Apparatus and method for discharge surface treatment
    121.
    发明申请
    Apparatus and method for discharge surface treatment 失效
    放电表面处理装置及方法

    公开(公告)号:US20050079276A1

    公开(公告)日:2005-04-14

    申请号:US10898992

    申请日:2004-07-27

    IPC分类号: B05B5/025 B05C9/08 C23C26/00

    摘要: An apparatus has a green compact electrode including a material of a coating formed on a workpiece by a discharge, a power source for supplying a first voltage, a voltage detector for detecting a voltage between the workpiece and the electrode, and a pulse current generator for generating and outputting a pulse current from the first voltage, and for cutting off the output when a predetermined period of time has passed after the voltage is detected to be less than a detection voltage. The pulse current is supplied between the workpiece and the electrode, and the detection voltage is less than the first voltage by 5% to 20% of the first voltage.

    摘要翻译: 一种装置具有包括通过放电在工件上形成的涂层的材料的绿色紧凑型电极,用于提供第一电压的电源,用于检测工件和电极之间的电压的电压检测器,以及用于 从第一电压产生和输出脉冲电流,并且在检测到电压小于检测电压之后经过预定时间段时切断输出。 在工件与电极之间提供脉冲电流,检测电压小于第一电压的5%〜20%。

    DIFFRACTIVE OPTICAL ELEMENT, METHOD OF FABRICATING THE ELEMENT, ILLUMINATION DEVICE PROVIDED WITH THE ELEMENT, PROJECTION EXPOSURE APPARATUS, EXPOSURE METHOD, OPTICAL HOMOGENIZER, AND METHOD OF FABRICATING THE OPTICAL HOMOGENIZER
    122.
    发明授权
    DIFFRACTIVE OPTICAL ELEMENT, METHOD OF FABRICATING THE ELEMENT, ILLUMINATION DEVICE PROVIDED WITH THE ELEMENT, PROJECTION EXPOSURE APPARATUS, EXPOSURE METHOD, OPTICAL HOMOGENIZER, AND METHOD OF FABRICATING THE OPTICAL HOMOGENIZER 失效
    衍射光学元件,制造元件的方法,提供元件的照明装置,投影曝光装置,曝光方法,光学均匀物和制备光学均匀物的方法

    公开(公告)号:US06836365B2

    公开(公告)日:2004-12-28

    申请号:US09549720

    申请日:2000-04-14

    申请人: Akihiro Goto

    发明人: Akihiro Goto

    IPC分类号: G02B2744

    摘要: A diffractive optical element efficiently converts an input light beam into an output light beam having a specified cross-sectional shape. The diffractive optical element includes a plurality of partial optical elements. The plurality of partial optical elements convert the input light beam to respective partial light beams, each of which has a shape that does not correspond to the specified cross-sectional shape. The sum of the partial light beams matches the shape of the output light beam (i.e., having the specified cross-sectional shape).

    摘要翻译: 衍射光学元件将输入光束有效地转换为具有规定横截面形状的输出光束。 衍射光学元件包括多个部分光学元件。 多个部分光学元件将输入光束转换成各自的部分光束,每个部分光束具有不对应于规定横截面形状的形状。 部分光束的总和匹配输出光束的形状(即具有规定的横截面形状)。

    Charged-particle-beam mapping projection-optical systems and methods for adjusting same
    123.
    发明授权
    Charged-particle-beam mapping projection-optical systems and methods for adjusting same 有权
    带电粒子束映射投影光学系统及其调整方法

    公开(公告)号:US06765217B1

    公开(公告)日:2004-07-20

    申请号:US09302075

    申请日:1999-04-28

    IPC分类号: G01N2100

    摘要: Charged-particle-beam (CPB) mapping projection-optical systems and adjustment methods for such systems are disclosed that can be performed quickly and accurately. In a typical system, an irradiation beam is emitted from a source, passes through an irradiation optical system, and enters a Wien filter (“E×B”). Upon passing through the E×B, the irradiation beam passes through an objective optical system and is incident on an object surface. Such impingement generates an observation beam that returns through the objective optical system and the E×B in a different direction to a detector via an imaging optical system. An adjustment-beam source emits an adjustment beam used for adjusting and aligning the position of, e.g., the object surface and/or the Wien's condition of the E×B. The adjustment beam can be off-axis relative to the objective-optical system. For such adjusting and aligning, fiducial marks (situated, e.g., in the plane of the object surface) can be used that are optimized for the CPB optical system and the off-axis optical system. Desirably, the image formed on the detector when electrical voltage and current are not applied to the E×B is in the same position as the image formed on the detector when electrical voltage and current are applied to the E×B. Also provided are “evaluation charts” for use in such alignments that do not require adjustment of the optical axis of the irradiation optical system, and from which the kinetic-energy distribution of the emitted adjustment beam is stable.

    摘要翻译: 公开了可以快速且准确地执行这种系统的带电粒子束(CPB)映射投影光学系统和调整方法。 在典型的系统中,照射光束从光源发射,通过照射光学系统,并进入维恩滤光片(“ExB”)。 当通过ExB时,照射光束通过物镜光学系统并入射到物体表面上。 这种冲击产生观察光束,该观察光束经由成像光学系统通过物镜光学系统和ExB以不同的方向返回到检测器。 调整光束源发射用于调整和对准例如物体表面的位置和/或ExB的维恩状态的调节光束。 调节光束可以相对于物镜光学系统偏轴。 对于这种调整和对准,可以使用为CPB光学系统和离轴光学系统优化的基准标记(例如位于物体表面的平面中)。 理想地,当电压和电流未施加到ExB时,在检测器上形成的图像与当将电压和电流施加到ExB时形成在检测器上的图像位于相同的位置。 还提供了用于这种对准的“评估图”,其不需要调整照射光学系统的光轴,并且发射的调节光束的动能分布从该距离稳定。

    Apparatus and method for discharge surface treatment
    124.
    发明授权
    Apparatus and method for discharge surface treatment 失效
    放电表面处理装置及方法

    公开(公告)号:US06702896B1

    公开(公告)日:2004-03-09

    申请号:US09660417

    申请日:2000-09-12

    IPC分类号: B05C5053

    摘要: In a power supply apparatus for discharge surface treatment which uses a green compact electrode as a discharge electrode, allows a pulse-type discharge to take place between said discharge electrode and a workpiece, and forms a film, which is made of an electrode material or a material obtained when the electrode material reacts to a discharge energy, on a surface of the workpiece following three measures are taken. (1) When a discharge voltage detected by the voltage detection means is less than or equal to discharge detection voltage set value which is slightly lower than a power supply voltage, the electric current cut-off means forcibly cuts off an output of the oscillator so that long-time pulse is prevented. (2) A capacitor is connected in parallel with an oscillation circuit of the oscillator, and the long-time pulse is prevented by capacitor discharge. (3) Time that the discharge takes place once is controlled by a timer so that the long-time pulse is prevented.

    摘要翻译: 在使用生坯电极作为放电电极的放电表面处理用电源装置中,允许在所述放电电极和工件之间发生脉冲型放电,并形成由电极材料制成的膜 采取在电极材料与放电能量反应时获得的材料,在三个措施之后在工件的表面上。 (1)当电压检测装置检测到的放电电压小于或等于放电检测电压设定值略低于电源电压时,电流切断装置强制切断振荡器的输出 可以防止长时间的脉冲。 (2)电容器与振荡器的振荡电路并联连接,并且通过电容器放电来防止长时间脉冲。 (3)放电发生一次的时间由定时器控制,以防止长时间脉冲。

    Discharge surface treatment device and a discharge surface treatment method
    125.
    发明授权
    Discharge surface treatment device and a discharge surface treatment method 失效
    放电表面处理装置和放电表面处理方法

    公开(公告)号:US06548028B1

    公开(公告)日:2003-04-15

    申请号:US09807762

    申请日:2001-04-18

    IPC分类号: B01J1908

    摘要: A discharge surface treatment device, which forms a modified layer on a metal surface by generating a discharge between an electrode composed of a modifying material or a material that is a source of the modifying material and metal that is a material to be surface-treated, has an arrangement in which: a plurality of electrodes, each of which is insulated from each other, are placed, each of the electrodes is connected to a power-source device exclusively used for the corresponding electrode so that each of the electrodes is supplied with a discharging pulse independently from the corresponding power-source device.

    摘要翻译: 一种放电表面处理装置,其通过在由改性材料构成的电极或作为改性材料的源的材料和作为待表面处理的材料的材料之间产生放电,在金属表面上形成改性层, 具有以下结构:多个彼此绝缘的电极被放置,每个电极连接到专用于相应电极的电源装置,使得每个电极被供应 独立于相应的电源装置的放电脉冲。

    Green compact electrode for discharge surface treatment
    126.
    发明授权
    Green compact electrode for discharge surface treatment 有权
    绿色紧凑型电极用于放电表面处理

    公开(公告)号:US06437278B1

    公开(公告)日:2002-08-20

    申请号:US09548433

    申请日:2000-04-12

    IPC分类号: B23H104

    CPC分类号: C23C26/00

    摘要: A green compact electrode for discharge surface treatment comprises a main body of green compact electrode obtained by pressuring and compacting metal powder or powder of a metal compound, or either of the two types of powder with ceramics powder added thereto; and a metallic die used for pressuring and compacting the main body of the green compact electrode, and is used for discharge surface treatment together with the die without taking out the main body of green compact electrode from the die.

    摘要翻译: 用于放电表面处理的绿色紧凑型电极包括通过加压和压实金属粉末或金属化合物的粉末或两种类型的粉末中的任一种而获得的生坯电极的主体,其中添加有陶瓷粉末; 以及用于压制和压实生坯电极主体的金属模具,用于与模具一起进行放电表面处理,而不从模具中取出生坯电极主体。

    Pulse signal generator
    128.
    发明授权
    Pulse signal generator 失效
    脉冲信号发生器

    公开(公告)号:US6140727A

    公开(公告)日:2000-10-31

    申请号:US186100

    申请日:1998-11-05

    CPC分类号: G01P3/488

    摘要: A pulse signal generator comprises a magnetic element (1) capable of causing a large Barkhausen jump; a detector (2) provided relative to the magnetic element; a magnetic field generator (3) provided in vicinity of the magnetic element for applying a biasing magnetic field to the magnetic element for making a predetermined magnetization; and a magnetic circuit forming unit (4) provided in vicinity of the magnetic element for applying a main magnetic field to the magnetic element for causing a large Barkhausen jump in the magnetic element. The magnetic field generator is provided with magnetic field concentration means (32A) for concentrating the biasing magnetic field upon the magnetic element and the magnetic field adjusting means (74) for adjusting an intensity of the biasing magnetic field upon the magnetic element.

    摘要翻译: 脉冲信号发生器包括能够引起大的巴克豪森跳跃的磁性元件(1); 相对于所述磁性元件提供的检测器(2); 磁场发生器(3),设置在所述磁性元件附近,用于向所述磁性元件施加偏置磁场以进行预定的磁化; 以及设置在磁性元件附近的用于向磁性元件施加主磁场以在磁性元件中引起大的巴克豪森跳跃的磁路形成单元(4)。 磁场发生器设置有用于将偏置磁场集中在磁性元件上的磁场集中装置(32A)和用于调节磁性元件上的偏置磁场强度的磁场调节装置(74)。

    Electrical discharge machine with pulses of both polarities
    129.
    发明授权
    Electrical discharge machine with pulses of both polarities 失效
    具有两极极性的放电机

    公开(公告)号:US5753882A

    公开(公告)日:1998-05-19

    申请号:US267233

    申请日:1994-06-29

    IPC分类号: B23H1/02 B23H7/16 B23H11/00

    摘要: An electrical discharge machine for applying a pulsed voltage to a machining gap between an electrode and a workpiece disposed opposite thereto. An insulating dielectric fluid, comprising an oil or water with compound additive, is disposed in the gap. A positive polarity voltage and an opposite polarity voltage are applied via switches and respective impedances to the machining gap in order to generate a discharge for machining the workpiece. The impedance values may be selectively set and the switching of the voltages controlled such as to apply a positive polarity voltage at the stop time of an opposite polarity pulsed voltage, whereby the average voltage approximates a predetermined value, preferably zero, during the stop time. Voltage control during the stop time will result in high speed and finish, especially for control in connection with a jump operation.

    摘要翻译: 一种放电机,用于对电极和与其相对设置的工件之间的加工间隙施加脉冲电压。 包含油或水与复合添加剂的绝缘介质流体设置在间隙中。 通过开关和相应的阻抗将正极性电压和相反极性电压施加到加工间隙,以便产生用于加工工件的放电。 可以选择性地设置阻抗值,并且控制电压的切换,以便在相反极性脉冲电压的停止时间施加正极性电压,由此平均电压在停止时间期间接近预定值,优选为零。 在停止时间内的电压控制将导致高速和完成,特别是与跳跃操作有关的控制。

    Insulated electric wire
    130.
    发明授权
    Insulated electric wire 失效
    绝缘电线

    公开(公告)号:US5750257A

    公开(公告)日:1998-05-12

    申请号:US671484

    申请日:1996-06-27

    摘要: An insulated electrical wire coated with a polyamide-imide insulating material which is a copolymer of anhydrotrimellitic acid, aliphatic and aromatic dicarboxylic acids and a diisocyanate, with a molar ratio of the acids to the diisocyanate of from about 0.9:1.0 to about 1.1:1.0 and optionally further containing from about 1 part wt. to about 30 parts wt. of an epoxy resin per each 100 parts of the copolymer. Optionally the aforementioned insulation can be an interior, first coating, coated by a second coating of a polyamide, polyamide-imide, and when the first coat does not contain an epoxy, then a polyimide.

    摘要翻译: 涂覆有聚酰胺 - 酰亚胺绝缘材料的绝缘电线,其是脱水偏苯三酸,脂族和芳族二羧酸和二异氰酸酯的共聚物,酸与二异氰酸酯的摩尔比为约0.9:1.0至约1.1:1.0 并且任选地还含有约1重量份 至约30重量份 的每100份共聚物的环氧树脂。 可选地,上述绝缘体可以是通过聚酰胺,聚酰胺 - 酰亚胺的第二涂层涂覆的内部第一涂层,并且当第一涂层不含环氧树脂时,则是聚酰亚胺。