摘要:
The present invention provides a defect inspection apparatus having high sensitivity and high throughput capabilities in defect inspection of a sample on which a pattern is formed, such as a semiconductor wafer.One feature of the present invention is that a direction of a pattern, directions in which illumination light beams are projected on a sample, and polarization of the illumination light beams are paid attention to. Another feature of the present invention is that projections on the sample in at least two illumination directions are perpendicular to or in parallel with a direction of the main pattern of the sample, and that the polarization of the illumination light beam in the first direction differs from the polarization of the illumination light beam in the second direction. Still another feature of the present invention is that the projection in the first direction and the projection in the second direction are perpendicular to each other. A further feature of the present invention is that the projection in the first direction and the projection in the second direction are in parallel with each other. Still a further feature of the present invention is that the polarization of the illumination light beam in the first direction is s-polarization, whereas the polarization of the illumination light beam in the second direction is p-polarization.
摘要:
The production method according to the present invention includes a process for producing fine particles formed of a non-precious metal; a process for forming a shell of a precious metal on the respective surfaces of the fine particles of the non-precious metal; and a process for collecting a catalyst from a fluid reaction mixture. A fine metal particle-carrying catalyst prepared by such a production method includes fine non-precious metal particles as the cores thereby reducing the usage of a precious metal to achieve suppression of a cost increase. Since it includes a shell portion formed of a precious metal, it exhibits excellent catalytic activity.
摘要:
A propylene-based polymer comprising the following component (A) insoluble in p-xylene at 25° C. and component (B) soluble in p-xylene at 25° C., wherein (i) the weight average molecular weight (Mw) measured with GPC is 100,000 to 1,000,000, (ii) the content of the component insoluble in hot p-xylene is 0.3% by weight or lower, and (iii) the degree of strain hardening (λ max) in measurement of elongational viscosity is 2.0 or higher; and a method for producing the same, along with a resin composition comprising a propylene-ethylene copolymer (Z) in an amount of 50.0 to 99.9% by weight and a propylene-based polymer (M) in an amount of 0.1 to 50.0% by weight.Component (A): a component (CXIS) insoluble in p-xylene at 25° C., having requirements specified by (A1) to (A5). Component (B): a component (CXS) is soluble in p-xylene at 25° C., having requirements specified by (B1) to (B4).
摘要:
A defect inspection apparatus includes: stages each mounting an inspecting object on which a circuit pattern having a group of parallel lines is formed, and each running perpendicular or parallel to the group of lines; an illumination optical system which illuminating a surface of the inspecting object with a slit beam being slit light so that a longitudinal direction of the slit beam is substantially perpendicular to the running directions of the stages, and which has a first inclined angle formed by the direction of the group of lines and a projection line, of an optical axis of the slit beam, to the inspecting object; a spatial filter that shields or transmits reflected and scattered light of the inspecting object according to a difference in distribution of orientation; and a detection optical system that detects the reflected and scattered light transmitted through the spatial filter by image sensors. Moreover, the illumination optical system illuminates the inspecting object with another slit beam from a direction opposite to an incident direction of the slit beam on a plane.
摘要:
A game device for performing a game in which, when a first-choice display object is freely chosen via a pointing operation undertaken by a player from among a large number of display objects, a second-choice object is then required to be determined as a correct choice, comprises determining means for determining whether or not the display object of interest has been chosen on the basis of the position coordinates from input means and a choice determination range and correcting means for performing, when the correct second-choice object has been determined, correction processing for changing the size of a choice determination range for the display object of interest used for the determination processing so that the choice determination range for a correct choice display object becomes relatively larger than the choice determination range for an incorrect choice display object.
摘要:
Provided is a game device which determines the goal point pursuant to the game progress and not in advance. The game device 1 is a game for competing for game scores in accordance with the superiority of the state of arrival upon the taxi, which is the moving object, reaching a goal. This game device 1 is a game wherein a presentation unit for presenting a goal determining element (passenger), which becomes the objective upon a taxi moving in the game space 511 (S104, S105), and judgment unit for determining the game results by judging the superiority of the state of arrival in accordance with such selected goal determining element upon selecting one goal among a plurality of goals (S105; YES) provided by the presentation unit (S104, S105) are processed by the CPU and displayed on the display.
摘要:
The present invention provides a method of conducting cell-free protein synthesis by conveniently suppressing mRNA degradation, and a reaction solution enabling cell-free protein synthesis by conveniently suppressing mRNA degradation. A cell-free protein synthesis method using a cell-free protein synthesis reaction solution containing at least an extract liquid derived from a living cell, a potassium salt, a magnesium salt, adenosine triphosphate, guanosine triphosphate, creatine phosphate, creatine kinase, amino acid, a tRNA, an mRNA, a buffer, and adenosine 3′,5′-bisphosphate.
摘要:
A game device displays on a display monitor scenes of a vehicle moving in response to manipulations by the player. The display monitor further displays a plurality of goal determining elements. A goal point and a time limit to reach the goal point are set when one of the goal determining elements is picked up. Time is counted from when the goal point and the time limit are set. The game device determines an amount of time for the vehicle to reach the goal point and a score that the player has achieved.
摘要:
Provided is a liquid sealing type vibration control device capable of sufficiently reducing strange sounds which comprises a first attachment fitting (1), a second attachment fitting (2), a vibration-isolating base body (3), a diaphragm (9), a partition body (12), and an orifice (25), the partition body (12) including an elastic partition membrane (15) and a pair of lattice members (17, 18). The elastic partition membrane (15) is provided on its both faces with rib groups (50) in a projecting manner, the rib groups (50) each consist of plural first ribs (51) and plural second ribs (52) mingled mutually, the first ribs (51) are set in such a height dimension that their tops can be situated apart from the lattice members (17, 18), and the second ribs (52) are set in such a height dimension that their tops abut on the lattice members (17, 18) and in a smaller rib width than the first ribs (51).
摘要:
The invention provides a heat dissipater such as a heat dissipation member that dissipates heat of an integrated circuit that is formed on a flexible substrate such as a flexible printed circuit board. The heat dissipater according to an aspect of the invention includes; a main body section that is formed in the shape of a hollow sleeve in such a manner that the flexible substrate can be inserted through and inserted inside the main body section; and an adhering section that is formed on an inner surface of the main body section in such a manner that the main body section and the integrated circuit are adhered to each other via the adhering section.