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公开(公告)号：US10903059B2
公开(公告)日：2021-01-26
申请号：US16123709
申请日：2018-09-06
发明人： Daisuke Ono , Yu Kambe
IPC分类号： C23C14/34 , H01J37/34 , H01J37/32 , C23C14/00 , C23C14/50 , H01L21/687 , C23C14/08 , H01L21/02 , H01L21/285
摘要： A film formation apparatus includes a chamber which has an interior capable of being vacuumed, and which includes a lid that is openable and closable on the upper part of the chamber, a rotation table which is provided in the chamber and which and carries a workpiece in the circular trajectory, a film formation unit that deposits film formation materials by sputtering on the workpiece carried by the rotation table to form films, a shielding member which is provided with an opening at the side which the workpiece passes through, and which forms a film formation room where the film formations by the film formation units are performed, and a support which supports the shielding member, and which is independent relative to the chamber and is independent from the lid.
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公开(公告)号：US10806674B2
公开(公告)日：2020-10-20
申请号：US16285259
申请日：2019-02-26
发明人： Shinichi Ogimoto , Ryo Ikuta , Yutaka Okabe , Hitoshi Aoyagi , Hikaru Hoshino
摘要： According to one embodiment, a tablet printing apparatus includes a conveyor configured to convey tablets sequentially supplied while sucking and holding the tablets; a print head arranged to face the conveyor to perform printing on each of the tablets being conveyed; a detector arranged upstream of the print head to detect the posture of each of the tablets; and a print condition tester arranged downstream of the print head to check print condition on each of the tablets. Suction force applied to the tablets is reduced at least in an area from a detection position to a print condition check position than in other area.
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公开(公告)号：US20200282747A1
公开(公告)日：2020-09-10
申请号：US16807241
申请日：2020-03-03
发明人： Azusa HIRANO , Yasutsugu TSURUOKA
摘要： According to one embodiment, a tablet printing apparatus includes: a conveyor configured to convey a tablet while sucking and holding the tablet by the discharge of air; an inkjet head configured to perform printing on the tablet conveyed by the conveyor; an exhaust pipe which the air discharged from the conveyor passes through; an exhaust blower as a heat source that generates heat; a heat conductive member that is in contact with the exhaust pipe and the exhaust blower; and a housing configured to house the conveyor, the inkjet head, the exhaust pipe, the exhaust blower, and the heat conductive member.
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公开(公告)号：US10682849B2
公开(公告)日：2020-06-16
申请号：US16206338
申请日：2018-11-30
发明人： Ryo Ikuta , Junsuke Komito , Shinichi Ogimoto
摘要： According to one embodiment, a tablet printing apparatus includes a conveying device, an inkjet printing device, and a control device. The conveying device is configured to convey a tablet. The printing device includes a nozzle array in which a plurality of nozzles are arranged in a direction crossing a conveying path where the tablet is conveyed by the conveying device, and performs printing by ejecting ink from the nozzles to the tablet being conveyed by the conveying device. The control device increases either one of a resolution in the conveying direction of the tablet at the time of performing the printing and a resolution in the array direction of the nozzles at the time of performing the printing higher than the other according to a print density or a print shape on the tablet, and controls the printing device to perform the printing.
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公开(公告)号：US10607863B2
公开(公告)日：2020-03-31
申请号：US15512308
申请日：2015-09-30
发明人： Konosuke Hayashi , Takashi Ootagaki
摘要： According to one embodiment, a substrate processing apparatus includes: a removing part (D1) configured to remove liquid droplets present in a recess (30); a drain hole (30a) located at the bottom of the recess (30) of a nozzle head (32), and configured to discharge the liquid droplets as a target to be removed out of the recess (30); and a controller configured to control the discharge state of a gas discharge nozzle (33) such that there is a period in which a gas is discharged from the gas discharge nozzle (33) at a flow rate, at which the gas discharged does not reach a surface to be processed of s substrate W, in a period from the end of the rinsing process using a treatment liquid to the start of the drying process using the gas.
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公开(公告)号：US10573540B2
公开(公告)日：2020-02-25
申请号：US15468577
申请日：2017-03-24
发明人： Nobuo Kobayashi , Takeki Kogawa , Katsuhiro Yamazaki , Yuki Saito
IPC分类号： H01L21/67 , H01L21/306
摘要： According to one embodiment, a substrate processing apparatus includes a tank that stores a treatment liquid; a liquid level pipe connected to the tank such that the treatment liquid stored in the tank flows therein, and configured such that the liquid level of the treatment liquid therein moves according to increase and decrease of the treatment liquid in the tank; a liquid level sensor that detects the liquid level in the liquid level pipe; an air supply pipe for supplying a gas to a piping space above the liquid level in the liquid level pipe; and a controller that determines whether there is erroneous detection of the liquid level sensor based on a detection result obtained by the liquid level sensor in response to the movement of the liquid level in the liquid level pipe caused by supply of the gas to the piping space from the air supply pipe.
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公开(公告)号：US10422032B2
公开(公告)日：2019-09-24
申请号：US15308638
申请日：2016-02-29
发明人： Yotaro Fukuoka , Sosuke Yagi
摘要： A film formation apparatus and a film-formed workpiece manufacturing method which are capable of forming a film with a uniform thickness on a workpiece like a three-dimensional object that includes a plurality of surfaces by a simple structure are provided. A film formation apparatus includes a target 21 that is a film formation material including a plane SU3, a power supply unit 3 applying power to the target 21, a rotating unit 4 rotating a workpiece W that is a film formation object around a rotation axis AX1, and a revolving unit 5 revolving the rotating unit 4 around a revolution axis AX2 separate from the rotation axis AX1 to repeatedly make the workpiece W to come close to and move apart from the target 21.
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公开(公告)号：US20190183733A1
公开(公告)日：2019-06-20
申请号：US16285259
申请日：2019-02-26
发明人： Shinichi OGIMOTO , Ryo IKUTA , Yutaka OKABE , Hitoshi AOYAGI , Hikaru HOSHINO
摘要： According to one embodiment, a tablet printing apparatus includes a conveyor configured to convey tablets sequentially supplied while sucking and holding the tablets; a print head arranged to face the conveyor to perform printing on each of the tablets being conveyed; a detector arranged upstream of the print head to detect the posture of each of the tablets; and a print condition tester arranged downstream of the print head to check print condition on each of the tablets. Suction force applied to the tablets is reduced at least in an area from a detection position to a print condition check position than in other area.
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公开(公告)号：US10281210B2
公开(公告)日：2019-05-07
申请号：US14773055
申请日：2014-02-28
摘要： According to one embodiment, a substrate processing apparatus (1) includes a table (4) configured to support a substrate W, a solvent supply unit (8) configured to supply a volatile solvent to a surface of the substrate W on the table (4), and an irradiator (10) configured to emit light to the substrate W, which has been supplied with the volatile solvent, and function as a heater that heats the substrate W such that a gas layer is formed on the surface of the substrate W to make the volatile solvent into a liquid ball. Thus, it is possible to dry the substrate successfully as well as to suppress pattern collapse.
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公开(公告)号：US10026760B2
公开(公告)日：2018-07-17
申请号：US14777694
申请日：2014-03-17
发明人： Koichi Hamada , Nobuo Kobayashi
IPC分类号： B08B3/04 , H01L27/12 , H01L21/67 , B08B3/02 , B08B3/08 , B08B3/10 , H01L21/02 , H01L21/687 , B08B3/00
摘要： According to one embodiment, a substrate processing apparatus (1) includes: a support (4) configured to support a substrate (W); a rotation mechanism (5) configured to rotate the support (4) about an axis that crosses the substrate (W) supported by the support (4) as a rotation axis; a nozzle (6) configured to supply a treatment liquid to a surface of the substrate (W) on the support (4) being rotated by the rotation mechanism (5); a heater (8) configured to heat the substrate (W) supported by the support (4) at a distance from the substrate (W); and a movement mechanism (9) configured to move the heater (8) in directions toward and away from the substrate (W) supported by the support (4).
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