公开(公告)号：US4872343A

公开(公告)日：1989-10-10

申请号：US230791

申请日：1988-08-10

Applicant: Rex B. Peters ,  Craig J. Cornelius

Inventor： Rex B. Peters ,  Craig J. Cornelius

IPC: G01P15/10 ,  G01L1/10 ,  G01L1/16 ,  G01P15/00 ,  G01P15/097

CPC classification number: G01P15/097 ,  G01L1/162

Abstract: A matched pair of vibrating beam force transducers for use in an instrument such as an accelerometer, to provide enhanced linearity and common mode tracking, while decreasing the possibility of lock in or cross-talk between the transducers. In a preferred embodiment, first and second transducers are provided, the transducers producing respective first and second output signals having respective first and second frequencies. The transducers are connected in an arrangement in which for a given acceleration, one frequency increases and the other frequency decreases. The first transducer comprises a pair of first beams, and the second transducer comprises a pair of second beams. The beam dimensions are selected such that the Euler buckling constants of the first and second transducers are substantially equal to one another, and such that the first and second frequencies are different from one another when the acceleration is zero and preferably are different from one another throughout the operating range of the accelerometer. In preferred arrangements, the transducer beams have a constant thickness, and the transducers have common axial stiffnesses.

Abstract translation: 用于诸如加速度计的仪器中的匹配的一对振动梁力传感器，以提供增强的线性度和共模跟踪，同时降低换能器之间锁定或串扰的可能性。 在优选实施例中，提供了第一和第二换能器，所述换能器产生具有相应的第一和第二频率的相应的第一和第二输出信号。 传感器以一种给定加速度的方式连接，一个频率增加，另一个频率降低。 第一传感器包括一对第一光束，第二传感器包括一对第二光束。 选择光束尺寸使得第一和第二换能器的欧拉屈曲常数彼此基本相等，并且使得当加速度为零时，第一和第二频率彼此不同，并且优选地彼此不同 加速度计的工作范围。 在优选的布置中，换能器束具有恒定的厚度，并且换能器具有共同的轴向刚度。

公开(公告)号：US4831304A

公开(公告)日：1989-05-16

申请号：US146383

申请日：1988-01-21

Applicant: Howard A. Dorey ,  Bronislaw J. Suski

Inventor： Howard A. Dorey ,  Bronislaw J. Suski

IPC: G01L1/10 ,  G01L1/16 ,  G01L1/18 ,  G01L9/00

CPC classification number: G01L9/0023 ,  G01L1/162 ,  G01L1/167 ,  G01L1/186 ,  G01L9/002

Abstract: A solid sensor, for sensing a physical parameter such as pressure, comprises a resonantly vibratable beam formed across a cavity in a substrate by micro-machining, and arranged such that changes in the parameter vary its resonant frequency. The beam either consists of or has deposited on it a material exhibiting piezo-electric effect, so that vibration of the beam can be excited by using the effect. This is achieved using light, either by forming a photodiode in the substrate in or near the beam, so that illuminating the photodiode causes a voltage to be applied to the beam, or, in the case where the piezo-electric material exhibits surface piezo-electric effect, by directly illuminating the beam.

公开(公告)号：US4751849A

公开(公告)日：1988-06-21

申请号：US875327

申请日：1986-06-17

Applicant: Jerome M. Paros ,  Donald W. Busse ,  Martin D. Chinn ,  Walter P. Kistler ,  Richard B. Wearn, Jr.

Inventor： Jerome M. Paros ,  Donald W. Busse ,  Martin D. Chinn ,  Walter P. Kistler ,  Richard B. Wearn, Jr.

IPC: G01G3/16 ,  G01L1/16 ,  G01P15/097 ,  G01P15/10 ,  G01L1/10

CPC classification number: G01P15/097 ,  G01G3/16 ,  G01L1/162 ,  G01P2015/0828

Abstract: A load cell having single or multiple resonators arranged to receive a strain that is proportional to the strain in a beam to which the resonator(s) is attached. Arrangement of the multiple resonators with respect to a force-bearing beam of the cell determines whether the cell is a bending mode load cell or a shear mode load cell. Absolute and differential pressure sensors, accelerometers and weighing devices are disclosed which employ the multiple-resonators of the invention.

Abstract translation: 具有单个或多个谐振器的测力传感器被布置成接收与谐振器所附接的波束中的应变成比例的应变。 多个谐振器相对于电池的承力梁的布置确定电池是弯曲模式称重传感器还是剪切模式称重传感器。 公开了使用本发明的多谐振器的绝对压差传感器和差压传感器，加速度计和称重装置。

公开(公告)号：US4712037A

公开(公告)日：1987-12-08

申请号：US879213

申请日：1986-06-26

Applicant: Pieter W. Verbeek ,  Theodorus A. Klaase ,  Arne Theil

Inventor： Pieter W. Verbeek ,  Theodorus A. Klaase ,  Arne Theil

IPC: B06B1/06 ,  G01L1/16 ,  G01L5/22 ,  G06F3/033 ,  G06F3/043 ,  G10K11/02 ,  H01L41/08

CPC classification number: G06F3/043 ,  B06B1/0607 ,  G01L1/162 ,  G01L5/228 ,  G10K11/02 ,  Y10S310/80

Abstract: A sensor for generating a signal in response of a variation at the tactile face. The sensor comprises superposed transmitting and receiving layers, which are provided with electrodes for the supply and pick-up of electrical signals to the transmitting layer and from the receiving layer respectively. With a high acoustic impedance of the boundary medium adjacent to the transmitting layer and a low acoustic impedance of the boundary medium adjacent to the receiving layer or vice versa, the sum of the thicknesses of the transmitting and receiving layers is an odd number of v/4f. With similar impedances, either low or high, of the said boundary media the aforesaid sum is an even number of v/4f. v is the propagation velocity of the acoustic vibration in the material of the transmitting and receiving layers and f the frequency of the signal supplied.

Abstract translation: 用于响应于触觉面的变化而产生信号的传感器。 传感器包括叠加的发射和接收层，它们分别设置有用于向发射层和接收层提供和接收电信号的电极。 由于与发射层相邻的边界介质的高声阻抗和与接收层相邻的边界介质的低声阻抗，反之亦然，发射层和接收层的厚度之和为奇数个v / 4f。 所述边界介质具有类似的阻抗或低或高的阻抗，上述和是v / 4f的偶数。 v是发射和接收层材料中声振动的传播速度，f是所提供信号的频率。

公开(公告)号：US4710668A

公开(公告)日：1987-12-01

申请号：US803160

申请日：1985-12-02

Applicant: Henri Fima ,  Denis Janiaud

Inventor： Henri Fima ,  Denis Janiaud

IPC: H03H9/19 ,  G01D5/243 ,  G01L1/10 ,  G01L1/16 ,  H03H9/05 ,  H03H9/17 ,  H03H9/46 ,  H01L41/08

CPC classification number: H03H9/17 ,  G01L1/106 ,  G01L1/162

Abstract: The invention provides a string resonator vibrating under flexion whose oscillation is maintained by piezoelectric, electrostatic or magnetic exitation means.Decoupling is obtained by inertia masses which oscillate in the vibration plane of the string, between the string and fixing supports, with a movement of rotation about an axis orthogonal to the vibration plane of the string and at the level of flexible elements. The resonator is easy to manufacture, inexpensive and hase a good coefficient of quality. It may be used for force, pressure sensors or gyroscopes.

Abstract translation: 本发明提供了一种在弯曲下振动的弦振荡器，其振动由压电，静电或磁力驱动装置保持。 通过围绕弦的振动平面中的弦，弦和固定支撑之间振动的惯性质量获得去耦合，其中围绕与弦的振动平面垂直的轴线的旋转运动以及柔性元件的水平。 谐振器易于制造，价格便宜并且具有良好的质量系数。 它可用于力，压力传感器或陀螺仪。

公开(公告)号：US4703216A

公开(公告)日：1987-10-27

申请号：US834383

申请日：1986-02-28

Applicant: James P. Corbett

Inventor： James P. Corbett

IPC: G01L1/16 ,  G01L9/00 ,  H01L41/08

CPC classification number: G01L1/162 ,  G01L9/0022

Abstract: A force and pressure transducer comprises a plate-like crystal. Two separate portions of the crystal are maintained in oscillation at different frequencies by a circuit. The crystal is firmly secured to a solid member in such a manner that deformation in the solid manner, caused by the force or fluid pressure to be measured, results in a secondary force being transmitted to the crystal. This compels the frequency of one of the two oscillating portions of the crystal to change substantially whereas the frequency of the other portion changes only minimally. The difference frequency between the two portions is a highly accurate measure of the force or fluid pressure to be measured.In oscillating crystal transducers hitherto employing plate-like crystals wherein the force to be measured is transmitted along the surface direction, the maximum applicable force has been limited by the ability of the crystal to sustain larger forces.The new development claimed herein permits large forces and fluid pressures to be measured.

Abstract translation: 力和压力传感器包括板状晶体。 晶体的两个独立部分通过电路保持在不同频率的振荡。 晶体牢固地固定在固体部件上，使得由待测量的力或流体压力引起的以固体方式的变形导致二次力传递到晶体。 这迫使晶体的两个振荡部分之一的频率基本上改变，而另一部分的频率仅最小地改变。 两部分之间的差异频率是测量力或流体压力的高精度测量。 在迄今使用板状晶体的振荡晶体传感器中，其中待测量的力沿着表面方向传播，所以最大的适用力受到晶体承受较大的力的能力的限制。 本文所要求的新发展允许测量大的力和流体压力。

公开(公告)号：US4651569A

公开(公告)日：1987-03-24

申请号：US729476

申请日：1985-05-01

Applicant: Jerome M. Paros ,  Walter P. Kistler ,  Donald W. Busse

Inventor： Jerome M. Paros ,  Walter P. Kistler ,  Donald W. Busse

IPC: G01G5/06 ,  G01L1/16 ,  G01L9/00 ,  G01P15/08 ,  G01L7/04 ,  G01L7/06 ,  G01L7/08

CPC classification number: G01P15/08 ,  G01G5/06 ,  G01L1/162 ,  G01L9/0022 ,  G01L9/0026

Abstract: A digital differential pressure sensor with relatively low sensitivity to common mode line pressure errors. The sensor includes an airtight enclosure having a pair of pressure ports through which pressures are coupled to opposite sides of a pressure-sensing diaphragm, bellows, or Bourdon tube. The pressure-sensing elements generate torques which are transmitted by a shaft to stress-sensitive resonators which are isolated from the torque-producing elements by a sealed, flexible tube.

Abstract translation: 数字差压传感器对共模线路压力误差的灵敏度较低。 传感器包括具有一对压力端口的气密外壳，压力通过该压力端口连接到压力感测隔膜，波纹管或布尔登管的相对侧。 压力感测元件产生的转矩由轴传递给应力敏感的谐振器，它们通过密封的柔性管与转矩产生元件隔离。

公开(公告)号：US4479391A

公开(公告)日：1984-10-30

申请号：US482041

申请日：1983-04-04

Applicant: Gary J. Banik ,  Errol EerNisse ,  Walter P. Kistler ,  Jerome Paros

Inventor： Gary J. Banik ,  Errol EerNisse ,  Walter P. Kistler ,  Jerome Paros

IPC: G01L1/10 ,  G01L1/16 ,  G01P15/097 ,  G01P15/10

CPC classification number: G01P15/097 ,  G01L1/106 ,  G01L1/162 ,  Y10S73/01

Abstract: A resonator force transducer assembly includes an elongate base element, a first arm disposed generally in parallel with a front portion of the base element, a first hinge joining the arm near a rear end thereof to the base element at about the middle thereof, an elongate resonator element such as a quartz crystal attached to the front ends of the arm and base element to extend therebetween, a second arm disposed generally in parallel with a rear portion of the base element, and a second hinge joining the second arm to the base element. A third hinge joins the front end of the second arm to the rear end of the first arm to form a type of compound lever arrangement so that when a force is applied to the second arm to urge it either toward or away from the base element, a portion of this force is transmitted via the third hinge to the first arm to urge it either away from or toward the base element to thereby stress the quartz resonator element. The force applied to the second arm can be measured by causing the quartz resonator element to vibrate and then taking measurements of the change in frequency with the application of force. To protect the quartz resonator element and the rest of the force transducer assembly from corrosive effects of the environment and from ambient perturbations which may introduce error in the force measurement, the entire assembly is disposed in a vacuum enclosure. The force to be measured is then transmitted to the second arm via a rod which is attached to the arm and which extends through an opening in the enclosure. A seal between the second arm and the opening in the enclosure is provided by bellows, and another bellows in opposing relationship is provided to compensate for the effect of atmospheric pressure on the second arm introduced through the first mentioned bellows.

Abstract translation: 谐振器力传感器组件包括细长的基座元件，大致平行于基座元件的前部设置的第一臂，将其后端附近的臂在其中部附近连接到基座元件的第一铰链， 谐振器元件，例如附接到臂和基座元件的前端的石英晶体，以在它们之间延伸;大体上平行于基部元件的后部设置的第二臂，以及将第二臂连接到基座元件的第二铰链 。 第三铰链将第二臂的前端连接到第一臂的后端以形成一种复合杆装置，使得当力施加到第二臂以将其推向或远离基座元件时， 该力的一部分经由第三铰链传递到第一臂，以将其推离或离开基座元件，从而使石英振子元件受到应力。 施加到第二臂的力可以通过使石英振动元件振动并随后通过施加力来测量频率变化来测量。 为了保护石英谐振器元件和力传感器组件的其余部分免受环境的腐蚀影响和可能在力测量中引起误差的环境扰动，整个组件设置在真空外壳中。 待测量的力然后通过杆连接到第二臂，该杆连接到臂上并延伸穿过外壳中的开口。 第二臂和外壳中的开口之间的密封由波纹管提供，并且提供相反关系的另一个波纹管以补偿通过第一提到的波纹管引入的第二臂上的大气压力的影响。

公开(公告)号：US4372173A

公开(公告)日：1983-02-08

申请号：US198705

申请日：1980-10-20

Applicant: Errol P. EerNisse ,  Jerome M. Paros

Inventor： Errol P. EerNisse ,  Jerome M. Paros

IPC: G01L1/10 ,  G01L1/16 ,  G01P15/097 ,  G01P15/10 ,  H03B5/32 ,  H03H9/19 ,  H04R17/10

CPC classification number: G01P15/097 ,  G01L1/162 ,  Y10S73/01 ,  Y10S73/04

Abstract: A vibratory, force transducer includes a pair of elongate, generally parallel bars coupled together at their ends in a type of double-ended tuning fork arrangement. The bars each have a thickness of t, a width of w and a length between fixed ends of L. The distance separating the points where the bars are coupled together is m. Apparatus is provided to cause the bars to vibrate in a transverse direction and in substantially 180.degree. phase opposition. Apparatus is also provided for determining the frequency of vibration of the bars so that when the bars are subjected to either compressive or tensile forces along the longitudinal axis of the bars, the magnitude of such forces can be readily determined by simply determining the magnitude of the frequency change. The values of w and t are selected so that 0.4

Abstract translation: 振动力传感器包括一对细长的大致平行的杆，它们的端部以一种双端音叉装置的形式连接在一起。 这些棒各自具有t的厚度，w的宽度和L的固定端之间的长度。将条连接在一起的点的距离为m。 提供设备以使杆在横向方向上以大致180°的相反方向振动。 还提供了用于确定杆的振动频率的设备，使得当杆沿杆的纵向轴线受到压缩或拉伸力时，可以容易地通过简单地确定杆的大小来确定这种力的大小， 频率变化。 选择w和t的值，使得0.4

公开(公告)号：US4328441A

公开(公告)日：1982-05-04

申请号：US117296

申请日：1980-01-31

Applicant: Frederick R. Kroeger, Jr. ,  Richard A. Norquist

Inventor： Frederick R. Kroeger, Jr. ,  Richard A. Norquist

IPC: H01L41/00 ,  H01H13/00 ,  H01H35/00 ,  H01L41/08 ,  H01L41/113 ,  H03K17/96

CPC classification number: H01L41/1132 ,  G01L1/162 ,  H03K17/964 ,  Y10S310/80

Abstract: A pressure sensitive apparatus for producing electrical signals on two electrodes having a layered structure consisting of a conductive layer, a piezoelectric polymer film layer, an electrode layer, an insulating layer, another electrode layer, another piezoelectric polymer film layer, and another conductive layer. The layered structure may be constructed from an insulating layer sandwiched between two piezoelectric polymer films each having an electrode on one surface thereof and having a conductive plane on the other surface thereof disposed on each side of the insulating layer with the electrodes in closest proximity to the insulating film. Further, support substrates may be disposed on each side of the piezoelectric polymer films, the support substrates having an opening where the electrodes are located. Still, further, the apparatus may be adapted for a pressure sensitive matrix keyboard having a plurality of keyboard switch positions arranged in a plurality of rows and columns where the electrodes are a strip constituting one of the rows and columns, respectively, of the keyboard switch positions. The piezoelectric polymer film may be polyvinylidene fluoride and the layered structure may be integrally bonded or physically sandwiched together and may have connected to it an electrical sensing circuit suitable for amplifying a small charge pulse induced by the strain upon the piezoelectric polymer film.

Abstract translation: 一种用于在具有由导电层，压电聚合物膜层，电极层，绝缘层，另一电极层，另一个压电聚合物膜层和另一导电层组成的层状结构的两个电极上产生电信号的压敏设备。 层状结构可以由夹在两个压电聚合物膜之间的绝缘层构成，每个压电聚合物膜在其一个表面上具有电极，并且在其另一个表面上具有设置在绝缘层的每一侧上的导电平面，其中电极最靠近 绝缘膜。 此外，支撑基板可以设置在压电聚合物膜的每一侧上，支撑基板具有电极所在的开口。 此外，该装置还可适用于压敏矩阵键盘，其具有排列成多个行和列的多个键盘开关位置，其中电极是分别构成键盘开关的行和列之一的条 职位 压电聚合物膜可以是聚偏二氟乙烯，并且层状结构可以整体地结合或物理地夹在一起，并且可以连接到适合于放大由压电聚合物膜上的应变引起的小电荷脉冲的电感测电路。