Substrate processing apparatus and cleaning method therefor
    91.
    发明申请
    Substrate processing apparatus and cleaning method therefor 审中-公开
    基板加工装置及其清洗方法

    公开(公告)号:US20050145170A1

    公开(公告)日:2005-07-07

    申请号:US11004897

    申请日:2004-12-07

    CPC分类号: C23C16/4405 C23C16/45565

    摘要: A substrate processing apparatus has a pressure-reducible reaction chamber, a substrate support provided in the reaction chamber, a gas inlet port provided in a wall portion of the reaction chamber to introduce a gas into the reaction chamber, a first plate provided between the substrate support and the gas inlet port in the reaction chamber and having a plurality of first holes for dispersing the gas introduced from the gas inlet port into the reaction chamber, and a second plate provided between the substrate support and the first plate in the reaction chamber in opposing relation to the first plate and having a plurality of second holes for further dispersing the gas dispersed by the first plate. The first and second plates can be moved relatively to each other such that a spacing between the first and second plates is variable.

    摘要翻译: 基板处理装置具有减压反应室,设置在反应室中的基板支撑体,设置在反应室壁部的气体导入口,将气体导入反应室,设置在基板之间的第一板 支撑件和气体入口,并且具有多个用于将从气体入口引入的气体分散到反应室中的第一孔,以及设置在反应室中的基板支撑件和第一板之间的第二板 与第一板相对,并且具有多个用于进一步分散由第一板分散的气体的第二孔。 第一和第二板可以相对移动,使得第一和第二板之间的间隔是可变的。

    Gasket and electronic apparatus having the same
    92.
    发明授权
    Gasket and electronic apparatus having the same 有权
    垫片和具有相同的电子设备

    公开(公告)号:US06906255B2

    公开(公告)日:2005-06-14

    申请号:US10722121

    申请日:2003-11-26

    IPC分类号: F16J15/10 H05K9/00

    CPC分类号: H05K9/0016

    摘要: A gasket that serves to shield electromagnetic waves from an electronic apparatus that has a housing that includes a first surface and a second surface opposite to the first surface, the gasket being squeezed into a perforation hole that perforates the first and second surfaces, and fixed onto the housing includes a lid part that contacts the first surface and serves as a flat spring, and an insertion part that is to be inserted into the perforation hole in the housing, and includes an engagement part, coupled with the support part, which at least partially projects from the perforation hole in the housing and contacts the second surface, wherein the engagement part includes a leg coupled with the the support part, and a foot that is coupled with the leg and forms an acute angle relative to the leg.

    摘要翻译: 一种用于屏蔽电磁波的垫片,该电子设备具有包括第一表面和与该第一表面相对的第二表面的壳体,该垫圈被挤压成穿孔第一表面和第二表面,并固定到 壳体包括接触第一表面并用作平板弹簧的盖部分和插入壳体中的穿孔中的插入部分,并且包括与支撑部分耦合的接合部分,至少 部分地从壳体中的穿孔孔突出并接触第二表面,其中接合部分包括与支撑部分联接的腿部,以及与腿部相连并相对于腿部形成锐角的脚部。

    Micro-oscillation element and method for driving the same
    93.
    发明申请
    Micro-oscillation element and method for driving the same 失效
    微振荡元件及其驱动方法

    公开(公告)号:US20050035682A1

    公开(公告)日:2005-02-17

    申请号:US10790762

    申请日:2004-03-03

    CPC分类号: H02N1/008

    摘要: A micro-oscillation element includes a movable main section, a first frame and a second frame, and a first connecting section that connects the movable main section and the first frame and defines a first axis of rotation for a first rotational operation of the movable main section with respect to the first frame. The element further includes a second connecting section that connects the first frame and the second frame and defines a second axis of rotation for a second rotational operation of the first frame and the movable main section with respect to the second frame. A first drive mechanism is provided for generating a driving force for the first rotational operation. A second drive mechanism is provided for generating a driving force for the second rotational operation. The first axis of rotation and the second axis of rotation are not orthogonal.

    摘要翻译: 微振荡元件包括可移动主体部分,第一框架和第二框架,以及第一连接部分,其连接可移动主体部分和第一框架,并且限定第一旋转轴线用于可移动主体的第一旋转操作 相对于第一帧的截面。 元件还包括第二连接部分,其连接第一框架和第二框架并且限定第二旋转轴线用于第一框架和可移动主体部分相对于第二框架的第二旋转操作。 第一驱动机构被提供用于产生用于第一旋转操作的驱动力。 提供第二驱动机构用于产生用于第二旋转操作的驱动力。 第一旋转轴线和第二旋转轴线不正交。

    Galvano-micromirror and its manufacture process

    公开(公告)号:US06650459B2

    公开(公告)日:2003-11-18

    申请号:US10216953

    申请日:2002-08-12

    申请人: Satoshi Ueda

    发明人: Satoshi Ueda

    IPC分类号: G02B2600

    CPC分类号: G02B26/0841

    摘要: A GALVANO-micromirror includes a first substrate having a light-reflective mirror face on one surface thereof and a first electrode on one or both surface(s) thereof; and a second substrate including a frame-form base, a second electrode located opposedly to the first electrode, a joint holder section located under the mirror face for holding the first substrate, and a torsion bar section located under the mirror face for connecting the frame-form base to the joint holder section and supporting the joint holder section pivotally within a range of angles, wherein a part of a surface of the first substrate on which the mirror face is not formed is joined to the joint holder section of the second substrate.

    Simulated gun
    99.
    发明授权
    Simulated gun 有权
    模拟枪

    公开(公告)号:US06481429B2

    公开(公告)日:2002-11-19

    申请号:US09766983

    申请日:2001-01-22

    IPC分类号: F41B708

    摘要: A simulated gun for use with a disk-shaped or substantially disk-shaped flying member made of a metal as a bullet for discharging it forward, the simulated gun comprising: a gunbarrel having the hollow whose cross section along a direction normal to a flying direction of the flying member is vertically long and has vertical and horizontal dimensions set substantially equal to the diameter and the thickness of the flying member, respectively, and a flying member hitting position being set at the inner back position of the gunbarrel; a hammer provided at the inner back position of the gunbarrel, reciprocatingly movable between an advanced position where it hits the rear part of the flying member set at the flying member hitting position and a retracted position which is located in a rearward from the advance position, and adapted to hit the flying member set at the flying member hitting position, and a trigger for reciprocatingly moving the hammer.

    摘要翻译: 一种模拟枪,用于由金属制成的圆盘状或大致圆盘形的飞行构件,用于将其向前排放,该模拟枪包括:枪管,其具有沿垂直于飞行方向的方向的横截面 飞行构件的垂直和水平尺寸分别基本上等于飞行构件的直径和厚度,并且飞行构件击打位置设置在枪管的内部后部位置; 设置在枪管的内后位置的锤,能够在其位于飞行构件击打位置处的飞行构件的后部的前进位置与位于从前进位置向后方的缩回位置之间往复运动, 并且适于撞击设置在飞行构件击打位置处的飞行构件,以及用于使锤子往复运动的扳机。

    Galvano-mirror and method of making the same
    100.
    发明授权
    Galvano-mirror and method of making the same 有权
    Galvano镜和制作相同的方法

    公开(公告)号:US06473221B2

    公开(公告)日:2002-10-29

    申请号:US09803014

    申请日:2001-03-12

    IPC分类号: G02B2608

    摘要: A method of making a galvano-mirror is provided. It includes the following steps. First, a first material substrate formed with a plurality of mirror plate regions is prepared. The mirror plate regions correspond in arrangement to the mirror plate of the galvano-mirror. Then, a second material substrate formed with a plurality of driver plate regions is prepared. The driver plate regions correspond in arrangement to the driver plate of the galvano-mirror. Then, the first and the second material substrates are attached to each other so that each of the mirror plate regions faces a relevant one of the driver plate regions. Finally, the attached first and second material substrates are divided into individual gaslvano-mirrors.

    摘要翻译: 提供了制作电流镜的方法。 它包括以下步骤。 首先,准备形成有多个镜面板区域的第一材料基板。 镜面板区域与电动反射镜的镜板相对应。 然后,准备形成有多个驱动板区域的第二材料基板。 驱动器板区域布置成与电流镜的驱动器板对应。 然后,将第一和第二材料基板彼此附接,使得每个镜板区域面对相关的一个驱动器板区域。 最后,连接的第一和第二材料基底被分成单独的气体镜。