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公开(公告)号:US10510646B2
公开(公告)日:2019-12-17
申请号:US15905756
申请日:2018-02-26
Applicant: Taiwan Semiconductor Manufacturing Co., Ltd.
Inventor: Tzung-Hui Lee , Hung-Jui Kuo , Ming-Che Ho
IPC: H01L23/498 , H01L25/11 , H01L23/31 , H01L21/48
Abstract: A package structure, a RDL structure and a method of forming the same are provided. The package structure includes a die, an encapsulant, a RDL structure, and a connector. The encapsulant is aside the die. The RDL structure is electrically connected to the die. The connector is connected to the die through the RDL structure. The RDL structure includes a dielectric layer, a first RDL and a second RDL. The dielectric layer is on the encapsulant and the die. The first RDL is penetrating through the dielectric layer to connect to the die, the first RDL comprises a first via and a first trace on the first via. The second RDL is on the first RDL. The second RDL comprises a second via and a second trace on the second via. The second via contacts and covers a portion of a top surface and a portion of sidewalls of the first trace.
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公开(公告)号:US20190341322A1
公开(公告)日:2019-11-07
申请号:US16517679
申请日:2019-07-22
Applicant: Taiwan Semiconductor Manufacturing Co., Ltd.
Inventor: Shih-Hao Tseng , Hung-Jui Kuo , Ming-Che Ho , Chia-Hung Liu
IPC: H01L23/31 , H01L21/56 , H01L25/10 , H01L23/00 , H01L21/48 , H01L23/498 , H01L25/00 , H01L21/683
Abstract: A semiconductor package includes an encapsulated semiconductor device, a redistribution structure, and a protection layer. The encapsulated semiconductor device includes a semiconductor device and an encapsulating material encapsulating the semiconductor device. The redistribution structure is disposed on the encapsulated semiconductor device and includes a dielectric layer and a redistribution circuit layer electrically connected to the semiconductor device. The protection layer at least covers the dielectric layer, wherein an oxygen permeability or a water vapor permeability of the protection layer is substantially lower than an oxygen permeability or a vapor permeability of the dielectric layer.
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公开(公告)号:US20190333782A1
公开(公告)日:2019-10-31
申请号:US15964092
申请日:2018-04-27
Applicant: Taiwan Semiconductor Manufacturing Co., Ltd.
Inventor: Po-Han Wang , Hung-Jui Kuo , Yu-Hsiang Hu
IPC: H01L21/56 , H01L23/31 , H01L23/367 , H01L23/04 , H01L23/498 , H01L21/48 , H01L25/065 , H01L25/00
Abstract: A semiconductor package manufacturing method thereof are provided. The semiconductor package includes a high-power device die, a redistribution structure, a heat dissipation module and a molding compound. The high-power device die has a front side and a back side opposite to the front side. The redistribution structure is disposed at the front side. The heat dissipation module is in direct contact with the back side. The molding compound is disposed between the redistribution structure and the heat dissipation module, and surrounding the high-power device die. The molding compound has a body portion and an extended portion. An interface between the body portion and the heat dissipation module is substantially parallel to the back side of the high-power device die. A thickness of the extended portion is greater than a thickness of the body portion.
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公开(公告)号:US10446521B2
公开(公告)日:2019-10-15
申请号:US15846234
申请日:2017-12-19
Applicant: Taiwan Semiconductor Manufacturing Co., Ltd.
Inventor: Hung-Jui Kuo , Yu-Hsiang Hu , Sih-Hao Liao
IPC: H01L23/48 , H01L25/065 , H01L23/498 , H01L23/31 , H01L23/00 , H01L21/56
Abstract: In accordance with some embodiments of the present disclosure, an integrated fan-out (INFO) package includes a substrate, a molding compound, a buffer layer, a first chip, a second chip, and a redistribution circuit structure layer. The molding compound is disposed on the substrate. The buffer layer is disposed on the substrate and includes a first buffer pattern and a second pattern separated from the first buffer pattern by a distance. A thickness of the first buffer pattern is greater than a thickness of the second buffer pattern. The first chip is attached to the substrate through the first buffer pattern and surrounded by the molding compound. The second chip is attached to the substrate through the second buffer pattern and surrounded by the molding compound. The redistribution circuit structure layer is disposed on the molding compound and electrically connected to the first chip and the second chip.
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公开(公告)号:US20190279929A1
公开(公告)日:2019-09-12
申请号:US16416278
申请日:2019-05-20
Applicant: Taiwan Semiconductor Manufacturing Co., Ltd.
Inventor: Yi-Wen Wu , Hung-Jui Kuo , Ming-Che Ho
IPC: H01L23/522 , H01L23/532 , H01L21/768 , H01L23/00 , H01L23/538
Abstract: An integrated fan-out package includes a die, an insulating encapsulation, a redistribution circuit structure, conductive terminals, and barrier layers. The insulating encapsulation encapsulates the die. The redistribution circuit structure includes a first redistribution conductive layer on the insulating encapsulation, a first inter-dielectric layer covering the first redistribution conductive layer, and a second redistribution conductive layer on the first inter-dielectric layer. The first redistribution conductive layer includes conductive through vias extending from a first surface of the insulating encapsulation to a second surface of the insulating encapsulation. The first inter-dielectric layer includes contact openings, portions of the second redistribution conductive layer filled in the contact openings are in contact with the first redistribution conductive layer and offset from the conductive through vias. The conductive terminals are disposed over the second surface of the insulating encapsulation. The barrier layers respectively are disposed between the conductive through vias and the conductive terminals.
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公开(公告)号:US10361139B2
公开(公告)日:2019-07-23
申请号:US15884397
申请日:2018-01-31
Applicant: Taiwan Semiconductor Manufacturing Co., Ltd.
Inventor: Shih-Hao Tseng , Hung-Jui Kuo , Ming-Che Ho , Chia-Hung Liu
IPC: H01L23/495 , H01L23/31 , H01L23/498 , H01L21/48 , H01L21/56 , H01L23/00
Abstract: A semiconductor package includes an encapsulated semiconductor device, a redistribution structure, and a protection layer. The encapsulated semiconductor device includes a semiconductor device and an encapsulating material encapsulating the semiconductor device. The redistribution structure is disposed on the encapsulated semiconductor device and includes a dielectric layer and a redistribution circuit layer electrically connected to the semiconductor device. The protection layer at least covers the dielectric layer, wherein an oxygen permeability or a water vapor permeability of the protection layer is substantially lower than an oxygen permeability or a vapor permeability of the dielectric layer.
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公开(公告)号:US10332856B2
公开(公告)日:2019-06-25
申请号:US15806347
申请日:2017-11-08
Applicant: Taiwan Semiconductor Manufacturing Co., Ltd.
Inventor: Wei-Chih Chen , Hung-Jui Kuo , Yu-Hsiang Hu , Sih-Hao Liao , Po-Han Wang
IPC: H01L25/11 , H01L23/00 , H01L25/04 , H01L25/07 , H01L25/075 , H01L25/065
Abstract: A package structure including at least one semiconductor die, an insulating encapsulant, an insulating layer, conductive pillars, a dummy pillar, a first seed layer and a redistribution layer is provided. The semiconductor die have a first surface and a second surface opposite to the first surface. The insulating encapsulant is encapsulating the semiconductor die. The insulating layer is disposed on the first surface of the semiconductor die and on the insulating encapsulant. The conductive pillars are located on the semiconductor die. The dummy pillar is located on the insulating encapsulant. The first seed layer is embedded in the insulating layer, wherein the first seed layer is located in between the conductive pillars and the semiconductor die, and located in between the dummy pillar and the insulating encapsulant. The redistribution layer is disposed over the insulating layer and is electrically connected to the semiconductor die through the conductive pillars.
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公开(公告)号:US10297544B2
公开(公告)日:2019-05-21
申请号:US15716476
申请日:2017-09-26
Applicant: Taiwan Semiconductor Manufacturing Co., Ltd.
Inventor: Yi-Wen Wu , Hung-Jui Kuo , Ming-Che Ho
IPC: H01L23/52 , H01L23/522 , H01L23/00 , H01L23/532 , H01L21/768
Abstract: Provided is an integrated fan-out package including a die, an insulating encapsulation, a redistribution circuit structure, a conductive terminal, and a barrier layer. The die is encapsulated by the insulating encapsulation. The redistribution circuit structure includes a redistribution conductive layer. The redistribution conductive layer is disposed in the insulating encapsulation and extending from a first surface of the insulating encapsulation to a second surface of the insulating encapsulation. The conductive terminal is disposed over the second surface of the insulating encapsulation. The barrier layer is sandwiched between the redistribution conductive layer and the conductive terminal. A material of the barrier layer is different from a material of the redistribution conductive layer and a material of the conductive terminal. A method of fabricating the integrated fan-out package is also provided.
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公开(公告)号:US20190139924A1
公开(公告)日:2019-05-09
申请号:US15806347
申请日:2017-11-08
Applicant: Taiwan Semiconductor Manufacturing Co., Ltd.
Inventor: Wei-Chih Chen , Hung-Jui Kuo , Yu-Hsiang Hu , Sih-Hao Liao , Po-Han Wang
IPC: H01L23/00
CPC classification number: H01L24/24 , H01L23/5389 , H01L24/19 , H01L24/25 , H01L24/73 , H01L24/82 , H01L25/042 , H01L25/0655 , H01L25/072 , H01L25/0753 , H01L25/115 , H01L2224/04105 , H01L2224/12105 , H01L2224/214 , H01L2224/2402 , H01L2224/24101 , H01L2224/24137 , H01L2224/2499 , H01L2224/25171 , H01L2224/32225 , H01L2224/73209 , H01L2224/73267 , H01L2224/82007 , H01L2224/82106 , H01L2224/92244
Abstract: A package structure including at least one semiconductor die, an insulating encapsulant, an insulating layer, conductive pillars, a dummy pillar, a first seed layer and a redistribution layer is provided. The semiconductor die have a first surface and a second surface opposite to the first surface. The insulating encapsulant is encapsulating the semiconductor die. The insulating layer is disposed on the first surface of the semiconductor die and on the insulating encapsulant. The conductive pillars are located on the semiconductor die. The dummy pillar is located on the insulating encapsulant. The first seed layer is embedded in the insulating layer, wherein the first seed layer is located in between the conductive pillars and the semiconductor die, and located in between the dummy pillar and the insulating encapsulant. The redistribution layer is disposed over the insulating layer and is electrically connected to the semiconductor die through the conductive pillars.
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公开(公告)号:US20190139847A1
公开(公告)日:2019-05-09
申请号:US15846232
申请日:2017-12-19
Applicant: Taiwan Semiconductor Manufacturing Co., Ltd.
Inventor: Po-Han Wang , Hung-Jui Kuo , Yu-Hsiang Hu
IPC: H01L23/31 , H01L23/00 , H01L21/56 , H01L21/3105
Abstract: A package structure and a method of manufacturing the same are provided. The package structure includes a die, a first encapsulant, a second encapsulant, a protection layer, a RDL structure and a connector. The first encapsulant is aside a first sidewall of the die, at least encapsulating a portion of the first sidewall of the die. The second encapsulant is aside a second sidewall of the die, encapsulating the second sidewall of the die. The protection layer is aside the first sidewall of the die and on the first encapsulant. The RDL structure is on a first surface of the die. The connector is electrically connected to the die through the RDL structure.
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