公开(公告)号：US20080123079A1

公开(公告)日：2008-05-29

申请号：US11935673

申请日：2007-11-06

Applicant: Shohei NUMATA ,  Atsushi Baba ,  Tetsuya Matsui

Inventor： Shohei NUMATA ,  Atsushi Baba ,  Tetsuya Matsui

IPC: G01L1/24

CPC classification number: G01L5/0047 ,  G01L1/241

Abstract: A residual stress measuring method capable of measuring residual stress of the surface of an object to be inspected rapidly in a non-destructive non-contact manner, as well as a residual stress measuring system having such characteristics and being high in portability, are provided. The residual stress measuring system comprises a heating laser for heating an inspection area of an object to be inspected, a laser interferometer for irradiating the inspection area interferometric with laser light and measuring a deformation quantity within an elastic deformation range upon stress relief by heating in accordance with a laser interferometric method, and a data processor for measuring residual stress from the deformation quantity within the elastic deformation range upon stress relief of the object to be inspected.

Abstract translation: 提供了能够以非破坏性的非接触方式快速地测量待检查物体的表面的残余应力的残余应力测量方法，以及具有这种特性并且携带性高的残余应力测量系统。 残余应力测量系统包括用于加热被检查物体的检查区域的加热激光器，用于用激光照射干涉检查区域的激光干涉仪，并且根据按照加热的应力消除来测量弹性变形范围内的变形量 采用激光干涉测量方法，以及数据处理器，用于根据待检测物体的应力释放来测量弹性变形范围内的变形量的残余应力。

公开(公告)号：US20060113473A1

公开(公告)日：2006-06-01

申请号：US11326399

申请日：2006-01-06

Applicant: Yoshifumi Taniguchi ,  Mikio Ichihashi ,  Masanari Kouguchi

Inventor： Yoshifumi Taniguchi ,  Mikio Ichihashi ,  Masanari Kouguchi

IPC: G21K7/00

CPC classification number: H01J37/28 ,  G01L1/241 ,  G01L5/0047 ,  G01N23/20 ,  G01N23/20058 ,  G01N23/2251 ,  H01J37/2955 ,  H01J2237/24585 ,  H01J2237/2544 ,  H01J2237/2813 ,  H01L22/12 ,  H01L2924/0002 ,  H01L2924/00

Abstract: A method and apparatus for measuring the physical properties of a micro region measures the two-dimensional distribution of stress/strain in real time at high resolution and sensitivity and with a high level of measuring position matching. A sample is scanned and irradiated with a finely focused electron beam (23, 26), and the displacement of position of a diffraction spot (32, 33) is measured by a two-dimensional position-sensitive electron detector (13). The displacement amount is outputted as a voltage value that is then converted into the magnitude of the stress/strain according to the principle of a nano diffraction method, and the magnitude is displayed in synchronism with a sample position signal.

Abstract translation: 用于测量微区物理特性的方法和装置以高分辨率和灵敏度实时测量应力/应变的二维分布以及高水平的测量位置匹配。 扫描样品并用精细聚焦的电子束（23,26）照射，并且通过二维位置敏感电子检测器（13）测量衍射光斑（32,33）的位置位移。 将位移量作为电压值输出，然后根据纳米衍射方法的原理将其转换为应力/应变的大小，并且与样本位置信号同步地显示幅度。

公开(公告)号：US06513390B1

公开(公告)日：2003-02-04

申请号：US09703230

申请日：2000-11-01

Applicant: Gonzalo De La Puente ,  Paul E. Jessop

Inventor： Gonzalo De La Puente ,  Paul E. Jessop

IPC: G01L124

CPC classification number: G01B11/18 ,  G01B11/165 ,  G01B11/168 ,  G01L1/241

Abstract: The present invention provides a simple design for a temperature-insensitive extrinsic polarimetric strain sensor. The sensing element is a thin sheet of photoelastic material that is bonded to the test object. It is illuminated with linearly polarized light with the polarization direction at 45 degrees relative to the strain-induced fast and slow axes in the photoelastic material. The sensor measures the difference between the strains along these two orthogonal directions. The reduced sensitivity of the sensor to temperature results from the fact that the illumination is perpendicular to the surface of the test object. All polarization components that are parallel to the surface will experience identical refractive index changes due to thermal effects. Consequently, a measurement of the difference in strains along two directions in the surface plane is insensitive to temperature.

公开(公告)号：US6057911A

公开(公告)日：2000-05-02

申请号：US971629

申请日：1997-11-17

Applicant: Stanley M. Reich

Inventor： Stanley M. Reich

IPC: G01B11/16 ,  G01L1/24 ,  G01B9/02

CPC classification number: G01L1/241 ,  G01B11/161 ,  G01L1/242

Abstract: Absolute strain is measured by providing a coherent beam of light and separating the coherent beam of light into first and second beams which are in quadrature with one another and which have different polarization angles. The first and second beams are combined in a manner which maintains the different polarization angles thereof, so as to form a combined beam. The combined beam is then applied to a Fabry-Perot strain sensor so as to form a reflected combined beam. The reflected combined beam is then separated into first and second reflected beams having different polarization angles. The intensity of the first and second reflected beams is then sensed, so as to determine a change in the etalon length of the Fabry-Perot sensor. The change in etalon length is indicative of the absolute strain sensed.

Abstract translation: 通过提供相干的光束并将相干光束分离成彼此正交且具有不同偏振角的第一和第二光束来测量绝对应变。 第一和第二光束以维持其不同偏振角的方式组合，以便形成组合光束。 然后将组合的光束施加到法布里 - 珀罗应变传感器，以形成反射的组合光束。 然后将反射的组合光束分离成具有不同偏振角的第一和第二反射光束。 然后感测第一和第二反射光束的强度，以便确定法布里 - 珀罗传感器的标准具长度的变化。 标准具长度的变化表示感测到的绝对应变。

公开(公告)号：US6056436A

公开(公告)日：2000-05-02

申请号：US25848

申请日：1998-02-19

Applicant: James S. Sirkis ,  Harmeet Singh

Inventor： James S. Sirkis ,  Harmeet Singh

IPC: G01D5/353 ,  G01K11/32 ,  G01L1/24 ,  G01K9/00 ,  G01B9/02 ,  G01B11/00 ,  G01K11/00

CPC classification number: G01L1/241 ,  G01D5/35312 ,  G01K11/3206 ,  G01L1/246 ,  G02B6/29356 ,  G02B6/29359

Abstract: Cascaded waveguide sensors with different sensitivities to temperature and strain produce independent temperature and strain measurements. In one embodiment a first sensor is formed of a first optical material having a corresponding first sensible thermomechanical response and a second sensor is formed of a second optical material having a corresponding second sensible thermomechanical response. The first and second thermomechanical responses are sufficiently different so as to produce independent temperature and strain measurements. Particular embodiments employ intrinsic or extrinsic Fabry-Perot interferometers (IFP, EFP),sensors, in-line fiber etalon (ILFE) sensor and a fiber-optic Bragg grating.

Abstract translation: 具有不同温度和应变灵敏度的级联波导传感器产生独立的温度和应变测量。 在一个实施例中，第一传感器由具有对应的第一显性热机械响应的第一光学材料形成，并且第二传感器由具有相应的第二显性热机械响应的第二光学材料形成。 第一和第二热机械响应是充分不同的，以便产生独立的温度和应变测量。 特定实施例采用内在或外在的法布里 - 珀罗干涉仪（IFP，EFP），传感器，直列光纤标准具（ILFE）传感器和光纤布拉格光栅。

公开(公告)号：US5916160A

公开(公告)日：1999-06-29

申请号：US629515

申请日：1996-04-09

Applicant: Mircea Arcan ,  Radu Arcan

Inventor： Mircea Arcan ,  Radu Arcan

IPC: A61B5/103 ,  G01L1/24 ,  A61B5/00

CPC classification number: A61B5/1036 ,  G01L1/241

Abstract: A real-time imaging contact gauge for indicating the distribution of contact pressure over a surface includes a transparent base panel, a pressure-transmitting member at one face of the transparent base panel for receiving the contact pressure to be indicated, a birefringent member sensitive to mechanical pressure located between the pressure-transmitting member and the transparent base panel, a plurality of spaced, parallel electro-luminescent layers carried by the transparent base panel for illuminating the birefringent layer, and a polarizer for polarizing the light transmitted to the birefringent layer to produce optical interference patterns corresponding to the contact presssure distribution applied to the pressure-transmitting member, which patterns are viewable through the opposite face of the transparent base panel.

Abstract translation: 用于指示表面上的接触压力分布的实时成像接触计包括透明基板，用于接收要指示的接触压力的透明基板的一个表面处的压力传递构件，对于要被指示的接触压力的双折射构件 位于压力传递部件和透明基板之间的机械压力，由用于照射双折射层的透明基板承载的多个间隔开的平行的电致发光层，以及用于使透射到双折射层的光偏振的偏振器 产生与施加到压力传递构件的接触压力分布相对应的光学干涉图案，该图案通过透明基板的相对面可以看到。

公开(公告)号：US5912457A

公开(公告)日：1999-06-15

申请号：US778064

申请日：1996-12-30

Applicant: Michael McQuaid

Inventor： Michael McQuaid

IPC: G01L1/24 ,  G01L5/14 ,  G01L11/02

CPC classification number: G01L11/02 ,  G01L1/241 ,  G01L5/14

Abstract: A pressure sensor includes two birefringent media, one of which is exposedo pressure to undergo pressure-variable birefringence. Polarized light passes through the birefringent media to be modulated in accordance with the pressure and is then made incident on a photodetector to detect the modulation. The use of two birefringent media provides temperature compensation.

Abstract translation: 压力传感器包括两个双折射介质，其中一个介质承受压力以进行压力可变双折射。 偏振光通过双折射介质以根据压力进行调制，然后入射到光电检测器上以检测调制。 使用两个双折射介质提供温度补偿。

公开(公告)号：US5825492A

公开(公告)日：1998-10-20

申请号：US638218

申请日：1996-04-26

Applicant: Philip L. Mason

Inventor： Philip L. Mason

IPC: G01L1/24 ,  G01L3/12 ,  G01B9/02

CPC classification number: G01L1/241 ,  G01L3/12

Abstract: This invention discloses an optical and computation system that enables the magnitude of the retardation, or the birefringence, in a birefringent material to be measured. This is achieved by consideration of the spectral interference pattern generated by combining quadrature axes of polarized light that have passed through the material, however, unlike other approaches, this invention removes the spectral intensity variations of the light source and the spectral attenuation variations of the optical system before analyzing the resultant spectral interference pattern. Since the spectral interference pattern is unique for each retardation or birefringence value, this invention provides an absolute measure of these quantities. Additionally this invention permits the full range of retardations or equivalent birefringence values to be measured, from zero retardation to any (large) value that does not create interference modulations, the frequency of which exceed the Shannon-Kotelnikov criteria for the wavelength or spectral sampling implemented. Further, in the second main embodiment of this invention, the dependence on stored light source spectral intensities and stored optical light path attenuations is removed, with the system being independent of any time dependent variations in intensity and/or attenuations and additionally, being independent of any axial alignment or setup requirements.

Abstract translation: 本发明公开了一种光学和计算系统，其能够测量双折射材料中的延迟或双折射的大小。 这通过考虑通过组合已经通过材料的偏振光的正交轴产生的光谱干涉图来实现，然而，与其他方法不同，本发明除去光源的光谱强度变化和光学的光谱衰减变化 在分析结果谱干涉图之前， 由于光谱干涉图案对于每个延迟或双折射值是唯一的，本发明提供了这些量的绝对度量。 此外，本发明允许测量全范围的延迟或等效双折射值，从零延迟到不产生干涉调制的任何（大）值，其频率超过实施的波长或光谱采样的香农 - 科特尔尼科夫标准 。 此外，在本发明的第二主要实施例中，消除了对存储的光源光谱强度和存储的光学光路衰减的依赖性，其中系统独立于强度和/或衰减中的任何时间依赖性变化，并且另外独立于 任何轴向对齐或设置要求。

公开(公告)号：US5475489A

公开(公告)日：1995-12-12

申请号：US150111

申请日：1993-11-24

Applicant: Allan Gottsche

Inventor： Allan Gottsche

IPC: G01D5/34 ,  G01J4/04 ,  G01L1/24 ,  G01L9/00 ,  G01R15/22 ,  G01R33/032 ,  G02B6/34

CPC classification number: G01J4/04 ,  G01D5/344 ,  G01L1/241 ,  G01L9/0077 ,  G01R33/032 ,  G02B6/2713

Abstract: A method of determining induced change of polarization state of light in a polarization element comprising transmitting unpolarized light from a light source at the one end of an optical transmitter waveguide means (21) to polarizer means (31) at the other end; polarizing the unpolarized light by the polarizer means (31); transmitting the polarized light through the polarization element (41, 41A, 41B) using at least one reflective optical element; analyzing the transmitted polarized light from the polarization element by an analyzer means (32); and transmitting the analyzed polarized light from the one end of optical receiver waveguide means (22) to a light detector at the other end; wherein the unpolarized light polarized by the polarizer means (31), the polarized light analyzed by the analyzer means (32), or both, are non-collimated; and the polarized light in the light path between the polarizer means (31) and the analyzer means (32) is collected and reflected by at least one reflective imaging optical element (51) so that the analyzed light exits the analyzer means (32) from the same side as the unpolarized light enters the polarizer (31). Further, fiber optic sensor devices for determining induced change of polarization state of light in a polarization element, particularly linear birefringence induced by electric voltage, electric field, and mechanical force, and circular birefringence induced by electric current and magnetic field.

Abstract translation: PCT No.PCT / DK92 / 00177 Sec。 371日期：1993年11月24日 102（e）日期1993年11月24日PCT提交1992年6月4日PCT公布。 第WO92 / 21949号公报 1。一种确定偏振元件中的光的偏振状态的诱导变化的方法，包括将光发射器波导装置（21）的一端处的光源的非偏振光传输到偏振器装置（31） 另一端 通过偏振器装置（31）偏振非偏振光; 使用至少一个反射光学元件透射偏振光（41,41A，41B）; 通过分析器装置（32）分析来自偏振元件的透射偏振光; 并将分析的偏振光从光接收器波导装置（22）的一端传输到另一端的光检测器; 其中由所述偏振器装置（31）偏振的非偏振光，由所述分析装置（32）分析的偏振光或者两者都是非准直的; 并且偏振器装置（31）和分析装置（32）之间的光路中的偏振光被至少一个反射成像光学元件（51）收集并反射，使得分析的光从分析器装置（32）离开 与非偏振光相同的一侧进入偏振器（31）。 此外，用于确定偏振元件中的光的偏振态的诱导变化的光纤传感器装置，特别是由电压，电场和机械力引起的线性双折射，以及由电流和磁场引起的圆形双折射。

公开(公告)号：US5410917A

公开(公告)日：1995-05-02

申请号：US86527

申请日：1993-07-01

Applicant: Terri Giversen ,  Mark Stratton ,  Nile F. Hartman

Inventor： Terri Giversen ,  Mark Stratton ,  Nile F. Hartman

IPC: G01L1/24 ,  G01L5/00

CPC classification number: G01L5/0057 ,  G01L1/241

Abstract: The present invention is a method and an apparatus for the precise quantitative measurement of the magnitude of force exerted at the points of contact on a high density electrical interconnect that quantitatively determines the magnitude of the force. The invention includes the steps of establishing a pressing relationship between a photoelastic material and the high density interconnect, coupling plane-polarized light into the photoelastic material stressed as a result of the pressing relationship with the high density interconnect, coupling of the polarized light being at 45 degrees with the direction of pressing, capturing an image of the fringe pattern of the plane polarized light exiting the stressed photoelastic material, the fringe pattern comprising of fringes wherein the number of fringes varies with the magnitude of the pressing force, and counting the number of fringes produced to determine the magnitude of force exerted on the photoelastic member.

Abstract translation: 本发明是一种用于精确定量测量施加在高密度电互连上的接触点处的力的量值的方法和装置，其定量地确定力的大小。 本发明包括以下步骤：建立光弹性材料和高密度互连之间的按压关系，将平面偏振光耦合到由于与高密度互连的压力关系而引起的应力的光弹性材料中， 拍摄方向为45度，拍摄离开应力光弹性材料的平面偏振光的条纹图案的图像，条纹图案包括条纹数目，其中边缘数随着按压力的大小而变化，并且对数字进行计数 产生的条纹以确定施加在光弹性构件上的力的大小。