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公开(公告)号：US20070000861A1
公开(公告)日：2007-01-04
申请号：US11475873
申请日：2006-06-28
CPC分类号： C23F4/00 , B82Y10/00 , G11B5/012 , G11B5/743 , G11B5/82 , G11B5/855 , H01J2237/30466 , H01J2237/3174
摘要： According to one embodiment, a method for manufacturing a magnetic recording medium includes forming patterns having protrusions and recesses of a ferromagnetic material onto a recording track section and a servo section on a substrate, forming a flattening film, a top surface of which is higher than that of the protrusion of the ferromagnetic material, onto the ferromagnetic material, and performing ion beam etching onto the flattening film up to a top surface of the protrusion of the ferromagnetic material, and determining an end point of flattening etching on the basis of a change in the total number of incident particles by means of an ion counter installed so as to be at an angle θ with respect to a perpendicular direction to the substrate in accordance with a material of the flattening film.
摘要翻译： 根据一个实施例，一种制造磁记录介质的方法包括将具有铁磁材料的突起和凹陷的图案形成在记录轨道部分和基板上的伺服部分上，形成平坦化膜，其顶表面高于 将铁磁材料的突出部分突出到铁磁材料上，并且对平坦化膜进行离子束蚀刻直到铁磁材料的突起的顶表面，并且基于变化确定平坦化蚀刻的终点 在通过离子计数器安装的入射颗粒的总数中，根据平坦化膜的材料相对于垂直于衬底的方向成角度θ。
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92.发明申请Electron beam irradiating method and manufacturing method of magnetic recording medium 审中-公开电子束照射方法及磁记录介质的制造方法公开(公告)号：US20060076509A1
公开(公告)日：2006-04-13
申请号：US11192048
申请日：2005-07-29
申请人： Takeshi Okino , Seiji Morita , Yoshiyuki Kamata
发明人： Takeshi Okino , Seiji Morita , Yoshiyuki Kamata
IPC分类号： A61N5/00
CPC分类号： B82Y40/00 , B82Y10/00 , G11B5/743 , G11B5/82 , G11B5/855 , H01J37/3174 , H01J2237/31766
摘要： The present invention is to make it possible to form a fine pattern, and improve a recording density on a magnetic recording medium and increase signal intensity. There is provided an electron beam irradiating method which irradiates an electron beam on a resist to perform irradiating using an electron beam irradiating apparatus provided with a moving mechanism which moves a state on which a substrate applied with the resist is put in one horizontal direction, and a rotating mechanism which rotates the stage. The electron beam irradiating method includes: exposing a portion once exposed while changing a deflection amount of the electron beam at least one time in the next round and rounds subsequent thereto, when exposure is performed while a deflection amount of an electron beam is being gradually changed so as to draw a concentric circle for each round.
摘要翻译： 本发明使得可以形成精细图案，并提高磁记录介质上的记录密度并增加信号强度。 提供一种电子束照射方法，其使用电子束照射装置对电子束照射抗蚀剂进行照射，电子束照射装置设置有移动机构，该移动机构使施加有抗蚀剂的基板在一个水平方向上移动的状态，以及 旋转台架的旋转机构。 电子束照射方法包括：在下一轮中至少一次改变电子束的偏转量的同时暴露一次暴露的部分，并在其后进行回合，同时当电子束的偏转量逐渐变化时进行曝光 以便为每一轮画一个同心圆。
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公开(公告)号：US5654739A
公开(公告)日：1997-08-05
申请号：US552361
申请日：1995-11-02
申请人： Yoshikatsu Sakai , Kenji Yamaguchi , Masayuki Nakagawa , Masao Yokomori , Katsuhisa Tsuda , Yoshiyuki Kamata
发明人： Yoshikatsu Sakai , Kenji Yamaguchi , Masayuki Nakagawa , Masao Yokomori , Katsuhisa Tsuda , Yoshiyuki Kamata
IPC分类号： G05B19/042 , G09G5/00
CPC分类号： G05B19/0426 , G05B2219/23121 , G05B2219/23157 , G05B2219/23168 , Y10S439/912
摘要： The controller executes a control calculation based on proportional and integration calculation parameters which are preset, and outputs a control output to a process, and comprises a display device for displaying panels having characters and figures thereon; a panel expanding key for instructing the display device to expand, or change, the panel to be displayed; a plurality of keys for setting control operations and various parameters; an operating panel generating unit for displaying as a bar graph; a process value and a control output value on an operating panel to be displayed on the display device; a trend graph panel generating unit for displaying the transition of the process value on a trend graph panel to be displayed on the display device; a tuning panel generating unit for displaying information to control the control parameter used in the control calculation on a tuning panel to be displayed on the display device; a display controlling unit for controlling the displays of the panels; and an operation key function changing unit for changing the functions of the plurality of keys.
摘要翻译： 控制器基于预设的比例积分计算参数和积分计算参数进行控制计算，并将控制输出输出到处理，并且包括用于显示其上具有字符和数字的面板的显示装置; 用于指示显示装置扩展或改变要显示的面板的面板扩展键; 用于设置控制操作和各种参数的多个键; 用于显示为条形图的操作面板生成单元; 要在显示装置上显示的操作面板上的过程值和控制输出值; 趋势图面板生成单元，用于显示要显示在显示装置上的趋势图面板上的处理值的转换; 调谐面板生成单元，用于显示信息以控制在显示装置上显示的调谐面板上的控制计算中使用的控制参数; 显示控制单元，用于控制面板的显示; 以及用于改变多个键的功能的操作键功能改变单元。
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公开(公告)号：US5483229A
公开(公告)日：1996-01-09
申请号：US176923
申请日：1994-01-03
CPC分类号： H05K7/1468
摘要： An input-output unit for communicating between an industrial control equipment and field devices controlled thereby, comprising a card accommodating chamber, provided with a row of slots which accommodate input-output cards which convert signals handled by the industrial control equipment and the signals handled by the field devices; a terminal block provided with two or three terminals per slot, to which signal wires connected to the field devices are connected and a case, on the front of which the card accommodating chamber and the terminal block are mounted in correspondence with the terminals and slots, whereby a compact input-output unit is realized with good heat dissipation, easy to assemble, and with increased density of mounting.
摘要翻译： 一种输入输出单元，用于在工业控制设备和由此控制的现场设备之间进行通信，包括卡容纳室，设置有一排槽，其容纳输入输出卡，其转换由工业控制设备处理的信号和由 现场设备; 连接到现场设备的信号线连接到每个时隙设置有两个或三个端子的端子块，以及与端子和槽对应地安装卡容纳室和端子块的前面的壳体， 从而实现了紧凑的输入 - 输出单元，具有良好的散热性，易于组装以及更高的安装密度。
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公开(公告)号：US5033811A
公开(公告)日：1991-07-23
申请号：US428929
申请日：1989-10-30
IPC分类号： G02F1/313
CPC分类号： G02F1/3138
摘要： An optical switch includes at least one input optical semi-conductor waveguide. Two output optical semiconductor waveguides are connected at a branch point to the input optical waveguide, and diverge from the branch point with a preset angle .theta. (degree) between them. A refractive index controlling portion is located on at least one of the output optical waveguides and away from the branch point. The refractive index controlling portion effects a light mode cut-off by electromagnetically causing a reduction of the refractive index of the associated output optical waveguide.
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96.发明授权公开(公告)号：US08980451B2
公开(公告)日：2015-03-17
申请号：US13185880
申请日：2011-07-19
申请人： Yoshiyuki Kamata , Kaori Kimura , Takeshi Iwasaki
发明人： Yoshiyuki Kamata , Kaori Kimura , Takeshi Iwasaki
摘要： According to one embodiment, in a method of manufacturing a magnetic recording medium which is configured such that a ferromagnetic recording part is formed on a substrate in a desired track pattern or a desired bit pattern, a ferromagnetic film is formed on the substrate, and then a mask is formed on the ferromagnetic film, the mask having an opening above a region for isolating the ferromagnetic film between tracks or bits. Subsequently, a B-based gas is radiated on the region of the ferromagnetic film through the opening of the mask, thereby increasing a B content of the region to nonmagnetize the region.
摘要翻译： 根据一个实施例，在制造磁记录介质的方法中，磁记录介质被构造为使得铁磁记录部分以期望的轨迹图案或期望的位图形式形成在基板上，在基板上形成铁磁性膜，然后 在铁磁膜上形成掩模，该掩模在磁道或位之间隔离铁磁膜的区域之上具有开口。 随后，通过打开掩模，在铁磁膜的区域上辐射B基气体，从而增加该区域的B含量以使该区域不磁化。
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公开(公告)号：US08681454B2
公开(公告)日：2014-03-25
申请号：US13424266
申请日：2012-03-19
CPC分类号： G11B5/855
摘要： According to one embodiment, a method of manufacturing a patterned medium includes depositing a magnetic recording layer and applying an ultraviolet curable resin on both surfaces of a medium substrate, pressing a first resin stamper and a second resin stamper each including patterns of recesses and protrusions, corresponding to a patterned medium, against both surfaces of the medium substrate in such a manner that a direction from a center of the medium substrate toward a center of the first resin stamper is off-oriented from a direction from the center of the medium substrate toward a center of the second resin stamper to imprint the patterns of recesses and protrusions on the ultraviolet curable resin, and irradiating the ultraviolet curable resin with an ultraviolet ray through each of the first and second resin stampers to cure the ultraviolet curable resin.
摘要翻译： 根据一个实施例，一种制造图案化介质的方法包括沉积磁记录层并在介质基板的两个表面上施加紫外线固化树脂，压制每个包括凹凸图案的第一树脂压模和第二树脂压模， 对应于图案化的介质，以介质基板的中心朝向第一树脂压模的中心的方向从介质基板的中心朝向 所述第二树脂压模的中心在所述紫外线固化树脂上印刷凹凸图案，并且通过所述第一和第二树脂印模机中的每一个照射所述紫外线固化树脂以固化所述紫外线固化树脂。
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98.发明授权Method for manufacturing magnetic recording medium and magnetic recording medium 失效磁记录介质和磁记录介质的制造方法公开(公告)号：US08475949B2
公开(公告)日：2013-07-02
申请号：US13236726
申请日：2011-09-20
IPC分类号： G11B5/66
摘要： A magnetic recording medium is presented that includes protruded magnetic patterns formed on a substrate, and a nonmagnetic material filled in recesses between the magnetic patterns in which an oxygen concentration thereof is higher at a surface side than at a substrate side. The nonmagnetic material is at least one selected from the group consisting of Si, SiC, SiC—C, SiOC, SiON, Si3N4, Al, AlxOy, Ti and TiOx.
摘要翻译： 提出了一种磁记录介质，其包括形成在基板上的突出的磁图案，以及填充在表面侧的氧浓度高于基板侧的磁性图案之间的凹部中的非磁性材料。 非磁性材料是选自Si，SiC，SiC-C，SiOC，SiON，Si 3 N 4，Al，Al x O y，Ti和TiO x中的至少一种。
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公开(公告)号：US20120177948A1
公开(公告)日：2012-07-12
申请号：US13424266
申请日：2012-03-19
IPC分类号： G11B5/82
CPC分类号： G11B5/855
摘要： According to one embodiment, a method of manufacturing a patterned medium includes depositing a magnetic recording layer and applying an ultraviolet curable resin on both surfaces of a medium substrate, pressing a first resin stamper and a second resin stamper each including patterns of recesses and protrusions, corresponding to a patterned medium, against both surfaces of the medium substrate in such a manner that a direction from a center of the medium substrate toward a center of the first resin stamper is off-oriented from a direction from the center of the medium substrate toward a center of the second resin stamper to imprint the patterns of recesses and protrusions on the ultraviolet curable resin, and irradiating the ultraviolet curable resin with an ultraviolet ray through each of the first and second resin stampers to cure the ultraviolet curable resin.
摘要翻译： 根据一个实施例，一种制造图案化介质的方法包括沉积磁记录层并在介质基板的两个表面上施加紫外线固化树脂，压制每个包括凹凸图案的第一树脂压模和第二树脂压模， 对应于图案化的介质，以介质基板的中心朝向第一树脂压模的中心的方向从介质基板的中心朝向 所述第二树脂压模的中心在所述紫外线固化树脂上印刷凹凸图案，并且通过所述第一和第二树脂印模机中的每一个照射所述紫外线固化树脂以固化所述紫外线固化树脂。
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公开(公告)号：US20120067843A1
公开(公告)日：2012-03-22
申请号：US13064301
申请日：2011-03-16
申请人： Akira Watanabe , Kaori Kimura , Yousuke Isowaki , Yoshiyuki Kamata , Naoko Kihara , Akira Kikitsu
发明人： Akira Watanabe , Kaori Kimura , Yousuke Isowaki , Yoshiyuki Kamata , Naoko Kihara , Akira Kikitsu
IPC分类号： C23F1/02
CPC分类号： H01L21/3086 , B82Y10/00 , G03F7/0002 , G03F7/165 , G03F7/168 , G11B5/743 , G11B5/82 , G11B5/855 , H01L21/0332 , H01L21/0337 , H01L21/3081
摘要： A method of forming a fine pattern according to an embodiment includes: forming a hard mask on a substrate; forming a mask reinforcing member on the hard mask; forming a di-block copolymer layer on the mask reinforcing member, the di-block copolymer layer comprising a sea-island structure; forming a pattern comprising a concave-convex structure in the di-block copolymer layer, with island portions of the sea-island structure being convex portions; and transferring the pattern onto the hard mask by performing etching on the mask reinforcing member and the hard mask, with a mask being the pattern formed in the di-block copolymer layer. The mask reinforcing member is comprised of a material having an etching speed that is higher than an etching speed for the hard mask and is lower than an etching speed for sea portions of the sea-island structure of the di-block copolymer layer.
摘要翻译： 根据实施例的形成精细图案的方法包括：在基底上形成硬掩模; 在所述硬掩模上形成掩模加强部件; 在掩模加强部件上形成二嵌段共聚物层，二嵌段共聚物层包含海岛结构体; 在所述二嵌段共聚物层中形成包括凹凸结构的图案，所述海岛结构的岛部是凸部; 并通过在掩模增强部件和硬掩模上进行蚀刻将图案转印到硬掩模上，其中掩模是在二嵌段共聚物层中形成的图案。 掩模加强部件由蚀刻速度高于硬掩模的蚀刻速度的材料构成，并且低于二嵌段共聚物层的海岛结构的海水部分的蚀刻速度。
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