摘要:
Disclosed is an ink jet printhead which comprises (i) an upper substrate with a set of parallel grooves for subsequent use as ink channels and a recess for subsequent use as a manifold, the grooves being open at one end for serving as droplet emitting nozzles, and (ii) a lower substrate in which one surface thereof has an array of heating elements and addressing electrodes formed thereon, said lower substrate having an insulative layer deposited on the surface thereof and over the heating elements and addressing electrodes and patterned to form recesses therethrough to expose the heating elements and terminal ends of the addressing electrodes, the upper and lower substrates being aligned, mated, and bonded together to form the printhead with the grooves in the upper substrate being aligned with the heating elements in the lower substrate to form droplet emitting nozzles, said upper substrate comprising a material formed by crosslinking or chain extending a polymer of formula I or II.
摘要:
An ink jet printer includes a trough having side walls and an exposed roof, the trough being substantially filled with fluid during operation. A paddle vane is located within the trough and offset from one wall when the paddle vane is in a quiescent position. An actuation mechanism is attached to the paddle vane such that, upon activation of the actuation mechanism, the paddle vane is caused to move towards the wall, resulting in an increase in pressure in the fluid between the wall and the paddle vane. This results in a consequential ejection of fluid via the exposed roof. A method of manufacture of the ink jet printer comprises the steps of initially providing a silicon wafer having a circuitry wafer layer including electrical circuitry necessary for the operation of the thermal actuation mechanisms on demand. The trough is etched in the surface of the wafer. The actuation mechanism and the paddle vane are created on the silicon wafer by means of depositing and etching a series of sacrificial layers to form a supporting structure for the actuation mechanism and the paddle vane, in addition to depositing and suitably etching a series of materials for forming the actuation mechanism and the paddle vane. An ink supply channel interconnecting the trough with an ink supply is etched through the wafer. Any remaining sacrificial layers are etched away so as to release the actuation mechanism and the paddle vane for operation.
摘要:
A high reliability ink jet head for an ink jet recording apparatus enabling consistent ink ejecting with no nozzle clogging. The ink jet head therefor comprises a substrate comprising plural ink passages, each comprising a nozzle, pressure generator continuous to the nozzle, and an orifice, and an ink supply member common to the plural ink passages. The substrate comprising an anisotropic crystalline material such as silicon, and a filter channel formed integrally to the ink supply member by anisotropic etching.
摘要:
In accordance with a first aspect of the present invention, there is provided a thermal actuator activated by conductive heating of an electrically conductive material, the actuator including: a first non-conductive strip of material attached to a substrate at a first end of the strip and adapted to apply a force to a load at a second end of the strip; a second conductive strip of material formed along one side of the first strip, the second conductive strip including a first wire strip running from substantially the first end to the second end and a second wire strip running from substantially the second end to the fist end, the wire strips being joined together at the second end so as to form a circuit, the wire strips being further connected to a controlled power supply at the first end such that activation of the controlled power supply causes heating of the conductive material so as to actuate the thermal actuator thereby applying a force to the load. Preferably, the first strip is in the form of a coil and the second conductive material is formed along a radial inner surface.
摘要:
An inkjet printhead and fabrication method include integrating actuators and ink firing chambers on a single substrate, such as a semiconductor substrate. The integration process utilizes semiconductor-on-insulator (SOI) techniques in the preferred embodiment. Actuators are formed on one surface of the substrate, typically a silicon substrate, and firing chambers are aligned with the actuators. Electrical switching devices, such as transistors, are formed along the surface and are utilized to individually address the actuators. After the integrated structure is formed, a supply manifold may be attached to the structure for replenishing fluid ink following a firing operation. Optionally, a flow control mechanism, such as a valve, may be incorporated between the manifold and the firing chamber.
摘要:
An ink jet recording apparatus that achieves sufficient attraction force even when the actuator is sealed. In the ink jet recording apparatus, an electric pulse is applied between a diaphragm and electrode by a drive circuit to deform a diaphragm by electrostatic force to eject an ink droplet from a nozzle comprises a vibration chamber containing a wall surface formed by the diaphragm and a wall surface on which the electrode is formed, and a first cavity communicating with the vibration chamber and containing a wall surface on which is provided a lead for connecting the drive circuit and electrode. The vibration chamber is sealed airtight, and comprises a second cavity communicating with the vibration chamber or first cavity for increasing the volume of the airtight sealed part of the actuator.
摘要:
An actuator is made by depositing an electrode layer on an initial layer. A patterned layer of sacrificial material is formed on the first electrode layer such that a region of the first electrode layer is exposed through the subsequent layer. A second electrode layer is deposited and patterned on the subsequent layer. Then, a third patterned layer of sacrificial material is formed on the second electrode layer with an opening there through to the exposed region of the first electrode layer. A structure is deposited, patterned and planarized on the third layer expose a surface of the third layer. A third electrode layer is deposited and patterned on the planarized structure and the exposed surface of the third layer. The sacrificial material is partially removed, whereby the first electrode layer, the structure, and the third electrode layer are free to move together relative to the second electrode layer.
摘要:
A method of ejecting ink from a chamber includes the step of providing a cantilevered beam actuator incorporating a shape memory alloy and transforming said shape memory alloy from its martensitic phase to its austenitic phase or vice versa to cause the ink to eject from said chamber.
摘要:
A method for manufacturing an electrostatic actuator comprises a vibrating plate, an electrode plate facing the vibrating plate, and a vibrating chamber formed between the electrode plate and the vibrating plate, wherein the vibrating plate is displaced by electrostatic force, by applying voltage between the vibrating plate and the electrode plate, the method comprises: a process for forming a pressure compensating chamber communicating with the vibrating chamber; a process for forming a displacement plate at a portion of the pressure compensating chamber, displaceable according to external atmospheric pressure, into a warped form curved so as to protrude in a direction away from the facing inner wall of the pressure compensating chamber; and a process for shutting off and sealing the pressure compensating chamber from the external atmosphere, along with the vibrating chamber.
摘要:
A printhead chip for an inkjet printhead includes a wafer substrate that incorporates drive circuitry. The wafer substrate defines a plurality of ink inlet channels. Nozzle arrangements are positioned on the wafer substrate. Each nozzle arrangement includes a passive nozzle chamber structure that extends from the wafer substrate and bounds a respective ink inlet channel. A dynamic nozzle chamber structure defines a nozzle chamber with the passive nozzle chamber structure and has a roof that defines the ink ejection port. The dynamic structure is displaceable towards the wafer substrate into an actuated position and away from the wafer substrate into a rest position such that a drop of ink can be ejected from the ink ejection port. An elongate micro-electromechanical actuator is connected between the wafer substrate and the dynamic structure. The actuator includes a beam assembly that has an active beam of a conductive material, capable of thermal expansion, that defines a heating circuit and is connected to the drive circuitry and a passive beam that is interposed between the active beam and the wafer substrate such that, when the active beam receives an electrical signal from the drive circuitry, the active beam expands relative to the passive beam driving the dynamic structure into the actuated position to generate the drop of ink and when the signal is cut off subsequent cooling of the active beam causes the dynamic structure to move back to the rest position, facilitating a separation of the drop of ink.