于驱动电极 在谐振器400的操作期间,使得纳米管元件410响应于施加到驱动电极408的一系列电脉冲 在共振器400的共振频率下进行一系列机械运动。

    Devices having vertically-disposed nanofabric articles and methods of making the same
    97.
    发明授权
    Devices having vertically-disposed nanofabric articles and methods of making the same 有权
    具有垂直布置的纳米制品的装置及其制造方法

    公开(公告)号:US07719067B2

    公开(公告)日:2010-05-18

    申请号:US11526364

    申请日:2006-09-25

    IPC分类号: H01L27/14

    摘要: Electro-mechanical switches and memory cells using vertically-oriented nanofabric articles and methods of making the same. Under one aspect, a nanotube device includes a substantially horizontal substrate having a vertically oriented feature; and a nanotube film substantially conforming to a horizontal feature of the substrate and also to at least the vertically oriented feature. Under another aspect, an electromechanical device includes a structure having a major horizontal surface and a channel formed therein, the channel having first and second wall electrodes defining at least a portion of first and second vertical walls of the channel; first and second nanotube articles vertically suspended in the channel and in spaced relation to a corresponding first and second wall electrode, and electromechanically deflectable in a horizontal direction toward or away from the corresponding first and second wall electrode in response to electrical stimulation.

    摘要翻译: 使用垂直取向的纳米制品的机电开关和存储单元及其制造方法。 在一个方面,纳米管装置包括具有垂直取向特征的基本水平的基底; 以及基本上符合衬底的水平特征以及至少垂直取向的特征的纳米管膜。 在另一方面,机电装置包括具有主要水平表面和形成在其中的通道的结构,所述通道具有限定通道的第一和第二垂直壁的至少一部分的第一和第二壁电极; 垂直悬挂在通道中并且与对应的第一和第二壁电极间隔开的第一和第二纳米管制品,并且响应于电刺激而在水平方向上以机电方式偏向或远离对应的第一和第二壁电极。

    TRIODES USING NANOFABRIC ARTICLES AND METHODS OF MAKING THE SAME
    100.
    发明申请
    TRIODES USING NANOFABRIC ARTICLES AND METHODS OF MAKING THE SAME 失效
    使用南方文章的三方及其制作方法

    公开(公告)号:US20090115305A1

    公开(公告)日:2009-05-07

    申请号:US12124475

    申请日:2008-05-21

    IPC分类号: H01J21/10 H01J9/385

    摘要: Vacuum microelectronic devices with carbon nanotube films, layers, ribbons and fabrics are provided. The present invention discloses microelectronic vacuum devices including triode structures that include three-terminals (an emitter, a grid and an anode), and also higher-order devices such as tetrodes and pentodes, all of which use carbon nanotubes to form various components of the devices. In certain embodiments, patterned portions of nanotube fabric may be used as grid/gate components, conductive traces, etc. Nanotube fabrics may be suspended or conformally disposed. In certain embodiments, methods for stiffening a nanotube fabric layer are used. Various methods for applying, selectively removing (e.g. etching), suspending, and stiffening vertically- and horizontally-disposed nanotube fabrics are disclosed, as are CMOS-compatible fabrication methods. In certain embodiments, nanotube fabric triodes provide high-speed, small-scale, low-power devices that can be employed in radiation-intensive applications.

    摘要翻译: 提供具有碳纳米管膜,层,带和织物的真空微电子器件。 本发明公开了包括三端(发射极,栅极和阳极)的三极管结构的微电子真空装置,以及诸如四极和五极管的高阶器件,所有这些都使用碳纳米管来形成 设备。 在某些实施例中,纳米管织物的图案化部分可以用作栅极/栅极部件,导电迹线等。纳米管织物可以悬挂或保形地设置。 在某些实施例中,使用用于加强纳米管织物层的方法。 公开了用于施加,选择性地去除(例如蚀刻)悬浮和加强垂直和水平布置的纳米管织物的各种方法,以及CMOS兼容的制造方法。 在某些实施例中,纳米管织物三极管提供可用于辐射密集型应用中的高速,小规模,低功率的器件。