公开(公告)号：US20170011912A1

公开(公告)日：2017-01-12

申请号：US15119683

申请日：2014-03-18

Applicant: INTEL CORPORATION

Inventor： Niloy MUKHERJEE ,  Brian S. DOYLE ,  Marko RADOSAVLJEVIC ,  Ravi PILLARISETTY ,  Han Wui THEN ,  Valluri R. RAO ,  Robert S. CHAU

IPC: H01L21/02 ,  H01L29/786 ,  H01L27/12

CPC classification number: H01L21/02513 ,  H01L21/02164 ,  H01L21/02178 ,  H01L21/02186 ,  H01L21/0228 ,  H01L21/02282 ,  H01L21/02422 ,  H01L21/02428 ,  H01L21/02488 ,  H01L21/02521 ,  H01L21/02532 ,  H01L21/02538 ,  H01L21/02549 ,  H01L21/02551 ,  H01L21/02595 ,  H01L21/02631 ,  H01L21/02675 ,  H01L21/763 ,  H01L27/1218 ,  H01L27/1225 ,  H01L29/78603 ,  H01L29/78681

Abstract: Embodiments of semiconductor assemblies, and related integrated circuit devices and techniques, are disclosed herein. In some embodiments, a semiconductor assembly may include a flexible substrate, a polycrystalline semiconductor material, and a polycrystalline dielectric disposed between and adjacent to the flexible substrate and the polycrystalline semiconductor material. The polycrystalline semiconductor material. The polycrystalline semiconductor material may include a polycrystalline III-V material, a polycrystalline II-VI material or polycrystalline germanium. Other embodiments may be disclosed and/or claimed.

Abstract translation: 本文公开了半导体组件的实施例以及相关的集成电路器件和技术。 在一些实施例中，半导体组件可以包括柔性衬底，多晶半导体材料和布置在柔性衬底和多晶半导体材料之间和之后的多晶电介质。 多晶半导体材料。 多晶半导体材料可以包括多晶III-V材料，多晶II-VI材料或多晶锗。 可以公开和/或要求保护其他实施例。

公开(公告)号：US20160240671A1

公开(公告)日：2016-08-18

申请号：US14914847

申请日：2013-09-27

Applicant: INTEL CORPORATION

Inventor： Willy RACHMADY ,  Van H. LE ,  Ravi PILLARISETTY ,  Marko RADOSAVLJEVIC ,  Gilbert DEWEY ,  Niloy MUKHERJEE ,  Jack T. KAVALIEROS ,  Robert S. CHAU ,  Benjamin CHU-KUNG ,  Roza KOTLYAR

IPC: H01L29/78 ,  H01L29/06 ,  H01L29/16 ,  H01L29/66 ,  H01L29/20

CPC classification number: H01L29/7842 ,  H01L29/0665 ,  H01L29/0673 ,  H01L29/068 ,  H01L29/1054 ,  H01L29/16 ,  H01L29/165 ,  H01L29/20 ,  H01L29/42392 ,  H01L29/512 ,  H01L29/66439 ,  H01L29/66568 ,  H01L29/775 ,  H01L29/778 ,  H01L29/78696

Abstract: An apparatus including a heterostructure disposed on a substrate and defining a channel region, the heterostructure including a first material having a first band gap less than a band gap of a material of the substrate and a second material having a second band gap that is greater than the first band gap; and a gate stack on the channel region, wherein the second material is disposed between the first material and the gate stack. A method including forming a first material having a first band gap on a substrate; forming a second material having a second band gap greater than the first band gap on the first material; and forming a gate stack on the second material.

Abstract translation: 一种包括设置在衬底上并限定沟道区的异质结构的装置，所述异质结构包括具有小于所述衬底的材料的带隙的第一带隙的第一材料和具有大于所述衬底的材料的第二带隙的第二材料 第一个带隙; 以及栅极堆叠，其中所述第二材料设置在所述第一材料和所述栅极叠层之间。 一种方法，包括在基板上形成具有第一带隙的第一材料; 形成具有大于所述第一材料上的所述第一带隙的第二带隙的第二材料; 以及在所述第二材料上形成栅叠层。

公开(公告)号：US20160172477A1

公开(公告)日：2016-06-16

申请号：US14909090

申请日：2013-09-27

Applicant: INTEL CORPORATION

Inventor： Gilbert DEWEY ,  Matthew V. METZ ,  Niloy MUKHERJEE ,  Robert S. CHAU ,  Marko RADOSAVLJEVIC ,  Ravi PILLARISETTY ,  Benjamin CHU-KUNG

IPC: H01L29/778 ,  H01L29/78 ,  H01L29/66 ,  H01L29/205

CPC classification number: H01L29/7786 ,  H01L29/1054 ,  H01L29/205 ,  H01L29/66462 ,  H01L29/66795 ,  H01L29/785 ,  H01L29/7851

Abstract: An apparatus including a heterostructure disposed on a substrate and defining a channel region, the heterostructure including a first material having a first band gap less than a band gap of a material of the substrate and a second material having a second band gap that is greater than the first band gap; and a gate stack on the channel region, wherein the second material is disposed between the first material and the gate stack. A method including forming a first material having a first band gap on a substrate; forming a second material having a second band gap greater than the first band gap on the first material; and forming a gate stack on the second material.

Abstract translation: 一种包括设置在衬底上并限定沟道区的异质结构的装置，所述异质结构包括具有小于所述衬底的材料的带隙的第一带隙的第一材料和具有大于所述衬底的材料的第二带隙的第二材料 第一个带隙; 以及栅极堆叠，其中所述第二材料设置在所述第一材料和所述栅极叠层之间。 一种方法，包括在基板上形成具有第一带隙的第一材料; 形成具有大于所述第一材料上的所述第一带隙的第二带隙的第二材料; 以及在所述第二材料上形成栅叠层。

公开(公告)号：US20160064491A1

公开(公告)日：2016-03-03

申请号：US14937819

申请日：2015-11-10

Applicant: Intel Corporation

Inventor： Han Wui Then ,  Sansaptak DASGUPTA ,  Marko RADOSAVLJEVIC ,  Benjamin CHU-KUNG ,  Sanaz GARDNER ,  Seung Hoon SUNG ,  Robert S. Chau

IPC: H01L29/20 ,  H01L21/283 ,  H01L21/02 ,  H01L29/423 ,  H01L29/78

CPC classification number: H01L29/2003 ,  H01L21/02164 ,  H01L21/02238 ,  H01L21/02255 ,  H01L21/0228 ,  H01L21/0254 ,  H01L21/283 ,  H01L21/28575 ,  H01L21/84 ,  H01L27/1203 ,  H01L29/0649 ,  H01L29/201 ,  H01L29/42356 ,  H01L29/66462 ,  H01L29/66795 ,  H01L29/7787 ,  H01L29/78 ,  H01L29/785 ,  H01L29/7851 ,  H01L29/802

Abstract: A III-N semiconductor channel is formed on a III-N transition layer formed on a (111) or (110) surface of a silicon template structure, such as a fin sidewall. In embodiments, the silicon fin has a width comparable to the III-N epitaxial film thicknesses for a more compliant seeding layer, permitting lower defect density and/or reduced epitaxial film thickness. In embodiments, a transition layer is GaN and the semiconductor channel comprises Indium (In) to increase a conduction band offset from the silicon fin. In other embodiments, the fin is sacrificial and either removed or oxidized, or otherwise converted into a dielectric structure during transistor fabrication. In certain embodiments employing a sacrificial fin, the III-N transition layer and semiconductor channel is substantially pure GaN, permitting a breakdown voltage higher than would be sustainable in the presence of the silicon fin.