公开(公告)号：US06819822B2

公开(公告)日：2004-11-16

申请号：US09751660

申请日：2000-12-28

Applicant: Behrang Behin ,  Michael J. Daneman ,  Meng-Hsiung Kiang ,  Kam-Yin Lau ,  Satinderpall Pannu

Inventor： Behrang Behin ,  Michael J. Daneman ,  Meng-Hsiung Kiang ,  Kam-Yin Lau ,  Satinderpall Pannu

IPC: G02B635

CPC classification number: G02B6/3556 ,  B81B3/0021 ,  B81B2201/033 ,  B81B2201/045 ,  B81B2203/0181 ,  B81B2203/058 ,  B81B2207/07 ,  B81C1/00214 ,  G02B6/3512 ,  G02B6/3518 ,  G02B6/3542 ,  G02B6/3546 ,  G02B6/356 ,  G02B6/357 ,  G02B6/3584 ,  G02B26/0833 ,  G02B26/085 ,  G02B26/0858 ,  G02B26/0866 ,  H02N1/008

Abstract: A two-dimensional scanner consists of a rotatable gimbal structure with vertical electrostatic comb-drive actuators and sensors. The scanner's two axes of rotation may be controlled independently by activating two sets of vertical comb-drive actuators. The first set of vertical comb-drive actuator is positioned in between a outer frame of the gimbal structure and the base, and the second set of vertical comb-drive actuator is positioned in between the inner part of the gimbal structure and the outer frame of the gimbal structure. The inner part of the gimbal structure may include a reflective surface, and the device may be used as a mirror. Furthermore, the capacitance of the vertical comb-drives may be measured to monitor the angular position of the mirror, and the capacitive position-monitoring signal may be used to implement closed-loop feedback control of the mirror angle. The two-dimensional scanner may be fabricated in a semiconductor process. Two-dimensional scanners may be used to produce fiber-optic switches.

Abstract translation: 二维扫描器由可旋转的万向架结构与垂直静电梳状驱动致动器和传感器组成。 扫描仪的两个旋转轴可以通过激活两组垂直梳齿驱动执行器来独立控制。 第一组垂直梳齿驱动致动器位于万向架结构的外框架和基座之间，第二组垂直梳齿驱动致动器定位在万向架结构的内部和外框之间 万向架结构。 万向节结构的内部可以包括反射表面，并且该装置可以用作反射镜。 此外，可以测量垂直梳状驱动器的电容以监视反射镜的角度位置，并且可以使用电容位置监视信号来实现镜角的闭环反馈控制。 二维扫描器可以在半导体工艺中制造。 二维扫描仪可用于生产光纤交换机。

公开(公告)号：US06778306B2

公开(公告)日：2004-08-17

申请号：US10429546

申请日：2003-05-05

Applicant: Jeffry J. Sniegowski ,  M. Steven Rodgers

Inventor： Jeffry J. Sniegowski ,  M. Steven Rodgers

IPC: G02B2600

CPC classification number: G02B26/00 ,  B81B3/007 ,  B81B2201/045 ,  B81B2203/0109 ,  B81B2203/053 ,  B81B2203/058 ,  G02B26/0833

Abstract: Various embodiments of reinforced mirror microstructures for a surface micromachined optical system are disclosed. Multi-layered and structurally reinforced mirror microstructures are disclosed, including both two and three-layer microstructures. Adjacent structural layers in these multi-layered mirror microstructures may be structurally reinforced and interconnected by a plurality of vertically disposed columns, or by a plurality of at least generally laterally extending rails or ribs, or some combination thereof. Various embodiments of a single layered mirror microstructure with a structural reinforcement assembly that cantilevers from a lower surface thereof is also disclosed.

公开(公告)号：US06778305B2

公开(公告)日：2004-08-17

申请号：US10409352

申请日：2003-04-08

Applicant: Jeffry J. Sniegowski ,  M. Steven Rodgers

Inventor： Jeffry J. Sniegowski ,  M. Steven Rodgers

IPC: G02B2600

CPC classification number: G02B26/00 ,  B81B3/007 ,  B81B2201/045 ,  B81B2203/0109 ,  B81B2203/053 ,  B81B2203/058 ,  G02B26/0833

Abstract: Various embodiments of reinforced mirror microstructures for a surface micromachined optical system are disclosed. Multi-layered and structurally reinforced mirror microstructures are disclosed, including both two and three-layer microstructures. Adjacent structural layers in these multi-layered mirror microstructures may be structurally reinforced and interconnected by a plurality of vertically disposed columns, or by a plurality of at least generally laterally extending rails or ribs, or some combination thereof. Various embodiments of a single layered mirror microstructure with a structural reinforcement assembly that cantilevers from a lower surface thereof is also disclosed.

公开(公告)号：US06757455B1

公开(公告)日：2004-06-29

申请号：US09581313

申请日：2000-06-12

Applicant: Shunji Kamijima ,  Masatoshi Yonekubo ,  Takashi Takeda ,  Takao Nishikawa

Inventor： Shunji Kamijima ,  Masatoshi Yonekubo ,  Takashi Takeda ,  Takao Nishikawa

IPC: G02B626

CPC classification number: B81C1/00182 ,  B81B2201/045 ,  B81C2201/034 ,  G02B26/02

Abstract: A micromachine and a manufacturing method are provided for a micromachine that has a dynamic first microstructured portion serving as a drive portion, and a static second microstructured portion adapted to perform a switching function and which functions as an optical element. The second microstructured portion can be manufactured at least without complex steps, such as a silicon process, by forming a static second microstructure on the dynamic first microstructured portion, or in such a way as to be overlaid thereon by mold transfer. Thus, the microstructured portion of a complex shape can be easily formed with good reproducibility. When a plurality of elements are arranged in an array, similarly as in the case of a spatial light modulator, the stable reproduction thereof is achieved by the mold transfer. Thus, as compared with the case of manufacturing all elements in a silicon process, the probability of an occurrence of a defect is very low.

Abstract translation: 提供了一种用于具有动态第一微结构部分作为驱动部分的微型机械的微机械和制造方法，以及适于执行切换功能并用作光学元件的静态第二微结构部分。 可以通过在动态第一微结构化部分上形成静态第二微结构，或以通过模转移覆盖在其上的方式，至少不需要复杂的步骤，例如硅工艺来制造第二微结构部分。 因此，可以容易地以良好的再现性形成复杂形状的微结构化部分。 当多个元件被布置成阵列时，类似于空间光调制器的情况，其稳定的再现是通过模转移实现的。 因此，与制造硅工艺中的所有元素的情况相比，缺陷发生的概率非常低。

公开(公告)号：US06757093B2

公开(公告)日：2004-06-29

申请号：US10151080

申请日：2002-05-20

Applicant: Robert L. Wood ,  Vivek Agrawal

Inventor： Robert L. Wood ,  Vivek Agrawal

IPC: G02B2600

CPC classification number: G02B26/085 ,  B81B3/004 ,  B81B2201/045 ,  B81B2203/0118 ,  B81B2203/058 ,  G02B26/0833 ,  G02B26/0841

Abstract: A MEMs structure can include a recess in a substrate, the recess having a side wall and a floor. A tail portion of a moveable reflector is on the substrate and extends beyond the side wall of the recess opposite the recess floor and is configured to rotate into the recess. A head portion of the moveable reflector extends on the substrate outside the recess.

Abstract translation: MEM结构可以包括在基板中的凹部，凹部具有侧壁和底板。 可移动反射器的尾部位于基底上并且延伸超过与凹部底部相对的凹部的侧壁，并被构造成旋转到凹部中。 可移动反射器的头部在凹部外部的基板上延伸。

公开(公告)号：US20040109222A1

公开(公告)日：2004-06-10

申请号：US10426372

申请日：2003-04-29

Inventor： Clark T.-C. Nguyen ,  Yuan Xie

IPC: G02B026/00

CPC classification number: B81B3/004 ,  B81B2201/045 ,  G02B7/003 ,  G02B7/1827

Abstract: A low-voltage electromechanical device including a tiltable microplatform, method of tilting same and array of such devices are provided. The tiltable or steerable microplatform utilizes a bent-beam actuator to achieve large tilting angles with low actuation voltages. Thin beams of the actuator are bent in such a way as to cause the microplatform to pivot around a dimple support that generates a torsional force leading to angular motion in suspension beams attached perpendicular to the thin beams and, in turn, leading to angular or tilting motion in the suspended microplatform. Some of the key features include (1) the low-voltage bent-beam actuator; (2) a dimple-supported microplatform with a hole underneath in the substrate to allow light to pass through and to allow unhindered tilting of the microplatform; and (3) a method for constructing a microprism on the tiltable transparent microplatform for color dispersion purposes in an adaptive vision system.

Abstract translation: 提供了包括可倾斜微平台，倾斜方法和这种装置阵列的低压机电装置。 可倾斜或可操纵的微平台利用弯梁致动器来实现具有低致动电压的大倾角。 致动器的薄梁被弯曲成使得微平台围绕凹坑支撑枢转，该凹坑支撑件产生扭转力，导致垂直于薄梁附接的悬挂梁中的角运动，并且进而导致角度或倾斜 悬浮微量平台中的运动。 一些关键特征包括（1）低压弯梁致动器; （2）一个凹坑支撑的微平台，其在基底下方具有孔，以允许光通过并允许微平台的不受阻碍的倾斜; 和（3）用于在自适应视觉系统中用于色散目的的可倾斜透明微平台上构造微棱镜的方法。

公开(公告)号：US06736521B1

公开(公告)日：2004-05-18

申请号：US10335750

申请日：2003-01-02

Applicant: Arthur Monroe Turner

Inventor： Arthur Monroe Turner

IPC: G02B7182

CPC classification number: B81B3/0051 ,  B81B2201/045 ,  G02B26/0833 ,  G02B26/085 ,  G02B26/101

Abstract: A device 21 comprises a movable structure 44 having a first movable portion 70 hinged to frame portion 60 by a first pair of hinges 81, 82 spaced apart along a first axis 91. The first movable portion 70 has an edge 140 that is substantially perpendicular to the first axis and substantially parallel with and immediately adjacent to an edge 132 of the frame portion 60, such that a tolerance space 120 defined therebetween. At least one projection 122 extends from one or both of the edges 132 and/or 140. The projection 122 is adapted to limit translational motion of the first movable portion 70 relative to the frame portion 60 within the plane. The device 21 motion between the first movable portion 80 and a second pivot axis 112 with translational motion between the first movable portion 70 and the second movable portion 80 limited by a similar projection.

Abstract translation: 装置21包括可移动结构44，其具有通过沿着第一轴线91间隔开的第一对铰链81,82铰接到框架部分60的第一可移动部分70.第一可移动部分70具有基本垂直于 第一轴线并且基本平行于并且紧邻框架部分60的边缘132，使得在它们之间限定公差空间120。 至少一个突起122从边缘132和/或140中的一个或两个延伸。突起122适于限制第一可移动部分70相对于框架部分60在平面内的平移运动。 第一可动部分80和第二枢转轴线112之间的装置21在第一可动部分70和第二可动部分80之间的平移运动受到类似的突起的限制。

公开(公告)号：US20040085606A1

公开(公告)日：2004-05-06

申请号：US10467174

申请日：2003-08-14

Inventor： Serge Valette

IPC: G02B026/08

CPC classification number: B81B3/0062 ,  B81B2201/045 ,  B81B2203/0181 ,  B81B2203/058 ,  G02B26/0841

Abstract: The invention relates to a method for manufacturing an optical micro-mirror comprising a fixed part, a moveable part, with reflection means connected to the stationary part by articulation means. This process is characterized in that it comprises the following steps: a) realization of a stack comprised of a mechanical substrate (21), a first layer (22) of thermal oxidation material and at least one second layer (26) of material for forming the mobile part; b) realization of the articulation means (27); c) realization of the reflector means (29) on the second layer; d) realization of the mobile part by etching of at least the second layer of material; e) elimination of the thermal oxidation layer in order to liberate the moveable part. Possible applications to optical routing or image projection systems.

Abstract translation: 本发明涉及一种用于制造光学微镜的方法，其包括固定部分，可移动部分，反射装置通过铰接装置连接到固定部分。 该方法的特征在于其包括以下步骤：a）实现由机械衬底（21），热氧化材料的第一层（22）和用于形成的材料的至少一个第二层（26）组成的堆叠 移动部分; b）实现铰接装置（27）; c）在第二层上实现反射器装置（29）; d）通过蚀刻至少第二层材料来实现移动部件; e）消除热氧化层以释放可移动部件。 光路由或图像投影系统的可能应用。

公开(公告)号：US06708491B1

公开(公告)日：2004-03-23

申请号：US09659572

申请日：2000-09-12

Applicant: Billy L. Weaver ,  Douglas P. Goetz ,  Kathy L. Hagen ,  Mike E. Hamerly ,  Robert G. Smith ,  Silva K. Theiss

Inventor： Billy L. Weaver ,  Douglas P. Goetz ,  Kathy L. Hagen ,  Mike E. Hamerly ,  Robert G. Smith ,  Silva K. Theiss

IPC: F01B2910

CPC classification number: G02B6/358 ,  B81B3/0024 ,  B81B3/0037 ,  B81B2201/031 ,  B81B2201/045 ,  B81B2203/0109 ,  B81B2203/0118 ,  B81B2203/053 ,  B82Y15/00 ,  G02B6/352 ,  G02B6/3576 ,  H01G5/18 ,  H01H1/0036 ,  H01H61/04 ,  H01H2061/006 ,  H01H2061/008

Abstract: A micrometer sized, single-stage, vertical thermal actuator capable of repeatable and rapid movement of a micrometer-sized optical device off the surface of a substrate. The vertical thermal actuator is constructed on a surface of a substrate. At least one hot arm has a first end anchored to the surface and a free end located above the surface. A cold arm has a first end anchored to the surface and a free end. The cold arm is located above the hot arm relative to the surface. A member mechanically and electrically couples the free ends of the hot and cold arms such that the member moves away from the substrate when current is applied to at least the hot arm. The hot arm can optionally include a grounding tab to minimize thermal expansion of the cold arm.

Abstract translation: 微米尺寸的单级垂直热致动器，其能够将微米尺寸的光学器件重复并快速地移动离开衬底的表面。 垂直热致动器构造在基板的表面上。 至少一个热臂具有锚固在表面上的第一端和位于表面上方的自由端。 冷臂具有锚固在表面上的第一端和自由端。 冷臂相对于表面位于热臂上方。 机构和电气耦合热臂和冷臂的自由端，使得当电流施加到至少热臂时，构件远离基板移动。 热臂可以可选地包括接地片，以最小化冷臂的热膨胀。

公开(公告)号：US06671078B2

公开(公告)日：2003-12-30

申请号：US09863654

申请日：2001-05-23

Applicant: Dale C. Flanders ,  Martin A. Schmidt

Inventor： Dale C. Flanders ,  Martin A. Schmidt

IPC: G02B2600

CPC classification number: B81B3/0021 ,  B81B2201/045 ,  G02B6/353 ,  G02B6/3552 ,  G02B6/3566 ,  G02B6/357 ,  G02B6/358 ,  G02B26/02

Abstract: A zipper actuator for optical beam control has an optical port formed through the substrate. The cantilevered beam of the actuator preferably includes a paddle for switching the optical signal. Mirror structures can be provided on the paddle for beam switching. In some embodiments, MEMS or electrode latches are further provided.