公开(公告)号：US09887063B2

公开(公告)日：2018-02-06

申请号：US14356578

申请日：2012-10-25

Applicant: CANON KABUSHIKI KAISHA

Inventor： Koji Yamazaki ,  Yasue Sato ,  Kazuyuki Ueda

IPC: H01J35/00 ,  H01J35/16 ,  H01J5/26 ,  G01N23/02 ,  H01J9/26 ,  H01J9/32 ,  H01J9/36 ,  H01J9/395 ,  H01J35/02 ,  H01J35/20

CPC classification number: H01J35/16 ,  G01N23/02 ,  H01J5/26 ,  H01J9/26 ,  H01J9/32 ,  H01J9/36 ,  H01J9/395 ,  H01J35/025 ,  H01J35/20 ,  H01J2209/18 ,  H01J2209/26 ,  H01J2235/084

Abstract: The present invention relates to a radiation generating tube. The radiation generating tube includes an envelope including an insulating tubular member having at least two openings, a cathode connected to one of the openings of the insulating tubular member, and an anode connected to the other of the openings of the insulating tubular member. At least one of the cathode and the anode and the insulating tubular member are bonded at a bonded portion with an electrically conductive bonding member; and the bonded portion bonded with the electrically conductive bonding member is coated with a dielectric layer.

公开(公告)号：US09671520B2

公开(公告)日：2017-06-06

申请号：US14175703

申请日：2014-02-07

Applicant: Euclid Techlabs, LLC

Inventor： Tancredi Botto ,  Benjamin Levitt ,  Chunguang Jing ,  Sergey Antipov ,  Alexei Kanareykin

IPC: G01V5/12 ,  H05H9/02 ,  H01J35/00 ,  H05G2/00

CPC classification number: G01V5/12 ,  H01J35/00 ,  H05G2/00 ,  H05H9/02

Abstract: A dielectric loaded accelerator for accelerating charged particles, such as electrons, ions and/or protons, is described herein. The dielectric loaded accelerator accelerates charged particles along a longitudinal axis and towards an outlet of the accelerator. The dielectric loaded accelerator accelerates the charged particles using oscillating electromagnetic fields that propagate within the accelerator according to an electromagnetic mode. The dielectric loaded accelerator described herein includes an electromagnetic mode with a phase velocity that increases towards the outlet of the accelerator and matches a velocity of the charged particles being accelerated along the longitudinal axis of the accelerator. By matching the phase velocity of the oscillating electromagnetic fields to the velocity of the charged particles, the accelerator reduces phase slippage between the fields and the charged particles and, therefore, efficiently accelerates charged particle towards the outlet.

公开(公告)号：US09500226B2

公开(公告)日：2016-11-22

申请号：US14459231

申请日：2014-08-13

Applicant: General Electric Company

Inventor： Ian Strider Hunt ,  Kenwood P. Dayton ,  Ben David Poquette ,  Santosh Kumar Tiwari ,  Michael J. Danyluk

IPC: H01J35/00 ,  F16C33/10 ,  H01J35/10

CPC classification number: F16C33/1065 ,  F16C17/107 ,  F16C33/14 ,  F16C33/6692 ,  F16C2380/16 ,  H01J35/101 ,  H01J2235/1066 ,  H01J2235/108

Abstract: Various methods and systems are provided for providing coatings and textures to surfaces of a bearing assembly in an x-ray system to control the wettability of the surfaces when components of the bearing assembly rotate during operation of the x-ray system. A lubricant is disposed in a gap formed between a shaft and a sleeve of the bearing assembly such that textured and coated surfaces of the shaft and sleeve alter wetting properties between the lubricant and surfaces. The coatings and textures can be wetting or anti-wetting to further enhance control over the behavior of the lubricant.

Abstract translation: 提供各种方法和系统，以在X射线系统中的轴承组件的表面上提供涂层和纹理，以在轴承组件的部件在x射线系统的操作期间旋转时控制表面的润湿性。 润滑剂设置在轴承组件的轴和套筒之间形成的间隙中，使得轴和套筒的纹理和涂覆表面改变润滑剂和表面之间的润湿性能。 涂层和纹理可以润湿或防湿润，以进一步增强对润滑剂性能的控制。

公开(公告)号：US20150363002A1

公开(公告)日：2015-12-17

申请号：US14736493

申请日：2015-06-11

Applicant: SIEMENS AKTIENGESELLSCHAFT

Inventor： MICHAEL FUHRMANN ,  ANJA JAEGER ,  ROBERT KAGERMEIER

IPC: G06F3/01 ,  H01J35/00

CPC classification number: G06F3/017 ,  A61B6/465 ,  A61B6/467 ,  G06F3/0487

Abstract: A device for the gesture-controlled setting of at least one setting variable on an X-ray source includes at least one recognition unit for anatomically recognizing a body part suitable for gesture control, at least one gesture detection unit for detecting at least one gesture of a body part recognized by the recognition unit, and at least one light source for displaying the at least one setting variable as feedback for a person making the gesture. The at least one setting variable was preset and/or set by using the at least one detected gesture. A method for the gesture-controlled setting of at least one setting variable on an X-ray source is also provided.

Abstract translation: 用于在X射线源上的至少一个设定变量的手势控制设置的装置包括至少一个用于解剖识别适于手势控制的身体部位的识别单元，至少一个手势检测单元，用于检测至少一个手势 由所述识别单元识别的身体部分，以及至少一个光源，用于将所述至少一个设定变量显示为作为进行所述手势的人的反馈。 通过使用至少一个检测到的手势来预设和/或设置至少一个设置变量。 还提供了用于在X射线源上进行至少一个设定变量的手势控制设置的方法。

公开(公告)号：US09184020B2

公开(公告)日：2015-11-10

申请号：US14163441

申请日：2014-01-24

Applicant: Moxtek, Inc.

Inventor： Todd S. Parker

IPC: H01J35/00 ,  H01J35/24 ,  H01J35/10 ,  H01J35/14 ,  H01J35/28

CPC classification number: H01J35/24 ,  H01J35/08 ,  H01J35/16 ,  H01J35/28 ,  H01J2235/081 ,  H01J2235/086 ,  H01J2235/087

Abstract: A x-ray tube comprising an anode sealed to a flexible coupling. The flexible coupling can allow the anode to deflect or tilt in various directions to allow an electron beam to impinge upon various selected regions of an anode target.A method of utilizing different regions of an x-ray tube target by tilting or deflecting an x-ray tube anode to cause an electron beam to impinge on a selected region of the target.

Abstract translation: 包括密封到柔性联轴器的阳极的x射线管。 柔性耦合可允许阳极在各个方向上偏转或倾斜，以允许电子束撞击阳极靶的各种选定区域。 一种通过倾斜或偏转x射线管阳极来引起电子束撞击靶的选定区域来利用X射线管靶的不同区域的方法。

公开(公告)号：US09153411B2

公开(公告)日：2015-10-06

申请号：US13564909

申请日：2012-08-02

Applicant: Jan Boese ,  Frank Dennerlein ,  Thomas Redel

Inventor： Jan Boese ,  Frank Dennerlein ,  Thomas Redel

IPC: H01J35/00 ,  H01J35/30 ,  A61B6/03 ,  A61B6/00

CPC classification number: H01J35/30 ,  A61B6/03 ,  A61B6/4435

Abstract: An X-ray imaging apparatus has at least one X-ray image system rotatable about an examination volume. The X-ray image system is controlled such that during a continuous rotation of the system, at least one 2D projection image is recorded. An image generation facility generates the 2D projection image from the measured data. The X-ray source includes an X-ray focus which can be changed in terms of position, which, during the recording of the 2D projection image, moves counter to the direction of rotation of the X-ray image system such that its spatial position in a fixed coordinate system does not change. The X-ray detector records several 2D partial images, from which the 2D projection image is calculated with the rotational movement of the X-ray detector being at least approximately compensated. The 2D projection images have significantly reduced image blur.

Abstract translation: X射线成像装置具有能够围绕检查体积旋转的至少一个X射线图像系统。 控制X射线图像系统，使得在系统的连续旋转期间，记录至少一个2D投影图像。 图像生成设备根据测量数据生成2D投影图像。 X射线源包括可以在2D投影图像的记录期间相对于X射线图像系统的旋转方向移动的位置方面改变的X射线焦点，使得其X射线焦点的空间位置 在固定的坐标系中不改变。 X射线检测器记录几个2D部分图像，由X射线检测器的旋转运动至少近似地补偿2D计算图像。 2D投影图像显着减少图像模糊。

公开(公告)号：US09117622B2

公开(公告)日：2015-08-25

申请号：US13570122

申请日：2012-08-08

Applicant: Keith C. Gendreau ,  Zaven Arzoumanian ,  Steven J. Kenyon ,  Nick Salvatore Spartana

Inventor： Keith C. Gendreau ,  Zaven Arzoumanian ,  Steven J. Kenyon ,  Nick Salvatore Spartana

IPC: H01J35/00 ,  H01J35/06 ,  H05G1/70

CPC classification number: H01J35/065 ,  H01J35/06 ,  H05G1/70

Abstract: A miniaturized high-speed modulated X-ray source (MXS) device and a method for rapidly and arbitrarily varying with time the output X-ray photon intensities and energies. The MXS device includes an ultraviolet emitter that emits ultraviolet light, a photocathode operably coupled to the ultraviolet light-emitting diode that emits electrons, an electron multiplier operably coupled to the photocathode that multiplies incident electrons, and an anode operably coupled to the electron multiplier that is configured to produce X-rays. The method for modulating MXS includes modulating an intensity of an ultraviolet emitter to emit ultraviolet light, generating electrons in response to the ultraviolet light, multiplying the electrons to become more electrons, and producing X-rays by an anode that includes a target material configured to produce X-rays in response to impact of the more electrons.

Abstract translation: 一种小型化的高速调制X射线源（MXS）装置以及随时间快速随意变化的输出X射线光子强度和能量的方法。 MXS装置包括发射紫外光的紫外线发射器，可操作地耦合到发射电子的紫外线发光二极管的光电阴极，可操作地耦合到乘以入射电子的光电阴极的电子倍增器和可操作地耦合到电子倍增器的阳极， 被配置为产生X射线。 用于调制MXS的方法包括调制紫外发射体的强度以发射紫外光，响应于紫外光产生电子，将电子乘以变成更多的电子，并通过包括目标材料的阳极产生X射线，该目标材料被配置为 响应于更多电子的影响产生X射线。

公开(公告)号：US20150173163A1

公开(公告)日：2015-06-18

申请号：US14636413

申请日：2015-03-03

Applicant: Carl Zeiss SMT GmbH

Inventor： Ingo Saenger ,  Manfred Maul ,  Christoph Hennerkes ,  Johannes Ruoff ,  Daniel Kraehmer

IPC: H05G2/00 ,  H01J35/00 ,  G21K1/16 ,  G03F7/20

CPC classification number: H05G2/001 ,  G02B27/286 ,  G03F7/70033 ,  G03F7/70075 ,  G03F7/70116 ,  G03F7/70308 ,  G03F7/70566 ,  G21K1/06 ,  G21K1/062 ,  G21K1/16 ,  H01J35/00 ,  H05H7/04

Abstract: An EUV light source serves for generating a usable output beam of EUV illumination light for a projection exposure apparatus for projection lithography. The light source has an EUV generation device which generates an EUV raw output beam. The latter is circularly polarized. For the purposes of setting the polarization of the usable output beam and in respect of the polarization direction, a polarization setting device has a linearly polarizing effect on the raw output beam. This results in an EUV light source, which provides an improved output beam for a resolution-optimized illumination.

Abstract translation: EUV光源用于产生用于投影光刻的投影曝光装置的EUV照明光的可用输出光束。 光源具有产生EUV原始输出光束的EUV生成装置。 后者是圆极化的。 为了设定可使用的输出光束的偏振和偏振方向，偏光设定装置对原始输出光束具有线偏振效果。 这导致EUV光源，其提供用于分辨率优化照明的改进的输出光束。

公开(公告)号：US08861684B2

公开(公告)日：2014-10-14

申请号：US13585157

申请日：2012-08-14

Applicant: Omar Al-Kofahi ,  Peter J. Rothschild

Inventor： Omar Al-Kofahi ,  Peter J. Rothschild

IPC: G21K1/02 ,  G21K1/04 ,  H01J35/00

CPC classification number: G21K1/043 ,  G01N23/06 ,  H01J35/00

Abstract: An apparatus for forming a beam of energetic particles and for scanning the beam of particles with respect to an inspected object. The apparatus has a source of energetic particles characterized by an effective beam origin and a rotating hoop having at least one aperture, such that the effective beam origin of the source is closer to the inspected object than the axis of rotation of the rotating hoop. A collimating structure disposed interior to the rotating hoop collimates emission by the source into a fan beam prior to impinging on the rotating hoop. In some embodiments, the effective beam origin may be moved with respect to the axis of rotation of the hoop.

Abstract translation: 一种用于形成能量粒子束并用于相对于被检查物体扫描粒子束的装置。 该装置具有以有效光源为特征的高能粒子源和具有至少一个孔的旋转箍，使得源的有效光束原点比旋转环的旋转轴更靠近被检查物体。 设置在旋转箍的内部的准直结构在撞击旋转箍之前将源的发射准直到扇形束中。 在一些实施例中，有效光束原点可以相对于环的旋转轴线移动。

公开(公告)号：US08582723B2

公开(公告)日：2013-11-12

申请号：US13131070

申请日：2009-11-19

Applicant: Rolf Karl Otto Behling ,  Michael Lübcke ,  Christoph Bathe ,  Wolfgang Chrost

Inventor： Rolf Karl Otto Behling ,  Michael Lübcke ,  Christoph Bathe ,  Wolfgang Chrost

IPC: H01J35/00

CPC classification number: H01J35/10 ,  H01J2235/1046 ,  H01J2235/1204

Abstract: In a rotatable anode (4) of an X-ray tube, a heat transfer between the rotating disc of the anode (4a) and the second bearing element (11) is achieved by providing a contact material (14) within a gap (16a, b) between the anode disc (4a) and the second bearing element (11). Contact elements (15) protrude from the second bearing element (11) into the contact material (14), thus allowing a heat transfer from anode disc (4a) to second bearing element (11) via contact material (14) and contact element (15).

Abstract translation: 在X射线管的可旋转阳极（4）中，通过在间隙（16a）内设置接触材料（14）来实现阳极（4a）的旋转盘和第二支承元件（11）之间的热传递 ，b）在阳极盘（4a）和第二轴承元件（11）之间。 接触元件（15）从第二轴承元件（11）突出到接触材料（14）中，从而允许通过接触材料（14）和接触元件（14）从阳极盘（4a）到第二轴承元件（11） 15）。