公开(公告)号：US20230231040A1

公开(公告)日：2023-07-20

申请号：US17578011

申请日：2022-01-18

Applicant: GlobalFoundries U.S. Inc.

Inventor： Hong Yu ,  Vibhor Jain

IPC: H01L29/735 ,  H01L29/417 ,  H01L29/66 ,  H01L29/08

CPC classification number: H01L29/735 ,  H01L29/41708 ,  H01L29/6625 ,  H01L29/0808 ,  H01L29/0821

Abstract: Embodiments of the disclosure provide a lateral bipolar transistor structure with an emitter/collector (E/C) contact to a doped semiconductor well and related methods. A bipolar transistor structure according to the disclosure may include a doped semiconductor well over a semiconductor substrate. An insulative region is on the doped semiconductor well. A base layer is on the insulative region, and an emitter/collector (E/C) layer on the insulative region and adjacent a first sidewall of the base layer. An E/C contact to the doped semiconductor well includes a lower portion adjacent the insulative region and an upper portion adjacent and electrically coupled to the E/C layer.

公开(公告)号：US11695064B2

公开(公告)日：2023-07-04

申请号：US17176251

申请日：2021-02-16

Applicant: GLOBALFOUNDRIES U.S. Inc.

Inventor： Vibhor Jain ,  Judson R. Holt ,  Tayel Nesheiwat ,  John J. Pekarik ,  Christopher Durcan

IPC: H01L29/732 ,  H01L29/66 ,  H01L29/08 ,  H01L29/06

CPC classification number: H01L29/732 ,  H01L29/0649 ,  H01L29/0804 ,  H01L29/66272

Abstract: Device structures and fabrication methods for a bipolar junction transistor. The device structure includes a substrate and a trench isolation region in the substrate. The trench isolation region surrounds an active region of the substrate. The device structure further includes a collector in the active region of the substrate, a base layer having a first section positioned on the active region and a second section oriented at an angle relative to the first section, an emitter positioned on the first section of the base layer, and an extrinsic base layer positioned over the trench isolation region and adjacent to the emitter. The second section of the base layer is laterally positioned between the extrinsic base layer and the emitter.

公开(公告)号：US20230143396A1

公开(公告)日：2023-05-11

申请号：US17684321

申请日：2022-03-01

Applicant: GLOBALFOUNDRIES U.S. Inc.

Inventor： Hong Yu ,  Vibhor Jain

IPC: H01L29/417 ,  H01L29/08 ,  H01L29/10 ,  H01L29/66 ,  H01L29/735 ,  H01L29/737

CPC classification number: H01L29/41708 ,  H01L29/0821 ,  H01L29/1008 ,  H01L29/66242 ,  H01L29/735 ,  H01L29/737 ,  H01L29/0808 ,  H01L29/0817

Abstract: The present disclosure relates to semiconductor structures and, more particularly, to a bipolar transistor with a collector contact and methods of manufacture. The structure includes: a lateral bipolar transistor which includes an emitter, a base and a collector; an emitter contact to the emitter; a base contact to the base; and a collector contact to the collector and extending to an underlying substrate underneath the collector.

公开(公告)号：US20230069207A1

公开(公告)日：2023-03-02

申请号：US17524043

申请日：2021-11-11

Applicant: GlobalFoundries U.S. Inc.

Inventor： Alexander Derrickson ,  Judson R. Holt ,  Haiting Wang ,  Jagar Singh ,  Vibhor Jain

IPC: H01L29/10 ,  H01L29/08 ,  H01L29/66 ,  H01L29/735 ,  H01L29/737

Abstract: Structures for a bipolar junction transistor and methods of forming a structure for a bipolar junction transistor. The structure includes an emitter having a raised portion, a collector having a raised portion, and a base having a base layer and an extrinsic base layer stacked with the base layer. The base layer and the extrinsic base layer are positioned in a lateral direction between the raised portion of the emitter and the raised portion of the collector, the base layer has a first width in the lateral direction, the extrinsic base layer has a second width in the lateral direction, and the second width is greater than the first width.

公开(公告)号：US20230067486A1

公开(公告)日：2023-03-02

申请号：US17525256

申请日：2021-11-12

Applicant: GLOBALFOUNDRIES U.S. Inc.

Inventor： Alexander Derrickson ,  Vibhor Jain ,  Judson R. Holt ,  Jagar Singh ,  Mankyu Yang

IPC: H01L29/08 ,  H01L29/735 ,  H01L29/737 ,  H01L29/06 ,  H01L29/10 ,  H01L29/417

Abstract: The present disclosure relates to semiconductor structures and, more particularly, to a lateral bipolar transistor with gated collector and methods of manufacture. The structure includes: an extrinsic base region vertically over a semiconductor substrate and comprising asymmetrical sidewall spacers on opposing sidewalls of the extrinsic base region; a collector region on the semiconductor substrate and separated from the extrinsic base region by at least a first spacer of the asymmetrical sidewall spacers; and an emitter region on the semiconductor substrate and separated from the extrinsic base region by a second spacer of the asymmetrical sidewall spacers.

公开(公告)号：US20230057695A1

公开(公告)日：2023-02-23

申请号：US17509327

申请日：2021-10-25

Applicant: GLOBALFOUNDRIES U.S. Inc.

Inventor： Vibhor Jain ,  Alvin J. Joseph ,  Alexander Derrickson ,  Judson R. Holt ,  John J. Pekarik

IPC: H01L29/08 ,  H01L29/735 ,  H01L29/417 ,  H01L29/66

Abstract: The present disclosure relates to semiconductor structures and, more particularly, to lateral bipolar transistors and methods of manufacture. The structure includes: an extrinsic base comprising semiconductor material; an intrinsic base comprising semiconductor material which is located below the extrinsic base; a polysilicon emitter on a first side of the extrinsic base; a raised collector on a second side of the extrinsic base; and sidewall spacers on the extrinsic base which separate the extrinsic base from the polysilicon emitter and the raised collector.

公开(公告)号：US20220375871A1

公开(公告)日：2022-11-24

申请号：US17323423

申请日：2021-05-18

Applicant: GLOBALFOUNDRIES U.S. Inc.

Inventor： Sunil K. Singh ,  Vibhor Jain ,  Siva P. Adusumilli ,  Sebastian T. Ventrone ,  Johnatan A. Kantarovsky ,  Yves T. Ngu

IPC: H01L23/544 ,  H01L23/48 ,  G01N21/64

Abstract: The disclosure provides an integrated circuit (IC) structure with fluorescent materials, and related methods. An IC structure according to the disclosure may include a layer of fluorescent material on an IC component. The layer of fluorescent material defines a portion of an identification marker for the IC structure.

公开(公告)号：US11488950B2

公开(公告)日：2022-11-01

申请号：US17173611

申请日：2021-02-11

Applicant: GLOBALFOUNDRIES U.S. Inc.

Inventor： Uzma B. Rana ,  Vibhor Jain ,  Anthony K. Stamper ,  Qizhi Liu ,  Siva P. Adusumilli

IPC: H01L27/06 ,  H01L29/732 ,  H01L21/8249 ,  H01L29/66 ,  H01L29/10 ,  H01L29/08 ,  H01L29/737 ,  H01L29/73

Abstract: Aspects of the disclosure provide an integrated circuit (IC) structure with a bipolar transistor stack within a substrate. The bipolar transistor stack may include: a collector, a base on the collector, and an emitter on a first portion of the base. A horizontal width of the emitter is less than a horizontal width of the base, and an upper surface of the emitter is substantially coplanar with an upper surface of the substrate. An extrinsic base structure is on a second portion of the base of the bipolar transistor stack, and horizontally adjacent the emitter. The extrinsic base structure includes an upper surface above the upper surface of the substrate.

公开(公告)号：US11362201B1

公开(公告)日：2022-06-14

申请号：US17120916

申请日：2020-12-14

Applicant: GLOBALFOUNDRIES U.S. Inc.

Inventor： Sarah McTaggart ,  Qizhi Liu ,  Vibhor Jain ,  Mark Levy ,  Paula Fisher ,  James R. Elliott

IPC: H01L29/737 ,  H01L29/66

Abstract: Device structures and fabrication methods for heterojunction bipolar transistors. Trench isolation regions are positioned in a semiconductor substrate to define active regions. A base layer includes first sections that are respectively positioned over the active regions and second sections that are respectively positioned over the trench isolation regions. Emitter fingers are respectively positioned on the first sections of the base layer. The first sections of the base layer include single-crystal semiconductor material, and the second sections of the base layer include polycrystalline semiconductor material. The second sections of the base layer are spaced in a vertical direction from the trench isolation regions to define a first cavity that extends about a perimeter of the base layer and second cavities that are connected to the first cavity.

公开(公告)号：US20220165676A1

公开(公告)日：2022-05-26

申请号：US16953441

申请日：2020-11-20

Applicant: GLOBALFOUNDRIES U.S. INC.

Inventor： Vibhor Jain ,  Sunil K. Singh ,  Johnatan A. Kantarovsky ,  Siva P. Adusumilli ,  Sebastian T. Ventrone ,  John J. Ellis-Monaghan ,  Yves T. Ngu

IPC: H01L23/544 ,  H01L23/00

Abstract: The disclosure provides a method to authenticate an integrated circuit (IC) structure. The method may include forming a first authentication film (AF) material within the IC structure. A composition of the first AF material is different from an adjacent material within the IC structure. The method includes converting the first AF material into a void within the IC structure. Additionally, the method includes creating an authentication map of the IC structure to include a location of the void in the IC structure for authentication of the IC structure.