公开(公告)号：US08400053B2

公开(公告)日：2013-03-19

申请号：US12136624

申请日：2008-06-10

申请人： Jonathan W. Ward ,  Thomas Rueckes ,  Brent M. Segal

发明人： Jonathan W. Ward ,  Thomas Rueckes ,  Brent M. Segal

IPC分类号： H01J63/04

CPC分类号： G11C23/00 ,  B82Y10/00 ,  G11C13/025 ,  G11C2213/16 ,  G11C2213/81 ,  H01H1/0094 ,  H01L21/76838 ,  H01L27/10 ,  Y10S977/724 ,  Y10S977/742 ,  Y10S977/796 ,  Y10S977/856 ,  Y10S977/888 ,  Y10S977/943 ,  Y10T428/24893 ,  Y10T428/24917

摘要： Carbon Nanotube Films, Layers, Fabrics, Ribbons, Elements and Articles are disclosed. To make various articles, certain embodiments provide a substrate. Preformed nanotubes are applied to a surface of the substrate to create a non-woven fabric of carbon nanotubes. Portions of the non-woven fabric are selectively removed according to a defined pattern to create the article. To make a nanofabric, a substrate is provided. Preformed nanotubes are applied to a surface of the substrate to create a non-woven fabric of carbon nanotubes wherein the non-woven fabric is substantially uniform density. The nanofabrics and articles have characteristics desirable for various electrical systems such as memory circuits and conductive traces and pads.

摘要翻译： 公开了碳纳米管薄膜，层，织物，丝带，元件和制品。 为了制造各种制品，某些实施方案提供了基材。 将预制的纳米管施加到基底的表面以产生碳纳米管的无纺织物。 根据限定的图案选择性地去除无纺织物的部分以产生制品。 为了制造纳米纤维，提供了基材。 将预制的纳米管施加到基底的表面以产生碳纳米管的无纺织物，其中无纺织物具有基本均匀的密度。 纳米材料和制品具有对各种电气系统（诸如存储电路和导电迹线和焊盘）所期望的特性。

公开(公告)号：US08115187B2

公开(公告)日：2012-02-14

申请号：US12124475

申请日：2008-05-21

申请人： Brent M. Segal ,  Jonathan W. Ward ,  Thomas Rueckes

发明人： Brent M. Segal ,  Jonathan W. Ward ,  Thomas Rueckes

IPC分类号： H01L29/02

CPC分类号： H01J21/10 ,  H01J3/021 ,  H01J19/38 ,  H01J2203/0232 ,  Y10S977/742

摘要： Vacuum microelectronic devices with carbon nanotube films, layers, ribbons and fabrics are provided. The present invention discloses microelectronic vacuum devices including triode structures that include three-terminals (an emitter, a grid and an anode), and also higher-order devices such as tetrodes and pentodes, all of which use carbon nanotubes to form various components of the devices. In certain embodiments, patterned portions of nanotube fabric may be used as grid/gate components, conductive traces, etc. Nanotube fabrics may be suspended or conformally disposed. In certain embodiments, methods for stiffening a nanotube fabric layer are used. Various methods for applying, selectively removing (e.g. etching), suspending, and stiffening vertically- and horizontally-disposed nanotube fabrics are disclosed, as are CMOS-compatible fabrication methods. In certain embodiments, nanotube fabric triodes provide high-speed, small-scale, low-power devices that can be employed in radiation-intensive applications.

摘要翻译： 提供具有碳纳米管膜，层，带和织物的真空微电子器件。 本发明公开了包括三端（发射极，栅极和阳极）的三极管结构的微电子真空装置，以及诸如四极和五极管的高阶器件，所有这些都使用碳纳米管来形成 设备。 在某些实施例中，纳米管织物的图案化部分可以用作栅极/栅极部件，导电迹线等。纳米管织物可以悬挂或保形地设置。 在某些实施例中，使用用于加强纳米管织物层的方法。 公开了用于施加，选择性地去除（例如蚀刻）悬浮和加强垂直和水平布置的纳米管织物的各种方法，以及CMOS兼容的制造方法。 在某些实施例中，纳米管织物三极管提供可用于辐射密集型应用中的高速，小规模，低功率的器件。

公开(公告)号：US20110083319A1

公开(公告)日：2011-04-14

申请号：US12953076

申请日：2010-11-23

申请人： Claude L. Bertin ,  Brent M. Segal ,  Thomas Rueckes ,  Jonathan W. Ward

发明人： Claude L. Bertin ,  Brent M. Segal ,  Thomas Rueckes ,  Jonathan W. Ward

IPC分类号： H01H11/00 ,  B82Y40/00

CPC分类号： H01L23/62 ,  B82Y10/00 ,  G11C13/025 ,  G11C17/16 ,  G11C17/165 ,  G11C23/00 ,  G11C2213/17 ,  H01H1/0094 ,  H01L23/60 ,  H01L27/0248 ,  H01L27/0251 ,  H01L51/0048 ,  H01L2224/16 ,  H01L2924/01019 ,  H01L2924/0102 ,  H01L2924/01025 ,  H01L2924/01046 ,  H01L2924/01066 ,  H01L2924/01068 ,  H01L2924/01077 ,  H01L2924/01079 ,  H01L2924/09701 ,  H01L2924/12044 ,  H01L2924/19103 ,  H01L2924/19104 ,  H01L2924/19105 ,  H01L2924/3011 ,  H05K1/0259 ,  Y10T29/49105 ,  Y10T29/49117 ,  Y10T29/49124 ,  Y10T29/49204

摘要： Nanotube ESD protective devices and corresponding nonvolatile and volatile nanotube switches. An electrostatic discharge (ESD) protection circuit for protecting a protected circuit is coupled to an input pad. The ESD circuit includes a nanotube switch electrically having a control. The switch is coupled to the protected circuit and to a discharge path. The nanotube switch is controllable, in response to electrical stimulation of the control, between a de-activated state and an activated state. The activated state creates a current path so that a signal on the input pad flows to the discharge path to cause the signal at the input pad to remain within a predefined operable range for the protected circuit. The nanotube switch, the input pad, and the protected circuit may be on a semiconductor chip. The nanotube switch may be on a chip carrier. The deactivated and activated states may be volatile or non-volatile depending on the embodiment. The ESD circuit may be repeatedly programmed between the activated and deactivated states so as to repeatedly activate and deactivate ESD protection of the protected circuit. The nanotube switch provides protection based on the magnitude of the signal on the input pad.

摘要翻译： 纳米管ESD保护装置和相应的非易失性和挥发性纳米管开关。 用于保护受保护电路的静电放电（ESD）保护电路耦合到输入焊盘。 ESD电路包括电子控制的纳米管开关。 开关耦合到保护电路和放电路径。 纳米管开关可以响应于控制的电刺激而被控制在去激活状态和激活状态之间。 激活状态产生电流路径，使得输入焊盘上的信号流到放电路径，使输入焊盘处的信号保持在受保护电路的预定可操作范围内。 纳米管开关，输入焊盘和受保护电路可以在半导体芯片上。 纳米管开关可以在芯片载体上。 根据实施例，去激活状态和激活状态可以是易失性的或非易失性的。 可以在激活和去激活状态之间重复地编程ESD电路，以便重复激活和去激活受保护电路的ESD保护。 纳米管开关基于输入焊盘上的信号幅度提供保护。

公开(公告)号：US07274078B2

公开(公告)日：2007-09-25

申请号：US11158544

申请日：2005-06-22

申请人： Venkatachalam C. Jaiprakash ,  Jonathan W. Ward ,  Thomas Rueckes ,  Brent M. Segal

发明人： Venkatachalam C. Jaiprakash ,  Jonathan W. Ward ,  Thomas Rueckes ,  Brent M. Segal

IPC分类号： H01L27/14

CPC分类号： G11C13/025 ,  B81B2203/0338 ,  B81B2203/04 ,  B81C1/00142 ,  B81C2201/0109 ,  B82Y10/00 ,  B82Y30/00 ,  B82Y40/00 ,  C01B32/162 ,  C01B2202/02 ,  C01B2202/22 ,  G11C11/56 ,  G11C13/0033 ,  G11C23/00 ,  G11C2213/16 ,  G11C2213/77 ,  G11C2213/81 ,  H01H1/0094 ,  H01L21/76838 ,  H01L51/0048 ,  H01L2221/1094 ,  Y10S977/943

摘要： Electro-mechanical switches and memory cells using vertically-disposed nanofabric articles and methods of making the same are described. An electro-mechanical device, includes a structure having a major horizontal surface and a channel formed therein. A conductive trace is in the channel; and a nanotube article vertically suspended in the channel, in spaced relation to a vertical wall of the channel. The article is electro-mechanically deflectable in a horizontal direction toward the conductive trace. Under certain embodiments, the vertically suspended extent of the nanotube article is defined by a thin film process. Under certain embodiments, the vertically suspended extent of the nanotube article is about 50 nanometers or less. Under certain embodiments, the nanotube article is clamped with a conducting material disposed in porous spaces between some nanotubes of the nanotube article. Under certain embodiments, the nanotube article is formed from a porous nanofabric. Under certain embodiments, the nanotube article is electromechanically deflectable into contact with the conductive trace and the contact is either a volatile state or non-volatile state depending on the device construction. Under certain embodiments, the vertically oriented device is arranged into various forms of three-trace devices. Under certain embodiments, the channel may be used for multiple independent devices, or for devices that share a common electrode.

公开(公告)号：US08631562B2

公开(公告)日：2014-01-21

申请号：US12953076

申请日：2010-11-23

申请人： Claude L. Bertin ,  Brent M. Segal ,  Thomas Rueckes ,  Jonathan W. Ward

发明人： Claude L. Bertin ,  Brent M. Segal ,  Thomas Rueckes ,  Jonathan W. Ward

IPC分类号： H01H11/00 ,  H01H65/00

CPC分类号： H01L23/62 ,  B82Y10/00 ,  G11C13/025 ,  G11C17/16 ,  G11C17/165 ,  G11C23/00 ,  G11C2213/17 ,  H01H1/0094 ,  H01L23/60 ,  H01L27/0248 ,  H01L27/0251 ,  H01L51/0048 ,  H01L2224/16 ,  H01L2924/01019 ,  H01L2924/0102 ,  H01L2924/01025 ,  H01L2924/01046 ,  H01L2924/01066 ,  H01L2924/01068 ,  H01L2924/01077 ,  H01L2924/01079 ,  H01L2924/09701 ,  H01L2924/12044 ,  H01L2924/19103 ,  H01L2924/19104 ,  H01L2924/19105 ,  H01L2924/3011 ,  H05K1/0259 ,  Y10T29/49105 ,  Y10T29/49117 ,  Y10T29/49124 ,  Y10T29/49204

摘要： An electrostatic discharge (ESD) protection circuit for protecting a protected circuit is coupled to an input pad. The ESD circuit includes a nanotube switch electrically having a control. The switch is coupled to the protected circuit and to a discharge path. The nanotube switch is controllable, in response to electrical stimulation of the control, between a de-activated state and an activated state. The activated state creates a current path so that a signal on the input pad flows to the discharge path to cause the signal at the input pad to remain within a predefined operable range for the protected circuit. The nanotube switch, the input pad, and the protected circuit may be on a semiconductor chip. The nanotube switch may be on a chip carrier. The deactivated and activated states may be volatile or non-volatile depending on the embodiment.

摘要翻译： 用于保护受保护电路的静电放电（ESD）保护电路耦合到输入焊盘。 ESD电路包括电子控制的纳米管开关。 开关耦合到保护电路和放电路径。 纳米管开关可以响应于控制的电刺激而被控制在去激活状态和激活状态之间。 激活状态产生电流路径，使得输入焊盘上的信号流到放电路径，使输入焊盘处的信号保持在受保护电路的预定可操作范围内。 纳米管开关，输入焊盘和受保护电路可以在半导体芯片上。 纳米管开关可以在芯片载体上。 根据实施例，去激活状态和激活状态可以是易失性的或非易失性的。

公开(公告)号：US20100051880A1

公开(公告)日：2010-03-04

申请号：US12612445

申请日：2009-11-04

申请人： Eliodor G. Ghenciu ,  Tzong-Ru T. Han ,  Ramesh SIVARAJAN ,  Thomas Rueckes ,  Rahul Sen ,  Brent M. Segal ,  Jonathan W. Ward

发明人： Eliodor G. Ghenciu ,  Tzong-Ru T. Han ,  Ramesh SIVARAJAN ,  Thomas Rueckes ,  Rahul Sen ,  Brent M. Segal ,  Jonathan W. Ward

IPC分类号： H01B1/04

CPC分类号： D06M11/64 ,  B82Y10/00 ,  B82Y30/00 ,  B82Y40/00 ,  C01B32/168 ,  C01B32/17 ,  C01B2202/02 ,  C01B2202/28 ,  D06M10/02 ,  D06M11/50 ,  D06M11/55 ,  D06M2101/40 ,  H01L51/0003 ,  H01L51/0048 ,  Y10S977/746 ,  Y10S977/845

摘要： Certain applicator liquids and method of making the applicator liquids are described. The applicator liquids can be used to form nanotube films or fabrics of controlled properties. An applicator liquid for preparation of a nanotube film or fabric includes a controlled concentration of nanotubes dispersed in a liquid medium containing water. The controlled concentration is sufficient to form a nanotube fabric or film of preselected density and uniformity.

摘要翻译： 描述了一些施用液体和制备涂抹液的方法。 施用液体可用于形成具有受控特性的纳米管膜或织物。 用于制备纳米管膜或织物的涂布液包括分散在含水液体介质中的受控浓度的纳米管。 受控浓度足以形成预选密度和均匀性的纳米管织物或薄膜。

公开(公告)号：US07567414B2

公开(公告)日：2009-07-28

申请号：US11264935

申请日：2005-11-02

申请人： Claude L. Bertin ,  Brent M. Segal ,  Thomas Rueckes ,  Jonathan W. Ward

发明人： Claude L. Bertin ,  Brent M. Segal ,  Thomas Rueckes ,  Jonathan W. Ward

IPC分类号： H02H9/00

CPC分类号： H01L23/62 ,  B82Y10/00 ,  G11C13/025 ,  G11C17/16 ,  G11C17/165 ,  G11C23/00 ,  G11C2213/17 ,  H01H1/0094 ,  H01L23/60 ,  H01L27/0248 ,  H01L27/0251 ,  H01L51/0048 ,  H01L2224/16 ,  H01L2924/01019 ,  H01L2924/0102 ,  H01L2924/01025 ,  H01L2924/01046 ,  H01L2924/01066 ,  H01L2924/01068 ,  H01L2924/01077 ,  H01L2924/01079 ,  H01L2924/09701 ,  H01L2924/12044 ,  H01L2924/19103 ,  H01L2924/19104 ,  H01L2924/19105 ,  H01L2924/3011 ,  H05K1/0259 ,  Y10T29/49105 ,  Y10T29/49117 ,  Y10T29/49124 ,  Y10T29/49204

摘要： Nanotube ESD protective devices and corresponding nonvolatile and volatile nanotube switches. An electrostatic discharge (ESD) protection circuit for protecting a protected circuit is coupled to an input pad. The ESD circuit includes a nanotube switch electrically having a control. The switch is coupled to the protected circuit and to a discharge path. The nanotube switch is controllable, in response to electrical stimulation of the control, between a de-activated state and an activated state. The activated state creates a current path so that a signal on the input pad flows to the discharge path to cause the signal at the input pad to remain within a predefined operable range for the protected circuit. The nanotube switch, the input pad, and the protected circuit may be on a semiconductor chip. The nanotube switch may be on a chip carrier. The deactivated and activated states may be volatile or non-volatile depending on the embodiment. The ESD circuit may be repeatedly programmed between the activated and deactivated states so as to repeatedly activate and deactivate ESD protection of the protected circuit. The nanotube switch provides protection based on the magnitude of the signal on the input pad.

摘要翻译： 纳米管ESD保护装置和相应的非易失性和挥发性纳米管开关。 用于保护受保护电路的静电放电（ESD）保护电路耦合到输入焊盘。 ESD电路包括电子控制的纳米管开关。 开关耦合到保护电路和放电路径。 纳米管开关可以响应于控制的电刺激而被控制在去激活状态和激活状态之间。 激活状态产生电流路径，使得输入焊盘上的信号流到放电路径，使输入焊盘处的信号保持在受保护电路的预定可操作范围内。 纳米管开关，输入焊盘和受保护电路可以在半导体芯片上。 纳米管开关可以在芯片载体上。 根据实施例，去激活状态和激活状态可以是易失性的或非易失性的。 可以在激活和去激活状态之间重复地编程ESD电路，以便重复激活和去激活受保护电路的ESD保护。 纳米管开关基于输入焊盘上的信号幅度提供保护。

公开(公告)号：US07566478B2

公开(公告)日：2009-07-28

申请号：US10341005

申请日：2003-01-13

申请人： Jonathan W. Ward ,  Thomas Rueckes ,  Brent M. Segal

发明人： Jonathan W. Ward ,  Thomas Rueckes ,  Brent M. Segal

IPC分类号： C23C16/26 ,  B05D5/12 ,  B05D3/00

CPC分类号： B82Y40/00 ,  B82Y10/00 ,  B82Y30/00 ,  C01B32/162 ,  C01B2202/02 ,  C01B2202/22 ,  G11C13/025 ,  G11C23/00 ,  G11C2213/16 ,  G11C2213/81 ,  H01L21/76838 ,  H01L2221/1094 ,  Y10S977/843

摘要： Methods of Making Carbon Nanotube Films, Layers, Fabrics, Ribbons, Elements and Articles are disclosed. Carbon nanotube growth catalyst is applied on to a surface of a substrate. The substrate is subjected to a chemical vapor deposition of a carbon-containing gas to grow a non-woven fabric of carbon nanotubes. Portions of the non-woven fabric are selectively removed according to a defined pattern to create the article. A non-woven fabric of carbon nanotubes may be made by applying carbon nanotube growth catalyst on to a surface of a wafer substrate to create a dispersed monolayer of catalyst. The substrate is subjected to a chemical vapor deposition of a carbon-containing gas to grow a non-woven fabric of carbon nanotubes in contact and covering the surface of the wafer and in which the fabric is substantially uniform density.

摘要翻译： 公开了制备碳纳米管薄膜，层，织物，丝带，元件和制品的方法。 将碳纳米管生长催化剂施加到基材的表面上。 对基板进行化学气相沉积的含碳气体以生长碳纳米管的无纺织物。 根据限定的图案选择性地去除无纺织物的部分以产生制品。 碳纳米管的无纺布可以通过将碳纳米管生长催化剂涂覆在晶片基板的表面上来制造催化剂的分散单层。 对基板进行化学气相沉积的含碳气体，使碳纳米管的无纺织物接触并覆盖晶片的表面，其中织物的密度基本上均匀。

公开(公告)号：US07560136B2

公开(公告)日：2009-07-14

申请号：US10341055

申请日：2003-01-13

申请人： Jonathan W. Ward ,  Thomas Rueckes ,  Brent M. Segal

发明人： Jonathan W. Ward ,  Thomas Rueckes ,  Brent M. Segal

IPC分类号： C23C16/22 ,  C23C16/00

CPC分类号： H01L21/3146 ,  B82Y10/00 ,  H01L29/43 ,  Y10S977/742 ,  Y10S977/75 ,  Y10S977/751

摘要： Methods of using thin metal layers to make Carbon Nanotube Films, Layers, Fabrics, Ribbons, Elements and Articles are disclosed. Carbon nanotube growth catalyst is applied on to a surface of a substrate, including one or more thin layers of metal. The substrate is subjected to a chemical vapor deposition of a carbon-containing gas to grow a non-woven fabric of carbon nanotubes. Portions of the non-woven fabric are selectively removed according to a defined pattern to create the article. A non-woven fabric of carbon nanotubes may be made by applying carbon nanotube growth catalyst on to a surface of a wafer substrate to create a dispersed monolayer of catalyst. The substrate is subjected to a chemical vapor deposition of a carbon-containing gas to grow a non-woven fabric of carbon nanotubes in contact and covering the surface of the wafer and in which the fabric is substantially uniform density.

摘要翻译： 公开了使用薄金属层制造碳纳米管薄膜，层，织物，丝带，元件和制品的方法。 将碳纳米管生长催化剂施加到基材的表面，包括一层或多层薄金属层。 对基板进行化学气相沉积的含碳气体以生长碳纳米管的无纺织物。 根据限定的图案选择性地去除无纺织物的部分以产生制品。 碳纳米管的无纺布可以通过将碳纳米管生长催化剂涂覆在晶片基板的表面上来制造催化剂的分散单层。 对基板进行化学气相沉积的含碳气体，使碳纳米管的无纺织物接触并覆盖晶片的表面，其中织物的密度基本上均匀。

公开(公告)号：US07335395B2

公开(公告)日：2008-02-26

申请号：US10341054

申请日：2003-01-13

申请人： Jonathan W. Ward ,  Thomas Rueckes ,  Brent M. Segal

发明人： Jonathan W. Ward ,  Thomas Rueckes ,  Brent M. Segal

IPC分类号： B05D3/12

CPC分类号： B05D1/002 ,  B05D3/0254 ,  B82Y30/00 ,  C23C16/0281 ,  C23C16/26 ,  D04H1/4234 ,  D04H1/4242 ,  D04H1/4382 ,  D04H1/4391

摘要： Methods of Using Preformed Nanotubes to Make Carbon Nanotube Films, Layers, Fabrics, Ribbons, Elements and Articles are disclosed. To make various articles, certain embodiments provide a substrate. Preformed nanotubes are applied to a surface of the substrate to create a non-woven fabric of carbon nanotubes. Portions of the non-woven fabric are selectively removed according to a defined pattern to create the article. To make a nanofabric, a substrate is provided. Preformed nanotubes are applied to a surface of the substrate to create a non-woven fabric of carbon nanotubes wherein the non-woven fabric is substantially uniform density.

摘要翻译： 公开了使用预制纳米管制备碳纳米管膜，层，织物，丝带，元件和制品的方法。 为了制造各种制品，某些实施方案提供了基材。 将预制的纳米管施加到基底的表面以产生碳纳米管的无纺织物。 根据限定的图案选择性地去除无纺织物的部分以产生制品。 为了制造纳米纤维，提供了基材。 将预制的纳米管施加到基底的表面以产生碳纳米管的无纺织物，其中无纺织物具有基本均匀的密度。