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公开(公告)号：US20230236065A1
公开(公告)日：2023-07-27
申请号：US18010901
申请日：2021-07-27
申请人： LYNRED
发明人： Willy Ludurczak , Marc Guillaumont
CPC分类号： G01J5/0853 , G01J5/024 , G01J5/20
摘要： An infrared imaging microbolometer integrating a membrane assembled in suspension above a substrate by means of holding arms attached to anchoring nails is disclosed. The membrane includes a support layer crossing the upper end of the anchoring nails. It also includes an absorber or electrode deposited on the support layer and on the anchoring nails with a pattern forming at least two electrodes. It further includes a dielectric layer deposited on the absorber or electrode and on the support layer, at least two conductive vias formed through the dielectric layer in contact with the at least two electrodes, and a thermometric or thermoresistive material arranged on a planar surface formed at the level of the upper ends of the conductive vias.
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公开(公告)号：US11685645B2
公开(公告)日：2023-06-27
申请号：US17913956
申请日：2021-04-08
申请人： LYNRED
发明人： Sylvain Lemettre
CPC分类号： B81B7/0038 , H01L23/26 , B81C1/00285 , B81C2203/0145
摘要： A method of manufacturing a microelectromechanical system includes forming of an electromechanical element on a substrate. The method further includes preparation of an encapsulation package to form a sealed cavity integrating the electromechanical element, with the sealed cavity having a volume smaller than 10 mm3. The method includes physical vapor deposition of a getter film on the substrate or on a wall of the encapsulation package so that the getter film has a specific absorption surface area smaller than 8 m2/g, and sealing of the encapsulation package on the substrate by means of a thermal sealing cycle having a temperature enabling to activate said getter film.
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13.发明申请公开(公告)号：US20220252456A1
公开(公告)日：2022-08-11
申请号：US17629995
申请日：2020-07-27
发明人： Denis PELENC , Giacomo BADANO , Alexi CARDOSO , Marc GUILLAUMONT
摘要： A process for producing a microbolometer including a vanadium-oxide-based sensitive material containing an additional chemical element chosen from arsenic, germanium, silicon and phosphorus, the process including: determining an effective amount of the additional chemical element from which the modified compound, having undergone a step of exposure to a temperature Tr for a time Δtr, exhibits an electrical resistivity ρa|r at room temperature that is higher than 10% of its native value; producing the sensitive material in a thin layer, this material being formed from the modified compound having an amount of the additional chemical element that is greater than or equal to the effective amount; and exposing the sensitive material to the temperature Tr for the time Δtr.
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公开(公告)号：US11408772B2
公开(公告)日：2022-08-09
申请号：US17279966
申请日：2019-11-26
申请人： LYNRED
发明人： Sébastien Cortial
摘要： A method of manufacturing an infrared detector includes the steps of: hybrid bonding of a detection chip to a second chip; said hybrid bonding step being carried out by adhesion of contacts and of insulator layers of the two chips; removal of a substrate of said detection chip to reach a deep oxide layer; forming of conductive pads through said deep oxide layer to reach transistors present in a semiconductor layer; and forming of microbolometers suspended over said deep oxide layer and electrically connected to the conductive pads.
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公开(公告)号：US11302729B2
公开(公告)日：2022-04-12
申请号：US16465877
申请日：2017-12-05
申请人： LYNRED
IPC分类号： H01L27/146
摘要： The detection device includes first and second photodetectors each sensitive to two different wavelength ranges. The detection device comprises a first filter configured to allow the first wavelength range to pass and to block the second wavelength range. The first filter covers the first photodetector and leaves the second photodetector uncovered. The detection device comprises a second filter located at a distance from the first and second photodetectors and at a distance from the first filter. The second filter is configured to allow the first and the second wavelength ranges to pass. A processing circuit is configured to receive electric signals coming from the first and second photodetectors and to provide data relative to the radiation of the second wavelength range by comparing the first signal with the second signal.
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公开(公告)号：US12078545B2
公开(公告)日：2024-09-03
申请号：US17615361
申请日：2020-06-05
申请人： LYNRED
发明人： Nicolas Boudou
CPC分类号： G01J5/20 , G01J2005/0077
摘要： The present disclosure relates to a microbolometer comprising an array of pixels, each pixel comprising one or more detection cells, each detection cell comprising an absorption layer (530) forming a quarter-wave cavity (533) having a height (h) of between 1.5 and 5 μm, wherein the pitch of the detection cells in at least one axis in a plane of the pixel array is in the range 2.4 h to 3.6 h.
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17.发明授权公开(公告)号：US12066332B2
公开(公告)日：2024-08-20
申请号：US17629995
申请日：2020-07-27
发明人： Denis Pelenc , Giacomo Badano , Alexi Cardoso , Marc Guillaumont
摘要： A process for producing a microbolometer including a vanadium-oxide-based sensitive material containing an additional chemical element chosen from arsenic, germanium, silicon and phosphorus, the process including: determining an effective amount of the additional chemical element from which the modified compound, having undergone a step of exposure to a temperature Tr for a time Δtr, exhibits an electrical resistivity ρa|r at room temperature that is higher than 10% of its native value; producing the sensitive material in a thin layer, this material being formed from the modified compound having an amount of the additional chemical element that is greater than or equal to the effective amount; and exposing the sensitive material to the temperature Tr for the time Δtr.
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公开(公告)号：US20240118132A1
公开(公告)日：2024-04-11
申请号：US18275886
申请日：2022-02-10
申请人： LYNRED
发明人： Pierre CASSAIGNE , Eric FRENE
IPC分类号： G01J1/02
CPC分类号： G01J1/0252
摘要： An electromagnetic radiation detection system includes a detection circuit detecting an electromagnetic radiation and supplying a representative electrical signal. A cold table supports the detection circuit. A thermally insulating support supports the cold table. It includes an enclosure defining a closed volume and provided with a bottom, a top and a side wall connecting the bottom and the top. The thermally insulating support mechanically connects the cold table with the bottom of the enclosure. A cooler is mechanically connected to the enclosure and configured to cool the detection circuit. The cooler is mechanically fastened onto the side wall of the enclosure and thermally connected to the detection circuit by means of a thermal connector connecting the cooler and the cold table and the cold shield.
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公开(公告)号：US11875483B2
公开(公告)日：2024-01-16
申请号：US17604910
申请日：2020-04-28
申请人： LYNRED
发明人： Alain Durand , Olivier Harant
CPC分类号： G06T5/005 , H04N23/80 , G06T2207/10016 , G06T2207/10048
摘要： The present disclosure relates to a method of removing, by an imaging processing device, remanence artifacts from an image (fn) of a sequence of images captured by an infrared imaging device, the method comprising:
inpainting a zone of remanence in the image (fn) to generate an inpainted image;
generating a remanence measure for at least some pixels in the image (fn) based on the inpainted image; and
removing remanence artifacts from at least some pixels of the image (fn) based on a remanence estimation for each of the at least some pixels, each remanence estimation being generated based on the remanence measures of a plurality of the images in the sequence.-
公开(公告)号：US11792536B2
公开(公告)日：2023-10-17
申请号：US16972967
申请日：2019-06-07
申请人： LYNRED
发明人： Alain Durand , Nicolas Boudou
IPC分类号： H04N23/81
CPC分类号： H04N23/81
摘要： An infrared camera includes a housing containing a pixel array. The pixel array includes: image pixels forming an image sensor arranged to receive infrared light from an image scene; and a plurality of parasitic heat sensing pixels arranged to receive infrared light from different portions of an interior surface of the housing.
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