Package structure and fabrication method thereof

    公开(公告)号:US10199239B2

    公开(公告)日:2019-02-05

    申请号:US14823341

    申请日:2015-08-11

    摘要: A package structure is provided, which includes: a frame having a cavity penetrating therethrough; a semiconductor chip received in the cavity of the frame, wherein the semiconductor chip has opposite active and inactive surfaces exposed from the cavity of the frame; a dielectric layer formed in the cavity to contact and fix in position the semiconductor chip, wherein a surface of the dielectric layer is flush with a first surface of the frame toward which the active surface of the semiconductor chip faces; and a circuit structure formed on the surface of the dielectric layer flush with the first surface of the frame and electrically connected to the active surface of the semiconductor chip, thereby saving the fabrication cost and reducing the thickness of the package structure.

    SEMICONDUCTOR DEVICE
    112.
    发明申请

    公开(公告)号:US20190027380A1

    公开(公告)日:2019-01-24

    申请号:US16070893

    申请日:2017-02-07

    IPC分类号: H01L21/52 H01L23/00

    摘要: A semiconductor device of the present invention includes a circuit layer formed of a conductive material, a semiconductor element mounted on a first surface of the circuit layer, and a ceramic substrate disposed on a second surface of the circuit layer, in which a Ag underlayer having a glass layer and a Ag layer laminated on the glass layer is formed on the first surface of the circuit layer, and the Ag layer of the Ag underlayer and the semiconductor element are directly joined together.

    3D-interconnect
    115.
    发明授权

    公开(公告)号:US10181447B2

    公开(公告)日:2019-01-15

    申请号:US15493917

    申请日:2017-04-21

    摘要: A method of making a microelectronic package includes bonding a conductive structure to a carrier so that the conductive structure overlies a rear surface of a microelectronic element disposed on the carrier and an exposed top surface of the carrier. The conductive structure may be a monolithic structure having a base and a plurality of interconnections extending continuously away from the base toward the carrier. The plurality of interconnections may have free ends that overlie the carrier. The microelectronic element may be positioned between at least two adjacent interconnections of the plurality of interconnections. The plurality of interconnections and the microelectronic element may be encapsulated with an encapsulant. The carrier may be removed to expose the free ends of the interconnections and bond pads of the microelectronic element. The free ends of the interconnections and the bond pads of the microelectronic element may be conductively connected with the terminals of the microelectronic package. The conductive structure may be patterned to form external contacts. At least some of the external contacts may overlie the microelectronic element.

    Microelectronic device housing bearing on the microelectronic device

    公开(公告)号:US10173890B2

    公开(公告)日:2019-01-08

    申请号:US15628978

    申请日:2017-06-21

    摘要: A box for a microelectronic device includes a first portion and a second portion able to be assembled in order to define, in an assembled position, a housing space for the microelectronic device. A face of the first portion is facing a face of the second portion in the assembled position. The first zones facing the faces form an interface for attaching the first portion and second portion. The second zones face faces forming a cavity for receiving the microelectronic device. At least one among the first portion and the second portion includes at least one element for electrical connection. The first portion and the second portion can apply at least one connection pad of the microelectronic device on the element for connection in the assembled position.

    Substrate processing system
    117.
    发明授权

    公开(公告)号:US10170347B2

    公开(公告)日:2019-01-01

    申请号:US15128804

    申请日:2015-02-27

    发明人: Yutaka Fujino

    摘要: A substrate processing system for performing a process with respect to a plurality of substrates includes an annular process chamber configured to accommodate the plurality of substrates and to perform a predetermined process on the plurality of substrates, a cassette mounting part configured to mount a cassette which accommodates the plurality of substrates, and a substrate transfer mechanism configured to transfer the plurality of substrates between the annular process chamber and the cassette mounting part. The plurality of substrates is concentrically disposed within the annular process chamber in a plane view.

    Vacuum assisted sealing processes and systems for increasing air cavity package manufacturing rates

    公开(公告)号:US10115605B2

    公开(公告)日:2018-10-30

    申请号:US15203732

    申请日:2016-07-06

    IPC分类号: H01L21/52 H01L21/50

    摘要: The present disclosure describes a sealing processes and structure for sealing air cavity electronic packages using a thermosetting, thermal plastic, other known or as yet unknown adhesives, or hybrid combinations of such adhesive(s). Processes disclosed comprise steps of providing a base and a lid, with at least one of the base and the lid having a mating surface coated with the adhesive. Initially, an air gap is maintained between the base, the lid, and the adhesive and a vacuum is generated around the base, the lid, and the adhesive. Once the vacuum has been generated, the base and the lid are mated to create a mated package assembly with a vacuum therein. After the mating, the mated package assembly is heated to a curing temperature to cure the adhesive, and pressure may be applied as well. Because the air within the mated package assembly has been evacuated prior to heating, there is no air pressure build-up therein, reducing or eliminating the presence of blowouts and pin holes.