公开(公告)号：US20050067100A1

公开(公告)日：2005-03-31

申请号：US10920407

申请日：2004-08-18

申请人： Shinji Kobayashi ,  Norihisa Koga

发明人： Shinji Kobayashi ,  Norihisa Koga

IPC分类号： G03F7/42 ,  B05C11/04 ,  B05C11/10 ,  B05C13/00 ,  B05D3/10 ,  C03C17/00 ,  C23F1/00 ,  G03F7/16 ,  H01L21/027

CPC分类号： C03C17/002 ,  C03C2218/328 ,  C03C2218/355 ,  G03F7/168 ,  Y10S134/902

摘要： An apparatus and a method for removing a coating film capable of stable treatment for removing unnecessary coating film at a substrate edge are provided. A substrate is clamped by approach stages from front and rear directions on a chuck, and fixed when accurate registration thereof is achieved. Then, the substrate edge is moved back and forth together with the chuck and the approach stage, so that the edge of the substrate is introduced in a space between an upper piece and a lower piece of a fixed arm portion. While the substrate is being moved, a solvent is fed from a nozzle portion onto a surface thereof and a purge gas is fed through a purge gas feeding pipe, so as to remove the coating film from the surface of the substrate by sucking and discharging the solvent and dissolved coating film through a discharge pipe.

摘要翻译： 提供了一种用于去除能够在基板边缘去除不需要的涂膜的稳定处理的涂膜的设备和方法。 基板通过卡盘上的前后方向的夹持夹紧，并且在实现精确对准时固定。 然后，基板边缘与卡盘和接近台一起前后移动，使得基板的边缘被引入到固定臂部分的上部件和下部件之间的空间中。 在基板移动的同时，将溶剂从喷嘴部分供给到其表面，并且净化气体通过吹扫气体供给管进给，从而通过吸附和排出基板从基板的表面除去涂膜 溶剂和溶解的涂膜通过排放管。

公开(公告)号：US06843345B2

公开(公告)日：2005-01-18

申请号：US10398624

申请日：2002-08-08

申请人： Hiroshi Koizumi ,  Shinji Kobayashi

发明人： Hiroshi Koizumi ,  Shinji Kobayashi

IPC分类号： B60R11/00 ,  B60R11/02 ,  H04R1/02 ,  H04R1/06 ,  H05K5/00

CPC分类号： H04R1/025 ,  B60R11/0217 ,  B60R2011/0021 ,  B60R2011/0043 ,  H04R1/06 ,  H04R2499/13

摘要： A speaker assembly device for a door of a vehicle capable of being installed in vehicle doors of different thicknesses and shapes includes a speaker unit; a holder for mounting the speaker unit to a front portion thereof, the holder including an engagement portion at a back portion thereof; and a spacer including an engaging portion and an opposingly contacting portion, the engaging portion being engageable with the engagement portion of the holder and the opposingly contacting portion opposingly contacting the door of the vehicle.

摘要翻译： 一种能够安装在不同厚度和形状的车门中的用于车门的扬声器组装装置包括扬声器单元; 用于将扬声器单元安装到其前部的保持器，所述保持器在其后部包括接合部分; 以及包括接合部分和相对接触部分的间隔件，所述接合部分可与所述保持器的接合部分和所述相对接触部分相对地接触所述车辆门。

公开(公告)号：US06704035B2

公开(公告)日：2004-03-09

申请号：US10373755

申请日：2003-02-27

申请人： Shinji Kobayashi ,  Tadashi Shinohara

发明人： Shinji Kobayashi ,  Tadashi Shinohara

IPC分类号： G03G1501

CPC分类号： H04N1/00238 ,  H04N1/00236 ,  H04N1/32 ,  H04N1/32502 ,  H04N1/32512 ,  H04N1/32518 ,  H04N1/506 ,  Y10S347/90

摘要： A color image forming apparatus for forming a color image on a storage medium using a laser beam generated from a laser generating means includes a plurality of image data interfaces provided between the color image forming apparatus and a peripheral device, image data interface conversion means for converting each of the image data interfaces into an image data interface for the laser generating means, and a single control means for controlling a drive timing of the laser generating means, the control means controlling the drive timing of the laser generating means for each one of a plurality of colors based on image data input from the image interface conversion means.

摘要翻译： 使用从激光发生装置产生的激光束在存储介质上形成彩色图像的彩色图像形成装置包括设置在彩色图像形成装置和外围装置之间的多个图像数据接口，图像数据接口转换装置，用于转换 每个图像数据接口成为用于激光产生装置的图像数据接口，以及用于控制激光产生装置的驱动定时的单个控制装置，控制装置控制激光产生装置的驱动定时 基于从图像接口转换装置输入的图像数据的多种颜色。

公开(公告)号：US06306547B1

公开(公告)日：2001-10-23

申请号：US09457531

申请日：1999-12-09

申请人： Shinji Kobayashi

发明人： Shinji Kobayashi

IPC分类号： G03F900

CPC分类号： G03F1/50 ,  G03F1/78

摘要： A transflecting portion of a photomask is given with a phase difference such that suppresses interference of exposure light exiting from the transflecting portion with light exiting from a transmitting portion. By exposing a resist to light through the photomask, a resist hole and a resist step are formed in the resist within a predetermined region (half area) in a secure manner. Consequently, by taking transmittivity and a phase difference of the transflecting portion with respect to the transmitting portion into consideration, it has become possible to provide a photomask by which a resist step is formed accurately in the resist.

摘要翻译： 给出光掩模的透视部分具有相位差，从而抑制从透射部分出射的曝光光线与从透射部分出射的光的干涉。 通过将抗蚀剂曝光通过光掩模，在安全的方式在预定区域（半个区域）内的抗蚀剂中形成抗蚀剂孔和抗蚀剂步骤。 因此，通过考虑透射部分的透射率和相位差，可以提供在光刻胶中精确地形成光刻胶步骤的光掩模。

公开(公告)号：US06265238B1

公开(公告)日：2001-07-24

申请号：US09500010

申请日：2000-02-08

申请人： Kaneo Yaji ,  Shinji Kobayashi

发明人： Kaneo Yaji ,  Shinji Kobayashi

IPC分类号： H01L2100

CPC分类号： G01P15/125 ,  G01P15/0802 ,  G01P2015/0828

摘要： A miniature electrostatic capacitive sensor in which electrical insulation is reliably established between a CV conversion circuit and a sensing unit. Also disclosed is a manufacturing method for the above type of capacitive sensor. The capacitive sensor is constructed of a sensing unit having a movable electrode and a stationary electrode, and a CV-conversion-circuit-forming portion having a CV conversion circuit. The movable electrode is constructed of a first support portion, a leaf spring connected to the first support portion, and a mass portion movably supported by the leaf spring. The stationary electrode is formed of a second support portion and a projecting portion connected to the second support portion. The CV-conversion-circuit forming portion and the first and second support portion are made thin. Accordingly, a shallow clearance is formed between the CV-conversion-circuit forming portion and each of the first support portion and the stationary electrode. An insulating substance can thus be positively deposited in the clearance, thereby forming an electrically insulating portion between the CV conversion circuit and the sensing unit.

摘要翻译： 一种微型静电电容传感器，其中在CV转换电路和感测单元之间可靠地建立电绝缘。 还公开了上述类型的电容式传感器的制造方法。 电容传感器由具有可动电极和固定电极的感测单元和具有CV转换电路的CV转换电路形成部构成。 可移动电极由第一支撑部分，连接到第一支撑部分的板簧和由板簧可移动地支撑的质量部分构成。 固定电极由第二支撑部分和连接到第二支撑部分的突出部分形成。 CV变换电路形成部分和第一和第二支撑部分变薄。 因此，在CV转换电路形成部分和第一支撑部分和固定电极之间形成浅间隙。 因此，绝缘物质可以积极地沉积在间隙中，从而在CV转换电路和感测单元之间形成电绝缘部分。

公开(公告)号：US5851702A

公开(公告)日：1998-12-22

申请号：US871977

申请日：1997-06-10

申请人： Kunio Watanabe ,  Shinji Kobayashi ,  Masashi Inoue

发明人： Kunio Watanabe ,  Shinji Kobayashi ,  Masashi Inoue

IPC分类号： G03F1/68 ,  G03F1/80 ,  H01L21/027 ,  H01L21/302 ,  H01L21/3065 ,  G03F9/00

CPC分类号： G03F1/54 ,  G03F1/50

摘要： A method for producing a photomask of the present invention includes the steps of: forming a light-blocking film on a surface of a transparent substrate; forming a resist film for an EB on the light-blocking film; patterning the resist film by EB writing and development; and selectively etching the light-blocking film using the patterned resist film to form a photomask, wherein the light-blocking film has a thickness in the range of about 60 nm to about 70 nm.

摘要翻译： 本发明的光掩模的制造方法包括以下步骤：在透明基板的表面上形成遮光膜; 在遮光膜上形成用于EB的抗蚀剂膜; 通过EB写作和开发来形成抗蚀膜; 并使用所述图案化的抗蚀剂膜选择性地蚀刻所述遮光膜以形成光掩模，其中所述遮光膜的厚度在约60nm至约70nm的范围内。

公开(公告)号：US5723236A

公开(公告)日：1998-03-03

申请号：US654432

申请日：1996-05-28

申请人： Masashi Inoue ,  Shinji Kobayashi

发明人： Masashi Inoue ,  Shinji Kobayashi

IPC分类号： G03F1/32 ,  G03F1/68 ,  H01L21/027 ,  G03F9/00

CPC分类号： G03F1/32 ,  G03F1/26

摘要： A half-tone film, a light-shielding film and resist are formed on a transparent substrate in this order, and the resist is removed by adjusting the dosage of exposure for each area so that film-thickness differences are provided. A predetermined pattern is formed on the half-tone film and the light-shielding film by utilizing the film-thickness differences. This half-tone pattern is a pattern to be copied onto resist on a wafer. Further, the light-shielding film is formed between the inside edge of a scribe line that separates chips from each other and the peripheral edge of the photomask. Thus, it becomes possible to prevent multiple exposure that tends to be generated upon conducting exposure using the step-and-repeat system, and also to maintain high light contrast by using a half-tone film.

摘要翻译： 在透明基板上依次形成半色调膜，遮光膜和抗蚀剂，通过调整各区域的曝光用量来除去抗蚀剂，从而提供膜厚度差异。 通过利用膜厚度差，在半色调膜和遮光膜上形成预定图案。 该半色调图案是要在晶片上复制到抗蚀剂上的图案。 此外，遮光膜形成在彼此分离芯片的划线的内边缘和光掩模的周缘之间。 因此，可以防止使用分步重复系统进行曝光时倾向于产生的多次曝光，并且还可以通过使用半色调膜来保持高的光对比度。

公开(公告)号：US5609971A

公开(公告)日：1997-03-11

申请号：US264918

申请日：1994-06-24

申请人： Naoto Matono ,  Hitoshi Noguchi ,  Tomomi Yamamoto ,  Shinji Kobayashi ,  Masahiro Nakata

发明人： Naoto Matono ,  Hitoshi Noguchi ,  Tomomi Yamamoto ,  Shinji Kobayashi ,  Masahiro Nakata

IPC分类号： G11B5/147 ,  G11B5/31 ,  G11B5/39 ,  G11B5/66 ,  B32B9/00

CPC分类号： G11B5/1475 ,  G11B5/3116 ,  G11B5/3967 ,  Y10S428/90 ,  Y10T428/1171 ,  Y10T428/12861 ,  Y10T428/12937

摘要： A thin film magnetic head comprising a lower magnetic core layer 9 and an upper magnetic core layer 12 formed over the core layer 9 with a coil layer 10, a gap spacer layer 11 and an insulating layer provided therebetween, the core layers 9 and 12 each having a core tip region c between a core tip a and a portion b increasing in core width. The core layers 9 and 12 are each formed by a magnetic thin film of NiFe having a positive magnetostriction constant of not greater than 1.times.10.sup.-6 in absolute value and containing 17.5 to 19.5 wt. % of Fe.

摘要翻译： 一种薄膜磁头，包括在芯层9上形成的下磁芯层9和上磁芯层12，线圈层10，间隔层11和设置在其间的绝缘层，芯层9和12各自 在核心尖端a和芯部宽度增加的部分b之间具有芯部尖端区域c。 芯层9和12各自由具有绝对值不大于1×10-6的正磁致伸缩常数的NiFe的磁性薄膜形成，并且含有17.5至19.5wt。 Fe％。

公开(公告)号：US5295149A

公开(公告)日：1994-03-15

申请号：US34867

申请日：1993-03-19

申请人： Kiyohisa Terai ,  Tohru Tamagawa ,  Takaaki Murata ,  Shinji Kobayashi ,  Akira Moriguchi ,  Hirokatsu Suzuki

发明人： Kiyohisa Terai ,  Tohru Tamagawa ,  Takaaki Murata ,  Shinji Kobayashi ,  Akira Moriguchi ,  Hirokatsu Suzuki

IPC分类号： H01S3/0975 ,  H01S3/09

CPC分类号： H01S3/0975

摘要： A gas laser device, including an a.c. power source for generating a.c. output voltage and a pair of electrodes positioned sandwiching discharge gap through which laser gas circulates. The pair of electrodes are connected to the a.c. power source for applying the a.c. voltage across the electrodes to achieve discharge in the discharge gap such as to create a positive column region and boundary layer regions, thereby to generate laser light. The positive column region is created in the discharge gap and a.c. power injected therein contributes to laser excitation. The boundary layer regions is created in a vicinity of one of the pair of electrodes, respectively and a.c. power injected therein does not contribute to laser excitation. A frequency of the a.c. power source is set to at least 700 kHz and an a.c. output voltage of the a.c. power source is set at a level such that a voltage in the positive column region is larger than a burden voltage in the boundary layer regions.In the gas laser device, it may be set that a dimension d between the pair of electrodes and a pressure p of the laser gas in the relationship of the following formula (A)pxd.gtoreq.34 torr.multidot.cm (A)As a result the input power supplied for laser excitation in the discharge gap is at least 50% of a total input power.

摘要翻译： 一种气体激光装置，包括一个等 用于产生交流电源 输出电压和一对电极定位夹着放电间隙，激光气体通过该间隙循环。 一对电极连接到交流电。 电源应用a.c. 电压跨过电极实现放电间隙的放电，从而产生正的列区域和边界层区域，由此产生激光。 在排出间隙中产生正柱区域， 其中注入的功率有助于激光激发。 边界层区分别形成在一对电极中的一个附近，并且a.c. 在其中注入的功率对激光激发没有贡献。 a.c.的频率。 电源设定为700 kHz以上， 交流输出电压。 电源被设定为使得正列区域中的电压大于边界层区域中的负载电压的电平。 在气体激光装置中，可以将下述公式（A）pxd> = 34 torr×cm（A）的关系设定为一对电极之间的尺寸d和激光气体的压力p。结果 在放电间隙中为激光激发提供的输入功率为总输入功率的至少50％。

公开(公告)号：USD810193S1

公开(公告)日：2018-02-13

申请号：US29556018

申请日：2016-02-26

申请人： Takuya Etoh ,  Shinji Kobayashi ,  Fei Zhang ,  Lei Al

设计人： Takuya Etoh ,  Shinji Kobayashi ,  Fei Zhang ,  Lei Al