公开(公告)号：US09690071B2

公开(公告)日：2017-06-27

申请号：US14966298

申请日：2015-12-11

申请人： RAYTHEON COMPANY

发明人： Nicholas D. Trail ,  David J. Markason

IPC分类号： G01B11/02 ,  G02B7/182 ,  G02B27/62 ,  G02B23/06 ,  G02B5/09 ,  G02B5/10 ,  G01M11/00 ,  G01B9/02 ,  G01B11/27 ,  G02B26/08

CPC分类号： G02B7/1822 ,  G01B9/02 ,  G01B11/272 ,  G01M11/005 ,  G02B5/09 ,  G02B5/10 ,  G02B23/06 ,  G02B26/0816 ,  G02B27/62

摘要： A method for configuring an alignment of a plurality of optical segments in a sparse aperture configuration of an optical device includes providing at least one beam of light from at least one light source located on the sparse aperture optical device, directing the at least one beam of light toward at least one segment of the plurality of optical segments, detecting a reflection or transmission of the at least one beam of light off of the at least one segment of the plurality of optical segments, determining a characteristic of the reflected or transmitted light, and based on the characteristic of the reflected or transmitted light, determining an alignment of the at least one segment of the plurality of optical segments.

公开(公告)号：US09684163B2

公开(公告)日：2017-06-20

申请号：US14210760

申请日：2014-03-14

申请人： E Ink Corporation

发明人： Kevin A. Li

IPC分类号： G02B26/08 ,  F21V8/00

CPC分类号： G02B26/0816 ,  G02B6/005

摘要： Methods, systems, and products illuminate display devices. Light in a waveguide is frustrated to illuminate an array of picture elements.

公开(公告)号：US20170168289A1

公开(公告)日：2017-06-15

申请号：US14966349

申请日：2015-12-11

申请人： Finger Lakes Instrumentation, LLC

发明人： Jozef Sofka

IPC分类号： G02B26/08 ,  G02B21/16

CPC分类号： G02B26/0816 ,  G02B21/16 ,  G02B21/18 ,  G02B26/008

摘要： Presented is a method, apparatus, and computer-readable medium for selectively switching optical paths. The apparatus includes a directing mirror for redirecting light from an incoming path to one of a plurality of input paths and redirecting the light from one of a plurality of output paths to an outgoing path, and a plurality of input mirrors, each one of the plurality of input mirrors operable for redirecting the light from one of the plurality of input paths to one of a plurality of transition paths. The apparatus includes a plurality of light modifying elements, each one of the light modifying elements in a corresponding transition path and a plurality of output mirrors, each one of the plurality of output mirrors operable for redirecting the light from one of the plurality of transition paths to one of a plurality of output paths.

公开(公告)号：US09671699B2

公开(公告)日：2017-06-06

申请号：US14632430

申请日：2015-02-26

申请人： Carl Zeiss SMT GmbH

发明人： Michael Patra

IPC分类号： G03F7/20 ,  G02B27/09 ,  G02B3/00 ,  G02B26/08

CPC分类号： G03F7/70075 ,  G02B3/0062 ,  G02B26/0816 ,  G02B27/0905 ,  G02B27/0961 ,  G03F7/70066 ,  G03F7/7015

摘要： An illumination system of a microlithographic projection exposure apparatus comprises an optical integrator, which includes a first optical raster plate and a second optical raster plate. The first second optical raster plate comprising an array of first lenses having, along a reference direction, a first focal length f1, and the second optical raster plate comprises an array of second lenses having, along the reference direction, a second focal length f2. The vertices of the first lenses and vertices of the second lenses are spaced apart by a distance d that is greater than the second focal length f2 so that d>1.01·f2. This ensures that laser pointing or another transient variation of the illumination of the optical integrator does not adversely affect the spatial irradiance distribution in a plane which is illuminated by the optical integrator.

公开(公告)号：US09665011B2

公开(公告)日：2017-05-30

申请号：US14670223

申请日：2015-03-26

申请人： Carl Zeiss SMT GmbH

发明人： Markus Hauf ,  Alexander Vogler

IPC分类号： G03B27/54 ,  G03F7/20 ,  G02B7/182 ,  G02B26/08 ,  G02B7/18

CPC分类号： G03F7/702 ,  G02B7/181 ,  G02B7/182 ,  G02B7/1828 ,  G02B26/0816 ,  G02B26/0833 ,  G03F7/70075 ,  G03F7/70116 ,  G03F7/70825

摘要： The invention relates to an arrangement for actuating an element in an optical system, in particular an optical system of a projection exposure apparatus, wherein the optical element is tiltable about at least one tilting axis via at least one joint having a joint stiffness, comprising at least one actuator for exerting a force on the optical element, wherein the actuator has an actuator stiffness which at least partly compensates for the joint stiffness.

公开(公告)号：US20170139202A1

公开(公告)日：2017-05-18

申请号：US15320398

申请日：2014-06-20

申请人： Newson NV

发明人： Marc Van Biesen

IPC分类号： G02B26/08 ,  G01D5/20 ,  G02B7/182

CPC分类号： G02B26/08 ,  G01D5/20 ,  G02B7/1827 ,  G02B7/1828 ,  G02B26/0816 ,  G02B26/101

摘要： The current invention concerns an apparatus and a method for positioning an optical element, said apparatus comprising a positionable part to which the optical element can be mounted; a base part; a suspension system, said positionable part being mounted on said base part in a movable manner with said suspension system; an actuation system for actuating movement of said positionable part with respect to said base part; and a control system for controlling movement of said positionable part.

公开(公告)号：US09651850B2

公开(公告)日：2017-05-16

申请号：US14751941

申请日：2015-06-26

申请人： Kevin Hwading Chu ,  Xiran Wang ,  Yangyang Chen

发明人： Kevin Hwading Chu ,  Xiran Wang ,  Yangyang Chen

IPC分类号： B60R1/02 ,  G03B17/56 ,  H04N5/225 ,  H04N5/232 ,  F16M11/04 ,  F16M11/14 ,  F16M11/18 ,  F16M11/20 ,  F16M11/28 ,  F16M13/00 ,  F16M13/04 ,  F16M13/06 ,  F16M13/08 ,  G02B26/08

CPC分类号： G03B17/565 ,  F16M11/041 ,  F16M11/14 ,  F16M11/18 ,  F16M11/2014 ,  F16M11/28 ,  F16M13/00 ,  F16M13/04 ,  F16M13/06 ,  F16M13/08 ,  G02B26/08 ,  G02B26/0816 ,  G02B27/644 ,  G03B17/561 ,  G03B17/563 ,  H04N5/2251 ,  H04N5/232 ,  H04N5/23219 ,  H04N5/23296

摘要： A telescoping monopod apparatus including a holder configured to hold an image acquisition module having a field of vision, and a support holding a mirror to be in proximity to a lens of the image acquisition module, the mirror is configured to enable the image acquisition module to capture an image outside the field of vision, and a body housing a control component and an electronic component configured to actuate the telescoping monopod apparatus and the support. The body is operatively connected to the holder. A tracking method including receiving an input from a user, detecting, by an image acquisition module, a feature, and adjusting a mirror to track the feature.

公开(公告)号：US20170127940A1

公开(公告)日：2017-05-11

申请号：US15318203

申请日：2015-06-11

申请人： CELLVIEW IMAGING INC.

发明人： Mark Hathaway ,  Rishard Weitz

IPC分类号： A61B3/12 ,  G02B26/08 ,  G02B27/42 ,  A61B3/10

CPC分类号： A61B3/1225 ,  A61B3/0008 ,  A61B3/1025 ,  G02B26/0808 ,  G02B26/0816 ,  G02B26/106 ,  G02B27/4227

摘要： In line-scan scanning laser ophthalmoscopy (SLO) a narrowband of wavelengths is required. For greater flexibility the frequencies of this narrowband should be selectable. This is possible using a broadband tunable single mode source, but such a solution is expensive. A system is provided in which an extended broadband source is used. Light from the extended source passes to a diffraction grating, which introduces a wavelength dependent angular separation when reflecting the light. By rotating the diffraction grating, only light of a selectable narrowband passes through a fixed output slit for use by the line-scan SLO system. Alternatively, the diffraction grating can be fixed and a rotatable mirror lying between the diffraction grating and the output slit can be used to select the wavelengths reaching the line-scan SLO system.

公开(公告)号：US09645388B2

公开(公告)日：2017-05-09

申请号：US14047192

申请日：2013-10-07

申请人： Carl Zeiss SMT GmbH

发明人： Gerhard-Wilhelm Ziegler ,  Thomas Bischoff

IPC分类号： G02B26/08 ,  G02B7/182 ,  G03F7/20

CPC分类号： G02B26/0816 ,  G02B7/1822 ,  G02B26/0833 ,  G03F7/70058 ,  Y10T29/49826

摘要： There is provided a facet mirror device comprising a facet element and a support unit, the support unit supporting the facet element. The support unit comprises a first support element and a second support element, the second support element being connected to the facet element to support the facet element. The first support element is connected to the second support element to support the second support element, the first support element being connected to the second support element via at least one flexure unit, the flexure unit comprising at least one flexure.

公开(公告)号：US09643280B2

公开(公告)日：2017-05-09

申请号：US14085280

申请日：2013-11-20

申请人： Samsung Display Co., Ltd. ,  Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V.

发明人： Doh-Hyoung Lee ,  Choong-Ho Lee ,  Sung-Sik Yun ,  Tong-Jin Park ,  Arnold Gillner ,  Nelli Hambach ,  Stephan Eifel ,  Jens Holtkamp ,  Lasse Büsing ,  Alexander Gatej

IPC分类号： H01S3/10 ,  B23K26/06 ,  G02B27/09 ,  G02B26/08 ,  B23K26/38 ,  B23K26/066

CPC分类号： B23K26/0604 ,  B23K26/0648 ,  B23K26/0652 ,  B23K26/066 ,  B23K26/38 ,  G02B26/0808 ,  G02B26/0816 ,  G02B27/0911

摘要： A laser processing apparatus includes: a laser generator that generates a laser beam, a diffractive optical element that divides the laser beam generated by the laser generator into a plurality of sub-laser beams, and a beam gap adjustor that adjusts a gap between neighboring ones of the plurality of sub-laser beams. Therefore, by installing a diffractive optical element that divides a laser beam that is generated by the laser generator into the plurality of sub-laser beams and a beam gap adjustor to adjust a gap between a plurality of sub-laser beams, the laser processing apparatus can form a processing pattern of various resolutions in a shadow mask while improving a processing speed of the shadow mask.